TWI592633B - Anti-interference gyroscope - Google Patents

Description

Anti-jamming gyroscope

The invention relates to the field of micromechanical technology, and in particular to an anti-jamming gyroscope.

A gyroscope, also known as an angular velocity meter, can be used to detect the angular velocity and angle of rotation. As we all know, traditional mechanical gyros, precision fiber optic gyros and laser gyros have been widely used in aviation, aerospace or other military fields. However, these gyroscopes are not suitable for use in consumer electronics due to their high cost and bulk. Micromechanical gyroscopes are easy to miniaturize and mass-produce because of the need to integrate internal rotating parts without the need to integrate rotating parts, so that the micro-mechanical gyroscopes are easy to miniaturize and mass-produce, with low cost and small size. Features. In recent years, micromechanical gyroscopes have received close attention in many applications, such as gyroscopes with micromechanical accelerometers for inertial navigation, stable images for digital cameras, wireless inertia mice for computers, etc. Wait.

The micromechanical gyroscope includes a driving portion and a detecting portion, and the measurement of the moving angular velocity is realized by the coupling of the driving and the detecting motion; when the gyro is in the driving motion state, and the angular velocity is input in the second direction perpendicular to the driving state motion axis At the time, since the Korotkoff effect gyroscope generates the detection state motion in the detection axis, the rotational angular velocity of the object is immediately measured by measuring the displacement of the detected state motion. With the development of MEMS gyroscope technology, high integration, low cost The three-axis measurement gyroscope meets the needs of modern consumer electronics products and has become a trend in the development of MEMS gyroscopes.

However, when the two-axis or three-axis gyroscope is used, the non-detection signal will cause interference to the detection of the gyroscope. How to reduce or even remove the interference signal is a technical problem to be solved.

The technical problem to be solved by the present invention is to provide an anti-jamming gyroscope capable of reducing or completely eliminating the interference of the vibration on the angular velocity detecting signal and more accurately measuring the angular velocity of the gyroscope.

In order to solve the above problems, the present invention provides an interference-resistant gyroscope including a first detection quality, a second detection quality, and a driving quality; the driving quality is respectively coupled to the first detection quality and the second detection quality to drive the The first detection quality and the second detection quality are reverse vibration; the first detection quality and the second detection quality both have a rotation axis of the first direction and a rotation axis of the second direction; and the gyroscope has an angular velocity about the first direction The first detection quality and the second detection quality are reversely rotated about the second direction rotation axis to detect the angular velocity of the gyroscope about the first direction; in the case where the gyroscope has an angular velocity about the second direction, The first detection quality and the second detection quality are reversely rotated about the first direction rotation axis to detect an angular velocity of the gyroscope about the second direction; the first direction is perpendicular to the second direction, and the first detection quality detection signal is The sum of the detection signals of the second detection quality is used as an output signal for detecting the angular velocity of the gyroscope.

Further, the first detection quality includes an anchor point, a first mass, a second mass, and a third mass; the anchor point is disposed in the first mass and is fixed on a substrate of the gyroscope; a mass is disposed within the second mass and is first symmetric by the first direction An elastic beam is suspended on the anchor point; the second mass is disposed in the third mass, and is suspended on the first mass by a second elastic beam symmetrical in the second direction; the third mass is borrowed Suspended from the second mass by a third elastic beam symmetrical in the first direction, and connected to the driving mass by a fourth elastic beam symmetrical in the second direction; the first mass has a rotation axis of the first direction, The second mass has a rotation axis of a first direction and a second direction, the third mass having a rotation axis of the second direction; the structure of the second proof mass is the same as the structure of the first proof mass.

Further, a position corresponding to the first elastic beam is disposed with a first recess for receiving the first elastic beam; and a position corresponding to the second elastic beam corresponding to the second elastic beam a second recess for receiving the second elastic beam; a position corresponding to the third elastic beam at the second elastic beam is provided with a third recess for receiving the third elastic beam a fourth recess is disposed at a position corresponding to the fourth elastic beam, and the fourth recess is configured to receive the fourth elastic beam; the third mass has a protrusion at a corresponding position of the fourth recess The second mass has a receiving portion at a position corresponding to the projection, the projection extending into the receiving portion.

