CN117490671B

CN117490671B - Microelectromechanical triaxial gyroscope and electronic device

Info

Publication number: CN117490671B
Application number: CN202311828569.2A
Authority: CN
Inventors: 庄瑞芬; 李诺伦
Original assignee: Memsensing Microsystems Suzhou China Co Ltd
Current assignee: Memsensing Microsystems Suzhou China Co Ltd
Priority date: 2023-12-28
Filing date: 2023-12-28
Publication date: 2024-03-12
Anticipated expiration: 2043-12-28
Also published as: CN117490671A

Abstract

The invention discloses a micro-electromechanical triaxial gyroscope and electronic equipment, wherein the micro-electromechanical triaxial gyroscope comprises: a substrate; the driving assembly comprises a first driving frame and a second driving frame which are arranged at intervals and have opposite vibration directions; a first detection assembly and a second detection assembly connected between the first drive frame and the second drive frame; a third detecting assembly including a first detecting portion and a second detecting portion symmetrically disposed at an outer periphery of the driving assembly; the first detection part and the second detection part are respectively connected with the first driving frame and the second driving frame; and the connecting assembly is respectively connected with the first detection part and the second detection part. The invention enables the first detection part and the second detection part to have the same vibration frequency, thereby improving the detection precision.

Description

Microelectromechanical triaxial gyroscope and electronic device

Technical Field

The invention relates to the technical field of micro-electromechanical systems, in particular to a micro-electromechanical three-axis gyroscope and electronic equipment.

Background

Microelectromechanical (Micro-Electro-Mechanical Systems), MEMS for short, gyroscopes are a common sensor element in microelectromechanical systems, which have been subject to development and evolution for nearly half a century since being proposed. Along with the gradual expansion of the application range, the gyroscope is widely applied to the fields of consumer electronics, automotive electronics, aerospace and the like, and the MEMS technology has the advantages of small volume, low power consumption, mass production and the like, so that more and more people are focusing on the inertial sensor chip of the micro-electromechanical system.

The capacitive micromechanical gyroscope is a miniature inertial sensor for measuring angular velocity, and the working principle is that coriolis force is utilized to detect angular velocity, namely, when a mechanical structure in back and forth movement is subjected to external angular velocity, coriolis acceleration is generated due to coriolis effect, the relationship between the coriolis acceleration and the angular velocity and the vibration linear velocity meets the right-hand rule, namely, coriolis force corresponding to the coriolis acceleration causes corresponding displacement of a movable mass block, so that the distance between capacitance plates is changed, and a signal processing circuit obtains the value of the corresponding angular velocity by sensing the change of capacitance. The device has the outstanding advantages of small volume, light weight, low power consumption, low cost, easy realization of mass production and the like, and is widely applied to the field of army and civil engineering.

A typical microelectromechanical tri-axis gyroscope structure typically has multiple movable masses for detecting the Z-axis angle, but there are different frequencies of motion between the movable masses for detecting the Z-axis angular velocity, which increases the detection error.

Disclosure of Invention

The embodiment of the invention provides a micro-electromechanical triaxial gyroscope and electronic equipment, which are used for detecting the same-frequency reverse vibration of a first detection part and a second detection part perpendicular to the direction angular velocity of a substrate, so that the detection precision is improved, and the generation of invalid modes is reduced.

In order to solve the technical problems, the embodiment of the invention discloses the following technical scheme:

in one aspect, a microelectromechanical tri-axis gyroscope is provided, comprising:

a substrate;

the driving assembly is arranged on one side of the substrate and comprises a first driving frame and a second driving frame which are arranged at intervals and have opposite vibration directions;

the first detection assembly and the second detection assembly are positioned between the first driving frame and the second driving frame and are mutually independent, the first detection assembly is connected with the first driving frame and the second driving frame, and the second detection assembly is connected with the first driving frame and the second driving frame;

a third detection assembly including a first detection portion and a second detection portion symmetrically disposed at an outer periphery of the driving assembly; the first detection part is connected with the first driving frame through a first elastic beam, and the second detection part is connected with the second driving frame through a second elastic beam;

and the connecting component is respectively connected with the first detection part and the second detection part, so that the first detection part and the second detection part vibrate at the same frequency.

In addition to or in lieu of one or more of the features disclosed above, the microelectromechanical tri-axis gyroscope has intersecting and perpendicular first, second, and third axes;

the connecting assembly comprises a connecting beam and a fourth elastic beam; the two ends of the connecting beam are respectively connected with the first detection part and the second detection part through the fourth elastic beam;

wherein the elastic directions of the first elastic beam, the second elastic beam and the fourth elastic beam extend along the first axial direction; in the first axial direction, the fourth elastic beam has a stiffness greater than the first and second elastic beams.

In addition to or in lieu of one or more of the features disclosed above, the connecting beam includes a pair of sub-beams that are axially symmetric about a second axis, and a connecting spring that connects the pair of sub-beams.

In addition to or as an alternative to one or more of the features disclosed above, an anchoring device is provided on the substrate;

the connecting assembly further comprises a fifth elastic beam, one end of the fifth elastic beam is connected with the end part of the connecting beam, the other end of the fifth elastic beam is connected with the anchoring device, and the elastic directions of the fifth elastic beam and the fourth elastic beam are mutually perpendicular.

In addition to or in lieu of one or more of the features disclosed above, the fourth and fifth spring beams may be provided at both ends in the direction of extension thereof with at least one stress relief hole extending through the thickness thereof.

In addition to one or more of the features disclosed above, or alternatively, the fourth elastic beam is a "table" -shaped beam structure, and the fourth elastic beams at both ends of the connection beam are symmetrical with respect to the vibration direction;

the fourth elastic beam is provided with at least one stress release hole penetrating along the thickness of the bending part of the beam structure in the shape of a Chinese character 'ji'.

In addition to or in lieu of one or more of the features disclosed above, the first detection portion includes a third mass including a first outer mass having a first outer hollowed out groove, a first sub-elastic beam, a second sub-elastic beam, and a third anchor point, the first outer mass being connected to the first inner mass by the first sub-elastic beam, the first inner mass being connected to the third anchor point by a second sub-elastic beam, the elastic directions of the first sub-elastic beam and the second sub-elastic beam being perpendicular;

The second detection part comprises a fourth mass block, a third sub elastic beam, a fourth sub elastic beam and a fourth anchor point, the fourth mass block comprises a second outer mass block and a second inner mass block, the second outer mass block is provided with a second outer hollow groove, the second inner mass block and the fourth anchor point are arranged in the second outer hollow groove, the second outer mass block is connected with the second inner mass block through the third sub elastic beam, the second inner mass block is connected with the fourth anchor point through the fourth sub elastic beam, and the elastic directions of the third sub elastic beam and the fourth sub elastic beam are vertical;

wherein the elastic directions of the first sub elastic beam and the third sub elastic beam extend along the second axis;

and two ends of the connecting beam are connected with the first outer mass block and the second outer mass block through the fourth elastic beam.

In addition to or in lieu of one or more of the features disclosed above, a drive spring beam is included;

the anchoring devices are arranged on two sides of the first driving frame and the second driving frame relative to the first axial direction; the first driving frame and the second driving frame are connected with the anchoring device through the driving elastic beam; the elastic direction of the driving elastic beam extends along the second axial direction.

