CN116660570A

CN116660570A - Angular velocity sensor, inertial sensor, and electronic apparatus

Info

Publication number: CN116660570A
Application number: CN202210152814.1A
Authority: CN
Inventors: 郑元辽; 胡启方
Original assignee: Huawei Technologies Co Ltd
Current assignee: Huawei Technologies Co Ltd
Priority date: 2022-02-18
Filing date: 2022-02-18
Publication date: 2023-08-29
Also published as: WO2023155637A1

Abstract

The embodiment of the application provides an angular velocity sensor, an inertial sensor and electronic equipment. The angular velocity sensor comprises a first mass block and a second mass block, wherein the first mass block is driven to reciprocate along an X axis, and the angular velocity of the first mass block around a Y axis can be judged through the displacement of the first mass block along a Z axis; by driving the second mass to reciprocate along the Y axis and by displacement of the second mass along the X axis/Z axis, the angular velocity of the first mass about the Z axis/X axis can be determined. The first mass is symmetrical about an axis of symmetry x and the second mass is symmetrical about an axis of symmetry y. The sensor of angular velocity further comprises a first anchor region for supporting the first mass and a second anchor region for supporting the second mass, the first anchor region, the second anchor region and the first mass being symmetrical with respect to the same symmetry axis x. The first anchor region may also be symmetrical with the second mass about the same axis of symmetry y.

Description

Angular velocity sensor, inertial sensor, and electronic apparatus

Technical Field

The present application relates to the field of inertial sensing and the field of electronic devices, and more particularly to inertial sensors, electronic devices.

Background

The electronic device may detect an angle or an angular velocity of the electronic device itself around multiple axes by an angular velocity sensor. Angular velocity sensors play an important role in application scenarios such as photo-taking anti-shake, navigation, game orientation, rotating screens, autopilot, etc.

The sensor of angular velocity may comprise a plurality of masses for detection. When the mass deflects, the capacitance between the mass and the detection electrode changes, so that the angular velocity sensor can output a signal related to the angle or angular velocity. The mass is typically disposed on the substrate of the angular velocity sensor. When one of the masses moves, the mass may pull the substrate, which may in turn cause the substrate to deform. The deformation of the substrate may shift other masses on the angular velocity sensor, thereby reducing the detection accuracy of the angular velocity sensor. It is therefore desirable to provide a solution for how to reduce substrate deformation.

Disclosure of Invention

The embodiment of the application provides an angular velocity sensor, an inertial sensor and electronic equipment. The purpose is to reduce substrate deformation.

In a first aspect, there is provided an angular velocity sensor comprising:

A first mass and a second mass driven to have a displacement component in a first direction, the first mass and the second mass for detecting angular velocities about a second direction and/or a third direction, the first direction, the second direction, the third direction being mutually orthogonal, the first mass itself and the second mass itself being symmetrical about a first axis of symmetry, the first mass and the second mass being symmetrical about a second axis of symmetry, the first axis of symmetry being parallel to the first direction, the second axis of symmetry being parallel to the second direction;

a third mass and a fourth mass driven to have a displacement component in the second direction, the third mass and the fourth mass for detecting an angular velocity about the first direction, the third mass itself and the fourth mass themselves each being symmetrical with respect to the second axis of symmetry, the third mass and the fourth mass being symmetrical with respect to the first axis of symmetry;

the first mass block is connected with the first anchor region and the second anchor region, the second mass block is connected with the first anchor region and the second anchor region, and the first anchor region and the second anchor region are symmetrical relative to the first symmetry axis;

A third anchor region connected to the third mass and the fourth mass;

the first anchor region, the second anchor region and the third anchor region are arranged on the second symmetry axis, and the third anchor region covers the intersection point of the first symmetry axis and the second symmetry axis.

In the present application, by arranging the anchor regions connected to the mover on the same symmetry axis of the angular velocity sensor, the forces to which the anchor regions are subjected can be generally symmetrical with respect to the symmetry axis, and thus the forces to which the anchor regions are subjected can be at least partially offset, and the amount of deformation of the anchor regions can be relatively small. According to the differential characteristics, the influence of substrate deformation and the like on the measurement accuracy of the angular velocity sensor is reduced, and the measurement accuracy of the angular velocity sensor is improved. The same mass block can be used for detecting angular speeds around multiple directions, so that the integration level of the inertial sensor is improved, and the occupied space of the inertial sensor is reduced.