Further, the gyro further includes a substrate, and the first detection electrode and the second detection electrode are respectively disposed on the substrate corresponding to the first detection quality and the second detection quality, and the first detection electrode and the second detection The electrodes are arranged in the same way.

Further, the first detection quality and the second detection quality are symmetrically disposed along the second direction.

Further, a Z-axis detection quality is included for detecting the acceleration of the gyroscope on the Z-axis.

Further, the Z-axis detection quality is symmetrically disposed along the first direction.

Further, the Z-axis detection mass has a movable electrode, and a fixed electrode is disposed on the substrate of the gyroscope, and the movable electrode and the fixed electrode form a comb-shaped capacitance for detecting the Z-axis acceleration.

Further, the driving quality includes an upper driving quality and a lower driving quality, and the upper driving quality is opposite to the driving direction of the lower driving mass to drive the first detecting quality and the second detecting quality to move clockwise or counterclockwise.

The invention has the advantages that when the gyroscope is rotated by an angular velocity in one direction, it may be subjected to vibration in a certain direction, and the rotation and vibration act on the detection quality, and the signal detected by the detection quality is rotation and vibration. The total signal, we want to detect the quality detection signal is the rotating signal, the vibration signal is the interference signal, causing the rotation signal detection is not accurate. The first detection quality and the second detection quality of the present invention have opposite vibration directions under the action of the driving quality, so that the first detection quality and the second detection quality are received when the gyroscope is rotated by an angular velocity about one direction. The direction of the 寇 Rioli force is opposite, the first detection quality is opposite to the inclination direction of the second detection quality, and the detection signals are the same in both directions. If the gyroscope is subjected to vibration in a certain direction, the vibration does not cause the first detection quality and the second detection quality to generate a 寇 Rioli force, but the first detection quality and the second detection quality are subjected to the same direction of force or The torque, under the action of the force or the moment, the first detection quality is consistent with the inclination direction of the second detection quality, and the detection signals of the two are opposite in direction. Therefore, the sum of the detection signal of the first detection quality and the detection signal of the second detection quality is used as the total output signal, and the detection signals brought by the vibrations cancel each other due to the opposite directions, thereby avoiding the vibration signal pair. The effect of the angular velocity signal reduces or completely removes the influence of the vibration signal on the angular velocity signal, making the angular velocity signal detection more accurate.

1‧‧‧ first test quality

2‧‧‧Second test quality

3‧‧‧Upper drive quality

4‧‧‧Down drive quality

5‧‧‧Substrate

6a‧‧‧electrode

6b‧‧‧electrode

7a‧‧‧electrode

7b‧‧‧electrode

8‧‧‧Z-axis inspection quality

9‧‧‧ comb-tooth capacitor

11‧‧‧Quality

20‧‧‧ Anchor

21‧‧‧first mass

22‧‧‧Second mass

23‧‧‧ third mass

24‧‧‧First elastic beam

25‧‧‧Second elastic beam

26‧‧‧ Third elastic beam

27‧‧‧ fourth elastic beam

30‧‧‧First depression

31‧‧‧second depression

32‧‧‧ Third depression

33‧‧‧fourth depression

1 is a schematic structural view of a first embodiment of an anti-jamming gyroscope according to the present invention; and FIG. 2 is a schematic view showing a first detecting quality structure of a second embodiment of the anti-jamming gyroscope of the present invention; A schematic diagram of a second embodiment of the anti-jamming gyroscope of the present invention; FIG. 4 is a schematic diagram of a first detecting quality structure of a third embodiment of the anti-jamming gyroscope of the present invention; and FIG. 5 is an anti-jamming of the present invention. A first state diagram of a first embodiment of a gyroscope; FIG. 6 is a second state diagram of a first embodiment of the anti-jamming gyroscope of the present invention.

The specific implementation manner of the anti-jamming gyroscope provided by the present invention will be described in detail below with reference to the accompanying drawings.

Referring to FIG. 1, an anti-jamming gyroscope of the present invention includes a first proof mass 1, a second proof mass 2, and a drive mass. The driving quality is respectively connected to the first detecting quality 1 and the second detecting quality 2 to drive the first detecting mass 1 and the second detecting mass 2 to move in opposite directions.