In addition to or in lieu of one or more of the features disclosed above, the first inner mass includes a first inner hollowed out groove and a first detection unit disposed within the first inner hollowed out groove, the first detection unit including a third fixed electrode and a third movable electrode;

at least two third fixed electrodes are sequentially arranged along the first axial direction, and the third movable electrodes are arranged between the adjacent third fixed electrodes; the third movable electrode is fixedly connected with the first inner mass block body, and the third fixed electrode is fixedly connected with the substrate; the third movable electrode and the third fixed electrode on one side of the third movable electrode are configured into a first detection capacitor, and the third movable electrode and the third fixed electrode on the other side of the third movable electrode are configured into a second detection capacitor; the first detection capacitor and the second detection capacitor are configured as differential capacitors;

the second inner mass block comprises a second inner hollow groove and a fourth fixed electrode and a fourth movable electrode which are arranged in the second inner hollow groove;

at least two fourth fixed electrodes are sequentially arranged along the first axial direction, and the fourth movable electrodes are arranged between the adjacent fourth fixed electrodes; the fourth movable electrode is fixedly connected with the second inner mass block body, and the fourth fixed electrode is fixedly connected with the substrate; the fourth movable electrode and the fourth fixed electrode at one side of the fourth movable electrode are configured to be a third detection capacitor, and the fourth movable electrode and the fourth fixed electrode at the other side of the fourth movable electrode are configured to be a fourth detection capacitor; the third detection capacitance and the fourth detection capacitance are configured as differential capacitances.

In addition to or in lieu of one or more of the features disclosed above, the first detection assembly includes a first mass, a first detection frame, a first anchor point, and a first steering beam; the first anchor point and the first steering beam are positioned in the first detection frame; the first anchor point is configured to secure the first steering beam; the first steering beam connects the first mass and the first detection frame.

In addition to or in lieu of one or more of the features disclosed above, the first mass is provided with a plurality of uniformly arranged damper holes extending through the first mass in the third axial direction.

In addition to or in lieu of one or more of the features disclosed above, the first detection assembly further comprises a pair of first coupling beams;

the two sides of the first detection frame relative to the second shaft are respectively connected with the first driving frame and the second driving frame through the first coupling beam;

the elastic direction of the first coupling beam extends along the first axial direction.

In addition to or as an alternative to one or more of the features disclosed above, the first mass includes a first mass unit and a second mass unit; the first mass unit and the second mass unit are respectively positioned at two sides of the first steering beam relative to the first axial direction;

The substrate comprises a first electrode plate and a second electrode plate;

the first mass unit and the first electrode plate form a first sub-capacitor; the second mass unit and the second electrode plate form a second sub-capacitor; the first sub-capacitance and the second sub-capacitance are configured as differential capacitances.

In addition to or in lieu of one or more of the features disclosed above, the second detection assembly includes a second mass, a second detection frame, a second anchor point, and a second steering beam; the second anchor point and the second steering beam are positioned in the second detection frame; the second anchor point is configured to secure the second steering beam; the second steering beam connects the second mass and the second detection frame.

In addition to or in lieu of one or more of the features disclosed above, the second mass is provided with a plurality of uniformly arranged damper holes extending through the second mass in the third axial direction.

In addition to or in lieu of one or more of the features disclosed above, the second detection assembly further comprises a pair of second coupling beams;

two sides of the second detection frame about a second axis are respectively connected with the first driving frame and the second driving frame through the second coupling beams;

The elastic direction of the second coupling beam extends along the first axial direction.

In addition to or as an alternative to one or more of the features disclosed above, the second mass includes a third mass unit and a fourth mass unit; the third mass unit and the fourth mass unit are respectively positioned at two sides of the second steering beam about the second axis;

the substrate comprises a third electrode plate and a fourth electrode plate;

the third mass unit and the third electrode plate form a third sub-capacitor; the fourth mass unit and the fourth electrode plate form a fourth sub-capacitor; the third sub-capacitance and the fourth sub-capacitance are configured as differential capacitances.

In addition to or in lieu of one or more of the features disclosed above, the drive assembly further comprises a drive unit;

the first driving frame is provided with at least one first hollow groove, and the driving unit is arranged in the first hollow groove;

the second driving frame is provided with at least one second hollow groove, and the driving unit is arranged in the second hollow groove;

the driving unit comprises a first fixed electrode, a second fixed electrode, a first movable electrode and a second movable electrode, wherein the first fixed electrode and the first movable electrode are oppositely arranged relative to the first axial direction, the second fixed electrode and the second movable electrode are oppositely arranged relative to the first axial direction, and the polarities of the first fixed electrode and the second fixed electrode are opposite;

The driving units in the first hollow groove and the driving units in the second hollow groove are symmetrical about a second axis.

In addition to or in lieu of one or more of the features disclosed above, the drive assembly further includes a pair of first drive detection units disposed at both ends of the first drive frame in the direction of vibration thereof, and a pair of second drive detection units disposed at both ends of the second drive frame in the direction of vibration thereof;

the first driving detection unit comprises a first driving detection fixed electrode and a first driving detection movable electrode which are oppositely arranged, the first driving detection movable electrode is fixedly connected with the first driving frame, and the first driving detection fixed electrode is fixedly connected with the substrate through a first driving detection anchor point;

the second drive detection unit comprises a second drive detection fixed electrode and a second drive detection movable electrode which are oppositely arranged, the second drive detection fixed electrode is fixedly connected with the second drive frame, and the second drive detection fixed electrode is fixedly connected with the substrate through a second drive detection anchor point.

In another aspect, an electronic device is further disclosed that includes a microelectromechanical tri-axis gyroscope as described in any of the above, in addition to or instead of one or more of the features disclosed above.

One of the above technical solutions has the following advantages or beneficial effects: because the vibration frequencies of the first detection part and the second detection part in the conventional technology are possibly different due to manufacturing process deviation, the first detection part and the second detection part are connected through the connecting component, so that the first detection part and the second detection part have the same vibration frequency, the error of output signals caused by different frequency movements of the detection parts for detecting the angular speed of the third axial direction at two sides is avoided, and the detection precision is improved.

According to the vibration detection device, the connecting beam, the first detection part and the second detection part are connected through the fourth elastic beam, wherein the elastic direction of the fourth elastic beam extends along the first axial direction, and vibration of the first detection part and the second detection part in the first axial direction under the condition that the connecting assembly is limited to input angular speed is avoided; the rigidity of the fourth elastic beam in the first axial direction is larger than that of the first elastic beam and the second elastic beam, and vibration of the first detection part and the second detection part in the second axial direction is prevented from being transmitted to the first driving frame and the driving frame, so that the coupling error between a driving mode without angular speed input and a detection mode with angular speed input is reduced.

According to the device, the connecting springs are arranged between the two sub beams in the connecting beam, the two sub beams move along the second axis by taking the connecting springs as bending points, so that the inward extrusion force or the outward tension force of the two side detection parts is released, the first detection parts and the second detection parts still have the same vibration frequency in the detection mode, and the detection precision is further improved.

