WO2023155637A1

WO2023155637A1 - Angular velocity sensor, inertial sensor, and electronic device

Info

Publication number: WO2023155637A1
Application number: PCT/CN2023/070897
Authority: WO
Inventors: 郑元辽; 胡启方
Original assignee: 华为技术有限公司
Priority date: 2022-02-18
Filing date: 2023-01-06
Publication date: 2023-08-24
Also published as: CN116660570A

Abstract

An angular velocity sensor, an inertial sensor (20), and an electronic device (100). The angular velocity sensor comprises a first mass block (311), a second mass block (313), a third mass block (312), and a fourth mass block (314); by means of driving the first mass block (311) and the second mass block (313) to have displacement components in the direction of the Y axis, the angular velocities of the first mass block (311) and the second mass block (313) around the Z axis/X axis can be measured; and by means of driving the third mass block (312) and the fourth mass block (314) to have displacement components in the direction of the X axis, the angular velocities of the third mass block (312) and the fourth mass block (314) around the Y axis can be measured. The first mass block (311) and the second mass block (313) are themselves each symmetrical about a first axis of symmetry (y), and the first mass block (311) is symmetrical to the second mass block (313) about a second axis of symmetry (x); the third mass block (312) and the fourth mass block (314) are themselves each symmetrical about the second axis of symmetry (x), and the third mass block (312) is symmetrical to the fourth mass block (314) about the first axis of symmetry (y); the first axis of symmetry (y) is parallel to the direction of the Y axis , and the second axis of symmetry (x) is parallel to the direction of the X axis.

Description

Angular velocity sensors, inertial sensors and electronics

This application claims the priority of a Chinese patent application with application number 202210152814.1 and application title "Angular Velocity Sensor, Inertial Sensor, and Electronic Equipment" filed with the China Patent Office on February 18, 2022, the entire contents of which are hereby incorporated by reference in this application middle.

technical field

The present application relates to the fields of inertial sensing and electronic devices, and more particularly, inertial sensors, electronic devices.

Background technique

The electronic device can detect the angle or angular velocity of the electronic device itself around multiple axes through the angular velocity sensor. Angular velocity sensors play an important role in application scenarios such as photo stabilization, navigation, game orientation, rotating screen, and automatic driving.

The angular velocity sensor may include multiple masses for detection. When the mass block deflects, the capacitance between the mass block and the detection electrode will change, so that the angular velocity sensor can output a signal related to the angle or angular velocity. The proof mass is usually arranged on the substrate of the angular velocity sensor. When one of the plurality of masses moves, the mass may pull the substrate, which may cause deformation of the substrate. The deformation of the substrate may displace other masses on the angular velocity sensor, thereby reducing the detection accuracy of the angular velocity sensor. Therefore, it is necessary to provide a solution on how to reduce substrate deformation.

Contents of the invention

Embodiments of the present application provide an angular velocity sensor, an inertial sensor, and an electronic device. The purpose is to reduce substrate deformation.

In a first aspect, an angular velocity sensor is provided, including:

A first mass and a second mass, the first mass and the second mass are driven to have a displacement component in a first direction, the first mass and the second mass are used to detect The angular velocity around the second direction and/or the third direction, the first direction, the second direction, and the third direction are mutually orthogonal, and the first mass itself and the second mass itself are relative to each other The first axis of symmetry is symmetrical, the first mass block and the second mass block are symmetrical with respect to the second axis of symmetry, the first axis of symmetry is parallel to the first direction, and the second axis of symmetry is parallel to the first axis of symmetry Two directions;

A third mass and a fourth mass, the third mass and the fourth mass are driven to have a displacement component in the second direction, the third mass and the fourth mass are used In order to detect the angular velocity around the first direction, the third mass itself and the fourth mass itself are symmetrical with respect to the second axis of symmetry, and the third mass and the fourth mass symmetrical with respect to said first axis of symmetry;

A first anchor area and a second anchor area, the first mass is connected to the first anchor area and the second anchor area, and the second mass is connected to the first anchor area and the second anchor area An anchor region is connected, and the first anchor region and the second anchor region are symmetrical with respect to the first axis of symmetry;

a third anchor region, the third anchor region being connected to the third mass and the fourth mass;

The first anchor region, the second anchor region and the third anchor region are arranged on the second axis of symmetry, the third anchor region covers the first axis of symmetry and the second axis of symmetry intersection point.

In this application, by setting the anchor area connected with the mover on the same axis of symmetry of the angular velocity sensor, the force borne by the anchor area can usually be symmetrical with respect to the axis of symmetry, and then the force borne by the anchor area can be at least partially offset, and the anchor area The amount of deformation can be relatively small. According to the differential characteristics, it is beneficial to reduce the influence of substrate deformation and the like on the measurement accuracy of the angular velocity sensor, and is beneficial to improve the measurement accuracy of the angular velocity sensor. The same mass block can be used to detect angular velocities around multiple directions, which is conducive to improving the integration of inertial sensors and reducing the occupied space of inertial sensors.

With reference to the first aspect, in some implementation manners of the first aspect, the first anchor region itself, the second anchor region itself and the third anchor region itself are all symmetrical with respect to the second axis of symmetry, The third anchor region is itself symmetrical with respect to the first axis of symmetry.

In this application, in order to suppress the influence of factors such as material strain and processing deviation, the angular velocity sensor has symmetry. The angular velocity sensor has symmetry, which is conducive to the application of the differential principle to remove common-mode noise caused by material strain and processing deviation, and is conducive to improving the angular velocity sensor's performance such as temperature drift and zero drift.

With reference to the first aspect, in some implementation manners of the first aspect, the angular velocity sensor further includes:

a driving part, the driving part is used for reciprocating movement along the first direction, and the driving part is connected to the first mass block;

A transmission beam assembly, the transmission beam assembly is symmetrical with respect to the first axis of symmetry, the transmission beam assembly includes a first end, a second end and a third end, the first end is connected to the driving member, and the first end Two ends are connected to the third mass, and the third end is connected to the fourth mass. When the first end has a displacement component along the first direction, the second end and the Each of the third ends has a displacement component parallel to the second direction, and the direction of the displacement component of the second end is opposite to that of the third end.

In this application, the displacement component in the Y direction can be converted to the displacement component in the X direction through the transmission beam assembly, so that the first mass block and the second mass block are driven by the same driving member, which is beneficial to reduce the number of components in the angular velocity sensor , which is beneficial to improve the coupling degree between the first mass and the second mass.

With reference to the first aspect, in some implementation manners of the first aspect, the transmission beam assembly includes a first transmission beam, a second transmission beam and a third transmission beam connected to each other, and the first transmission beam is close to the drive The second transmission beam is arranged close to the third mass block, the third transmission beam is arranged close to the fourth mass block, the first transmission beam is arranged parallel to the first direction, and the Both the second transmission beam and the third transmission beam include portions arranged obliquely or vertically relative to the first direction.

In the present application, when the first transmission beam has a displacement component along the extension direction of the first transmission beam, since the second transmission beam includes a portion different from the extension direction of the first transmission beam, the second transmission beam can be replaced by the second transmission beam. A transmission beam is pulled, and an end of the second transmission beam far away from the first transmission beam may have a displacement component along a direction perpendicular to the extending direction of the first transmission beam. Similarly, an end of the third transmission beam remote from the first transmission beam may have a displacement component along a direction perpendicular to the extension direction of the first transmission beam. Thus the drive beam assembly can have a steering drive function.

With reference to the first aspect, in some implementation manners of the first aspect, the second transmission beam includes a first transmission section, a second transmission section, and a third transmission section, and the first transmission section and the second transmission section segments are arranged parallel to the second direction, the third transmission segment is connected between the first transmission segment and the second transmission segment, and the third transmission segment is parallel to the first direction or Tilt setting.

In the present application, the second transmission beam includes a plurality of transmission sections perpendicular to the Y direction, and connected by transmission sections parallel to the Y direction, which is beneficial to disperse the displacement components in the X direction converted by the transmission beam assembly in the On multiple transmission sections, it is beneficial to reduce the detection error caused by excessive deformation of the transmission section.

With reference to the first aspect, in some implementations of the first aspect, when the third mass and the fourth mass have angular velocity components around the first direction, the second transmission beam and the The third transmission beam rotates around the first transmission beam.

That is, when the third mass and the fourth mass have angular velocity components around the Y direction, the second transmission beam may have a rotation angle around the Y direction.

In the present application, the position of a part of the first transmission beam is relatively fixed, and the deformable amount of the first transmission beam is relatively small. When the third mass block and the fourth mass block have an angular velocity component around the Y direction, the second transmission beam and the third transmission beam are rotated relative to the first transmission beam, so that the second transmission beam and the third transmission beam can absorb the The rotation tendency of the third mass and the fourth mass is beneficial to reduce the extent to which the first mass is pulled by the third mass and the fourth mass, which in turn is beneficial to reduce the friction between the third mass and the fourth mass in the first mass Displacement in the X and Z directions under the traction of the block.

With reference to the first aspect, in some implementation manners of the first aspect, the stiffness of the first transmission beam in the second direction is smaller than the stiffness of the first transmission beam in the third direction.

In the present application, the first transmission beam has elasticity in the X direction, which is beneficial to reduce the displacement of the third mass block and the fourth mass block in the X direction under the traction of the first mass block.

With reference to the first aspect, in some implementation manners of the first aspect, the stiffness of the second transmission beam in the second direction is smaller than the stiffness of the second transmission beam in the third direction.

In the present application, the second transmission beam may have elasticity in the X direction, which is beneficial to reduce the displacement of the first mass in the X direction under the traction of the third mass and the fourth mass.

With reference to the first aspect, in some implementations of the first aspect, the stiffness of the second transmission beam in the first direction is smaller than the stiffness of the second transmission beam in the third direction

In the present application, the second transmission beam may have elasticity in the Y direction, which is beneficial to reduce the displacement of the third mass block and the fourth mass block in the Y direction under the traction of the first mass block.

In this application, by setting the transmission beam assembly with the above structure, the displacement components of the third mass block and the fourth mass block in the X direction have little influence on the first mass block; the displacement components of the first mass block in the X direction and Y direction The displacement component has less influence on the third mass block and the fourth mass block. Therefore, by rationally designing the steering structure, the steering structure can not only be used to transmit and convert the driving force, but also improve the decoupling between multiple mass blocks with different detection directions, which is beneficial to improve the measurement accuracy of the inertial sensor.

a support member, the support member is connected to the third anchorage area, and is connected between the third mass block and the fourth mass block, and the support member is relative to the first axis of symmetry, the The second axis of symmetry is symmetrical.

In this application, by setting supports between the third anchor area and the third mass, and between the third anchor area and the fourth mass, the third mass and the fourth mass can be suspended on the angular velocity sensor on the substrate layer.

A first torsion beam, the first torsion beam is connected between the support member and the third anchorage area, the first torsion beam extends along the first direction, when the third mass block and the When the fourth mass block has an angular velocity component around the first direction, the support member rotates around the first torsion beam.

In the present application, the first torsion beam may provide torsional stiffness to the support. When the third mass block and the fourth mass block rotate around the Y direction under the action of external force, the support can be driven by the third mass mass and the fourth mass block, and twisted relative to the first torsion beam; when the support is not subjected to external force In action, due to the torsional stiffness of the first torsion beam, the support can return to its original state.

With reference to the first aspect, in some implementations of the first aspect, the third mass includes a notch of the first mass, and the notch of the first mass is symmetrical with respect to the second axis of symmetry; the angular velocity sensor Also includes:

A first elastic connecting piece, the first elastic connecting piece straddles the gap of the first mass block, and is connected between the support piece and the third mass block.

In the present application, an elastic connection is provided between the support and the third mass, and the elastic connection can reduce the amount of deformation of the support and the third anchorage caused by the traction of the third mass.

With reference to the first aspect, in some implementation manners of the first aspect, the stiffness of the first elastic connecting member in the second direction is smaller than the stiffness of the first elastic connecting member in the third direction.

In the present application, the first elastic connecting member may have elasticity in the X direction, which is beneficial to reduce the deformation of the supporting member in the X direction under the traction of the third mass block.

a fourth transmission beam, the fourth transmission beam is connected to the first anchorage area, and is connected between the first mass block and the second mass block, and the fourth transmission beam is along the first Extending in the direction, the fourth transmission beam itself is symmetrical with respect to the second axis of symmetry.

In the present application, by setting the fourth transmission beam between the first anchor area and the first mass block, the first mass block can be suspended on the substrate layer of the angular velocity sensor.

With reference to the first aspect, in some implementation manners of the first aspect, the stiffness of the fourth transmission beam in the second direction is smaller than the stiffness of the fourth transmission beam in the third direction.

In the present application, the fourth transmission beam may have elasticity in the X direction, which is beneficial to reduce the deformation of the first anchorage area in the X direction under the traction of the first mass block.

A second torsion beam, the second torsion beam is connected between the first anchorage area and the fourth transmission beam, the second torsion beam extends along the second direction, when the first mass block and the When the second mass block has an angular velocity component around the second direction, the fourth transmission beam rotates around the second torsion beam.

With reference to the first aspect, in some implementation manners of the first aspect, the second torsion beam itself is symmetrical with respect to the second axis of symmetry.

In the present application, the second torsion beam has symmetry, which is beneficial to reduce errors generated during the transmission of the fourth transmission beam.

In this application, the second torsion beam may provide torsional stiffness to the fourth transmission beam. When the first mass block rotates around the X direction or Z direction under the action of external force, the fourth transmission beam can be driven by the first mass block and twisted relative to the second torsion beam; when the fourth transmission beam is not subjected to external force, Due to the torsional stiffness of the second torsion beam, the fourth transmission beam can return to its original state.

A second elastic connecting member, the second elastic connecting member is connected between the fourth transmission beam and the first mass block, and the second elastic connecting member extends along the second direction.

In this application, an elastic connecting piece is provided between the fourth transmission beam and the first mass block, and the elastic connection piece can reduce the amount of deformation of the fourth transmission beam and the first anchorage area caused by the traction of the first mass block.

With reference to the first aspect, in some implementation manners of the first aspect, the stiffness of the second elastic connecting member in the first direction is smaller than the stiffness of the second elastic connecting member in the third direction.