In this embodiment, the driving quality includes an upper driving mass 3 and a lower driving mass 4, and the upper driving mass 3 and the lower driving mass 4 move in opposite directions to drive the first detecting quality 1 and the second detecting quality 2 Hour or counterclockwise movement. The upper driving mass 3 and the lower driving mass 4 are symmetrically disposed along an axis of symmetry of the second direction and are movable in a positive and negative direction of the first direction, the first direction being perpendicular to the second direction. In this embodiment, the The first direction is the Y direction, and the second direction is the X direction. For example, when the upper driving mass 3 moves in the positive direction in the first direction (forward in the Y direction) and the lower driving mass 4 moves in the negative direction in the first direction (negative direction in the Y direction), the first detecting mass 1 rotates clockwise. The second proof mass 2 rotates counterclockwise, and the first proof mass 1 and the second proof mass 2 move in opposite directions. The driving mode of the driving quality is a driving method commonly used in the prior art. For example, electrostatic force drive is not described here.

The first proof mass 1 and the second proof mass 2 each have a rotation axis of the first direction (not shown in the drawing) and a rotation axis of the second direction (not shown in the drawing). Under the action of the driving quality, the first detecting mass 1 and the second detecting mass 2 are oppositely vibrated, and the first detecting mass 1 and the second detecting quality are when the gyroscope is subjected to the angular velocity around the first direction or the second direction. 2 subject to the second direction or the first direction of the 寇 Riley force moment in the opposite direction, so that the first detection mass 1 and the second detection mass 2 rotate in opposite directions about the rotation axis of the second direction or the rotation axis of the first direction motion.

When the gyroscope is subjected to the angular velocity in the second direction (X direction), the gyroscope vibrates in the opposite direction in the plane under the action of the driving quality, and the first detecting mass 1 and the second detecting mass 2 are subjected to the opposite direction. The 寇 Rioli force moment around the first direction (Y direction), the first detection mass 1 and the second detection mass 2 respectively in the first direction (Y direction) under the action of the respective 寇 Rioli force moments The shaft rotates in the opposite direction.

When the gyroscope is subjected to the angular velocity around the first direction (Y direction), the gyroscope vibrates in the opposite direction in the plane under the action of the driving mass, and the first detecting mass 1 and the second detecting mass 2 are subjected to the opposite direction. The 寇 Rioli force moment around the second direction (X direction), the first detection mass 1 and the second detection mass 2 respectively in the second direction (X direction) under the action of the respective 寇 Rioli force moments The shaft rotates in the opposite direction.

When the angular velocity in one direction is received, the first detection quality 1 and the second detection quality 2 vibrate in opposite directions, and the sum of the detection signal of the first detection quality 1 and the detection signal of the second detection quality 2 is used as a gyro The angular velocity of the instrument detects the output signal, thereby detecting the angular velocity experienced by the gyroscope. When the first detection quality 1 and the second detection quality 2 are opposite to each other, the detection signal of the first detection quality 1 and the detection signal direction of the second detection quality 2 are the same, and the sum of the two can be used as the angular velocity of the gyroscope. The detected output signal.

When the gyroscope is subjected to an angular velocity in one direction, the gyroscope may also be subjected to vibration in a certain direction, and the vibration is not applied to the angular velocity of the gyroscope, so the vibration does not cause the 寇 Rio force, so When the vibration is received, the first detection quality 1 and the second detection quality 2 may move in the same direction. At this time, the detection signal of the first detection quality 1 and the detection signal of the second detection quality 2 are opposite to each other. The first detection quality 1 detection signal and the second detection When the sum of the quality 2 detection signals is used as the output signal of the gyroscope's angular velocity detection, when the two opposite signals are added, the two signals are cancelled, so that the signal of the vibration is not included in the final output signal, so that the output The signal only includes the angular velocity signal in one direction, which eliminates the interference of the vibration diagonal velocity detection, and the detection of the angular velocity signal is more accurate.

