CN112629516B - Grating coupling suppression structure of wheel type horizontal axis gyroscope - Google Patents
Grating coupling suppression structure of wheel type horizontal axis gyroscope Download PDFInfo
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- CN112629516B CN112629516B CN201910953193.5A CN201910953193A CN112629516B CN 112629516 B CN112629516 B CN 112629516B CN 201910953193 A CN201910953193 A CN 201910953193A CN 112629516 B CN112629516 B CN 112629516B
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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Abstract
The invention discloses a coupling suppression structure for a vibrating wheel type horizontal axis gyroscope. The wheel type horizontal axis gyroscope comprises a single detection axis horizontal axis gyroscope and a double detection axis horizontal axis gyroscope. The invention discloses a coupling inhibition structure suitable for a wheel type horizontal axis gyro, which is in a grid shape and is characterized in that: two by two groups are distributed in central symmetry with the geometric center. The coupling suppression electrode is also of a grid-bar-shaped structure and is distributed in a cross way with the grid-bar-shaped suppression structure. The invention has the beneficial effects that: due to the existence of processing errors, the horizontal axis gyroscope can generate out-of-plane displacement to generate a coupling signal when no angular velocity is input in a driving state, and by applying direct-current voltage to the bottom coupling suppression electrode, electrostatic force is generated to act on the grid-shaped structure to balance out-of-plane displacement so as to suppress the coupling signal due to the overlapping of the grid-shaped structure and the bottom coupling electrode. By adjusting the direct-current voltage on the coupling suppression electrode, the coupling signal is reduced to the minimum, and the device performance of the horizontal axis gyroscope is obviously improved.
Description
The technical field is as follows:
the invention relates to a bar-shaped coupling suppression structure for a wheel type horizontal axis gyroscope, and belongs to the technical field of structural design of micro-electromechanical inertial sensors.
Background art:
a gyroscope is a device used to detect the angular velocity of the motion of an object. The micro-electro-mechanical gyroscope has the advantages of small volume, light weight, low cost, low power consumption, easy integration and the like, and is widely applied to the fields of aviation, spaceflight, weapons, automobiles, consumer electronics and the like.
The Inertial Measurement Unit (IMU) is a unit formed by combining a single-axis gyroscope, a double-axis gyroscope or a three-axis gyroscope and an accelerometer, can simultaneously measure the acceleration and the angular velocity of three orthogonal axial directions of an object, can obtain information such as the velocity, displacement, direction and posture of the object through a series of data processing, and is widely applied to the fields such as unmanned aerial vehicles, unmanned vehicles, robots, Virtual Reality (VR) and Augmented Reality (AR).
The performance of the Z-axis micro-electromechanical tuning fork gyroscope for detecting the angular velocity perpendicular to the surface of the device reaches a higher level at present. Thus, one idea behind multi-axis inertial sensors is the assembly of discrete components, assembling multiple single-axis (Z-axis) gyroscopes and accelerometers into an IMU. However, since a plurality of discrete components are assembled together, the size is large, installation errors can be generated, different devices are difficult to be assembled in a strict orthogonal mode, so that the performance of the devices can be affected by coupling among different devices, and meanwhile, the requirement on process compatibility is high due to the assembly of a plurality of components. At present, a single detection mass block gyroscope is the most widely researched and mature micro-electromechanical vibration gyroscope form, the structural form is easy to have the problem of sensitivity to linear acceleration in principle, and the resonant wheel type gyroscope can well solve the problem due to the completely symmetrical characteristic. The wheel type horizontal axis gyroscope is driven to vibrate angularly around an axis vertical to the plane of the device, when angular velocity in the horizontal direction is input, the sensitive mass block can generate out-of-plane motion under the action of Coriolis force, and the value of the angular velocity of the input horizontal axis can be obtained by detecting the change of capacitance between the sensitive mass block and a bottom electrode. Therefore, the horizontal axis gyroscope and the Z axis gyroscope are monolithically integrated on the same plane, and the size of the IMU device can be reduced. However, the horizontal axis gyroscope is an important research breakthrough in IMU research due to the existence of many design limitations.
In an ideal state, the horizontal axis gyroscope does not generate out-of-plane displacement when no angular velocity is input in a driving state, however, due to the existence of process errors, such as the existence of an etching inclination angle, the horizontal axis gyroscope generates out-of-plane displacement when no angular velocity is input in the driving state, an output signal is generated, and the signal is orthogonal to a detection signal, so that the device performance of the horizontal axis gyroscope is seriously influenced. The suppression of the orthogonal coupling of the horizontal axis gyroscope becomes the key for improving the performance of the device. For this purpose, a bar-like coupling suppression structure for a wheeled horizontal axis gyro is proposed.