The sub-beam and the anchoring device are connected to a fifth elastic beam perpendicular to a fourth elastic beam in the elastic direction, the fifth elastic beam is connected with a driving frame (a first driving frame or a second driving frame) through the fourth elastic beam, a detection part (a first detection part or a second detection part) and the elastic beam (the first elastic beam or the second elastic beam) in sequence, the first driving frame and the second driving frame have the same-frequency driving frequency in the second axial direction, and then the detection frequency of the first detection part and the detection frequency of the second detection part are more matched with the driving frequency of the driving frame.

Drawings

The technical solution and other advantageous effects of the present invention will be made apparent by the following detailed description of the specific embodiments of the present invention with reference to the accompanying drawings.

Fig. 1 is a top view of a microelectromechanical tri-axis gyroscope provided in accordance with an embodiment of the present invention.

Fig. 2 is an enlarged schematic view at a in fig. 1.

Fig. 3 is an enlarged schematic view at B in fig. 1.

Fig. 4 is an enlarged schematic view at C in fig. 1.

In the figure: 101-an anchoring device; 102-driving an elastic beam; 105-a first coupling beam; 106-a second coupling beam; 1071-a first elastic beam; 1072-a second spring beam; 108-a fourth spring beam; 109-fifth spring beams; 110-connecting beams; 1101-sub-beams; 1102-connecting a spring;

1100-a first drive frame; 1110-a first hollowed out groove; 1120-a first drive detection structure; 1121-a first driven proof mass; 1122-first driver detect anchor; 1123—a first drive detection movable electrode; 1124-first drive detection stationary electrode;

1200-a second drive frame; 1210-a second hollow; 1220-second drive detect structure; 1221-a second drive proof mass; 1222-a second drive detect anchor; 1223-a second drive detection movable electrode; 1224-second drive detection stationary electrode;

1300-a drive unit; 1310-a first sub-anchor; 1320-a second child anchor; 1311-a first fixed electrode; 1312-a first movable electrode; 1321-a second fixed electrode; 1322-a second movable electrode;

20-a first detection component; 200-a first detection frame; 201-a first anchor point; 202-a first steering beam; 203-a first mass; 2031-a first mass unit; 2032-a second mass unit;

30-a second detection assembly; 300-a second detection frame; 301-a second anchor point; 302-a second steering beam; 303-a second mass; 3031-a third mass unit; 3032-fourth mass unit;

40-a third detection assembly; 410-a first detection section; 4100—a third mass; 4110-first outer mass; 4111-a first outer hollow; 4120-a first inner mass; 4121-a first inner hollowed out groove; 4130-a first sub-elastic beam; 4140-third anchor point; 4150-a second sub-elastic beam; 4160-a first detection unit; 4161-third child anchor; 4162-third stationary electrode; 4163-a third movable electrode;

420-a second detection section; 4200-fourth mass; 4210-a second outer mass; 4211-a second outer hollow; 4220-a second inner mass; 4221-a second inner hollowed out groove; 4230-a third sub-elastic beam; 4240-fourth anchor point; 4250-fourth sub-beams; 4260-a second detection unit; 4261-fourth anchor points; 4262-fourth fixed electrode; 4263-fourth movable electrode.

Detailed Description

In order to make the objects, technical solutions and advantageous effects of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and detailed description. It should be understood that the detailed description is intended to illustrate the invention, and not to limit the invention.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, the meaning of "plurality" means two or more, unless specifically defined otherwise.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; the connection may be mechanical connection, direct connection or indirect connection through an intermediate medium, and may be internal connection of two elements or interaction relationship of two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is less level than the second feature.

Referring to fig. 1, fig. 1 shows a top view of a microelectromechanical tri-axis gyroscope in an embodiment of the present application, where the microelectromechanical tri-axis gyroscope has intersecting and perpendicular first, second, and third axes X, Y, Z, and includes a substrate and a device structure. The substrate is a semiconductor wafer, the device structure is disposed on one side of the substrate, and the device structure has a first plane parallel to the substrate. The device structure comprises: the first detecting assembly 20, the second detecting assembly 30, the driving assembly, the third detecting assembly 40, and the connecting assembly. Wherein, the first detection assembly 20 responds to the angular velocity of the first axial direction X, the second detection assembly 30 responds to the angular velocity of the second axial direction Y, and the first detection assembly 20 and the second detection assembly 30 are arranged along the second axial direction Y at the intermediate position and are mutually independent. The driving assembly includes a first driving frame 1100 and a second driving frame 1200 disposed at intervals, the first driving frame 1100 and the second driving frame 1200 being disposed at both sides (left and right sides in the drawing) of the first sensing assembly 20 with respect to the second axis Y, respectively, the first sensing assembly 20 and the second sensing assembly 30 being located between the first driving assembly and the second driving assembly, both sides of the first sensing assembly 20 with respect to the second axis Y being drivingly connected with the first driving frame 1100 and the second driving frame 1200, respectively, through a pair of first coupling beams 105, and both sides of the second sensing assembly 30 with respect to the second axis Y being drivingly connected with the first driving frame 1100 and the second driving frame 1200, respectively, through a pair of second coupling beams 106, the elastic directions of the first coupling beams 105 and the second coupling beams 106 extending in the first axial X direction. The first driving frame 1100 and the second driving frame 1200 are provided with a plurality of driving units 1300, the driving units 1300 drive the first driving frame 1100 and the second driving frame 1200 to do the same-frequency and opposite-direction vibration motion along the second axial direction Y, and the first detection assembly 20 and the second detection assembly 30 are driven by the first driving frame 1100 and the second driving frame 1200 to do the reciprocating torsion motion in the first plane. The third sensing assembly 40 is responsive to the angular velocity perpendicular to the first plane direction, the third sensing assembly 40 includes a first sensing part 410 and a second sensing part 420, the first sensing part 410 and the second sensing part 420 are mirror symmetrically disposed at the outer circumferences of the first sensing assembly 20 and the second sensing assembly 30, and the driving assembly and the first sensing assembly 20 and the second sensing assembly 30 are disposed between the first sensing part 410 and the second sensing part 420. In the present embodiment, the first detection portion 410 is provided on a side of the first driving frame 1100 away from the second driving frame 1200 (left side in the drawing), and the second detection portion 420 is provided on a side of the second driving frame 1200 away from the first driving frame 1100 (right side in the drawing). The first detection unit 410 is in driving connection with the first driving frame 1100 through a first elastic beam 1071, the second detection unit 420 is in driving connection with the second driving frame 1200 through a second elastic beam 1072, and the elastic directions of the first elastic beam 1071 and the second elastic beam 1072 extend in the first axial direction X.