A first detecting electrode and a second detecting electrode are respectively disposed on the substrate 5 of the gyroscope corresponding to the first detecting mass 1 and the second detecting mass 2, and in the specific embodiment, the first detecting electrode includes four Two opposite electrodes are disposed, and the second detecting electrode includes four electrodes disposed opposite to each other. The first detecting electrode and the second detecting electrode are indicated by broken lines in the drawing. Since the sum of the detection signal of the first detection quality 1 and the detection signal of the second detection quality 2 as the output signal of the detection axis cancels the influence of the vibration on the angular velocity detection, the first detection electrode and the second detection electrode The arrangement is the same to ensure that the signals output by the first detection quality 1 and the second detection quality 2 can be in one-to-one correspondence. When the detection signal is superimposed, the corresponding vibration signals can be completely cancelled to better eliminate the vibration diagonal velocity signal detection. Impact. Hereinafter, the relationship between the detection signal of the anti-jamming gyroscope of the present invention and the output signal will be described in detail by taking the oppositely disposed electrode 6a, the electrode 6b, and the oppositely disposed electrode 7a and the electrode 7b as an example. The anti-interference gyroscope design circuit detects the accumulated capacitance = C6a-C6b+C7a-C7b, and C is the capacitance between the electrode and the detection quality. When the first proof mass 1 and the second proof mass 2 vibrate in opposite directions, the sign of change (positive sign) of C6a and C7a is the same, and is opposite to the sign of change of C6b and C7b, so C has a change. When the two detection mass vibration directions are the same, the change sign (positive sign) of C6a and C7a is opposite, and opposite to the change sign of C6b and C7b, C6a, C6b, C7a, C7b cancel and C does not change. Therefore, the signal of the vibration is not included in the final output signal, so that the output signal only includes the angular velocity signal in one direction, and the interference of the vibration diagonal velocity detection is eliminated, and the detection of the angular velocity signal is more accurate.

Further, the first detection quality 1 and the second detection quality 2 are symmetrically disposed along a second direction, and the first direction is perpendicular to the second direction. In this embodiment, the first detecting mass 1 and the second detecting mass 2 are symmetrically disposed along the second direction (X direction), that is, the symmetry axis directions of the first detecting mass 1 and the second detecting mass 2 are The first direction (Y direction) perpendicular to the two directions (X direction).

Further, the gyroscope further includes a Z-axis detection quality 8 for detecting the gyro The acceleration of the instrument on the Z axis. The Z-axis detection mass 8 can be symmetrically disposed in the first direction or the second direction. Preferably, when the first proof mass 1 and the second proof mass 2 are symmetrically disposed along the second direction, the Z-axis detection quality is symmetrically disposed along the first direction to reduce the space occupied by the detection quality, thereby further reducing the gyroscope volume of.

The Z-axis detection mass 8 has a movable electrode, and a fixed electrode is disposed on the substrate 5 of the gyroscope. The movable electrode is disposed opposite to the fixed electrode to form a comb-shaped capacitor 9 for detecting the Z-axis acceleration. When the gyro has an acceleration in the Z-axis direction, the relative position of the movable electrode and the fixed electrode of the comb-shaped capacitor 9 changes, so that the gyro Z-axis acceleration can be detected according to the change in the capacitance of the comb-shaped capacitor 9.

Further, in the second embodiment of the present invention, the first detection quality 1 is optimized in order to enable the detection quality to be flexibly rotated in the first direction and flexibly rotated in the second direction without affecting each other. The structure of the second detection quality 2 is the same as the structure of the second detection quality 2, and the structure of the first detection quality 1 is taken as an example.

Referring to FIGS. 2 and 3, in a second embodiment of the present invention, the first proof mass 1 includes an anchor point 20, a first mass 21, a second mass 22, and a third mass 23. The anchor point 20 is disposed in the first mass 11 and is fixed to an external substrate (not shown in the drawing). In this embodiment, the first mass 11 is an inner hollow frame, and the anchor point 20 is disposed inside the frame. The anchor point 20 is fixed to the outer substrate and cannot be rotated and moved. The first mass 21 is disposed within the second mass 22 and is suspended from the anchor point 20 by a first resilient beam 24 that is symmetrical in a first direction. The second mass 22 is an inner hollow frame, and the first mass 21 is suspended from the inside of the frame. The second mass 22 is disposed within the third mass 23 and is suspended from the first mass 11 by a second resilient beam 25 that is symmetrical in the second direction. The third mass 23 is an inner hollow frame, and the second mass 22 is suspended from the inside of the frame. The third mass 23 is suspended from the second mass 22 by a third elastic beam 26 that is symmetric in the first direction, and the external elastic mass is driven by the fourth elastic beam 27 that is symmetric in the second direction (Fig. Connected in the middle).