With reference to the first aspect, in certain implementations of the first aspect, the first anchor region itself, the second anchor region itself, and the third anchor region itself are each symmetric about the second axis of symmetry, and the third anchor region itself is symmetric about the first axis of symmetry.

In the present application, the angular velocity sensor has symmetry in order to suppress the influence of factors such as material strain and processing deviation. The angular velocity sensor has symmetry, is favorable for applying a differential principle, removing common mode noise caused by material strain, machining deviation and the like, and is favorable for improving temperature drift performance, zero drift performance and the like of the angular velocity sensor.

With reference to the first aspect, in certain implementations of the first aspect, the angular velocity sensor further includes:

the driving piece is used for reciprocating along the first direction and is connected with the first mass block;

the transmission beam assembly is symmetrical relative to a first symmetry axis, the transmission beam assembly comprises a first end, a second end and a third end, the first end is connected with the driving piece, the second end is connected with the third mass block, the third end is connected with the fourth mass block, when the first end has a displacement component along the first direction, the second end and the third end are both provided with a displacement component parallel to the second direction, and the displacement component of the second end is opposite to the displacement component of the third end.

According to the application, the displacement component in the Y direction can be converted into the displacement component in the X direction through the transmission beam assembly, so that the first mass block and the second mass block are driven by the same driving piece, the number of devices in the angular velocity sensor is reduced, and the coupling degree of the first mass block and the second mass block is improved.

With reference to the first aspect, in certain implementations of the first aspect, the drive beam assembly includes a first drive beam, a second drive beam, and a third drive beam that are connected to each other, the first drive beam being disposed proximate to the driving member, the second drive Liang Kaojin being disposed proximate to the fourth mass, the first drive beam being disposed parallel to the first direction, the second drive beam and the third drive beam each including portions that are disposed obliquely or perpendicularly with respect to the first direction.

In the present application, when the first transmission beam has a displacement component in the extending direction of the first transmission beam, since the second transmission beam includes a portion different from the extending direction of the first transmission beam, the second transmission beam may be pulled by the first transmission beam, and an end of the second transmission beam remote from the first transmission beam may have a displacement component in a direction perpendicular to the extending direction of the first transmission beam. Similarly, an end of the third drive beam remote from the first drive beam may have a displacement component in a direction perpendicular to the extension direction of the first drive beam. The drive beam assembly may thus have a steering drive function.

With reference to the first aspect, in certain implementation manners of the first aspect, the second transmission beam includes a first transmission section, a second transmission section, and a third transmission section, where the first transmission section and the second transmission section are disposed in parallel with respect to the second direction, the third transmission section is connected between the first transmission section and the second transmission section, and the third transmission section is disposed in parallel or inclined with respect to the first direction.

In the application, the second transmission beam comprises a plurality of transmission sections which are vertical relative to the Y direction and are connected through the transmission sections which are parallel relative to the Y direction, so that the displacement component in the X direction converted by the transmission beam assembly is dispersed on the plurality of transmission sections, and the detection error caused by excessive deformation of the transmission sections is reduced.

With reference to the first aspect, in certain implementations of the first aspect, when the third mass and the fourth mass have an angular velocity component about the first direction, the second drive beam and the third drive beam rotate about the first drive beam.

That is, when the third mass and the fourth mass have an angular velocity component around the Y direction, the second transfer beam may have a rotation angle around the Y direction.

In the present application, the position of a portion of the first drive beam is relatively fixed, and the amount of deformability of the first drive beam is relatively small. When the third mass block and the fourth mass block have angular velocity components around the Y direction, the second transmission beam and the third transmission beam rotate relative to the first transmission beam, so that the second transmission beam and the third transmission beam can absorb the rotation trend from the third mass block and the fourth mass block, the degree that the first mass block is pulled by the third mass block and the fourth mass block is reduced, and the displacement of the third mass block and the fourth mass block in the X direction and the Z direction under the traction of the first mass block is reduced.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the first drive beam in the second direction is less than a stiffness of the first drive beam in the third direction.

In the application, the first transmission beam has elasticity in the X direction, which is beneficial to reducing the displacement of the third mass block and the fourth mass block in the X direction under the traction of the first mass block.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the second drive beam in the second direction is less than a stiffness of the second drive beam in the third direction.