The invention content is as follows:
the invention aims to provide a coupling suppression structure for a vibrating wheel type horizontal axis gyroscope. The wheel type horizontal axis gyroscope comprises a single detection axis horizontal axis gyroscope and a double detection axis horizontal axis gyroscope. The wheel type horizontal axis gyroscope is of a decoupling structure and mainly comprises driving comb teeth, driving detection comb teeth, a driving frame, a sensitive mass block, a detection frame, anchor points, a connecting beam and a bottom detection electrode.
The invention discloses a coupling inhibition structure suitable for a wheel type horizontal axis gyro, which is in a grid shape and is characterized in that: two by two groups are distributed in central symmetry about the geometric center. The coupling suppression electrode is also of a grid-shaped structure and is distributed in a cross mode with the grid-shaped suppression structure.
The beneficial effects of the invention are as follows: due to the existence of machining errors, the horizontal axis gyroscope generates out-of-plane displacement to generate a coupling signal when no angular velocity is input in a driving state. By applying a direct current voltage to the bottom coupling suppression electrode, electrostatic force is generated to act on the grid-shaped structure due to the overlapping of the grid-shaped structure and the bottom coupling electrode, so that the off-plane displacement is balanced, and a coupling signal is suppressed. Direct current voltage on the coupling suppression electrode is adjusted through the circuit, coupling signals are reduced to the minimum, device performance of the horizontal axis gyroscope is remarkably improved, and a good prospect is provided for monolithic integration of the multi-axis gyroscope.
Drawings
Fig. 1 is a schematic diagram of a horizontal axis gyroscope with a bar-shaped wheel, in which a right-side partially enlarged view is a schematic diagram of a bar-shaped suppression structure and a distribution of bottom coupling suppression electrodes.
Fig. 2 is a schematic diagram of the distribution of coupling suppression electrodes at the bottom of a horizontal axis gyroscope with a bar-shaped wheel, which is suitable for the invention.
Fig. 3 is a schematic diagram of the operation of the bar-shaped coupling suppression structure of the wheel-type horizontal axis gyroscope, which is applicable to the present invention, and is a sectional view taken along line a-a' in fig. 1.
Detailed Description
As shown in fig. 1, the wheeled horizontal axis gyroscope structure to which the present invention is applied generally comprises driving combs [101(a), 101(b),101(c),101(d) ] symmetrically distributed about a geometric center, driving detection combs [102(a), 102(b),102(c),102(d) ], an outer frame 103, an inner frame 104, a central sensitive mass 105, bottom detection electrodes, and anchor points [1001, 1002] fixedly connected to the bottom. As shown in fig. 1, the outer frame 103 is connected to the anchor point 1001 by driving the folding beams [106(a), 106(b), 106(c), 106(d) ], the outer frame 103 and the proof mass 105 are connected by outer frame connecting beams 107, the inner frame 104 and the proof mass 105 are connected by inner frame connecting beams 108, and the inner frame 104 is connected to the anchor point 1002 at the center by central connecting beams 109 symmetrically distributed about the geometric center. The grating-strip coupling suppression structures 110 of the present invention are symmetrically distributed with respect to the geometric center in pairs, and each group of the grating-strip suppression structures 110 has two groups [201, 202] of corresponding bottom grating electrodes, which are distributed across the grating-strip suppression structures, as shown in the right enlarged view of fig. 1.
Fig. 2 is a schematic diagram of the distribution of the bottom coupling suppression electrodes of the horizontal axis gyroscope with the bar-shaped wheel according to the present invention. For each group of grid-shaped suppression structures, two groups of coupling suppression electrodes are corresponding to the gyro structure to rotate anticlockwise and clockwise respectively. There are eight sets of coupled suppression electrodes in fig. 2, where [201(a), 202(a) ] and [201(c), 202(c) ] are symmetrically distributed about the geometric center, and [201(b), 202(b) ] and [201(d), 202(d) ] are symmetrically distributed about the geometric center. For the eight groups of coupling suppression electrodes in fig. 2, voltage can be applied alone to generate suppression effect, and structural symmetry can be utilized to reduce the coupling suppression electrodes into four groups by connecting two by two and using differential form for suppression.