In the present application, the second elastic connecting member may have elasticity in the Y direction, which is beneficial to reduce the deformation of the fourth transmission beam in the Y direction under the traction of the first mass block.

a fourth anchor region, the fourth anchor region is connected between the first mass and the second mass, and the fourth anchor region itself is symmetrical with respect to the second axis of symmetry;

The position connected to the first anchor region on the first mass is the first position, the position connected to the second anchor region on the first mass is the second position, and the first mass The position connected to the fourth anchor region is the third position, and the first position, the second position, and the third position are not collinear.

In the present application, the first mass may be supported by the first anchor region, the second anchor region and the fourth anchor region. The three positions where the first mass is connected to the first anchor region, the second anchor region and the fourth anchor region are not collinear, so that the first mass can be suspended on the substrate layer of the angular velocity sensor.

A third elastic connecting piece, the third elastic connecting piece is connected between the fourth anchor area and the first mass block.

In the present application, an elastic connection is provided between the fourth anchor area and the first mass, and the elastic connection can reduce the amount of deformation of the fourth anchor area caused by the traction of the first mass.

With reference to the first aspect, in some implementation manners of the first aspect, the stiffness of the third elastic connecting member in the first direction is smaller than the stiffness of the third elastic connecting member in the third direction.

In the present application, the first mass can be suspended on the substrate layer of the angular velocity sensor by setting the third elastic connecting member between the fourth anchor area and the first mass. The third elastic connecting member may also have elasticity in the Y direction, which is beneficial to reduce the deformation of the fourth anchor area in the Y direction under the traction of the first mass block.

With reference to the first aspect, in some implementation manners of the first aspect, the stiffness of the third elastic connecting member in the second direction is smaller than the stiffness of the third elastic connecting member in the third direction.

In the present application, the third elastic connecting member may have elasticity in the X direction, which is beneficial to reduce the deformation of the fourth anchor region in the X direction under the traction of the first mass block.

With reference to the first aspect, in some implementations of the first aspect, when the first mass has an angular velocity component around the second direction, the first mass rotates around the third elastic connecting member .

In the present application, the third elastic connecting member can provide torsional rigidity for the first mass. When the first mass rotates around the X direction under the action of an external force, the first mass can be twisted relative to the third elastic connector; when the first mass is not subjected to an external force, due to the torsional stiffness of the third elastic connector, The first mass can be restored to its original state.

With reference to the first aspect, in some implementations of the first aspect, when the first mass has an angular velocity component around the third direction, the first mass rotates around the third elastic connecting member .

In the present application, the third elastic connecting member can provide torsional rigidity for the first mass. When the first mass rotates around the Z direction under the action of an external force, the first mass can be twisted relative to the third elastic connector; when the first mass is not subjected to an external force, due to the torsional stiffness of the third elastic connector, The first mass can be restored to its original state.

With reference to the first aspect, in some implementation manners of the first aspect, the first mass has a second mass notch, and the third mass and the fourth mass are arranged on the second mass inside the gap.

In this application, the notch of the first mass block and the notch of the second mass block are arranged opposite to accommodate the third mass block and the fourth mass block, which is conducive to reducing the overall size of the inertial sensor and increasing the effective detection area of the mass block .

A first detection electrode, the first mass can move relative to the first detection electrode, the first mass and the first detection electrode are arranged along the third direction to form a first capacitance, when the When the first mass has an angular velocity component around the second direction, the first mass has a displacement component along the third direction, and the displacement component of the first mass along the third direction Corresponding to the capacitance variation of the first capacitor;

The first readout circuit is configured to output the angular velocity component in the second direction according to the capacitance variation of the first capacitor.

In this application, by setting the detection electrodes, the displacement component of the first mass in the Z-axis direction can be captured, so that the Coriolis force of the first mass in the Z-axis direction can be inferred, and then judged that the first mass is around the X-axis. the angular velocity.

The second detection electrode, the third mass block can move relative to the second detection electrode, the third mass block and the second detection electrode are arranged along the third direction to form a second capacitance, when the When the third mass has an angular velocity component around the first direction, the third mass has a displacement component along the third direction, and the displacement component of the third mass along the third direction Corresponding to the capacitance variation of the second capacitor;

The second readout circuit is configured to output the angular velocity component in the first direction according to the capacitance variation of the second capacitor.

In this application, by setting the detection electrodes, the displacement component of the second mass in the Z-axis direction can be captured, so that the Coriolis force of the second mass in the Z-axis direction can be inferred, and then it can be judged that the second mass is around the Y-axis. the angular velocity.

A third detection electrode, the first mass can move relative to the third detection electrode, the first mass and the third detection electrode are arranged along the second direction to form a third capacitance, when the When the first mass has an angular velocity component around the third direction, the first mass has a displacement component along the second direction, and the third mass has a displacement component along the second direction Corresponding to the capacitance variation of the third capacitor;

The third readout circuit is configured to output the angular velocity component in the third direction according to the capacitance variation of the third capacitor.

In this application, by setting the detection electrodes, the displacement component of the first mass in the X-axis direction can be captured, so that the Coriolis force of the first mass in the X-axis direction can be inferred, and then it can be judged that the first mass is around the Z-axis. the angular velocity.

In a second aspect, an inertial sensor is provided, including the angular velocity sensor described in any one of the implementation manners in the first aspect above.

In a third aspect, an electronic device is provided, including the inertial sensor described in any one of the implementation manners in the second aspect above.

Description of drawings

Fig. 1 is a schematic structural diagram of an electronic device provided by an embodiment of the present application.

Fig. 2 is a schematic structural diagram of an inertial sensor provided by an embodiment of the present application.

Fig. 3 is a schematic structural diagram of a mechanical structure layer provided by an embodiment of the present application.

Fig. 4 is a schematic perspective view of a mechanical structure layer provided by an embodiment of the present application.

Fig. 5 is a schematic diagram of the movement of a mechanical structure layer provided by an embodiment of the present application.

Fig. 6 is a schematic structural diagram and a schematic diagram of movement of a transmission beam assembly provided by an embodiment of the present application.

FIG. 7 is a schematic diagram of an arrangement of detection electrodes on a substrate provided by an embodiment of the present application.

Fig. 8 is a schematic diagram of detecting an angular velocity around the X-axis by a mechanical structure layer provided by an embodiment of the present application.

FIG. 9 is a schematic diagram of an inertial sensor detecting an angular velocity around the X-axis provided by an embodiment of the present application.

FIG. 10 is a schematic diagram of a mechanical structure layer detecting an angular velocity around the Y-axis provided by an embodiment of the present application.

FIG. 11 is a schematic diagram of an inertial sensor detecting an angular velocity around the Y-axis provided by an embodiment of the present application.

FIG. 12 is a schematic diagram of an inertial sensor detecting an angular velocity around the Z-axis provided by an embodiment of the present application.

Detailed ways

The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings.

FIG. 1 is a schematic structural diagram of an electronic device 100 provided by an embodiment of the present application. The electronic device 100 can be, for example, a terminal consumer product or a 3C electronic product (computer, communication, consumer electronics), such as a mobile phone, a portable computer, a tablet computer, an e-reader, a notebook computer, etc. , digital cameras, wearable devices, earphones, watches, stylus and other devices. The electronic device 100 may also be a vehicle, or a control device, a car machine, a vehicle-mounted device, etc. applied to a vehicle. The embodiment shown in FIG. 1 is described by taking the electronic device 100 as a mobile phone as an example.

The electronic device 100 may include a casing 11 , a display screen 12 and a circuit board assembly 13 . Specifically, the casing 11 may include a frame and a rear cover. A bezel may be located between the display 12 and the back cover. The frame can surround the periphery of the display screen 12 and surround the periphery of the back cover. The cavity formed among the display screen 12 , the frame, and the rear cover can be used for accommodating the circuit board assembly 13 . The circuit board assembly 13 may include a circuit board, and an inertial sensor 20 disposed on the circuit board. The circuit board may be, for example, a main board, a small board, or the like.

FIG. 2 shows two embodiments of an inertial sensor (also called an inertial measurement unit (IMU)) 20 . In the embodiment shown in FIG. 2 , the inertial sensor 20 may be an angular velocity sensor (also called a gyroscope), or may integrate an acceleration sensor and an angular velocity sensor. That is, the inertial sensor 20 may include only an angular velocity sensor (in this case, the inertial sensor 20 may be equivalent to the angular velocity sensor), or the inertial sensor 20 may include an angular velocity sensor and an acceleration sensor. The angular velocity sensor can be an inertial sensor, or a part of an inertial sensor. In an embodiment where the inertial sensor 20 integrates an acceleration sensor and an angular velocity sensor, the inertial sensor 20 may be a sensor that can realize both the functions of an acceleration sensor and an angular velocity sensor.

The angular velocity sensor can be used to determine the motion posture of the electronic device 100 . In some embodiments, the angular velocity of the electronic device 100 around three axes (ie, X-axis direction, Y-axis direction and Z-axis direction) can be determined by an angular velocity sensor.

In a possible scenario, the angular velocity sensor can be used to shoot scenes such as anti-shake. For example, when the shutter is pressed, the angular velocity sensor detects the shaking angle of the electronic device 100, calculates the distance that the lens module needs to compensate according to the angle, and allows the lens to counteract the shaking of the electronic device 100 through reverse movement to achieve anti-shake.

In another possible scenario, the angular velocity sensor can also be used in navigation, automatic driving and other scenarios. For example, when the electronic device 100 deflects during the movement, the angular velocity sensor can detect the deflected angle or angular velocity. Combined with the moving speed of the electronic device 100, the electronic device 100 can determine its approximate position on the map, driving status, etc.

In another possible scenario, the angular velocity sensor can also be used in other more types of scenarios, such as somatosensory games and other scenarios.

The acceleration sensor can detect the acceleration of the electronic device 100 in various directions (generally three axes). The magnitude and direction of gravity can be detected when the electronic device 100 is stationary. It can also be used to identify the posture of the electronic device 100, pedometer and other applications.

As shown in FIG. 2 , the inertial sensor 20 may include a chip 21 and one or more detection components 22 . Chip 21 may include readout circuitry, or instead, readout circuitry. A part or the whole of the detection component 22 may also be called a micro electro mechanical system (MEMS). The chip 21 can be electrically connected with the detection part 22 . In the embodiment shown in FIG. 2 , inertial sensor 20 may include a single detection component 22 . The chip 21 can obtain a signal related to angular velocity through the detection component 22 , and in one embodiment, the chip 21 can obtain a signal related to acceleration through the detection component 22 . In another embodiment, inertial sensor 20 may include two detection components 22 . The chip 21 can obtain signals related to acceleration through one detection component 22 , and obtain signals related to angular velocity through another detection component 22 .

The principle of acquiring the motion state of the electronic device 100 through the inertial sensor 20 will be described below with reference to FIG. 1 and FIG. 2 .

The detection component 22 may include a substrate layer, a mechanical structure layer and a cover layer. The mechanical structural layer can be hermetically connected between the mechanical structural layer and the cover layer. The mechanical structure layer may also be referred to as MEMS layer. The mechanical structure layer may be a key component of the detection component 22 for realizing angular velocity detection.

The mechanical structure layer can include a mover and a stator. The stator may be fixed within the inertial sensor 20 . The stator can, for example, be fastened to the substrate layer. There is a gap between the stator and the mover so that the stator and the mover can form a capacitance. The capacitance formed by the stator and the mover can be used to drive the mover to move relative to the stator. The mover may, for example, be suspended above the substrate layer and be able to move relative to the substrate layer. In one embodiment, the mover and the stator may comprise comb structures, for example. The comb-shaped mover can be a movable comb. The comb-shaped stator may be a fixed comb.

The stator can be, for example, an anchor region. In this application, grooves may be provided on the stator. The groove can be obtained by, for example, processing through MEMS technology, or through processes such as substrate local growth. Since the mechanical structure layer is connected between the substrate layer and the cover layer, the stator can be connected between the substrate layer and the cover layer. The stator and the substrate layer or the cover layer can be connected by bonding. Grooves are provided on the stator, which is beneficial to increase the bonding area between the connection of the mechanical structure layer and the substrate layer or the connection of the mechanical structure layer and the cover layer, thereby improving the mechanical stability of the inertial sensor 20 . The anchor region of the mechanical structure layer 300 can also be obtained by surface silicon growth, bonding and fixing, and the like.

The inertial sensor 20 may also include detection electrodes. The detection electrodes may be fixed within the inertial sensor 20 . Capacitance can be formed between the mover and the detection electrode. The capacitance formed by the mover and the detection electrodes can be used to detect the motion state of the electronic device 100 . In the embodiment shown in FIG. 2, the detection electrodes can be fixed on the substrate layer, for example.

Now, with reference to FIG. 2 , the working principle of the inertial sensor 20 will be described by taking the embodiment of Y-axis direction detection as an example. The chip 21 can send an alternating current signal to the detection component 22 to drive the mover of the detection component 22 to reciprocate relative to the stator along the X-axis direction in a translational manner at a preset frequency. This movement basically does not change the distance between the detection electrode and the mover in the Z-axis direction. The distance between the detection electrode and the mover along the Z-axis direction may correspond to the capacitance formed by the detection electrode and the mover, so the capacitance formed by the detection electrode and the mover may basically remain unchanged.

When the electronic device 100 does not move (including translation, rotation, etc.), the capacitance of the capacitance formed by the detection electrode and the mover can basically remain unchanged.

When the electronic device 100 moves, for example, when the electronic device has an angular velocity component that rotates around the Y-axis direction under the action of an external force, that is, when the rotation direction of the electronic device is the Y-axis direction, the mover will also rotate Tendency to rotate in the Y-axis direction and bear additional forces. This force may be referred to as the Coriolis force. The direction of the acting force (such as the direction of the Z axis) may be orthogonal to the direction of rotation of the mover (such as the direction of the Y axis) and the direction of movement of the mover (such as the direction of the X axis). The mover can move along the Z axis under the action of the force. Therefore, the acting force can change the distance between the detection electrode and the mover, thereby changing the capacitance of the capacitance formed by the detection electrode and the mover. The electronic device 100 shown in FIG. 1 can obtain the angular velocity ω that rotates with the electronic device 100 around the Y-axis direction by obtaining the capacitance variation of the capacitance formed by the detection electrode and the mover. In one embodiment, the readout circuit can acquire the amount of capacitance change, and output the angular velocity according to the amount of capacitance change.