In the application, the second transmission beam can have elasticity in the X direction, which is beneficial to reducing the displacement of the first mass block in the X direction under the traction of the third mass block and the fourth mass block.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the second drive beam in the first direction is less than a stiffness of the second drive beam in the third direction

In the application, the second transmission beam can have elasticity in the Y direction, which is beneficial to reducing the displacement of the third mass block and the fourth mass block in the Y direction under the traction of the first mass block.

In the application, the transmission beam assembly with the structure is arranged, so that the displacement components of the third mass block and the fourth mass block in the X direction have less influence on the first mass block; the displacement components of the first mass block in the X direction and the Y direction have less influence on the third mass block and the fourth mass block. Therefore, by reasonably designing the steering structure, the steering structure not only can be used for transmitting and converting driving force, but also can promote decoupling among a plurality of mass blocks with different detection directions, thereby being beneficial to improving the measurement accuracy of the inertial sensor.

The support piece is connected with the third anchor area and connected between the third mass block and the fourth mass block, and the support piece is symmetrical relative to the first symmetry axis and the second symmetry axis.

In the present application, by providing the support between the third anchor region and the third mass, and between the third anchor region and the fourth mass, the third mass and the fourth mass can be suspended on the substrate layer of the angular velocity sensor.

and a first torsion beam connected between the support and the third anchor region, the first torsion beam extending in the first direction, the support rotating about the first torsion beam when the third and fourth masses have an angular velocity component about the first direction.

In the present application, the first torsion beam may provide torsional rigidity to the support. When the third mass block and the fourth mass block rotate around the Y direction under the action of external force, the supporting piece can be driven by the third mass block and the fourth mass block and can twist relative to the first torsion beam; when the support is not subjected to an external force, the support may be restored to an original state due to the torsional rigidity of the first torsion beam.

With reference to the first aspect, in certain implementations of the first aspect, the third mass includes a first mass gap that is symmetrical with respect to the second symmetry axis; the sensor of angular velocity further includes:

and the first elastic connecting piece spans across the first mass block notch and is connected between the supporting piece and the third mass block.

In the application, the elastic connecting piece is arranged between the supporting piece and the third mass block, and the elastic connecting piece can reduce the deformation of the supporting piece and the third anchor area caused by the traction of the third mass block.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the first elastic connection in the second direction is less than a stiffness of the first elastic connection in the third direction.

In the application, the first elastic connecting piece can have elasticity in the X direction, which is beneficial to reducing the deformation of the supporting piece in the X direction under the traction of the third mass block.

and the fourth transmission beam is connected with the first anchor region and between the first mass block and the second mass block, extends along the first direction and is symmetrical relative to the second symmetry axis.

In the application, the first mass can be suspended on the substrate layer of the angular velocity sensor by providing a fourth transmission beam between the first anchor region and the first mass.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the fourth drive beam in the second direction is less than a stiffness of the fourth drive beam in the third direction.

In the application, the fourth transmission beam can have elasticity in the X direction, which is beneficial to reducing the deformation of the first anchor area in the X direction under the traction of the first mass block.

and a second torsion beam connected between the first anchor region and the fourth drive beam, the second torsion beam extending in the second direction, the fourth drive beam rotating about the second torsion beam when the first and second masses have an angular velocity component about the second direction.

With reference to the first aspect, in certain implementations of the first aspect, the second torsion beam itself is symmetrical with respect to the second symmetry axis.

In the application, the second torsion beam has symmetry, which is beneficial to reducing errors generated during the transmission of the fourth transmission beam.

In the present application, the second torsion beam may provide torsional rigidity to the fourth drive beam. When the first mass block rotates around the X direction or the Z direction under the action of external force, the fourth transmission beam can be driven by the first mass block and is twisted relative to the second torsion beam; when the fourth driving beam is not subjected to an external force, the fourth driving beam can be restored to the original state due to the torsional rigidity of the second torsion beam.

and the second elastic connecting piece is connected between the fourth transmission beam and the first mass block and extends along the second direction.

In the application, the elastic connecting piece is arranged between the fourth transmission beam and the first mass block, and the elastic connecting piece can reduce the deformation of the fourth transmission beam and the first anchor area caused by the traction of the first mass block.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the second elastic connection in the first direction is less than a stiffness of the second elastic connection in the third direction.

In the application, the second elastic connecting piece can have elasticity in the Y direction, which is beneficial to reducing the deformation of the fourth transmission beam in the Y direction under the traction of the first mass block.

a fourth anchor region connected between the first mass and the second mass, the fourth anchor region itself being symmetrical about the second axis of symmetry;

the position on the first mass block connected with the first anchor area is a first position, the position on the first mass block connected with the second anchor area is a second position, the position on the first mass block connected with the fourth anchor area is a third position, and the first position, the second position and the third position are not collinear.