Referring to fig. 1 and 2, fig. 2 shows a top view of a driving unit 1300, where two sides (i.e., up and down in the drawing) of a first driving frame 1100 about a first axial direction X are respectively provided with an anchoring device 101, and the anchoring device 101 is an anchor structure fixedly connected to a substrate. The upper and lower sides of the first driving frame 1100 are connected to the anchoring device 101 through the driving elastic beam 102, and the elastic direction of the driving elastic beam 102 extends in the second axial Y direction. The first driving frame 1100 is provided with a plurality of first hollowed-out grooves 1110 sequentially arranged along the second axial Y direction, and the driving unit 1300 is disposed in the first hollowed-out grooves 1110. The driving unit 1300 includes a first fixed electrode 1311, a second fixed electrode 1321, a first movable electrode 1312, and a second movable electrode 1322. The plurality of first fixed electrodes 1311 are sequentially arranged at equal intervals along the second axis Y, and the plurality of second fixed electrodes 1321 are sequentially arranged at equal intervals along the second axis Y, the first fixed electrodes 1311 and the second fixed electrodes 1321 being disposed symmetrically about the first axis X. The first sub-anchor 1310 and the second sub-anchor 1320 are both accommodated in the first hollowed-out groove 1110, the first sub-anchor 1310 and the second sub-anchor 1320 are fixedly connected with the substrate, the first fixed electrode 1311 is fixedly connected with the first sub-anchor 1310 to be fixed at a fixed position of the substrate, and the second fixed electrode 1321 is fixedly connected with the second sub-anchor 1320 to be fixed at another fixed position of the substrate. The first fixed electrode 1311 is disposed at an upper position in the drawing, the second fixed electrode 1321 is disposed at a lower position in the drawing, and the polarities of the first fixed electrode 1311 and the second fixed electrode 1321 are opposite. A plurality of first movable electrodes 1312 are disposed between adjacent first fixed electrodes 1311, and the first movable electrodes 1312 are fixedly connected with the first driving frame 1100 or the second driving frame 1200, a plurality of second movable electrodes 1322 are disposed between adjacent second fixed electrodes 1321, and the second movable electrodes 1322 are fixedly connected with the first driving frame 1100 or the second driving frame 1200, and the first movable electrodes 1312 and the second movable electrodes 1322 are symmetrically disposed about the first axial direction X. An electrostatic attractive force exists between the first fixed electrode 1311 and the first movable electrode 1312, and an electrostatic attractive force exists between the second fixed electrode 1321 and the second movable electrode 1322, so that the first driving frame 1100 can be controlled and driven to reciprocate in the second axial Y direction.

Similarly, an anchoring device 101 is respectively disposed on the upper and lower sides of the second driving frame 1200, the upper and lower sides of the second driving frame 1200 are connected to the anchoring device 101 through the driving elastic beam 102, and the elastic direction of the driving elastic beam 102 extends along the second axial direction Y. The second driving frame 1200 is provided with a plurality of second hollow grooves 1210 sequentially arranged along the second axis Y, the driving unit 1300 is disposed in the second hollow grooves 1210, and the driving unit 1300 in the second hollow grooves 1210 controls and drives the second driving frame 1200 to reciprocate on the second axis Y. The positions of the first fixed electrode 1311 and the second fixed electrode 1321 disposed in the second hollowed out groove 1210 are opposite to the positions of the first fixed electrode 1311 and the second fixed electrode 1321 disposed in the first hollowed out groove 1110; that is, in the second hollow groove 1210, the first fixed electrode 1311 is disposed at a lower position, and the second fixed electrode 1321 is disposed at an upper position; correspondingly, the first movable electrode 1312 is also disposed at a lower position, and the second movable electrode 1322 is disposed at an upper position. That is, the driving unit 1300 disposed in the first driving frame 1100 and the driving unit 1300 disposed in the second driving frame 1200 are symmetrical to each other about the second axis Y. Since the electrode positions in the driving unit 1300 in the first hollowed-out groove 1110 are opposite to the electrode positions in the driving unit 1300 in the second hollowed-out groove 1210, the reciprocating motion of the second driving frame 1200 is opposite to and at the same frequency as the reciprocating motion of the first driving frame 1100 in the second axial Y direction.

With continued reference to fig. 1, the first detection assembly 20 includes a first detection frame 200, a first mass 203, a first anchor 201, and a first steering beam 202. The first detecting frame 200 is a frame structure, a first anchor point 201 is disposed at a geometric center position of the first detecting frame 200, a pair of first steering beams 202 are disposed at two sides of the first anchor point 201 with respect to the first axial direction X, the first steering beams 202 extend along the second axial direction Y, one end of each first steering beam 202 is connected to the first detecting frame 200, and the other end is connected to the first anchor point 201. The first mass 203 comprises a first mass unit 2031 and a second mass unit 2032, the first mass unit 2031 and the second mass unit 2032 are arranged on both sides of the first anchor 201 about the second axis Y, respectively, and the first mass unit 2031 and the second mass unit 2032 are fixedly connected with the first steering beam 202. The first detection frame 200 is driven by the first coupling beam 105 through the first driving frame 1100 and the second driving frame 1200 to make reciprocating torsion movement around the first anchor point 201 in the first plane, and the first detection frame 200 drives the first mass block 203 to make reciprocating torsion movement around the first anchor point 201 through the first torsion beam.

A first electrode plate and a second electrode plate (not shown in the figure) corresponding to the first mass unit 2031 and the second mass unit 2032 respectively are arranged on one side of the substrate close to the device structure, the first mass unit 2031 and the first electrode plate are configured to be a first sub-capacitor in the third axial direction Z, the second mass unit 2032 and the second electrode plate are configured to be a second sub-capacitor in the third axial direction Z, the first sub-capacitor and the second sub-capacitor form a differential capacitor, and detection sensitivity can be improved through the differential capacitor detection structure.

Specifically, in the case where the present application is in the no angular velocity input, the distance between the first mass unit 2031 and the first electrode plate and the distance between the second mass unit 2032 and the second electrode plate are equal, and the capacitance values of the first sub-capacitance and the second sub-capacitance are equal at this time. In the case of receiving an angular velocity input about the first axial direction X, the first mass 203 performing a reciprocating torsion motion will generate a coriolis acceleration due to a coriolis effect, the coriolis force corresponding to the coriolis acceleration causes the first mass 203 to perform a torsion motion outside the first plane with the first steering beam 202 as an axis, a distance change between the first mass unit 2031 and the first electrode plate is equal to a distance change between the second mass unit 2032 and the second electrode plate, capacitance values of the first sub-capacitor and the second sub-capacitor change, capacitance value change amounts of the first sub-capacitor and the second sub-capacitor are consistent but opposite in direction, a differential output is formed, and a difference value between capacitance values of the first sub-capacitor and the second sub-capacitor is utilized, and the differential output can be converted into a voltage output signal through an integrated circuit, where the voltage output signal is in proportional relation with the angular velocity about the first axial direction X, so as to calculate a corresponding angular velocity.

The structure that the first mass 203 is connected to the first detection frame 200 through the first steering beam 202, and the first detection frame 200 is connected to the first driving frame 1100 and the second driving frame 1200 on both sides through the first coupling beam 105 extending along the first axis in the elastic direction reduces the influence of the first mass 203 on the directions other than the vibration of the first driving frame 1100 and the second driving frame 1200 along the second axis Y direction when the detection mode is vibrating, and reduces the quadrature error.