The anchor point 20 is not rotatable, and the first mass 21 is constrained by the first elastic beam 24 such that the first mass 21 has only a rotational axis of the first direction, that is, the first mass 21 can be wound around the first mass 21 Rotate in one direction. The third mass 23 is symmetric with the fourth elastic beam 27 and the outer direction in the second direction The third mass 23 is constrained by the fourth elastic beam 27 such that the third mass 23 has only the rotation axis of the second direction, that is, the third mass 23 can be wound around the second Direction rotation. The second mass 22 is suspended by the second elastic beam 25 symmetrical in the second direction to the first mass 21, and the third mass 23 is suspended by the third elastic beam 26 symmetrically in the first direction at the second mass At the same time, the first mass 21 has a rotation axis in a first direction, and the third mass 23 has a rotation axis in a second direction. Therefore, the second mass 22 has a first direction and a second direction. The axis of rotation.

Further, in order to reduce the volume of the gyroscope, on the basis of the second embodiment, in the third embodiment of the present invention, the structures of the first detection quality 1 and the second detection quality 2 are further optimized, the first The detection quality 1 is the same as the structure of the second detection quality 2, and the structure of the first detection quality 1 is taken as an example.

Referring to FIG. 4, the first mass 2 is disposed at a position corresponding to the first elastic beam 24 with a first recess 30 for receiving the first elastic beam 24. The second mass 22 is disposed at a position corresponding to the second elastic beam 25 and is provided with a second recess 31 for accommodating the second elastic beam 25 . The second mass 22 is disposed at a position corresponding to the third elastic beam 26 with a third recess 32 for receiving the third elastic beam 26 . The third mass 23 is disposed at a position corresponding to the fourth elastic beam 27 with a fourth recess 33 for accommodating the fourth elastic beam 27.

The first elastic beam 24, the second elastic beam 25, the third elastic beam 26, and the fourth elastic beam 27 are respectively disposed in the first recess 30, the second recess 31, the third recess 32, and the fourth recess 33, so that An elastic beam 24, a second elastic beam 25, a third elastic beam 26, and a fourth elastic beam 27 partially overlap the first mass 21, the second mass 22, and the third mass 23, respectively, to reduce the The space occupied by the first elastic beam 24, the second elastic beam 25, the third elastic beam 26, and the fourth elastic beam 27 can further reduce the size of the first proof mass 1, reduce the volume of the gyroscope, and realize the gyro The miniaturization of the instrument.

The motion state of the anti-jamming gyroscope of the present invention will be further described below in accordance with a third embodiment of the anti-jamming gyroscope of the present invention.

Referring to Fig. 5, when the gyroscope is subjected to an angular velocity in the second direction (X direction), the gyroscope is vibrating in the opposite direction in the plane under the action of the driving quality, and the first inspection is performed. The measured mass 1 and the second detected mass 2 are subjected to a 寇 Rioli force moment in a first direction (Y direction) in the opposite direction, and the first proof mass 1 and the second proof mass 2 respectively receive a 寇 Rioli force Under the action of the moment, the rotation of the first direction (Y direction) is performed in the opposite direction.

Referring to Fig. 6, when the gyroscope is subjected to the angular velocity around the first direction (Y direction), the gyroscope vibrates in the opposite direction in the plane under the action of the driving quality, and the first detecting quality 1 and the second detecting are performed. The mass 2 is subjected to a 寇 Rioli force moment in a second direction (X direction) in the opposite direction, and the first detection mass 1 and the second detection mass 2 respectively follow the respective 寇 Rioli force moments of the second The rotation axis of the direction (X direction) performs the movement in the opposite direction.