In the present application, the first mass may be supported by the first anchor region, the second anchor region, and the fourth anchor region. The first mass is non-collinear with the 3 locations at which the first, second and fourth anchor regions are connected, respectively, such that the first mass can be suspended on a substrate layer of the angular rate sensor.

and a third resilient connecting element connected between the fourth anchor region and the first mass.

In the application, the elastic connecting piece is arranged between the fourth anchor area and the first mass block, and the elastic connecting piece can reduce the deformation of the fourth anchor area caused by the traction of the first mass block.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the third elastic connection in the first direction is less than a stiffness of the third elastic connection in the third direction.

In the present application, the first mass can be suspended on the substrate layer of the angular velocity sensor by providing a third elastic connection between the fourth anchor region and the first mass. The third resilient connecting element may also have a resilience in the Y-direction, which is advantageous for reducing deformation of the fourth anchor region in the Y-direction under traction of the first mass.

With reference to the first aspect, in certain implementations of the first aspect, a stiffness of the third elastic connection in the second direction is less than a stiffness of the third elastic connection in the third direction.

In the application, the third elastic connecting piece can have elasticity in the X direction, which is beneficial to reducing the deformation of the fourth anchor area in the X direction under the traction of the first mass block.

With reference to the first aspect, in certain implementations of the first aspect, when the first mass has an angular velocity component about the second direction, the first mass rotates about the third elastic connection.

In the present application, the third elastic connection may provide torsional rigidity to the first mass. When the first mass block rotates around the X direction under the action of external force, the first mass block can twist relative to the third elastic connecting piece; when the first mass block is not acted by external force, the first mass block can be restored to the initial state due to the torsional rigidity of the third elastic connecting piece.

With reference to the first aspect, in certain implementations of the first aspect, when the first mass has an angular velocity component about the third direction, the first mass rotates about the third elastic connection.

In the present application, the third elastic connection may provide torsional rigidity to the first mass. When the first mass block rotates around the Z direction under the action of external force, the first mass block can twist relative to the third elastic connecting piece; when the first mass block is not acted by external force, the first mass block can be restored to the initial state due to the torsional rigidity of the third elastic connecting piece.

With reference to the first aspect, in certain implementations of the first aspect, the first mass has a second mass gap, and the third mass and the fourth mass are disposed within the second mass gap.

In the application, the notch of the first mass block and the notch of the second mass block are arranged in opposite directions so as to accommodate the third mass block and the fourth mass block, thereby being beneficial to reducing the overall size of the inertial sensor and increasing the effective detection area of the mass blocks.

a first detection electrode with respect to which the first mass is movable, the first mass and the first detection electrode being arranged in the third direction to form a first capacitance, the first mass having a displacement component in the third direction when the first mass has an angular velocity component around the second direction, the displacement component of the first mass in the third direction corresponding to a capacitance value variation amount of the first capacitance;

and the first readout circuit is used for outputting the angular velocity component in the second direction according to the capacitance value variation of the first capacitor.

In the application, the displacement component of the first mass block in the Z-axis direction can be captured by arranging the detection electrode, so that the Korotkoff force of the first mass block in the Z-axis direction can be deduced, and the angular speed of the first mass block around the X-axis can be judged.

a second detection electrode with respect to which the third mass is movable, the third mass and the second detection electrode being arranged in the third direction to form a second capacitance, the third mass having a displacement component in the third direction when the third mass has an angular velocity component around the first direction, the displacement component in the third direction of the third mass corresponding to a capacitance value variation amount of the second capacitance;

and the second reading circuit is used for outputting the angular velocity component in the first direction according to the capacitance value variation of the second capacitor.

In the application, the displacement component of the second mass block in the Z-axis direction can be captured by arranging the detection electrode, so that the Korotkoff force of the second mass block in the Z-axis direction can be deduced, and the angular speed of the second mass block around the Y-axis can be judged.

a third detection electrode with respect to which the first mass is movable, the first mass and the third detection electrode being arranged in the second direction to form a third capacitance, the first mass having a displacement component in the second direction when the first mass has an angular velocity component around the third direction, the displacement component in the second direction of the third mass corresponding to a capacitance value variation amount of the third capacitance;

And the third reading circuit is used for outputting the angular velocity component in the third direction according to the capacitance value variation of the third capacitor.