The second detection assembly 30 comprises a second detection frame 300, a second mass 303, a second anchor 301 and a second steering beam 302. The second detecting frame 300 is a frame structure, the second anchor point 301 is disposed at a geometric center position of the second detecting frame 300, a pair of second steering beams 302 are respectively disposed at two sides of the second anchor point 301 with respect to the second axis Y, the second steering beams 302 extend along the first axis X direction, one end of each second steering beam 302 is connected to the second detecting frame 300, and the other end is connected to the second anchor point 301. The second mass block 303 includes a third mass unit 3031 and a fourth mass unit 3032, the third mass unit 3031 and the fourth mass unit 3032 are respectively disposed at two sides of the second anchor point 301 about the first axial direction X, and the third mass unit 3031 and the fourth mass unit 3032 are fixedly connected to the second steering beam 302. The second detecting frame 300 is driven by the first driving frame 1100 and the second driving frame 1200 through the second elastic beam 1072 to make a reciprocating torsion motion around the second anchor point 301 in the first plane, and the second detecting frame 300 drives the second mass block 303 to make a reciprocating torsion motion around the second anchor point 301 through the second torsion beam.

A third electrode plate and a fourth electrode plate (not shown in the figure) corresponding to the third mass unit 3031 and the fourth mass unit 3032 respectively are arranged on one side of the substrate close to the device structure, the third mass unit 3031 and the third electrode plate are configured to be a third sub-capacitor in a third axial direction Z, the fourth mass unit 3032 and the fourth electrode plate are configured to be a fourth sub-capacitor in the third axial direction Z, the third sub-capacitor and the fourth sub-capacitor form a differential capacitor, and the detection sensitivity can be improved through the differential capacitor detection structure.

Specifically, in the case where the present application is at the angular velocity input, the distance between the third mass unit 3031 and the third electrode plate and the distance between the fourth mass unit 3032 and the fourth electrode plate are equal, and the capacitance values of the third sub-capacitance and the fourth sub-capacitance are equal at this time. In the case of receiving an angular velocity input about the second axis Y, the second mass 303 performing a reciprocating torsion motion will generate a coriolis acceleration due to a coriolis effect, the coriolis force corresponding to the coriolis acceleration causes the second mass 303 to perform a torsion motion outside the first plane with the second steering beam 302 as an axis, a change in a distance between the third mass unit 3031 and the third electrode plate is equal to a change in a distance between the fourth mass unit 3032 and the fourth electrode plate, capacitance values of the third sub-capacitor and the fourth sub-capacitor change, and capacitance values of the third sub-capacitor and the fourth sub-capacitor change in an amount consistent but opposite direction, so as to form a differential output.

It should be noted that, by the structure that the second mass 303 is connected to the second detection frame 300 through the second steering beam 302, and the second detection frame 300 is connected to the first driving frame 1100 and the second driving frame 1200 on both sides through the second elastic beam 1072 extending along the first axis in the elastic direction, the influence of the second mass 303 on the directions other than the vibration of the first driving frame 1100 and the second driving frame 1200 along the second axis Y when the detection mode is vibrating is reduced, and the quadrature error is reduced.

Further, a plurality of damping holes arranged in an array are uniformly arranged on the first mass block 203 and the second mass block 303, so as to reduce damping of the first mass block 203 and the second mass block 303 in a detection mode and improve sensitivity of the first detection component 20 and the second detection component 30.

Further, the first coupling beam 105 and the second coupling beam 106 are beam structures formed by combining a pair of "several" shaped beams symmetrical about the second axis Y. The first coupling beam 105 and the second coupling beam 106 are provided with stress release holes penetrating in the thickness direction of the substrate at the bending positions so as to reduce stress transmission between the driving frame and the detecting frame.

Referring to fig. 1 and 3, fig. 3 shows a top view of a portion of the first detecting portion 410, where the first detecting portion 410 includes a third mass 4100, a first sub-elastic beam 4130, a second sub-elastic beam 4150, and a third anchor 4140, the third mass 4100 includes a first outer mass 4110 and a first inner mass 4120, the first outer mass 4110 has a first outer hollow groove 4111, and the first inner mass 4120 and the third anchor 4140 are disposed in the first outer hollow groove 4111. The first inner mass 4120 is connected to the first outer mass 4110 at both sides thereof with respect to the second axis Y through first sub-elastic beams 4130, respectively, and the elastic direction of the first sub-elastic beams 4130 extends in the second axis Y direction. In the present embodiment, the first inner mass 4120 has an "i" shape, and a pair of third anchor points 4140 are respectively disposed at least partially in grooves on both sides of the first inner mass 4120 with respect to the second axis Y, and the third anchor points 4140 are connected to the first inner mass 4120 by second sub-elastic beams 4150 extending in the second axis Y direction. The two ends of the second sub elastic beam 4150 about the second axis Y are respectively connected to the two ends of the first inner mass 4120 about the second axis Y, the middle portion of the second sub elastic beam 4150 is connected to the third anchor 4140, the third anchor 4140 is fixedly connected to the substrate and supports the first inner mass 4120, and the first inner mass 4120 is movable in the first axial X direction with respect to the third anchor 4140.

In the case where there is no angular velocity input in the present application, the first outer mass 4110 is driven by the first driving frame 1100 through the first elastic beam 1071 to make a vibration motion in the second axial Y direction, and since the first outer mass 4110 and the first inner mass 4120 are connected through the first sub-elastic beam 4130 that moves in the second axial Y direction in the elastic direction, the vibration motion of the first outer mass 4110 in the second axial Y direction is not transmitted to the first inner mass, and the first inner mass 4120 remains relatively stationary. In the case of the present application receiving an angular velocity input about the third axis Z, the first outer mass 4110 vibrating in the second axial Y direction may generate coriolis accelerations due to coriolis effects, and the coriolis forces corresponding to the coriolis accelerations may cause the first outer mass 4110 to make a vibrating motion in the first axial X direction. The first sub-elastic beams 4130 have rigidity in the first axial direction X, and vibration of the first outer mass 4110 in the first axial direction X is transmitted to the first inner mass 4120 through the first sub-elastic beams 4130, so that the first inner mass 4120 performs vibration motion in the first axial direction X.

In this embodiment, a pair of first inner hollow grooves 4121 symmetrical about the first axial direction X is provided on the first inner mass block 4120, a first detecting unit 4160 is provided in the first inner hollow groove 4121, the first detecting unit 4160 includes a plurality of third fixed electrodes 4162 sequentially arranged at intervals along the first axial direction X and third movable electrodes 4163 disposed between adjacent third fixed electrodes 4162, the third fixed electrodes 4162 are fixedly connected with the substrate through third sub-anchor points 4161 disposed in the first inner hollow groove 4121, and the third movable electrodes 4163 are fixedly connected with the first inner mass block 4120. The third movable electrode 4163 and the third fixed electrode 4162 on the first axial direction X positive side thereof are configured as a first detection capacitance, the third movable electrode 4163 and the third fixed electrode 4162 on the first axial direction X negative side thereof are configured as a second detection capacitance, and the first detection capacitance and the second detection capacitance are configured as a differential capacitance for improving the detection sensitivity.