According to the capacitance change ΔC, the distance change y between the detection electrode and the mover can be determined. The capacitance variation ΔC and the spacing variation y can satisfy the following formula, for example:

According to the stiffness k of the mover and the variation y of the spacing, the Coriolis force F that the mover bears can be determined. For example, the Coriolis force F, the stiffness k and the distance change y can satisfy the following formula:

F=k·y.

According to the Coriolis force F, the mass m of the mover, and the reciprocating velocity v of the mover, the angular velocity ω of the mover can be determined. Coriolis force F, mover mass m, mover reciprocating velocity v and angular velocity ω, for example, can satisfy the following formula:

When the electronic device 100 actually moves, the electronic device 100 can rotate around the three axes of the X-axis direction, the Y-axis direction and the Z-axis direction. The inertial sensor can refer to the above principles to obtain angular velocities around the X-axis, Y-axis, and Z-axis respectively. In the embodiments provided in the present application, in addition to detecting the movement of the mover through capacitance, the movement of the mover can also be detected through other methods, for example, through the time-of-flight method. The present application may not be limited to the manner of detecting angular velocity provided in the embodiment.

Since the mover is arranged on the substrate layer, the movement of the mover may drag the substrate layer to deform. The deformation of the substrate layer may lead to unreasonable movement of the mover, thereby affecting the measurement accuracy of the angular velocity sensor. The embodiments of the present application aim at the above problems and provide a series of technical solutions, the purpose of which is to reduce the influence of substrate deformation on the measurement accuracy of the angular velocity sensor, so that the angular velocity sensor or inertial sensor can meet various requirements, and improve the angular velocity sensor or inertial sensor. Application performance within electronic devices. For example, the angular velocity sensor or inertial sensor provided in the embodiment of the present application may have characteristics such as small size, multi-axis detection, and excellent detection accuracy.

FIG. 3 and FIG. 4 are schematic internal structure diagrams of a mechanical structure layer 300 provided by an embodiment of the present application, wherein FIG. 3 is a plane structure diagram, and FIG. 4 is a three-dimensional structure diagram. FIG. 5 is a schematic diagram of movement of movers of the mechanical structure layer 300 when the mechanical structure layer 300 shown in FIGS. 3 and 4 does not rotate. The mechanical structure layer 300 may be a component of an angular velocity sensor or an inertial sensor provided in the present application. The inertial sensor is taken as an example to illustrate below. For the embodiments of the angular velocity sensor, reference may be made to the embodiments of the inertial sensor.

For ease of description, as shown in FIGS. 3 to 5 , it is assumed that there is an XYZ coordinate system. Wherein, the XY plane is parallel to the paper surface of FIG. 3 and FIG. 5 , and the Z-axis direction is perpendicular to the paper surface of FIG. 3 and FIG. 5 . The X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other. The mechanical structure layer 300 may be arranged parallel to the XY plane.

The mechanical structure layer 300 may include a mass block 311 and a mass block 312 . In the embodiment shown in Fig. 3, the proof mass 311 is used to detect the angular velocity around the X-axis direction and the Z-axis direction. The mass block 312 is used to detect the angular velocity around the Y axis. In other possible embodiments, the proof mass 311 may only be used to detect the angular velocity in the direction of the X axis or the angular velocity in the direction of the Z axis. The working principle of the mass block 311 detecting the angular velocity around the X-axis direction and the Z-axis direction will be introduced below. For the embodiment in which the mass block 311 only detects the angular velocity around the X-axis direction and the embodiment in which the mass block 311 only detects the angular velocity around the Z-axis direction, refer to the embodiment shown in FIG. 3 .

In some embodiments, the mechanical structure layer 300 may have symmetry in order to suppress the effects of factors such as material strain and processing deviation. The mechanical structure layer 300 has symmetry, which is beneficial to apply the differential principle to remove common mode noise caused by material strain and processing deviation, and is beneficial to improve the temperature drift performance and zero drift performance of the mechanical structure layer 300 .

The mechanical structure layer 300 may be symmetrical with respect to the axis of symmetry x, and symmetrical with respect to the axis of symmetry x, the axis of symmetry x may be parallel to the direction of the X axis, and the axis of symmetry x may be parallel to the direction of the Y axis. In this application, the moving directions of two components or structures that are mutually symmetrical with respect to the symmetry axis x or the symmetry axis y may be symmetrical, so that the motion modes of the two components or structures can meet the same-frequency differential requirements.

In one embodiment, the mass 311 itself is symmetrical about the axis of symmetry y. The mass 312 itself may be symmetrical about the axis of symmetry x. The mass block 311 and the mass block 312 have symmetry, which is beneficial to improve the measurement accuracy of the inertial sensor by applying the differential principle.

In order to improve the detection accuracy of the mechanical structure layer 300 , the mechanical structure layer 300 may further include a mass block 313 and a mass block 314 . The proof-mass 313 and the proof-mass 311 may be symmetrical with respect to the torsion beam x. The proof-mass 314 and proof-mass 312 may be symmetrical about the torsion beam y. Proof 313 and proof mass 311 may satisfy the differential decoupling condition. The proof-mass 314 and the proof-mass 312 may satisfy the differential decoupling condition. For a specific embodiment of the mass block 313 , reference may be made to the embodiments of the mass block 311 . For a specific embodiment of the mass block 314, reference may be made to the embodiment of the mass block 312.

In the embodiment shown in Fig. 3, the side of the mass block 311 close to the mass block 312 and the mass block 314 can be provided with a mass block gap 3115, and the side of the mass block 313 close to the mass block 312 and the mass block 314 can be provided with a Mass gap 3135. The proof-mass notch 3115 and the proof-mass notch 3135 may be symmetrical about the axis of symmetry x. Mass 312 and mass 314 can be accommodated in mass notch 3115 and mass notch 3135, which is beneficial to increase the usable detection area of mass 311 and mass 313 and to reduce the overall size of the angular velocity sensor.

In the present application, differential decoupling may mean that component A and component B are symmetrical, and the motion modes of component A and component B belong to differential motion. Through the differential movement of the symmetrical structure, it can be beneficial to eliminate the common mode effect to reduce the effect between part A and part B.

The mechanical structure layer 300 may further include an anchor region 321 and an elastic connector 331 . In the present application, the anchor region 32 may belong to the stator of the mechanical structure layer 300 . The anchor region 321 may be arranged on the axis of symmetry x. In the embodiment shown in Figure 3, the anchor region 321 itself may be symmetrical about the axis of symmetry x. The elastic connecting piece 331 can be connected between the anchor area 321 and the proof mass 311 . In this application, the anchor region can be fixed on the substrate layer shown in FIG. 2 , for example.

In this application, "connection" may include direct connection and indirect connection. The direct connection between component a and component b may mean that no other components are included in the connection relationship from component a to component b. The indirect connection between component a and component b may mean that the connection relationship from component a to component b may include one or more other components, such as component c. That is, part a and part b may be connected by one or more parts (the one or more parts may include part c).

The elastic connector 331 can be used to support the mass 311 so that the mass 311 is suspended between the substrate layer and the cover layer shown in FIG. 2 . That is to say, the elastic connecting member 331 can be used to provide suspension support for the mass block 311 along the Z-axis direction. In some embodiments, the rigidity of the elastic connecting member 331 in the Z-axis direction may be relatively large.

The elastic connector 331 can also be used to provide a buffer space in the X-axis direction and the Y-axis direction between the mass block 311 and the anchor region 321 . That is to say, the rigidity of the elastic connecting member 331 in the X-axis direction and the Y-axis direction may be relatively small, or the elastic connecting member 331 may have elasticity in the X-axis direction and the Y-axis direction. The stiffness of the elastic connecting member 331 in the direction of the Z axis may be greater than the stiffness of the elastic connecting member 331 in the direction of the X axis or the direction of the Y axis.

In some embodiments provided in the present application, the elastic connecting member 331 may include a connecting beam 3311 and a connecting beam 3312 . Since the mass block 311 is used to detect the angular velocity in the X-axis direction and the Z-axis direction, the mass block 311 may have a displacement component in the Y-axis direction when no external force is applied. That is to say, the driving direction of the mass block 311 may be the Y-axis direction, and the detection direction of the mass block 311 may be the X-axis direction and the Z-axis direction. Therefore, one of the connecting beam 3311 and the connecting beam 3312 may be vertically arranged with respect to the driving direction of the proof mass 311 , and the other of the connecting beam 3311 and the connecting beam 3312 may be vertically arranged with respect to the detection direction of the proof mass 311 .

In an embodiment shown in FIG. 3 , the connecting beam 3311 can be arranged parallel to the Y-axis direction, so that the connecting beam 3311 can be arranged vertically relative to the detection direction of the proof mass 311; the connecting beam 3312 can be arranged relative to the X-axis direction are arranged in parallel, so that the connecting beam 3311 can be arranged vertically relative to the driving direction of the proof mass 311 .

The stiffness of the connecting beam 3311 in the Y-axis direction and the Z-axis direction may be relatively large. The stiffness of the connecting beam 3311 in the X-axis direction may be relatively small, or the connecting beam 3311 may be elastic in the X-axis direction, so that the elastic connecting member 331 may provide a buffer space in the X-axis direction through the connecting beam 3311 .

The rigidity of the connecting beam 3312 in the X-axis direction and the Z-axis direction may be relatively large. The stiffness of the connecting beam 3312 in the Y-axis direction can be relatively small, or the connecting beam 3312 can be elastic in the Y-axis direction, so that the elastic connecting member 331 can provide a buffer space in the Y-axis direction through the connecting beam 3312 .

According to the symmetry of the mechanical structure layer 300 , the mechanical structure layer 300 may further include elastic connectors 332 . The elastic connecting piece 331 and the elastic connecting piece 332 may be symmetrical with respect to the symmetry axis x. The elastic connector 331 and the elastic connector 332 may be located at two ends of the anchor region 321 . The elastic connecting piece 332 can be connected between the proof mass 313 and the anchor area 321 . The elastic connector 332 can be used to support the mass 313 so that the mass 313 is suspended between the substrate layer and the cover layer shown in FIG. 2 . That is to say, the elastic connecting member 332 can be used to provide suspension support for the mass block 313 along the Z-axis direction.

The elastic connector 332 can be used to support the mass 313 so that the mass 313 is suspended between the substrate layer and the cover layer shown in FIG. 2 . That is to say, the elastic connecting member 332 can be used to provide suspension support for the mass block 313 along the Z-axis direction. In some embodiments, the rigidity of the elastic connecting member 332 in the Z-axis direction may be relatively large.

The elastic connector 332 can also be used to provide a buffer space in the X-axis direction and the Y-axis direction between the mass block 313 and the anchor area 321 . That is to say, the rigidity of the elastic connecting member 332 in the X-axis direction and the Y-axis direction may be relatively small, or the elastic connecting member 332 may have elasticity in the X-axis direction and the Y-axis direction.

Since the mass block 311 and the mass block 313 can be symmetrical with respect to the axis of symmetry x, the specific embodiment of the elastic connecting member 332 can refer to the embodiment of the elastic connecting member 331 .

In order to improve the detection accuracy of the mechanical structure layer 300 , the mechanical structure layer 300 may further include an anchor region 322 , an elastic connecting piece 333 , and an elastic connecting piece 334 . The anchor region 321 and the anchor region 322 may be symmetrical with respect to the torsion beam y. The elastic connecting piece 333 and the elastic connecting piece 331 may be symmetrical with respect to the torsion beam y. The elastic connector 334 and the elastic connector 332 may be symmetrical with respect to the torsion beam y. For a specific embodiment of the anchor region 322 , reference may be made to the embodiment of the anchor region 321 . For a specific embodiment of the elastic connecting member 333 , reference may be made to the embodiment of the elastic connecting member 331 . For a specific embodiment of the elastic connecting member 334 , reference may be made to the embodiment of the elastic connecting member 332 .

The mechanical structure layer 300 may further include an anchor area 323 , a torsion beam 341 , and a transmission beam 351 . The anchor region 323 may be positioned on the axis of symmetry x. In the embodiment shown in Figure 3, the anchor region 323 itself may be symmetrical about the axis of symmetry x. Torsion beam 341 may be connected to anchor region 323 . The torsion beam 341 itself may be symmetrical about the axis of symmetry x. An end of the torsion beam 341 away from the anchor area 323 may be connected to a transmission beam 351 . The drive beam 351 itself may be symmetrical with respect to the axis of symmetry x. The position where the transmission beam 351 is connected to the torsion beam 341 may correspond to the central area of the transmission beam 351 .

The torsion beam 341 and the transmission beam 351 can be used to provide suspension support for the mass block 311 along the Z-axis direction. In combination with the above, one end of the mass block 311 can be supported by the anchor area 321 and the elastic connector 331 , and the other end of the mass block 311 can be supported by the anchor area 323 , the torsion beam 341 , and the transmission beam 351 . The stiffness of the torsion beam 341 and the transmission beam 351 in the Z-axis direction can be relatively large.

The transmission beam 351 can be used to twist around the torsion beam 341 , so as to provide a buffer space for the mass block 311 and the mass block 313 along the Z-axis direction. In one embodiment, the torsion beam 341 may provide the transmission beam 351 with torsional stiffness along the torsion beam 341 or along the X-axis direction.

In order to improve the detection accuracy of the mechanical structure layer 300 , the mechanical structure layer 300 may further include an anchor area 324 , a torsion beam 342 , and a transmission beam 352 . The anchor region 323 and the anchor region 324 may be symmetrical about the symmetry axis y. The torsion beam 342 and the torsion beam 341 may be symmetrical with respect to the symmetry axis y. The transmission beam 352 and the transmission beam 351 may be symmetrical with respect to the symmetry axis y. For a specific embodiment of the anchor region 324 , reference may be made to the embodiment of the anchor region 323 . For a specific embodiment of the torsion beam 342 , reference may be made to the embodiment of the torsion beam 341 . The specific embodiment of the transmission beam 352 can refer to the embodiment of the transmission beam 351 . In some embodiments, the anchor region 323 can be integrally formed with the anchor region 321 . Similarly, anchor region 324 may be integrally formed with anchor region 322 .