The above is only a preferred embodiment of the present invention, and it should be noted that those skilled in the art can also make several improvements and retouchings without departing from the principles of the present invention. These improvements and retouchings should also be considered as The scope of protection of the present invention.

1‧‧‧ first test quality

2‧‧‧Second test quality

3‧‧‧Upper drive quality

4‧‧‧Down drive quality

5‧‧‧Substrate

6a‧‧‧electrode

6b‧‧‧electrode

7a‧‧‧electrode

7b‧‧‧electrode

8‧‧‧Z-axis inspection quality

9‧‧‧ comb-tooth capacitor

Claims (9)

An anti-jamming gyroscope includes a first detection quality, a second detection quality, and a driving quality; the driving quality is respectively coupled to the first detection quality and the second detection quality to drive the first detection quality and the second detection Mass reverse vibration; the first detection quality and the second detection quality each have a rotation axis of the first direction and a rotation axis of the second direction; in the case where the gyroscope has an angular velocity about the first direction, the first detection quality is The second detecting mass is reversely rotated about the second direction rotating shaft to detect an angular velocity of the gyroscope about the first direction; in the case where the gyroscope has an angular velocity about the second direction, the first detecting quality and the second The detection quality is reversely rotated about the first direction rotation axis to detect the angular velocity of the gyroscope in the second direction; the first direction is perpendicular to the second direction, and the detection signal of the first detection quality and the detection signal of the second detection quality The sum is the output signal of the angular velocity detection of the gyroscope. The anti-interference gyroscope according to claim 1, wherein the first detection quality comprises an anchor point, a first mass, a second mass, and a third mass; the anchor point is set at the first quality Blocked in a block and fixed on a substrate of the gyroscope; the first mass is disposed in the second mass and suspended on the anchor point by a first elastic beam symmetric in a first direction; the second mass a block is disposed in the third mass and suspended by the second elastic beam symmetrical in the second direction on the first mass; the third mass is suspended by the third elastic beam symmetric in the first direction a second mass on the second mass and connected to the driving mass by a fourth elastic beam symmetrical in a second direction; the first mass having a first direction of rotation, the second mass having a first direction and a second direction a rotating shaft, the third mass has a rotating shaft in a second direction; the structure of the second detecting mass is the same as the structure of the first detecting mass. The anti-jamming gyroscope according to claim 2, wherein the first mass is disposed at a position corresponding to the first elastic beam with a first recess, the first recess For accommodating the first elastic beam; the second mass is disposed at a position corresponding to the second elastic beam with a second recess for receiving the second elastic beam; the second mass and the second a third recess is disposed at a position corresponding to the third elastic beam, the third recess is configured to receive the third elastic beam; a position corresponding to the fourth elastic beam is disposed at a position corresponding to the fourth elastic beam, and the fourth recess is disposed And accommodating the fourth elastic beam; the third mass has a protrusion at the corresponding position of the fourth recess, and the second mass has a receiving portion at a position corresponding to the protrusion, the protrusion extending into the receiving portion unit. The anti-jamming gyroscope according to claim 1, wherein the gyroscope further comprises a substrate, and the first detecting electrode is respectively disposed on the substrate corresponding to the first detecting quality and the second detecting quality And the second detecting electrode, the first detecting electrode and the second detecting electrode are arranged in the same manner. The anti-interference gyroscope according to claim 1, wherein the first detection quality and the second detection quality are symmetrically disposed along the second direction. The anti-interference gyroscope according to claim 1, further comprising a Z-axis detection quality for detecting the acceleration of the gyroscope on the Z-axis. The anti-interference gyroscope according to claim 4, wherein the Z-axis detection quality is symmetrically disposed along the first direction. The anti-jamming gyroscope according to claim 4, wherein the Z-axis detecting mass has a movable electrode, and a fixed electrode is disposed on the substrate of the gyroscope, and the movable electrode and the fixed electrode form a comb-shaped capacitor for detecting Z Axis acceleration. The anti-interference gyroscope according to claim 1, wherein the driving quality comprises an upper driving quality and a lower driving quality, and the upper driving quality is opposite to the driving direction of the lower driving mass to drive the first detecting quality and The second detection quality moves clockwise or counterclockwise.