Specifically, in the case where no angular velocity is input in the present application, the distance between the third movable electrode 4163 and the third fixed electrode 4162 on both sides thereof is equal, and at this time, the capacitance values of the first detection capacitance and the second detection capacitance are equal. Under the condition that the angular velocity input around the third axial direction Z is received, the first inner mass block 4120 performs vibration motion along the first axial direction X, the third movable electrode 4163 also performs vibration motion along the first axial direction X, the distance between the third movable electrode 4163 and the third fixed electrodes 4162 on the two sides of the third movable electrode 4163 is changed equally, the capacitance values of the first detection capacitor and the second detection capacitor are changed, the capacitance value change amounts of the first detection capacitor and the second detection capacitor are consistent but opposite in direction, differential output is formed, the difference value between the capacitance values of the first detection capacitor and the second detection capacitor is utilized, and the voltage output signal can be converted into a voltage output signal through an integrated circuit, and the voltage output signal is in proportional relation with the angular velocity around the third axial direction Z, so that the corresponding angular velocity is calculated.

Similarly, the second detecting unit 420 and the first detecting unit 410 are symmetrically disposed about the second axis Y, the second detecting unit 420 includes a fourth mass 4200, a third sub-elastic beam 4230, a fourth sub-elastic beam 4250, and a fourth anchor point 4240, the fourth mass 4200 includes a second outer mass 4210 and a second inner mass 4220, the second outer mass 4210 has a second outer hollowed out groove 4211, and the second inner mass 4220 and the fourth anchor point 4240 are disposed within the second outer hollowed out groove 4211. The second inner mass 4220 is connected to the second outer mass 4210 at both sides thereof with respect to the second axis Y through third sub-elastic beams 4230, respectively, and the elastic direction of the third sub-elastic beams 4230 extends in the second axis Y direction. In the present embodiment, the second inner mass 4220 has an "i" shape structure, and a pair of fourth anchor points 4240 are respectively disposed at least partially at the grooves on both sides of the second inner mass 4220 with respect to the second axis Y, and the fourth anchor points 4240 are connected to the second inner mass 4220 through fourth sub-elastic beams 4250 extending in the second axis Y direction. The two ends of the third sub elastic beam 4230 about the second axis Y are respectively connected to the two ends of the second inner mass 4220 about the second axis Y, the middle portion of the fourth sub elastic beam 4250 is connected to the fourth anchor point 4240, the fourth anchor point 4240 is fixedly connected to the substrate and plays a supporting role on the second inner mass 4220, and the second inner mass 4220 can move relative to the fourth anchor point 4240 in the first axial X direction.

In the absence of angular velocity input, the second outer mass 4210 is driven by the second drive frame 1200 via the second spring beams 1072 to make a vibratory motion in the second axial Y direction, the second outer mass 4210 being relatively stationary. Since the vibration direction of the second driving frame 1200 is opposite to that of the first driving frame 1100, the vibration direction of the second outer mass 4210 is opposite to that of the first outer mass 4110. In the case where the present application receives an angular velocity input about the third axial direction Z, the second outer mass 4210 performs a vibration motion in the first axial direction X due to the coriolis effect, and is transmitted to the second inner mass 4220 through the third sub-elastic beam 4230 so as to perform a vibration motion in the first axial direction X therewith. The vibration direction of the second outer mass 4210 and the second inner mass 4220 is opposite to the vibration direction of the first outer mass 4110 and the first inner mass 4120.

In this embodiment, a pair of second inner hollow grooves 4221 symmetrical about the first axial direction X are disposed on the second inner mass block 4220, a second detection unit 4260 is disposed in the second inner hollow groove 4221, the second detection unit 4260 includes a plurality of fourth fixed electrodes 4262 sequentially arranged at intervals along the first axial direction X, and fourth movable electrodes 4263 disposed between adjacent fourth fixed electrodes 4262, the fourth fixed electrodes 4262 are fixedly connected with the substrate through fourth sub-anchor points 4261 disposed in the second inner hollow groove 4221, and the fourth movable electrodes 4263 are connected with the second inner mass block 4220. The fourth movable electrode 4263 and the fourth fixed electrode 4262 on the opposite side of the first axial direction X thereof are configured as a third detection capacitance, the fourth movable electrode 4263 and the fourth fixed electrode 4262 on the opposite side of the first axial direction X thereof are configured as a fourth detection capacitance, and the third detection capacitance and the fourth detection capacitance are configured as a differential capacitance for improving the detection sensitivity.

Specifically, in the case where no angular velocity is input in the present application, the distances of the fourth movable electrode 4263 and the fourth fixed electrodes 4262 on both sides thereof are equal, and the capacitance values of the third detection capacitance and the fourth detection capacitance at this time are equal. Under the condition that the angular velocity input around the third axial direction Z is received, the second inner mass 4220 performs vibration motion along the first axial direction X, the fourth movable electrode 4263 also performs vibration motion along the first axial direction X, the distance between the fourth movable electrode 4263 and the fourth fixed electrodes 4262 on two sides of the fourth movable electrode 4263 is changed equally, the capacitance values of the third detection capacitor and the fourth detection capacitor are changed, the capacitance value change amounts of the third detection capacitor and the fourth detection capacitor are consistent but opposite in direction, differential output is formed, the difference value between the capacitance values of the third detection capacitor and the fourth detection capacitor is utilized, and the differential output can be converted into a voltage output signal through an integrated circuit, and the voltage output signal is in proportional relation with the angular velocity around the third axial direction Z, so that the corresponding angular velocity is calculated.

The output signals of the first detection unit 4160 and the second detection unit 4260 about the angular velocity around the third axis Z are combined and output, so that the magnitude of the output signal is increased, the sensitivity is improved, and the signal to noise ratio is also improved. And the symmetrical arrangement with respect to the first detecting unit 4160 and the second detecting unit 4260 can eliminate the influence of the acceleration in the first axial X direction on the detection result and the influence of the torsion in the first plane of the mass blocks in both sides on the detection result.

In the present embodiment, the first sub elastic beam 4130 and the third sub elastic beam 4230 have a "n" -shaped beam structure. In other embodiments, the first sub-elastic beam 4130 and the third sub-elastic beam 4230 are beam structures formed by combining a pair of "several" shaped beams symmetrical about the second axis Y, which are not particularly limited herein.

Further, the first sub-beams 4130 on both sides of the first inner mass 4120 are rotationally symmetric about the first inner mass 4120 geometric center 180 ° and the second sub-beams 4150 on both sides of the second inner mass 4220 are rotationally symmetric about the second inner mass 4220 geometric center 180 °.

Further, both ends of the first, second, third and fourth sub-elastic beams 4130, 4150, 4230 and 4250 in the extending direction of the sub-elastic beams have stress release holes penetrating in the thickness direction of the substrate to avoid deviation of output signals caused by transmission of stress to the first and second detection units 4160 and 4260 through the elastic beams.

Further, the elastic directions of the first elastic beam 1071 and the second elastic beam 1072 extend along the first axial direction X, so that vibration of the outer mass block along the first axial direction X is prevented from being transmitted to the driving frame under the condition that angular speed input around the third axial direction Z is received, and quadrature errors are reduced.