In some embodiments, the mechanical structure layer 300 may further include elastic connectors 335 . The elastic connecting piece 335 can be connected between the transmission beam 351 and the mass block 311 . The elastic connecting member 335 can be used to provide suspension support for the mass block 311 along the Z-axis direction. The rigidity of the elastic connecting member 335 in the Z-axis direction may be relatively large.

The stiffness of at least one of the transmission beam 351 and the elastic connecting member 335 in the X-axis direction may be relatively small or elastic, so as to provide a buffer space for the mass block 311 and the mass block 313 in the X-axis direction. In an embodiment provided in the present application, the rigidity of the transmission beam 351 in the X-axis direction may be relatively small or elastic. In a possible situation, the torsion beam 341 can provide the transmission beam 351 with torsional rigidity along the Z-axis direction. In one embodiment, the rigidity of the elastic connecting member 335 and the elastic connecting member 336 in the X-axis direction may be relatively large.

The stiffness of at least one of the transmission beam 351 and the elastic connecting member 335 in the Y-axis direction may be relatively small or elastic, so as to provide a buffer space for the mass block 311 and the mass block 313 in the Y-axis direction. In an embodiment provided by the present application, the rigidity of the elastic connecting member 335 in the Y-axis direction may be relatively small or elastic. In a possible situation, the stiffness of the transmission beam 351 in the Y-axis direction may be greater than the stiffness of the elastic connector 335 in the Y-axis direction, so that the transmission beam 351 can provide the elastic connector 335 with a 351 torsional rigidity.

In some embodiments provided in the present application, the overall rigidity of the elastic connector 335 may be less than the overall rigidity of the transmission beam 351 , and the overall rigidity of the transmission beam 351 may be less than that of the torsion beam 341 .

According to the symmetry of the mechanical structure layer 300 , the mechanical structure layer 300 may further include elastic connectors 336 . The elastic connecting piece 335 and the elastic connecting piece 336 can be respectively connected to two ends of the transmission beam 351 . That is to say, the transmission beam 351 can be connected between the elastic connection part 335 and the elastic connection part 336 . An end of the elastic connecting member 336 away from the transmission beam 351 may be connected to the mass block 313 . The elastic connecting piece 335 and the elastic connecting piece 336 may be symmetrical with respect to the symmetry axis x. Since the mass block 311 and the mass block 313 can be symmetrical with respect to the symmetry axis x, the specific embodiment of the elastic connecting member 336 can refer to the embodiment of the elastic connecting member 335 .

In order to improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include elastic connectors 337 and elastic connectors 338. The elastic connecting piece 337 and the elastic connecting piece 335 may be symmetrical with respect to the symmetry axis y. The elastic connecting member 338 and the elastic connecting member 336 may be symmetrical with respect to the symmetry axis y. For a specific embodiment of the elastic connecting member 337 , reference may be made to the embodiment of the elastic connecting member 335 . For a specific embodiment of the elastic connecting member 338 , reference may be made to the embodiment of the elastic connecting member 336 .

In the embodiment shown in FIG. 3 , in order to improve the stability of the mass block 311 suspended on the substrate layer, the position 1 connected to the anchor region 321 on the mass block 311, the position 2 connected to the anchor region 322 on the mass block 311, The position 3 connected to the anchor region 323 on the mass block 311 is not collinear, or the position 1 connected to the anchor region 321 on the mass block 311, the position 3 connected to the anchor region 323 on the mass block 311, and the position 3 connected to the anchor region 323 on the mass block 311 Location 4 where region 324 connects is not collinear.

As shown in FIG. 3 , the mass block 311 and the anchor area 321 are connected by an elastic connector 331 , and the position 1 on the mass block 311 connected to the anchor area 321 is the part where the elastic link 331 and the mass block 311 are connected. The mass block 311 is connected to the anchor area 322 through the elastic connector 333 , and the position 2 on the mass block 311 connected to the anchor area 322 is the part where the elastic link 333 and the mass block 311 are connected. The mass block 311 is connected to the anchor area 323 through the elastic connector 335 , and the position 3 on the mass block 311 connected to the anchor area 323 is the part where the elastic connector 335 and the mass block 311 are connected. Therefore, position 1, position 2, and position 3 may not be collinear.

As shown in FIG. 3 , the mass block 311 and the anchor area 321 are connected by an elastic connector 331 , and the position 1 on the mass block 311 connected to the anchor area 321 is the part where the elastic link 331 and the mass block 311 are connected. The mass block 311 is connected to the anchor area 323 through the elastic connector 335 , and the position 3 on the mass block 311 connected to the anchor area 323 is the part where the elastic connector 335 and the mass block 311 are connected. The mass block 311 is connected to the anchor area 324 through the elastic connecting piece 337 , and the position 4 on the mass block 311 connected to the anchor area 324 is the part where the elastic connecting piece 337 is connected to the mass block 311 . Therefore, position 1, position 3, and position 4 may not be collinear.

The mechanical structure layer 300 may also include an anchor region 325 , a torsion beam 343 , a torsion beam 344 . The anchor region 325 is arranged both on the axis of symmetry x and on the axis of symmetry y. That is, the anchor region 325 may cover the intersection of the symmetry axis x and the symmetry axis y. The anchor region 325 may be positioned at the intersection of the symmetry axis x and the symmetry axis y. In the embodiment shown in FIG. 3 , the anchor region 325 itself may be symmetrical about the axes of symmetry x, y. The torsion beam 343 and the torsion beam 344 may be respectively connected to two ends of the anchor area 325 . The torsion beam 343 itself and the torsion beam 344 themselves may be symmetrical with respect to the symmetry axis y. The torsion beam 343 and the torsion beam 344 may be symmetrical with respect to the axis of symmetry x.

The mechanical structure layer 300 may further include a support 360 . The support 360 itself may be symmetrical with respect to the axis of symmetry x, the axis of symmetry y. The support 360 may have a support fenestration 361 . The support fenestration 361 may surround the outer perimeter of the anchor region 325 . The opening 361 of the support member may be symmetrical with respect to the axis of symmetry x and the axis of symmetry y. That is, the support member opening 361 may be located in the central area of the support member 360 . The inner wall of the support window 361 may be connected with the torsion beam 343 and the torsion beam 344 . That is to say, the end of the torsion beam 343 away from the anchor area 325 may be connected to the first position of the inner wall of the window 361 of the support member. An end of the torsion beam 344 away from the anchor area 325 may be connected to a second position on the inner wall of the window 361 of the support member. The first position and the second position may be symmetrical with respect to the axis of symmetry x. The first position and the second position lie on the axis of symmetry y.

The support member 360 may include a support end portion 362 , and the support end portion 362 may be disposed close to the mass block 312 and connected to the mass block 312 . The supporting member 360, the torsion beam 343 and the torsion beam 344 can be used to support the mass 312, so that the mass 312 and the mass 314 can be suspended between the substrate layer and the cover layer shown in FIG. 2 . That is to say, the supporting member 360 , the torsion beam 343 and the torsion beam 344 can be used to provide suspension support for the mass block 312 and the mass block 314 along the Z-axis direction. In some embodiments, the rigidity of the support member 360 , the torsion beam 343 , and the torsion beam 344 in the Z-axis direction may be relatively large.

The stiffness of the support 360, the torsion beam 343, and the torsion beam 344 in the Y-axis direction can be relatively large, so that the support 360, the torsion beam 343, and the torsion beam 344 can provide the mass block 312 with a supporting force along the Y-axis direction, so that The displacement component of the proof mass 312 in the Y-axis direction is reduced.

The supporting member 360 can rotate around the torsion beam 343 and the torsion beam 344 . The supporting member 360 can be used to absorb the displacement component in the Z-axis direction, so as to reduce the deformation of the anchoring area 325 under the traction of the proof mass 312 . In some embodiments, the torsion beam 343 and the torsion beam 344 can provide the support member 360 with torsional rigidity along the Y-axis direction or along the torsion beam 343 and the torsion beam 344 .

According to the symmetry of the mechanical structure layer 300 , the support 360 may also include a support end 363 . The support end 362 and the support end 363 may be symmetrical with respect to the symmetry axis y. The support end 363 may be disposed close to the mass block 314 and connected to the mass block 314 . The supporting member 360, the torsion beam 343, and the torsion beam 344 can also be used to support the mass block 314, so that the mass block 314 can be suspended between the substrate layer and the cover layer shown in FIG. 2 . The supporting member 360, the torsion beam 343, and the torsion beam 344 can also be used to provide a supporting force for the mass block 314 along the Y-axis direction, so as to reduce the displacement component of the mass block 314 in the Y-axis direction. Since the mass 312 and the mass 314 can be symmetrical with respect to the symmetry axis y, the specific embodiment of the support end 363 can refer to the embodiment of the support end 361 .

In some embodiments provided in the present application, the mechanical structure layer 300 may further include elastic connectors 339 . The elastic connector 339 itself may be symmetrical with respect to the axis of symmetry x. The elastic connecting piece 339 may be connected between the supporting end 362 of the supporting piece 360 and the proof mass 312 . That is to say, the supporting member 360 and the mass block 312 can be connected through the elastic connecting member 339 .

In the embodiment shown in FIG. 3 , the proof-mass 312 may include a proof-mass notch 3121 . The proof-mass notch 3121 itself may be symmetrical with respect to the axis of symmetry x. The elastic connector 339 can span the notch 3121 of the mass block, that is, one end of the elastic link 339 can be connected to the position a of the notch 3121 of the mass block, and the other end of the elastic link 339 can be connected to the position b of the notch 3121 of the mass block , wherein the position a and the position b can be set oppositely, and the position a and the position b can be symmetrical with respect to the axis of symmetry x.

The elastic connector 339 can be used to support the mass 312 so that the mass 312 can be suspended between the substrate layer and the cover layer shown in FIG. 2 . That is to say, the elastic connecting member 339 can be used to provide suspension support for the mass block 312 along the Z-axis direction. In some embodiments, the rigidity of the elastic connecting member 339 in the Z-axis direction may be relatively large.

The elastic connecting piece 339 can also be used to provide a buffer space for the mass block 312 in the X-axis direction. That is to say, the rigidity of the elastic connecting member 339 in the X-axis direction may be relatively small, or the elastic connecting member 339 may have elasticity in the X-axis direction. In one embodiment, the stiffness of the elastic connecting member 339 in the X-axis direction may be smaller than the stiffness of the supporting member 360 in the X-axis direction.

In some embodiments, the stiffness of the elastic connector 339 in the Y-axis direction can be relatively large, so as to improve the support effect of the anchor area 325 on the mass block 312 and the mass block 314 in the Y-axis direction, and reduce the stiffness of the mass block 312. and the displacement of the mass block 314 in the Y-axis direction, reducing the impact of the mass block 312 and the mass block 314 on the angular velocity component around the X-axis direction.

According to the symmetry of the mechanical structure layer 300 , the mechanical structure layer 300 may further include elastic connectors 3310 . The elastic connecting member 3310 itself may be symmetrical with respect to the axis of symmetry x. The elastic connection part 339 and the elastic connection part 3310 may be symmetrical with respect to the symmetry axis y. The elastic connecting piece 3310 may be connected between the supporting end 363 of the supporting piece 360 and the proof mass 314 . That is to say, the supporting member 360 and the mass block 314 can be connected by an elastic connecting member 3310 .

In the embodiment shown in FIG. 3 , the proof-mass 314 may include a proof-mass notch 3141 . The proof-mass notch 3141 itself may be symmetrical about the axis of symmetry x. The proof-mass notch 3121 and the proof-mass notch 3141 may be symmetrical about the symmetry axis y. The elastic connecting member 3310 can straddle the notch 3141 of the mass block and connect with the mass block 314 .

Since the mass block 312 and the mass block 314 are symmetrical with respect to the symmetry axis y, the specific embodiment of the elastic connecting member 3310 can refer to the embodiment of the elastic connecting member 339 .

Mechanical structural layer 300 may also include anchor region 326 and driver 371 . The anchor region 326 itself may be symmetrical about the axis of symmetry y. The driving member 371 itself may be symmetrical with respect to the symmetry axis y. The drive element 371 may belong to a mover of the mechanical structure layer 300 . The driving member 371 can move along the Y-axis direction relative to the anchor area 326 , that is, the driving member 371 can have a displacement component along the Y-axis direction relative to the anchor area 326 . A driving electrode may be disposed on the anchor area 326 , and the driving electrode may form a capacitance with the driving element 371 so that the driving element 371 may move relative to the anchor area 326 along the Y-axis direction.

In the present application, a component may have a displacement component in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction. The displacement component of the component along the X-axis direction may be a projection of the component's displacement along the X-axis direction. The displacement component of the component along the Y-axis direction may be a projection of the component's displacement along the Y-axis direction. The displacement component of the component along the Z-axis direction may be a projection of the component's displacement along the Z-axis direction. The displacement of the component may be the vector sum of the displacement component of the component in the X-axis direction, the displacement component in the Y-axis direction, and the displacement component in the Z-axis direction. When a part has a displacement component only in the X-axis direction, the part can move in the X-axis direction. When a part has a displacement component only in the Y-axis direction, the part can move in the Y-axis direction. When a part has a displacement component only in the Z-axis direction, the part can move in the Z-axis direction.

In one embodiment, the mechanical structure layer 300 may further include fixed comb teeth 3261 and movable comb teeth 3711 . The fixed comb teeth 3261 can be fixed on the anchor area 326 . The movable comb teeth 3711 can be fixed on the driving member 371 . The fixed comb teeth 3261 and the movable comb teeth 3711 can be arranged at intersecting intervals.

In this application, the fixed comb teeth may belong to the stator of the mechanical structure layer 300 , and the movable comb teeth may belong to the mover of the mechanical structure layer 300 . The fixed comb teeth may include multiple fixed teeth, and the movable comb teeth may include multiple movable teeth. The intersecting spacing between the fixed comb teeth and the movable comb teeth can refer to that there are 1 movable teeth between adjacent two fixed teeth, 1 fixed teeth between adjacent two movable teeth, and a gap between adjacent fixed teeth and movable teeth. set up.