Fig. 3 is a schematic diagram of the operation of the bar-shaped coupling suppression structure of the wheel-type horizontal axis gyroscope according to the present invention, which is shown in a cross-sectional view a-a' in fig. 1. Due to the existence of machining errors, the horizontal axis gyroscope generates out-of-plane displacement when no angular velocity is input in a driving state. When the gyro is driven to make back-and-forth angular vibration by applying direct current voltage to the coupling suppression electrodes [201(c), 202(c) ] on the bottom substrate 300, due to the overlapping of the grid-shaped structure 110 and the coupling electrodes [201(c), 202(c) ] on the bottom substrate 300, electrostatic force is generated to act on the grid-shaped structure 110 to balance out-of-plane displacement so as to suppress a coupling signal, and the relationship is satisfied by deducing the electrostatic force F, the voltage Vp applied to the grid-shaped structure 110 and differential coupling suppression direct current voltages [ Vq +, Vq- ] respectively applied to the coupling suppression electrodes [201(c), 202(c) ]:
F∝Vp·Vq。
Claims (6)
1. a coupling suppression structure for a wheeled horizontal axis gyroscope for balancing out-of-plane displacement of the horizontal axis gyroscope in a no-input angular rate state due to process errors by electrostatic forces generated by overlap between the coupling suppression structure (110) and a bottom coupling suppression electrode (201, 202), the coupling suppression structure comprising: the structure for coupling suppression is a grid-strip coupling suppression structure (110), wherein the structure comprises a plurality of groups of grid-strip coupling suppression structures (110), and every two of the plurality of groups of grid-strip coupling suppression structures (110) are symmetrically distributed around a geometric center; for each group of the grating strip coupling suppression structures (110), two groups of grating strip coupling suppression electrodes (201, 202) are corresponding to and distributed in a cross way with the grating strip coupling suppression structures (110), and the orthographic projection part of each grating strip on the bottom substrate (300) covers the orthographic projection of the corresponding group of the coupling suppression electrodes (201, 202) on the bottom substrate (300);
each group of grid-shaped coupling suppression structures (110) comprises a plurality of grid bars, and the grid bars of the grid-shaped coupling suppression structures (201, 202) are distributed in a fan shape.
2. A coupling suppression structure for a wheeled horizontal axis gyro as claimed in claim 1, wherein: the wheel type horizontal axis gyroscope is applied to a wheel type horizontal axis gyroscope and comprises a wheel type single-detection-axis horizontal axis gyroscope and a wheel type double-detection-axis horizontal axis gyroscope, wherein the wheel type horizontal axis gyroscope comprises driving comb teeth (101 (a),101(b),101(c) and 101(d)) which are distributed in an axisymmetric mode, driving detection comb teeth (102 (a),102(b),102(c) and 102(d)), an outer frame (103), an inner frame (104), a sensitive mass block (105), a connecting beam, a bottom detection electrode and anchor points (1001, 1002) fixedly connected with the bottom.
3. A coupling suppression structure for a wheeled horizontal axis gyro as claimed in claim 1 or claim 2, wherein: the gyroscope is driven in a state of angular vibration about an axis perpendicular to the plane of the device, and when angular velocity in the horizontal direction is input, the proof mass (105) will undergo out-of-plane motion.
4. A coupling suppression structure for a wheeled horizontal axis gyro as claimed in claim 1, wherein: the sensing mass (105) for detection is distributed in an axisymmetric manner, and the sensing mass (105) comprises a circular structure.
5. A coupling suppression structure for a wheeled horizontal axis gyro as claimed in claim 1, wherein: and detecting by adopting a differential variable gap capacitor.
6. A coupling suppression structure for a wheeled horizontal axis gyro as claimed in claim 1, wherein: the voltage applied to the coupling suppression electrodes (201, 202) is a DC voltage.
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| CN107619018A (en) * | 2016-07-14 | 2018-01-23 | 恩智浦美国有限公司 | For reducing orthogonal segmented electrode structure in integrating device |
| CN108955663A (en) * | 2017-05-23 | 2018-12-07 | 北京大学 | A kind of wheeled gyro of resonant mode twin shaft micromechanics |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10466053B2 (en) * | 2017-04-04 | 2019-11-05 | Invensense, Inc. | Out-of-plane sensing gyroscope robust to external acceleration and rotation |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103363969A (en) * | 2012-04-05 | 2013-10-23 | 快捷半导体(苏州)有限公司 | MEMS device quadrature shift cancellation |
| CN203349833U (en) * | 2012-04-05 | 2013-12-18 | 快捷半导体(苏州)有限公司 | Orthogonality correction equipment and system |
| CN107619018A (en) * | 2016-07-14 | 2018-01-23 | 恩智浦美国有限公司 | For reducing orthogonal segmented electrode structure in integrating device |
| CN106500732A (en) * | 2016-12-22 | 2017-03-15 | 四川纳杰微电子技术有限公司 | A kind of micro-mechanical gyroscope quadrature error collocation structure |
| CN206724975U (en) * | 2016-12-22 | 2017-12-08 | 四川知微传感技术有限公司 | A kind of micro-mechanical gyroscope quadrature error collocation structure being easily achieved |
| CN108955663A (en) * | 2017-05-23 | 2018-12-07 | 北京大学 | A kind of wheeled gyro of resonant mode twin shaft micromechanics |
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