The third detection component 40 responding to the angular velocity around the third axial direction Z adopts the technical scheme that the outer mass block and the inner mass block are connected through the elastic beam with the same elastic direction as the vibration direction of the driving frame, so that the vibration of the outer mass block is prevented from being transmitted to the inner mass block to generate error output signals under the condition of no angular velocity input. The first detecting assembly 20, the second detecting assembly 30 and the third detecting assembly 40 in the present application are independent from each other, and are connected to the driving frame through coupling beams or elastic beams, respectively, that is, the mass blocks for detecting the first axial direction X, the second axial direction Y and the third axial direction Z are separated from each other and independent from each other, so as to reduce inter-axis interference between the respective detecting axes.

Because the vibration frequencies of the first outer mass 4110 and the second outer mass 4210 in the conventional art may be different due to manufacturing process variations, the present application connects the first outer mass 4110 and the second outer mass 4210 to have the same vibration frequency through the connection assembly.

Referring to fig. 1 and 4, fig. 4 shows a schematic structural diagram of a connection assembly in the present application, and the microelectromechanical tri-axial gyroscope of the present application further includes a pair of connection assemblies symmetrical about the first axial direction X, where the pair of connection assemblies are disposed on two sides of the driving assembly about the first axial direction X, and between the first detecting portion 410 and the second detecting portion 420.

Specifically, the connection assembly includes a connection beam 110, a fourth elastic beam 108, wherein the connection beam includes a pair of sub-beams 1101 symmetrical about the second axis Y, and a connection spring 1102 connecting the sub-beams 1101.

The elastic directions of the fourth elastic beam 108 and the connecting spring 1102 extend along the first axial direction X, and the sub beam 1101 extends along the first axial direction X, so that the connecting beam 110 and the fourth elastic beam 108 have rigidity in the second axial direction Y, the first outer mass 4110 and the second outer mass 4210 at two ends of the connecting assembly can move reversely at the same frequency when vibrating along the second axial direction Y, and output signals caused by different frequencies of the outer mass movements at two sides are prevented from generating errors, the reliability of the application is enhanced, and the detection precision is improved.

When receiving an angular velocity input about the third axial direction Z, the first detection portion 410 and the second detection portion 420 vibrate reversely in the first axial direction X. When the first detecting portion 410 moves in the first axial direction X negative direction and the second detecting portion 420 moves in the first axial direction X positive direction, since the fourth elastic beam 108 has a rigidity in the first axial direction X that is greater than the rigidities of the first and second elastic beams 1071 and 1072 in the first axial direction X, the first outer mass 4110 of the first detecting portion 410 moves in the first axial direction X negative direction by pulling the connection Liang Ziliang 1101 of the side through the fourth elastic beam 108, and the second outer mass 4210 of the second detecting portion 420 moves in the first axial direction X positive direction by pulling the connection Liang Ziliang 1101 of the side through the fourth elastic beam 108. Considering that if the rigidity of the connection beam is too great, the movement range of the two outer masses is limited, at least one connection spring 1102 is disposed between the two sub-beams 1101, so that when the first detection portion 410 moves in the first axial direction X negative direction and the second detection portion 420 moves in the first axial direction X positive direction, the two sub-beams 1101 can move in the second axial direction Y negative direction with the connection spring 1102 as a bending point to release the outward tension of the two detection portions; when the first detecting portion 410 moves in the first axial direction X positive direction and the second detecting portion 420 moves in the first axial direction X negative direction, the two sub beams 1101 can move in the second axial direction Y positive direction with the connecting spring 1102 as a bending point to release the force of inward pressing of the two detecting portions.

Further, by providing the fourth elastic beam 108 with a rigidity in the first axial direction X that is greater than the rigidity of the first and second elastic beams 1071 and 1072 in the first axial direction X, it is also possible to avoid transmission of vibrations of the first and second outer masses 4110 and 4210 in the first axial direction X to the first and second drive frames 1100 and 1200 through the first and second elastic beams 1071 and 1072, thereby reducing a coupling error between a drive mode without angular velocity input and a detection mode with angular velocity input.

Preferably, a fifth elastic beam 109 having an elastic direction extending along the second axial direction Y may be further disposed at the end of the pair of sub-beams 1101 away from each other, so as to provide a larger movable space for the connection beam 110 in the second axial direction Y, and increase the movable ranges of the first and second detection portions 410 and 420, thereby increasing the range of the gyroscope. Specifically, one end of the fifth elastic beam 109 is connected to the sub beam 1101 of the connection beam 110, and the other end is fixedly connected to the substrate through the anchor 101. The fifth elastic beam 109 is connected to the driving frame (the first driving frame 1100 or the second driving frame 1200) via the sub beam 1101, the fourth elastic beam 108, the outer mass (the first outer mass 4110 or the second outer mass 4210) and the elastic beam (the first elastic beam 1071 or the second elastic beam 1072) of the connecting beam 110 in this order, and the first elastic beam 1071 or the second elastic beam 1072 extending in the elastic direction along the first axial direction X filters the vibration of the outer mass in the first axial direction X, and the driving frame (the first driving frame 1100 or the second driving frame 1200) is also connected to the anchor 101 through the driving elastic beams 102 at both ends of the second axial direction Y thereof, and therefore, the fifth elastic beam 109 and the driving elastic beam 102 can also determine the driving frequency of the driving frame in the second axial direction Y together, so that the detection frequency of the first detection portion 410, the second detection portion 420 is more matched to the driving frequency of the driving frame.

In the present embodiment, the first detecting portion 410 and the second detecting portion 420 are disposed on both sides of the driving assembly about the second axis Y, respectively, and the connecting assembly is disposed on both sides of the first axis X and connects the first detecting portion 410 and the second detecting portion 420. In other embodiments, the first detecting portion 410 and the second detecting portion 420 may be disposed on two sides (i.e., upper and lower sides in the drawing) of the driving assembly with respect to the first axial direction X, and the connecting assembly is disposed on two sides with respect to the second axial direction Y and connects the first detecting portion 410 and the second detecting portion 420, which is not particularly limited herein.

Further, the fourth elastic beam 108 and the fifth elastic beam 109 are of a "several" beam structure, the fourth elastic beam 108 at both ends of the connection beam 110 is symmetrical about the second axis Y, and the fifth elastic beam 109 at both ends of the connection beam 110 is symmetrical about the second axis Y.

Further, stress release holes penetrating along the thickness direction of the substrate are formed at both ends of the fourth elastic beam 108 and the fifth elastic beam 109, so as to reduce stress transmission between components, and further avoid signal deviation caused by stress torsion.