By inputting alternating current to the driving part 371 and the anchor area 326, the interaction force between the movable comb 3711 and the fixed comb 3261 can drive the movable comb 3711 to move relative to the fixed comb 3261 along the Y-axis direction, thereby making the driving part 371 There may be a displacement component along the Y-axis direction relative to the anchor region 326 . The driving member 371 can be connected to the mass block 311 at the anchor area 326 , so that the mass block 311 can have a displacement component along the Y-axis direction driven by the driving member 371 . When the mass block 311 is not subjected to external force, the mass block 311 can move along the Y-axis direction.

In order to improve the detection accuracy of the mechanical structure layer 300 , the mechanical structure layer 300 may further include an anchor area 327 and a driving element 372 . Anchor region 327 and anchor region 326 may be symmetrical about the axis of symmetry x. The driving member 372 and the driving member 371 may be symmetrical with respect to the axis of symmetry x. The driving member 372 can move along the Y-axis relative to the anchor area 327 . The moving direction of the driving member 372 and the moving direction of the driving member 371 may be symmetrical. The driving part 372 can be connected between the anchor area 327 and the mass block 313 , so that the mass block 313 can have a displacement component along the Y-axis direction driven by the driving part 372 . The driving member 371 and the driving member 372 can meet the differential decoupling condition, so when no external force is applied, the moving direction of the mass block 313 and the moving direction of the mass block 311 can be symmetrical. The specific embodiment of the driving member 372 can refer to the embodiment of the driving member 371 . For the specific embodiment of the anchor region 327 , reference may be made to the embodiment of the anchor region 326 .

Fig. 5 shows a schematic structural diagram of the movement of the mass block 311 and the mass block 313 along the Y-axis direction. The dotted line in FIG. 5 shows the positions of the mass blocks 311 and 313 before moving, and the solid line in FIG. 5 shows the positions of the mass blocks 311 and 313 after moving.

In the embodiment shown in FIG. 3 , the proof-mass 311 may include a proof-mass window 3111 . The proof-mass fenestration 3111 may surround the periphery of the anchor region 326 . The inner wall of the proof mass window 3111 can be connected with the driving member 371 . That is to say, the anchor region 326 and the driving member 371 are located in the proof-mass window 3111 . The proof-mass window 3111 itself may be symmetrical about the symmetry axis y.

In the embodiment shown in FIG. 3 , the proof-mass 313 may include a proof-mass window 3131 . The proof-mass fenestration 3131 may surround the periphery of the anchor region 327 . The inner wall of the proof mass window 3131 can be connected with the driving member 372 . That is to say, the anchor region 327 and the driver 372 are located in the mass opening 3131 . The proof-mass window 3131 itself may be symmetrical about the axis of symmetry y. The proof-mass window 3131 and the proof-mass window 3111 may be symmetrical about the axis of symmetry x.

In the embodiment shown in FIG. 3 , the mass block 311 can be a separate component, and the mass block 311 can have an accommodating area (the accommodating area can be a mass block notch 3115 ), and the accommodating area can be located on the mass block 311 away from the driving member 372 On one side of the mass block 312 and the mass block 314 may be arranged in the accommodation area. The accommodating area is provided on the side of the mass block 311 far away from the driving member 372, which is conducive to deflecting the mass block 311 around the X-axis direction relative to the side of the mass block 311 close to the driving member 372, and the mass block 311 is close to the driving member 372. The displacement component of one side in the Z-axis direction is relatively small, and the displacement component of the mass block 311 in the Z-axis direction on the side away from the driving member 372 is relatively large. Therefore, it is beneficial to reduce the displacement component of the mass block 312 and the mass block 314 in the Z-axis direction under the traction of the mass block 311 .

In other possible embodiments, the mass block 311 may also be assembled from multiple components. For example, the mass block 311 may include a mass piece a and a mass piece b arranged separately, and the mass piece a and the mass piece b may be symmetrical with respect to the symmetry axis y. The mass a and the mass b may be respectively connected to both sides of the driving member 371 .

When the mass block 311 is used as a separate component, the integrity of the mass block 311 is relatively high, and the same-frequency differential performance of the mass block 311 can be better. When the mass block 311 is assembled from multiple components, the overall mass of the mass block 311 can be slightly reduced, which is beneficial to increase the motion range of the mass block 311 and improve the detection sensitivity of the inertial sensor. However, multiple components need to meet the same-frequency differential requirements, therefore, the machining accuracy of the mass block 311 is required to be relatively high.

In combination with the above, the first end of the mass block 311 can be supported by the anchor region 321 and the elastic connector 331, the second end of the mass block 311 can be supported by the anchor region 322 and the elastic connector 333, and the third end of the mass block 311 can be Supported by the anchor region 323 and the elastic connector 335 , the fourth end of the mass block 311 may be supported by the anchor region 324 and the elastic connector 337 . When the mass block 311 has a displacement component along the Y-axis direction, the

elastic connectors

331, 333, 335, and 337 can be used to provide a buffer space for the mass block 311 in the Y-axis direction, In order to reduce the deformation of the anchor area 321 , the anchor area 322 , the anchor area 323 and the anchor area 324 .

In combination with the above, the first end of the mass block 313 can be supported by the anchor region 321 and the elastic connector 332, the second end of the mass block 313 can be supported by the anchor region 322 and the elastic connector 334, and the third end of the mass block 313 can be Supported by the anchor region 323 and the elastic connector 336 , the fourth end of the mass block 313 may be supported by the anchor region 324 and the elastic connector 337 . When the mass block 313 has a displacement component along the Y-axis direction, the

elastic connectors

332, 334, 336, and 337 can be used to provide a buffer space for the mass block 313 in the Y-axis direction, In order to reduce the deformation of the anchor area 321 , the anchor area 322 , the anchor area 323 and the anchor area 324 .

Since the elastic connecting piece 331 and the elastic connecting piece 332 are symmetrical with respect to the symmetry axis x, the elastic component force along the Y-axis direction received by the elastic connecting piece 331 and the elastic component force along the Y-axis direction received by the elastic connecting piece 332 can cancel each other out, It is beneficial to reduce the deformation of the anchor region 321 in the Y-axis direction.

Since the elastic connecting piece 333 and the elastic connecting piece 334 are symmetrical with respect to the symmetry axis x, the elastic component force along the Y-axis direction received by the elastic connecting piece 333 and the elastic component force along the Y-axis direction received by the elastic connecting piece 334 can cancel each other out, It is beneficial to reduce the deformation of the anchor region 322 in the Y-axis direction.

Since the elastic connecting member 335 and the elastic connecting member 336 are symmetrical with respect to the symmetry axis x, the elastic component force along the Y-axis direction received by the elastic connecting member 335 and the elastic component force along the Y-axis direction received by the elastic connecting member 336 can cancel each other out, It is beneficial to reduce the deformation of the anchor area 323 and the torsion beam 341 in the Y-axis direction.

Since the elastic connecting piece 337 and the elastic connecting piece 338 are symmetrical with respect to the symmetry axis x, the elastic component force along the Y-axis direction received by the elastic connecting piece 337 and the elastic component force along the Y-axis direction received by the elastic connecting piece 338 can cancel each other out, It is beneficial to reduce the deformation of the anchor area 324 and the torsion beam 342 in the Y-axis direction.

The mechanical structural layer 300 may also include a drive beam assembly 381 . The drive beam assembly 381 itself may be symmetrical about the axis of symmetry y. The transmission beam assembly 381 may include a connecting end 3811 , a connecting end 3812 and a connecting end 3813 . The connection end 3812 and the connection end 3813 may be symmetrical with respect to the symmetry axis y.

The connecting end 3811 can be connected with the driving member 371 . In the embodiment shown in FIG. 3 , the connection end 3811 can be connected to the driving member 371 through the mass block 311 . The connecting end 3812 can be connected to the proof mass 312 . The connecting end 3813 can be connected with the proof mass 314 . The transmission beam assembly 381 can transmit translational driving force between the driving member 371 and the mass block 312 , and between the driving member 371 and the mass block 314 , so that the mass block 312 and the mass block 314 move reciprocally under the driving of the driving member 371 . In the embodiment shown in FIG. 3 , since the mass block 311 is connected between the driving member 371 and the transmission beam assembly 381, the transmission beam assembly 381 can be between the mass block 311 and the mass block 312, and between the mass block 311 and the mass block. The block 314 transmits translational driving force, so that the mass block 312 and the mass block 314 move back and forth under the drive of the mass block 311 .

The transmission beam assembly 381 is also used to convert the translational driving force along the Y-axis direction from the driving member 371 into a translational driving force along the X-axis direction. Referring to FIG. 6 , the transmission beam assembly 381 can also be used to convert the displacement component of the connection end 3811 along the Y-axis direction into the displacement components of the connection end 3812 and the connection end 3813 along the X-axis direction. That is to say, when the connection end 3811 of the transmission beam assembly 381 moves along the Y-axis direction, the connection end 3812 and the connection end 3813 of the transmission beam assembly 381 may have a displacement component along the X-axis direction, and the connection end of the transmission beam assembly 381 The displacement components of 3812 and connection end 3813 may be symmetrical with respect to the symmetry axis y. Through the transmission beam assembly 381 and the transmission beam assembly 382 , it is beneficial to improve the decoupling degree of the mass block 311 and the mass block 312 .

In some embodiments, as shown in FIG. 6, when the connection end 3811 of the transmission beam assembly 381 moves along the Y+ direction, the connection end 3812 of the transmission beam assembly 381 may have a displacement component along the X+ direction, and the connection of the transmission beam assembly 381 The end 3813 may have a displacement component along the X-direction, and the connecting end 3812 and the connecting end 3813 of the transmission beam assembly 381 may have the same magnitude of movement. When the connection end 3811 of the transmission beam assembly 381 moves along the Y-direction, the connection end 3812 of the transmission beam assembly 381 may have a displacement component along the X-direction, and the connection end 3813 of the transmission beam assembly 381 may have a displacement component along the X+ direction , and the connecting end 3812 and the connecting end 3813 of the transmission beam assembly 381 may have the same movement range.

The mass block 312 and the mass block 314 may have a displacement component in the X-axis direction under the traction of the transmission beam assembly 381 . That is to say, when the inertial sensor is not subjected to external force, the mass block 312 and the mass block 314 can reciprocate along the X-axis direction. In the embodiment shown in FIG. 5 , when the driver 371 has a positive displacement component along the Y-axis direction, the proof mass 312 may have a positive displacement component along the X-axis direction, and the proof mass 314 may have a positive displacement component along the X-axis direction. negative displacement component in the axial direction; when the driver 371 has a negative displacement component along the Y-axis direction, the mass block 312 can have a negative displacement component along the X-axis direction, and the mass block 314 can have a negative displacement component along the X-axis direction. positive displacement component of . Thus, the moving direction of the proof mass 314 and the moving direction of the proof mass 312 can be symmetrical.

With reference to the embodiments shown in FIG. 3 and FIG. 6 , the transmission beam assembly 381 may include a transmission beam 381 a , a transmission beam 381 b and a transmission beam 381 c .

The transmission beam 381a itself may be symmetrical with respect to the axis of symmetry y. In one embodiment, as shown in FIG. 6, the transmission beam 381a may be a straight beam. The transmission beam 381a may also have other shapes, such as trapezoidal beams and the like. One end of the transmission beam 381a may be connected to the driving member 371 or the mass block 311, and the other end of the transmission beam 381a may be connected to the transmission beam 381b and the transmission beam 381c. That is to say, the transmission beam 381b and the transmission beam 381c may meet at one end of the transmission beam 381a away from the driving member 371 or the mass block 311 . In one embodiment, the end of the transmission beam 381a connected to the driving member 371 or the mass block 311 may correspond to the connection end 3811 of the transmission beam assembly 381, and the end of the transmission beam 381b away from the transmission beam 381a may correspond to the end of the transmission beam assembly 381. The connection end 3812 , the end of the transmission beam 381 c away from the transmission beam 381 a may correspond to the connection end 3813 of the transmission beam assembly 381 .

The transmission beam 381b and the transmission beam 381c may be symmetrical with respect to the symmetry axis y. The transmission beam 381b may include one or more transmission sections 3811b that are inclined or perpendicular relative to the transmission beam 381a. The drive beam 381c may include one or more drive segments 3811c that are inclined or perpendicular relative to the drive beam 381a. One or more transmission sections 3811b may be symmetrical to one or more transmission sections 3811c with respect to the symmetry axis y, so that the transmission beam 381b and the transmission beam 381c may be symmetrical with respect to the symmetry axis y as a whole. That is to say, one or more transmission segments 3811b may correspond to one or more transmission segments 3811c one-to-one, and the transmission segments 3811b and 3811c corresponding to each other may be symmetrical with respect to the symmetry axis y.

In some embodiments, the transmission beam 381b may further include one or more connecting sections 3812b. The connecting section 3812b may be arranged parallel to the transmission beam 381a, and connected between two adjacent transmission sections 3811b. The transmission beam 381c may further include a connecting section 3812c, which may be arranged parallel to the transmission beam 381a and connected between two adjacent transmission sections 3811c. One or more connection sections 3812b may be symmetrical with one or more connection sections 3812c with respect to the symmetry axis y, so that the transmission beam 381b and the transmission beam 381c may be symmetrical with respect to the symmetry axis y as a whole. That is to say, one or more connection segments 3812b may correspond to one or more connection segments 3812c, and the

connection segments

3812b and 3812c corresponding to each other may be symmetrical with respect to the symmetry axis y.

In the embodiment shown in Fig. 6, the transmission beam 381b may include a transmission section 3811b1, a transmission section 3811b2 and a connecting section 3812b, the transmission section 3811b1 and the transmission section 3811b2 may be vertically arranged relative to the transmission beam 381a, and the connection section 3812b is connected to the transmission section Between 3811b1 and transmission section 3811b2. The transmission beam 381c may include a transmission section 3811c1, a transmission section 3811c2 and a connecting section 3812c. The transmission section 3811c1 and the transmission section 3811c2 may be vertically arranged relative to the transmission beam 381a, and the connection section 3812c is connected between the transmission section 3811c1 and the transmission section 3811c2. Wherein, the transmission section 3811b1 can be symmetrical with the transmission section 3811c1 with respect to the symmetry axis y; the transmission section 3811b2 can be symmetric with the transmission section 3811c2 with respect to the symmetry axis y; the connection section 3812b can be symmetric with the connection section 3812c with respect to the symmetry axis y.

When the transmission beam 381a has a displacement component along the extension direction of the transmission beam 381a, since the transmission beam 381b and the transmission beam 381c include parts different from the extension direction of the transmission beam 381a, the transmission beam 381b and the transmission beam 381c can be replaced by the transmission beam 381a. Traction, the end of the transmission beam 381b away from the transmission beam 381a, and the end of the transmission beam 381c away from the transmission beam 381a may have a displacement component along a direction perpendicular to the extension direction of the transmission beam 381a. Therefore, the transmission beam assembly 381 can have a steering function.

In order to improve the detection accuracy of the mechanical structure layer 300 , the mechanical structure layer 300 may further include a transmission beam assembly 382 . The transmission beam assembly 382 may be symmetrical to the transmission beam assembly 381 with respect to the symmetry axis x. The transmission beam assembly 382 may include a connecting end 3821 , a connecting end 3822 and a connecting end 3823 . The connection end 3822 and the connection end 3823 may be symmetrical with respect to the symmetry axis y. The connection end 3821 and the connection end 3811 may be symmetrical with respect to the symmetry axis x. The connection end 3822 and the connection end 3812 may be symmetrical with respect to the symmetry axis x. The connection end 3823 and the connection end 3813 may be symmetrical with respect to the symmetry axis x.

The connecting end 3821 can be connected with the driving member 372 . In the embodiment shown in FIG. 3 , the connecting end 3821 can be connected to the driving member 372 through the mass block 313 . The connecting end 3822 can be connected to the proof mass 312 . The connecting end 3823 can be connected to the proof mass 314 . The transmission beam assembly 382 can transmit translational driving force between the driving member 372 and the mass block 312, and the driving member 372 and the mass block 314, so that the mass block 312 and the mass block 314 reciprocate along the X-axis direction driven by the driving member 372 move. For the specific embodiment of the transmission beam assembly 382 , reference may be made to the embodiment of the transmission beam assembly 381 .

Fig. 5 shows a schematic structural diagram of the movement of the mass block 312 and the mass block 314 along the X-axis direction. The dotted line in FIG. 5 shows the positions of the mass blocks 312 and 314 before moving, and the solid line in FIG. 5 shows the positions of the mass blocks 312 and 314 after moving. As shown in FIG. 5 , through the transmission beam assembly 381 , the mass blocks 312 and 314 can have a displacement component along the X-axis direction under the traction of the driving member 371 . Through the transmission beam assembly 382 , the mass block 312 and the mass block 314 can have a displacement component along the X-axis direction under the traction of the driving member 372 .

In combination with the above, the first end of the mass block 312 can be supported by the mass block 311 and the transmission beam assembly 381, the second end of the mass block 312 can be supported by the mass block 313 and the transmission beam assembly 382, and the third end of the mass block 312 can be It is supported by the anchor area 325, the torsion beam 343, the torsion beam 344, and the support member 360 (in a possible embodiment, it also includes an elastic connection member 339). As shown in FIG. 5 , when the mass block 312 has a displacement component along the X-axis direction, the elastic connector 339 can be used to provide a buffer space for the mass block 312 in the X-axis direction, so as to reduce the deformation of the anchor area 325 .

In combination with the above, the first end of the mass block 314 can be supported by the mass block 311 and the transmission beam assembly 381, the second end of the mass block 314 can be supported by the mass block 313 and the transmission beam assembly 382, and the third end of the mass block 314 can be It is supported by the anchor area 325, the torsion beam 343, the torsion beam 344, and the support member 360 (in a possible embodiment, it also includes an elastic connection member 3310). As shown in FIG. 5 , when the mass block 314 has a displacement component along the X-axis direction, the elastic connector 3310 can be used to provide a buffer space for the mass block 314 in the X-axis direction, so as to reduce the deformation of the anchor area 325 .

Since the transmission beam assembly 381 and the transmission beam assembly 382 are symmetrical with respect to the symmetry axis x, the elastic component force along the Y-axis direction received by the transmission beam assembly 381 and the elastic component force along the Y-axis direction received by the transmission beam assembly 382 can cancel each other out, It is beneficial to reduce the deformation of the mass block 312 , the mass block 314 , the anchor area 322 , the support member 360 , the torsion beam 343 , and the torsion beam 344 in the Y-axis direction.

Since the elastic connecting piece 339 and the elastic connecting piece 3310 are symmetrical with respect to the symmetry axis y, the elastic component force along the X-axis direction received by the elastic connecting piece 339 and the elastic component force along the X-axis direction received by the elastic connecting piece 3310 can cancel each other out, It is beneficial to reduce the amount of deformation of the anchor region 325 in the X-axis direction.

In a possible embodiment, the displacement components of the driving member 371 in the X-axis direction and the Z-axis direction may be relatively small or even negligible. For example, the driving member 371 may be carried or supported by the substrate layer or the anchor region 32 and constrained to move along the Y-axis direction. Since the displacement component of the mass block 311 in the Z-axis direction may not affect the driving member 371 , the driving member 371 and the mass block 311 may satisfy the principle decoupling condition. Principled decoupling can mean that component A and component B do not belong to independent layouts, component A detects capacitance changes in the direction of axis a, component B does not move on axis a, or the amount of movement of component B on axis a is negligible. That is, the resonance of component B will not affect the detection of component A. The principle structure is to avoid or reduce the influence between two components from the perspective of detection principle.

In another possible embodiment, during the rotation of the mechanical structure layer 300, the driving member 371 may have a displacement component in the X-axis direction and/or the Z-axis direction, for example, under the traction of the proof mass 311, the driving member 371 There may be a displacement component along the X-axis direction and/or along the Z-axis direction; alternatively, the driving member 371 may also pull the mass block 311 so that the mass block 311 has a displacement component along the X-axis direction and/or along the Z-axis direction. Since the mechanical structure layer 300 includes the

masses

313 and 311 satisfying the differential decoupling condition, even if the driving member 371 has a displacement component in the X-axis direction and/or the Z-axis direction, the detection accuracy of the inertial sensor can be relatively high. high.

In the case that the driving member 371 has a displacement component along the X-axis direction, the transmission beam assembly 381 may partially or entirely have a displacement component along the X-axis direction under the traction of the driving member 371, thereby pulling the mass block 312 and the mass block 314 has a displacement component along the X-axis direction. Since the detection direction of the mass block 312 and the mass block 314 is the Z-axis direction, the driving member 371 and the mass block 312 (or the mass block 314 ) can satisfy the principle decoupling condition.

In the case that the driving member 371 has a displacement component along the Z-axis direction, the transmission beam assembly 381 may partially or entirely have a displacement component along the Z-axis direction under the traction of the driving member 371, thereby pulling the mass block 312 and the mass block 314 has a displacement component along the Z axis. Since the mass 312 and the mass 314 are symmetrical with respect to the axis of symmetry y, and the mass 312 and the mass 314 themselves can be symmetrical with respect to the axis of symmetry x, combined with the principle of differential decoupling, even if the driving member 371 has For the displacement component, the detection accuracy of the inertial sensor can also be relatively high.

Fig. 7 shows a distribution diagram of detection electrodes on a substrate. Capacitance is formed between the detection electrode and the mass block to capture the displacement component of the mass block.

The mechanical structure layer 300 may also include an anchor region 328 . A detection electrode group 391 is arranged on the anchor region 328 , and the detection electrode group 391 can be arranged opposite to the proof mass 311 , so that the detection electrode group 391 can form a capacitor group 1 with the proof mass 311 . The detection electrode group 391 and the proof mass 311 can be arranged along the X-axis direction.

In the embodiment shown in FIG. 7 , fixed comb teeth may be fixed on the anchor area 328 . With reference to the embodiment shown in FIG. 3 , movable comb teeth may be fixed on the mass block 311 . Fixed combs and movable combs are set at crossing intervals. The fixed comb teeth and the movable comb teeth can be arranged along the X-axis direction. Each fixed tooth of the fixed comb is provided with a detection electrode, and all the detection electrodes provided on the fixed comb can form a detection electrode group 391 . Each movable tooth of the movable comb can form a capacitance with the facing detection electrode, and the entire capacitance formed by the movable comb and the detection electrode group 391 can form a capacitance group 1 . By detecting the capacitance variation of the capacitor group 1 , the angular velocity component of the mass block 311 around the Z axis can be determined. The inertial sensor can include a readout circuit 1, which can be used to obtain the capacitance variation of the capacitor group 1, and output an angular velocity signal, which can indicate the angular velocity component of the mass block 311 around the X-axis.

In one embodiment, as shown in FIG. 7 , the proof-mass 311 may include a proof-mass window 3113 , and the proof-mass window 3113 may surround the outer circumference of the anchor region 328 and the fixed comb teeth. The movable comb teeth 3114 can be connected with the inner wall of the mass block window 3113, and the inner wall of the mass block window 3113 extends into the gap formed by the fixed comb teeth.

The mechanical structure layer 300 may also include an anchor region 329 . A detection electrode group 392 is arranged on the anchor region 329 , and the detection electrode group 392 can be arranged opposite to the mass block 313 , so that the detection electrode group 392 can form a capacitance group 2 with the mass block 313 . The detection electrode group 392 and the proof mass 313 can be arranged along the X-axis direction.

In the embodiment shown in FIG. 7 , fixed comb teeth may be fixed on the anchor area 329 . With reference to the embodiment shown in FIG. 3 , movable comb teeth may be fixed on the mass block 313 . Fixed combs and movable combs are set at crossing intervals. The fixed comb teeth and the movable comb teeth can be arranged along the X-axis direction. Each fixed tooth of the fixed comb is provided with a detection electrode, and all the detection electrodes provided on the fixed comb can form a detection electrode group 392 . Each movable tooth of the movable comb can form a capacitance with the facing detection electrode, and the entire capacitance formed by the movable comb and the detection electrode group 392 can form the capacitor group 2 . By detecting the capacitance variation of the capacitor group 2, the angular velocity component of the mass block 313 around the Z axis can be determined. The inertial sensor may include a readout circuit 2, and the readout circuit 2 may be used to obtain the capacitance variation of the capacitor group 2, and output an angular velocity signal, which may indicate the angular velocity component of the mass 313 around the Z-axis.

In one embodiment, as shown in FIG. 7 , the proof-mass 313 may include a proof-mass window 3133 , and the proof-mass window 3133 may surround the outer circumference of the anchor region 329 and the fixed comb teeth. Movable comb can link to each other with the inwall of mass block window 3133, and stretches into the gap formed by fixed comb tooth by the inwall of mass block window 3133.

In order to improve the detection accuracy of the mechanical structure layer 300 , the inertial sensor 20 may further include an anchor region 3210 , an anchor region 3211 , a detection electrode group 393 , and a detection electrode group 394 . A detection electrode group 393 may be provided on the anchor region 3210 , and the detection electrode group 393 may form a capacitance group 3 with the proof mass 311 . The inertial sensor can include a readout circuit 3, which can be used to obtain the capacitance variation of the capacitor group 3, and output an angular velocity signal, which can indicate the angular velocity component of the mass 311 around the Z-axis. A detection electrode group 394 may be provided on the anchor region 3211 , and the detection electrode group 394 may form a capacitance group 4 with the proof mass 313 . The inertial sensor may include a readout circuit 4, and the readout circuit 4 may be used to obtain the capacitance variation of the capacitor group 4, and output an angular velocity signal, which may indicate the angular velocity component of the proof mass 314 around the Z-axis. Anchor region 3210 may be disposed symmetrically to anchor region 328 about the axis of symmetry y. The anchor region 3211 may be arranged symmetrically with the anchor region 329 with respect to the symmetry axis y. The detection electrode group 393 may be arranged symmetrically with the detection electrode group 391 with respect to the symmetry axis y. The detection electrode group 394 may be arranged symmetrically with the detection electrode group 392 with respect to the symmetry axis y. For the specific embodiment of the anchor region 3210, refer to the embodiment of the anchor region 328; for the specific embodiment of the anchor region 3211, refer to the embodiment of the anchor region 329; for the specific embodiment of the detection electrode group 393, refer to the relevant detection electrode group 391. Example. For a specific embodiment of the detection electrode group 394 , reference may be made to the embodiment of the detection electrode group 392 .

Inertial sensor 20 may also include detection electrode set 395 . The detection electrode group 395 can be disposed on the substrate layer shown in FIG. 2 , for example. The detecting electrode group 395 may be arranged opposite to the proof mass 311 . The detection electrode group 395 and the mass block 311 can be arranged along the Z-axis direction. The detection electrode group 395 itself may be symmetrical with respect to the symmetry axis y. In the embodiment shown in FIG. 7 , the detection electrode group 395 may include a detection electrode 395a and a detection electrode 395b. The

detection electrodes

395a and 395b may be symmetrical with respect to the symmetry axis y.

The detection electrode group 395 and the mass block 311 can be arranged parallel to the XY plane, so that the detection electrode group 395 and the mass block 311 can form a capacitance group 5 . Capacitor bank 5 may include one or more capacitors. In the embodiment shown in FIG. 7 , the detection electrode 395a and the mass block 311 may have a capacitance 5a, the detection electrode 395b and the mass block 311 may have a capacitance 5b, and the capacitance 5a and the capacitance 5b may be two capacitances in the capacitance group 5 . The inertial sensor can include a readout circuit 5, which can be used to obtain the capacitance variation of the capacitor group 5, and output an angular velocity signal, which can indicate the angular velocity component of the mass 311 around the X-axis.

Inertial sensor 20 may also include detection electrode set 396 . The detection electrode group 396 can be disposed on the substrate layer shown in FIG. 2 , for example. The detection electrode group 396 can be arranged opposite to the proof mass 312 . The detection electrode group 396 and the proof mass 312 can be arranged along the Z-axis direction. The detection electrode set 396 itself may be symmetrical about the axis of symmetry x. In the embodiment shown in FIG. 7 , the detection electrode group 396 may include a detection electrode 396a and a detection electrode 396b. The detection electrodes 396a and 396b may be symmetrical with respect to the symmetry axis x. The inertial sensor may include a readout circuit 6, and the readout circuit 6 may be used to obtain the capacitance variation of the capacitor group 6, and output an angular velocity signal, which may indicate the angular velocity component of the mass 312 around the Y-axis.