With continued reference to fig. 4, the drive assembly further includes a first drive detection structure 1120 and a second drive detection structure 1220. The first driving frame 1100 is provided with a first driving detecting structure 1120 at two ends of the second axis Y, the first driving detecting structure 1120 at two sides is symmetrical about the first axis X, the first driving detecting structure 1120 includes a first driving detecting mass 1121 fixedly connected with the first driving frame 1100, and a first driving detecting anchor 1122 fixedly connected with the substrate, the first driving detecting mass 1121 and the first driving detecting anchor 1122 are oppositely disposed about the second axis Y, the first driving detecting structure 1120 further includes a first driving detecting unit disposed between the first driving detecting mass 1121 and the first driving detecting anchor 1122, the first driving detecting unit includes a plurality of first driving detecting fixed electrodes 1124 sequentially disposed at intervals along the first axis X, and a first movable driving detecting electrode 1124 disposed between adjacent first driving detecting fixed electrodes 1124, the first driving detecting fixed electrodes 1124 are connected with the first driving detecting anchor 1122, and the first driving detecting movable electrode 1123 is connected with the first driving detecting mass 1121. The first driving detection fixed electrode 1124 and the first driving detection movable electrode 1123 can be used as electrodes for adjusting the frequency of the first driving frame 1100, and appropriate voltages are respectively applied to the two electrodes to adjust the rigidity of the driving elastic beams 102 at the upper end and the lower end of the first driving frame 1100, so that the frequency of the first driving frame 1100 is similar to the frequencies of the first detection component 20, the second detection component 30 and the third detection component 40, thereby improving the output signal of the microelectromechanical triaxial gyroscope of the present application.

A second driving detecting structure 1220 is disposed at both ends of the second driving frame 1200 with respect to the second axis Y, respectively, and the second driving detecting structures 1220 at both sides are symmetrical with respect to the first axis X, and the first driving detecting structure 1120 and the second driving detecting structure 1220 are symmetrical with respect to the second axis Y. The second drive detection structure 1220 includes a second drive detection mass 1221 fixedly connected to the second drive frame 1200, and a second drive detection anchor 1222 fixedly connected to the substrate, the second drive detection mass 1221 and the second drive detection anchor 1222 being disposed opposite to each other about the second axis Y, the second drive detection structure 1220 further includes a second drive detection unit disposed between the second drive detection mass 1221 and the second drive detection anchor 1222, the second drive detection unit includes a plurality of second drive detection fixed electrodes 1224 sequentially disposed at intervals along the first axis X, and a second movable drive detection electrode disposed between adjacent second drive detection fixed electrodes 1224, the second drive detection fixed electrodes 1224 being connected to the second drive detection anchor 1222, the second drive detection movable electrode 1223 being connected to the second drive detection mass 1221. The second driving detection fixed electrode 1224 and the second driving detection movable electrode 1223 can be used as electrodes for adjusting the frequency of the second driving frame 1200, and appropriate voltages are respectively applied to the two electrodes to adjust the rigidity of the driving elastic beams 102 at the upper end and the lower end of the second driving frame 1200, so that the frequency of the second driving frame 1200 is similar to the frequencies of the first detection component 20, the second detection component 30 and the third detection component 40, thereby improving the output signal of the microelectromechanical triaxial gyroscope of the present application.

Correspondingly, the application also provides electronic equipment comprising the micro-electromechanical triaxial gyroscope.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.

Claims

1. A microelectromechanical triaxial gyroscope having intersecting and perpendicular first, second and third axial directions, comprising: a substrate;

the connecting component is respectively connected with the first detection part and the second detection part, so that the first detection part and the second detection part vibrate at the same frequency;

the connecting assembly comprises a connecting beam and a fourth elastic beam; the two ends of the connecting beam are respectively connected with the first detection part and the second detection part through the fourth elastic beam; the connecting beam comprises a pair of sub beams which are symmetrical about a second axis, and a connecting spring which connects the pair of sub beams;

2. The microelectromechanical triaxial gyroscope of claim 1,

an anchoring device is arranged on the substrate;

3. The microelectromechanical triaxial gyroscope of claim 2, characterized in that the fourth and fifth elastic beams are provided at both ends in the extension direction thereof with at least one stress relief hole penetrating through the thickness thereof.

4. The microelectromechanical triaxial gyroscope of claim 1, characterized in that the fourth elastic beam is of a "several" beam structure, the fourth elastic beams at both ends of the connecting beam being symmetrical with respect to the vibration direction;

5. The microelectromechanical triaxial gyroscope of claim 2,

the first detection part comprises a third mass block, a first sub elastic beam, a second sub elastic beam and a third anchor point, wherein the third mass block comprises a first outer mass block and a first inner mass block, the first outer mass block is provided with a first outer hollow groove, the first inner mass block and the third anchor point are arranged in the first outer hollow groove, the first outer mass block is connected with the first inner mass block through the first sub elastic beam, the first inner mass block is connected with the third anchor point through the second sub elastic beam, and the elastic directions of the first sub elastic beam and the second sub elastic beam are vertical;

6. The microelectromechanical triaxial gyroscope of claim 5, further comprising a driving spring beam;

7. The microelectromechanical triaxial gyroscope of claim 5,

the first inner mass block comprises a first inner hollow groove and a first detection unit arranged in the first inner hollow groove, and the first detection unit comprises a third fixed electrode and a third movable electrode;

8. The microelectromechanical tri-axis gyroscope of claim 1, wherein the first detection assembly comprises a first mass, a first detection frame, a first anchor point, and a first steering beam; the first anchor point and the first steering beam are positioned in the first detection frame; the first anchor point is configured to secure the first steering beam; the first steering beam connects the first mass and the first detection frame.

9. The microelectromechanical triaxial gyroscope of claim 8, characterized in that the first mass is provided with a plurality of damping holes that are uniformly arranged, the damping holes penetrating the first mass in the third axial direction.

10. The microelectromechanical triaxial gyroscope of claim 8, characterized in that the first detection assembly further includes a pair of first coupling beams;

11. The microelectromechanical tri-axis gyroscope of claim 8, wherein the first mass comprises a first mass unit and a second mass unit; the first mass unit and the second mass unit are respectively positioned at two sides of the first steering beam about the second axis;

the substrate comprises a first electrode plate and a second electrode plate;

12. The microelectromechanical tri-axial gyroscope of claim 1, wherein the second sensing assembly comprises a second proof mass, a second sensing frame, a second anchor point, and a second steering beam; the second anchor point and the second steering beam are positioned in the second detection frame; the second anchor point is configured to secure the second steering beam; the second steering beam connects the second mass and the second detection frame.

13. The microelectromechanical triaxial gyroscope of claim 12, characterized in that the second mass is provided with a plurality of uniformly arranged damping holes, the damping holes penetrating the second mass in the third axial direction.

14. The microelectromechanical triaxial gyroscope of claim 12, characterized in that the second detection assembly further includes a pair of second coupling beams;

15. The microelectromechanical tri-axis gyroscope of claim 12, characterized in that the second mass comprises a third mass unit and a fourth mass unit; the third mass unit and the fourth mass unit are respectively positioned at two sides of the second steering beam relative to the first axial direction;

The substrate comprises a third electrode plate and a fourth electrode plate;

16. The microelectromechanical tri-axis gyroscope of claim 1, characterized in that the driving assembly further comprises a driving unit;

17. The microelectromechanical triaxial gyroscope of claim 1, characterized in that the drive assembly further includes a pair of first drive detection units disposed at both ends of the first drive frame in the vibration direction thereof, and a pair of second drive detection units disposed at both ends of the second drive frame in the vibration direction thereof;

18. An electronic device comprising a microelectromechanical triaxial gyroscope according to any of claims 1 to 17.