The detection electrode group 396 and the mass block 312 can be arranged parallel to the XY plane, so that the detection electrode group 396 and the mass block 312 can form a capacitance group 6 . Capacitor bank 6 may include one or more capacitors. In the embodiment shown in FIG. 7 , the detection electrode 396 a and the mass block 312 may have a capacitance of 6 a, the detection electrode 396 b and the mass block 312 may have a capacitance of 6 b, and the capacitance 6 a and the capacitance 6 b may be two capacitances in the capacitance group 6 .

The inertial sensor 20 may further include a detection electrode set 397 (in the embodiment shown in FIG. 7 , the detection electrode set 397 may include a detection electrode 397a, a detection electrode 397b). The detection electrode group 397 can be arranged opposite to the mass block 313 , and the detection electrode group 397 and the mass block 313 can be arranged along the Z-axis direction to form a capacitance group 7 . By detecting the capacitance variation of the capacitor group 7, the angular velocity component of the mass block 313 around the X-axis direction can be determined. The detection electrode group 397 may be arranged symmetrically with the detection electrode group 395 with respect to the symmetry axis x. For a specific embodiment of the detection electrode group 397 , reference may be made to the embodiment of the detection electrode group 395 . The inertial sensor can include a readout circuit 3, which can be used to obtain the capacitance variation of the capacitor group 7, and output an angular velocity signal, which can indicate the angular velocity component of the mass 313 around the X-axis.

The inertial sensor 20 may further include a detection electrode set 398 (in the embodiment shown in FIG. 7 , the detection electrode set 398 may include a detection electrode 398a, a detection electrode 398b). The detection electrode group 398 can be arranged opposite to the mass block 314 , and the detection electrode group 398 and the mass block 314 can be arranged along the Z-axis direction to form a capacitor group 8 . By detecting the capacitance variation of the capacitor group 8 , the angular velocity component of the mass block 314 around the Y axis can be determined. The detection electrode group 398 may be arranged symmetrically with the detection electrode group 396 with respect to the symmetry axis y. For a specific embodiment of the detection electrode group 398 , reference may be made to the embodiment of the detection electrode group 396 . The inertial sensor may include a readout circuit 8, and the readout circuit 8 may be used to obtain the capacitance variation of the capacitor group 8, and output an angular velocity signal, which may indicate the angular velocity component of the mass 314 around the Y axis.

The above readout circuits 1 to 8 may be the same readout circuit or different readout circuits.

FIG. 8 shows a schematic structural diagram of the inertial sensor 20 detecting angular velocity around the X-axis. Observing the inertial sensor 20 shown in FIG. 8 along the X+ direction, a schematic structure diagram shown in FIG. 9 can be obtained. The principle of detecting the angular velocity around the X-axis direction through the mass block 311 and the mass block 313 will be described below with reference to FIG. 8 and FIG. 9 .

In the present application, the inertial sensor 20 is rotated by an external force, and the inertial sensor 20 may have angular velocity components around the X-axis direction, the Y-axis direction, and the Z-axis direction. The projection of the angular velocity direction of the inertial sensor 20 in the X-axis direction may be the angular velocity component of the inertial sensor 20 around the X-axis direction. The projection of the angular velocity direction of the inertial sensor 20 in the Y-axis direction may be the angular velocity component of the inertial sensor 20 around the Y-axis direction. The projection of the angular velocity direction of the inertial sensor 20 in the Z-axis direction may be the angular velocity component of the inertial sensor 20 around the Z-axis direction. The vector sum of the angular velocity components around the X-axis direction, the Y-axis direction, and the Z-axis direction of the inertial sensor 20 may be the angular velocity direction of the inertial sensor 20 .

The proof-mass 311 and the proof-mass 313 may have a displacement component along the Y-axis direction. When the inertial sensor 20 as a whole has an angular velocity component rotating around the X-axis direction under the action of an external force, the

masses

311 and 313 may be subjected to a Coriolis force along the Z-axis direction. The proof-mass 311 and the proof-mass 313 may have a displacement component along the Z-axis direction. Therefore, the distance between the mass block 311 and the detection electrode group 395 can be changed, and the capacitance value of the capacitor group 5 formed by the mass block 311 and the detection electrode group 395 can be changed; the distance between the mass block 313 and the detection electrode group 397 can be changed, and the mass block 313 and The capacitance of the capacitance group 7 formed by the detection electrode group 397 can vary. The capacitance variation of the capacitor group 5 formed by the mass block 311 and the detection electrode group 395 may correspond to the displacement component of the mass block 311 in the Z-axis direction. The capacitance variation of the capacitor group 7 formed by the mass block 313 and the detection electrode group 397 may correspond to the displacement component of the mass block 313 in the Z-axis direction.

Referring to FIG. 8 and FIG. 9 , it is assumed that the driving direction of the mass block 311 is Y+, and the driving direction of the mass block 313 is Y-. Under the action of an external force, the mass block 311 can surround the elastic connector 331 and the elastic connector 333, and have an angular velocity component that rotates around the X-axis direction, and the mass block 313 can surround the elastic connector 332 and the elastic connector 334, and have an angular velocity component that rotates around the X-axis direction. The angular velocity component of the rotation. Thus, proof-mass 311 may have a displacement component along the Z+ direction, and proof-mass 313 may have a displacement component along the Z-direction. The mass block 311 has a tendency to be far away from the detection electrode set 395 , and the mass block 313 has a tendency to be close to the detection electrode set 397 .

Since the detection results of the detection electrode group 395 and the detection electrode group 397 all include common mode noise, the detection results output by the detection electrode group 395 and the detection electrode group 397 can be relatively effectively removed from the common mode noise, which is conducive to improving the performance of the inertial sensor 20. For example, temperature drift performance, zero drift performance, etc.

As shown in FIG. 8 , a transmission beam 351 is connected between the elastic connector 335 and the elastic connector 336 . Referring to FIG. 9 , the transmission beam 351 can be connected between the mass block 311 and the mass block 313 . Since the displacement components of the mass block 311 and mass block 313 in the direction of the Z axis are in opposite directions, the transmission beam 351 can be used to rotate around the axis of symmetry x relative to the anchor area 323 . Since the elastic connector 335 and the elastic connector 336 have a buffering effect, the inclination of the transmission beam 351 can be relatively small. angle of inclination. The transmission beam 351 is also conducive to providing a balance force in the Z-axis direction for the mass block 311 and the mass block 313, and is conducive to making the displacement components of the mass block 311 and the mass block 313 in the Z-axis direction symmetrical.

FIG. 10 shows a schematic structural diagram of the inertial sensor 20 detecting angular velocity around the Y-axis direction. Observing the inertial sensor 20 shown in FIG. 10 along the Y+ direction, a schematic structure diagram shown in FIG. 11 can be obtained. The principle of detecting the angular velocity around the Y-axis direction through the mass block 312 and the mass block 314 will be described below with reference to FIG. 10 and FIG. 11 .

The proof-mass 312 and the proof-mass 314 may have a displacement component along the X-axis direction. When the inertial sensor 20 as a whole has an angular velocity component rotating around the Y-axis direction under the action of an external force, the mass block 312 and the mass block 314 may be subjected to a Coriolis force along the Z-axis direction. The proof-mass 312 and the proof-mass 314 may have a displacement component along the Z-axis direction. Therefore, the distance between the mass block 312 and the detection electrode group 396 can vary, and the capacitance of the capacitor group 6 formed by the mass block 312 and the detection electrode group 396 can vary; the distance between the mass block 314 and the detection electrode group 398 can vary, and the mass block 314 and The capacitance of the capacitance group 8 formed by the detection electrode group 398 can vary. The capacitance variation of the capacitor group 6 formed by the mass block 312 and the detection electrode group 396 may correspond to the displacement component of the mass block 312 in the Z-axis direction. The capacitance variation of the capacitor group 8 formed by the mass block 314 and the detection electrode group 398 may correspond to the displacement component of the mass block 314 in the Z-axis direction.

Referring to FIG. 10 and FIG. 11 , it is assumed that the driving direction of the mass block 312 is X+, and the driving direction of the mass block 314 is X-. Under the action of external force, the mass block 312 can surround the anchor area 325 or the torsion beam 343 or the torsion beam 344, and has an angular velocity component that rotates around the Y-axis direction, and the mass block 314 can surround the anchor area 325 or the torsion beam 343 or the torsion beam 344, with The angular velocity component of the rotation around the Y axis. Thus, proof-mass 312 may have a displacement component along the Z+ direction and proof-mass 314 may have a displacement component along the Z-direction. The mass 312 tends to be far away from the detection electrode set 396 , and the mass 314 tends to be close to the detection electrode set 398 .

Since the detection results of the detection electrode group 396 and the detection electrode group 398 all include common-mode noise, the detection results output by the detection electrode group 396 and the detection electrode group 398 can be relatively effectively removed from the common-mode noise, which is conducive to improving the performance of the inertial sensor 20. For example, temperature drift performance, zero drift performance, etc.

As shown in FIG. 10 , a supporting member 360 is connected between the elastic connecting member 339 and the elastic connecting member 3310 , and the supporting member 360 can be twisted around the torsion beam 343 and the torsion beam 344 . Referring to FIG. 10 and FIG. 11 , the elastic connecting member 339 can be connected to the mass block 312 , and the elastic connecting member 3310 can be connected to the mass block 314 . Since the displacement components of the proof mass 312 and proof mass 314 in the Z-axis direction are in opposite directions, the support member 360 can be used for twisting around the symmetry axis y relative to the anchor region 325 .

Since the rigidity of the elastic connector 339, the elastic connector 3310, and the support member 360 in the Z-axis direction is relatively large, the elastic connector 339, the mass block 312, and the support member 360 are relatively The torsion degrees of 344 may be substantially the same, and the torsion degrees of the elastic connecting member 3310 , the mass block 314 , and the support member 360 relative to the anchor region 325 or the torsion beam 343 or the torsion beam 344 may be substantially the same. Therefore, it is beneficial to improve the symmetry of the displacement components of the mass block 312 and the mass block 314 in the Z-axis direction, improve the same-frequency differential motion performance of the mass block 312 and the mass block 314, and then help to improve the detection accuracy of the inertial sensor 20 .

As shown in FIG. 10 , the mass block 312 and mass block 311 are connected through a transmission beam assembly 381 , and the mass block 314 and mass block 313 are connected through a transmission beam assembly 382 . Since the directions of the displacement components of the mass block 312 and the mass block 314 in the Z-axis direction are opposite, the transmission beam assembly 381 and the transmission beam assembly 382 can bear the torsional force twisted around the axis of symmetry y, so as to reduce the mass of the mass block 311 and the mass block 313. Possibility of traction by twisting of mass 312 and mass 314. The transmission beam assembly 381 itself and the transmission beam assembly 382 itself, the mass block 311 itself and the mass block 313 themselves can be symmetrical with respect to the same axis of symmetry, which is also conducive to reducing the torsion of the mass block 311 and the mass block 313 by the mass block 312 and the mass block 314 The possibility of traction. The mass block 311 and the mass block 313 can be supported by the elastic connector 331, the elastic connector 332, the elastic connector 333, and the elastic connector 334, and the elastic connector 331, the elastic connector 332, the elastic connector 333, and the elastic connector 334 The greater stiffness in the Z-axis direction is also beneficial to reduce the possibility that the

masses

311 and 313 are pulled by the torsion of the

masses

312 and 314 .

FIG. 12 shows a schematic structural diagram of the inertial sensor 20 detecting angular velocity around the Z-axis. The dotted lines in FIG. 12 show the positions of the mass blocks 311 and 313 before rotating around the Z-axis direction, and the solid lines in FIG. 12 show the positions of the mass blocks 311 and 313 after rotating around the Z-axis direction. The principle of detecting the angular velocity around the Z-axis direction through the mass block 311 and the mass block 313 will be described below with reference to FIG. 12 .

The proof-mass 311 and the proof-mass 313 may have a displacement component along the Y-axis direction. When the inertial sensor 20 as a whole has an angular velocity component rotating around the Z-axis direction under the action of an external force, the

masses

311 and 313 may be subjected to a Coriolis force along the X-axis direction. The proof-mass 311 and the proof-mass 313 may have a displacement component along the X-axis direction.

The distance between the mass block 311 and the detection electrode group 391 can vary, and the capacitance value of the capacitor group 1 formed by the mass block 311 and the detection electrode group 391 can vary; similarly, the capacitance value of the capacitor group 3 formed by the mass block 311 and the detection electrode group 393 Values can vary. The capacitance variation of the capacitor group 1 formed by the mass block 311 and the detection electrode group 391, and the capacitance variation of the capacitance group 3 formed by the mass block 311 and the detection electrode group 393 can be compared with the mass block 311 in the X-axis direction. The displacement components correspond.

The distance between the mass block 313 and the detection electrode group 392 can vary, and the capacitance value of the capacitance group 2 formed by the mass block 313 and the detection electrode group 392 can vary; similarly, the capacitance of the capacitance group 4 formed by the mass block 313 and the detection electrode group 392 Values can vary. The capacitance variation of the capacitor group 2 formed by the mass block 313 and the detection electrode group 392, and the capacitance variation of the capacitance group 4 formed by the mass block 313 and the detection electrode group 394 can be compared with the mass block 313 in the X-axis direction. The displacement components correspond.

As shown in FIG. 12 , it is assumed that the driving direction of the mass block 311 is Y+, and the driving direction of the mass block 313 is Y-. Under the action of an external force, the mass 311 can surround the anchor region 325 and have an angular velocity component that rotates around the Z axis, and the mass 313 can surround the anchor region 325 and have an angular velocity component that rotates around the Z axis. Thus, the proof-mass 311 may have a displacement component along the X-direction, and the proof-mass 313 may have a displacement component along the X+ direction. In one embodiment, the mass block 311 tends to be close to the detection electrode set 391 and away from the detection electrode set 393 , and the mass block 313 has a tendency to be far away from the detection electrode set 392 and close to the detection electrode set 394 .

Since the detection results of the detection electrode group 391 and the detection electrode group 392 all include common mode noise, the detection results output by the detection electrode group 391 and the detection electrode group 392 can be relatively effectively removed from the common mode noise, which is conducive to improving the performance of the inertial sensor 20. For example, temperature drift performance, zero drift performance, etc.

As shown in FIG. 12 , the elastic connecting piece 331 , the anchor region 321 and the elastic connecting piece 332 can be connected between the mass block 311 and the mass block 313 . Since the displacement components of the mass block 311 and mass block 313 in the X-axis direction are in opposite directions, the elastic connecting member 331 and the elastic connecting member 332 can rotate around the direction parallel to the Z-axis direction relative to the anchor region 321 . Since the elastic connecting member 331 and the elastic connecting member 332 have a buffering effect, the degree of deformation of the anchor area 321 can be relatively small.

As shown in FIG. 12 , the torsion beam 341 and the transmission beam 351 can be connected between the mass block 311 and the mass block 313 . Since the directions of displacement components of the mass block 311 and mass block 313 in the X-axis direction are opposite, the transmission beam 351 can rotate around a direction parallel to the Z-axis direction relative to the torsion beam 341 . The transmission beam 351 can provide a balance force in the X-axis direction for the mass block 311 and the mass block 313 , which is beneficial to make the displacement components of the mass block 311 and the mass block 313 in the X-axis direction symmetrical. The torsion beam 341 can also provide torsion support for the mass block 311 and the mass block 313 to rotate around the Z-axis direction. In combination with the foregoing, it can be seen that through the elastic connector 335, the elastic connector 336 and the transmission beam 351, it is beneficial to provide elastic deformation of the mass block 311 and the mass block 313 in at least two detection directions through a relatively simple structure, so that the mass block 311 and the mass block 313 has the ability to detect angular velocity about multiple directions.

As shown in FIG. 12 , the mass block 311 and the mass block 312 are connected by a transmission beam assembly 381 , and the mass block 313 and the mass block 314 are connected by a transmission beam assembly 382 . Since the directions of the displacement components of the mass block 311 and the mass block 313 in the X-axis direction are opposite, the transmission beam assembly 381 and the transmission beam assembly 382 can absorb the displacement components along the X-axis direction to reduce the mass block 312 and the mass block 314. 311 and the possibility of mass block 313 being towed.

The angular velocity sensor and the inertial sensor provided in the embodiment of the present application, by setting the anchor area connected with the mover on the same axis of symmetry of the inertial sensor, it is beneficial to reduce the influence of substrate deformation on the measurement accuracy of the angular velocity sensor, and make the inertia The sensor can meet various requirements and improve the application performance of inertial sensors in electronic equipment. The angular velocity sensor and the inertial sensor provided in the embodiment of the present application, by designing the components connected between the anchor area and the mass block, the same mass block can be used to detect the angular velocity around multiple directions, which is conducive to improving the integration of the inertial sensor. Reduce the footprint of inertial sensors. The angular velocity sensor, inertial sensor, and electronic device provided in the embodiments of the present application, through rational design of the steering structure, the steering structure can not only be used to transfer and change directions, but also reduce the movement correlation between multiple masses with different detection directions , so as to improve the decoupling between multiple mass blocks with different detection directions, which is beneficial to improve the measurement accuracy of the inertial sensor.

The above is only a specific implementation of the application, but the scope of protection of the application is not limited thereto. Anyone familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the application. Should be covered within the protection scope of this application. Therefore, the protection scope of the present application should be determined by the protection scope of the claims.

Claims

An angular velocity sensor, characterized in that it comprises:

A first mass (311) and a second mass (313), the first mass (311) and the second mass (313) are driven to have a displacement component in a first direction (Y), so The first mass (311) and the second mass (313) are used to detect the angular velocity around the second direction (X) and/or the third direction (Z), the first direction (Y), the The second direction (X) and the third direction (Z) are orthogonal to each other, and the first mass block (311) itself and the second mass block (313) themselves are symmetrical with respect to the first symmetry axis (y) , the first mass (311) and the second mass (313) are symmetrical with respect to the second axis of symmetry (x), and the first axis of symmetry (y) is parallel to the first direction (Y), so The second axis of symmetry (x) is parallel to the second direction (X);

A third mass (312) and a fourth mass (314), said third mass (312) and said fourth mass (314) being driven to have a displacement component in said second direction (X) , the third mass (312) and the fourth mass (314) are used to detect the angular velocity around the first direction (Y), the third mass (312) itself and the fourth The mass (314) itself is symmetrical with respect to the second axis of symmetry (x), and the third mass (312) and the fourth mass (314) are symmetrical with respect to the first axis of symmetry (y) symmetry;

The first anchor region and the second anchor region, the first mass (311) is connected to the first anchor region and the second anchor region, the second mass (313) is connected to the first anchor a region connected to said second anchor region, said first anchor region and said second anchor region being symmetrical with respect to said first axis of symmetry (y);

a third anchor region (325), the third anchor region (325) being connected to the third mass (312) and the fourth mass (314);

The first anchor region, the second anchor region and the third anchor region (325) are arranged on the second axis of symmetry (x), and the third anchor region (325) covers the first The intersection of the axis of symmetry (y) and said second axis of symmetry (x).
The angular velocity sensor according to claim 1, characterized in that, the first anchor region itself, the second anchor region itself and the third anchor region (325) themselves are all relative to the second axis of symmetry ( x) symmetry, said third anchor region (325) itself being symmetric with respect to said first axis of symmetry (y).
The angular velocity sensor according to claim 1 or 2, wherein the angular velocity sensor further comprises:

a driving member (371), the driving member (371) is used for reciprocating movement along the first direction (Y), and the driving member (371) is connected to the first mass block (311);

A transmission beam assembly (381), the transmission beam assembly (381) is symmetrical with respect to the first symmetry axis (y), and the transmission beam assembly (381) includes a first end (3811), a second end (3812) and a second end Three ends (3813), the first end (3811) is connected to the driving member (371), the second end (3812) is connected to the third mass block (312), and the third end ( 3813) is connected to the fourth mass (314), when the first end (3811) has a displacement component along the first direction (Y), the second end (3812) and the first The three ends (3813) all have displacement components parallel to the second direction (X), and the direction of the displacement component of the second end (3812) is opposite to that of the third end (3813).
The angular velocity sensor according to claim 3, characterized in that, the transmission beam assembly (381) comprises a first transmission beam (381a), a second transmission beam (381b) and a third transmission beam (381c) connected to each other, The first transmission beam (381a) is arranged close to the driving member (371), the second transmission beam (381b) is arranged close to the third mass block (312), and the third transmission beam (381c) is close to The fourth mass block (314) is arranged, the first transmission beam (381a) is arranged parallel to the first direction (Y), the second transmission beam (381b) and the third transmission beam (381c) ) each include a portion arranged obliquely or vertically relative to the first direction (Y).
The angular velocity sensor according to claim 4, characterized in that, the second transmission beam (381b) comprises a first transmission section (3811b1), a second transmission section (3811b2), and a third transmission section (3812b), the The first transmission section (3811b1) and the second transmission section (3811b2) are arranged in parallel with respect to the second direction (X), and the third transmission section (3812b) is connected to the first transmission section (3811b1) Between the second transmission section (3811b2), the third transmission section (3812b) is arranged parallel or inclined relative to the first direction (Y).
The angular velocity sensor according to claim 4 or 5, characterized in that, when the third mass (312) and the fourth mass (314) have an angular velocity component around the first direction (Y) , the second transmission beam (381b) and the third transmission beam (381c) rotate around the first transmission beam (381a).
The angular velocity sensor according to any one of claims 4 to 6, characterized in that, the stiffness of the first transmission beam (381a) in the second direction (X) is smaller than that of the first transmission beam (381a) Stiffness in said third direction (Z).
The angular velocity sensor according to any one of claims 4 to 7, characterized in that, the stiffness of the second transmission beam (381b) in the second direction (X) is smaller than that of the second transmission beam (381b) Stiffness in said third direction (Z).
The angular velocity sensor according to any one of claims 4 to 8, characterized in that, the stiffness of the second transmission beam (381b) in the first direction (Y) is smaller than that of the second transmission beam (381b) Stiffness in said third direction (Z).
The angular velocity sensor according to any one of claims 1 to 9, wherein the angular velocity sensor further comprises:

a support (360), the support (360) is connected to the third anchor area (325) and connected between the third mass (312) and the fourth mass (314), The support (360) is symmetrical with respect to the first axis of symmetry (y) and the second axis of symmetry (x).
The angular velocity sensor according to claim 10, wherein the angular velocity sensor further comprises:

The first torsion beam (343), the first torsion beam (343) is connected between the support (360) and the third anchor area (325), the first torsion beam (343) along the The first direction (Y) extends, and when the third mass (312) and the fourth mass (314) have angular velocity components around the first direction (Y), the support (360 ) rotate around the first torsion beam (343).
The angular velocity sensor according to claim 10 or 11, characterized in that, the third mass block (312) comprises a first mass block notch (3121), and the first mass block notch (3121) is opposite to the first mass block notch (3121 ). Two symmetrical axes (x) are symmetrical; The angular velocity sensor also includes:

The first elastic connecting member (339), the first elastic connecting member (339) spans the first mass block gap (3121), and is connected between the support member (360) and the third mass block ( 312).
The angular velocity sensor according to claim 12, characterized in that, the stiffness of the first elastic connecting member (339) in the second direction (X) is smaller than that of the first elastic connecting member (339) in the second direction (X). Stiffness in three directions (Z).
The angular velocity sensor according to any one of claims 1 to 13, wherein the angular velocity sensor further comprises:

A fourth transmission beam (351), the fourth transmission beam (351) is connected with the first anchorage area (323), and connected between the first mass block (311) and the second mass block (313) ), the fourth transmission beam (351) extends along the first direction (Y), and the fourth transmission beam (351) itself is symmetrical with respect to the second axis of symmetry (x).
The angular velocity sensor according to claim 14, characterized in that, the stiffness of the fourth transmission beam (351) in the second direction (X) is smaller than that of the fourth transmission beam (351) in the third direction (Z) stiffness.
The angular velocity sensor according to claim 14 or 15, wherein the angular velocity sensor further comprises:

The second torsion beam (341), the second torsion beam (341) is connected between the first anchorage area (323) and the fourth transmission beam (351), and the second torsion beam (341) is along the The second direction (X) extends, when the first mass (311) and the second mass (313) have angular velocity components around the second direction (X), the fourth transmission beam ( 351 ) rotate around said second torsion beam ( 341 ), which is itself symmetrical with respect to said second axis of symmetry (x).
The angular velocity sensor according to any one of claims 14 to 16, wherein the angular velocity sensor further comprises:

The second elastic connector (335), the second elastic connector (335) is connected between the fourth transmission beam (351) and the first mass block (311), the second elastic connector (335) extends along said second direction (X).
The angular velocity sensor according to claim 17, characterized in that, the stiffness of the second elastic connecting member (335) in the first direction (Y) is smaller than that of the second elastic connecting member (335) in the first direction (Y). Stiffness in three directions (Z).
The angular velocity sensor according to any one of claims 1 to 18, wherein the angular velocity sensor further comprises:

A fourth anchor region (321), the fourth anchor region (321) is connected between the first mass (311) and the second mass (313), the fourth anchor region (321) is itself symmetrical about said second axis of symmetry (x);

The position connected to the first anchor region (323) on the first mass block (311) is the first position, and the position connected to the second anchor region (324) on the first mass block (311) The position is the second position, the position connected to the fourth anchor area (321) on the first mass (311) is the third position, the first position, the second position, the third The positions are not collinear.
The angular velocity sensor according to claim 19, wherein the angular velocity sensor further comprises:

A third elastic connection part (331), the third elastic connection part (331) is connected between the fourth anchor area (321) and the first mass block (311).
The angular velocity sensor according to claim 20, characterized in that, the stiffness of the third elastic connecting member (331) in the first direction (Y) is smaller than that of the third elastic connecting member (331) in the first direction (Y). Stiffness in three directions (Z).
The angular velocity sensor according to claim 20 or 21, characterized in that, the stiffness of the third elastic connecting member (331) in the second direction (X) is smaller than that of the third elastic connecting member (331) in the second direction (X). Stiffness in the third direction (Z).
The angular velocity sensor according to any one of claims 1 to 22, characterized in that, the first mass (311) has a second mass notch (3115), and the third mass (312) and the The fourth mass block (314) is arranged in the gap (3115) of the second mass block.
The angular velocity sensor according to any one of claims 1 to 23, wherein the angular velocity sensor further comprises:

The first detection electrode (395), the first mass (311) can move relative to the first detection electrode (395), the first mass (311) and the first detection electrode (395) arranged along the third direction (Z) to form a first capacitance, when the first mass (311) has an angular velocity component around the second direction (X), the first mass (311) Having a displacement component along the third direction (Z), the displacement component of the first mass (311) along the third direction (Z) corresponds to the capacitance variation of the first capacitor;

A first readout circuit, the first readout circuit is configured to output the angular velocity component in the second direction (X) according to the capacitance variation of the first capacitor.
The angular velocity sensor according to any one of claims 1 to 24, wherein the angular velocity sensor further comprises:

The second detection electrode (396), the third mass (312) can move relative to the second detection electrode (396), the third mass (312) and the second detection electrode (396) arranged along the third direction (Z) to form a second capacitance, when the third mass (312) has an angular velocity component around the first direction (Y), the third mass (312) having a displacement component along the third direction (Z), the displacement component of the third mass (312) along the third direction (Z) corresponds to the capacitance variation of the second capacitor;

The second readout circuit is configured to output the angular velocity component in the first direction (Y) according to the capacitance variation of the second capacitor.
The angular velocity sensor according to any one of claims 1 to 25, wherein the angular velocity sensor further comprises:

The third detection electrode (391, 393), the first mass (311) can move relative to the third detection electrode (391, 393), the first mass (311) and the third detection The electrodes (391, 393) are arranged along the second direction (X) to form a third capacitor, and when the first mass (311) has an angular velocity component around the third direction (Z), the first A mass (311) has a displacement component along the second direction (X), the displacement component of the third mass (312) along the second direction (X) and the capacitance of the third capacitor Corresponding to the value change;

The third readout circuit is configured to output the angular velocity component in the third direction (Z) according to the capacitance variation of the third capacitor.
An inertial sensor (20), characterized by comprising the angular velocity sensor according to any one of claims 1-26.
An electronic device, characterized by comprising the inertial sensor (20) according to claim 27.