In the application, the displacement component of the first mass block in the X-axis direction can be captured by arranging the detection electrode, so that the Korotkoff force of the first mass block in the X-axis direction can be deduced, and the angular speed of the first mass block around the Z-axis can be judged.

In a second aspect, there is provided an inertial sensor comprising an angular rate sensor as described in any one of the implementations of the first aspect above.

In a third aspect, there is provided an electronic device comprising an inertial sensor as described in any one of the implementations of the second aspect above.

Drawings

Fig. 1 is a schematic structural diagram of an electronic device according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram of an inertial sensor according to an embodiment of the present application.

Fig. 3 is a schematic structural diagram of a mechanical structural layer provided in an embodiment of the present application.

Fig. 4 is a schematic perspective view of a mechanical structure layer provided by an embodiment of the present application.

Fig. 5 is a schematic diagram of movement of a mechanical structure layer according to an embodiment of the present application.

Fig. 6 is a schematic block diagram and a motion schematic diagram of a drive beam assembly according to an embodiment of the present application.

Fig. 7 is a schematic diagram of an arrangement of detection electrodes on a substrate according to an embodiment of the present application.

Fig. 8 is a schematic diagram of a mechanical structure layer for detecting angular velocity around an X-axis according to an embodiment of the present application.

Fig. 9 is a schematic diagram of an inertial sensor for detecting angular velocity about an X-axis according to an embodiment of the present application.

Fig. 10 is a schematic diagram of a mechanical structure layer for detecting angular velocity around a Y-axis according to an embodiment of the present application.

Fig. 11 is a schematic diagram of an inertial sensor for detecting angular velocity about a Y-axis according to an embodiment of the present application.

Fig. 12 is a schematic diagram of an inertial sensor for detecting angular velocity about a Z-axis according to an embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings.

Fig. 1 is a schematic block diagram of an electronic device 100 according to an embodiment of the present application. The electronic device 100 may be, for example, an end consumer product or a 3C electronic product (computer), a communication, a consumer (consumer) electronic product, such as a mobile phone, a portable device, a tablet computer, an electronic reader, a notebook computer, a digital camera, a wearable device, an earphone, a watch, a stylus, etc. The electronic device 100 may also be a vehicle, or a control device applied to a vehicle, a vehicle machine, an in-vehicle device, or the like. The embodiment shown in fig. 1 is illustrated with an electronic device 100 being a mobile phone.

The electronic device 100 may include a housing 11, a display screen 12, and a circuit board assembly 13. Specifically, the housing 11 may include a rim and a rear cover. The bezel may be located between the display 12 and the rear cover. The bezel may surround the outer periphery of the display screen 12 and surround the outer periphery of the rear cover. The cavity formed between the display 12, bezel, and back cover may be used to house the circuit board assembly 13. The circuit board assembly 13 may include a circuit board and an inertial sensor 20 disposed on the circuit board. The circuit board may be, for example, a motherboard, a small board, or the like.

Fig. 2 shows two embodiments of an inertial sensor (which may also be referred to as an inertial measurement unit (inertial measurement unit, IMU)) 20. In the embodiment shown in fig. 2, the inertial sensor 20 may be an angular velocity sensor (also may be referred to as a gyroscope), or an acceleration sensor and an angular velocity sensor may be integrated. That is, the inertial sensor 20 may include only the angular velocity sensor (in this case, the inertial sensor 20 may be equivalent to the angular velocity sensor), or the inertial sensor 20 may include both the angular velocity sensor and the acceleration sensor. The angular velocity sensor may be an inertial sensor or may be part of an inertial sensor. In the embodiment in which the inertial sensor 20 integrates the acceleration sensor and the angular velocity sensor, the inertial sensor 20 may be a sensor capable of realizing both the function of the acceleration sensor and the function of the angular velocity sensor.

The angular velocity sensor may be used to determine a motion gesture of the electronic device 100. In some embodiments, the angular velocity of the electronic device 100 about three axes (i.e., the X-axis direction, the Y-axis direction, and the Z-axis direction) may be determined by an angular velocity sensor.

In one possible scenario, an angular velocity sensor may be used to capture an anti-shake or the like scenario. For example, when the shutter is pressed, the angular velocity sensor detects the shake angle of the electronic device 100, calculates the distance to be compensated by the lens module according to the angle, and makes the lens counteract the shake of the electronic device 100 through the reverse motion, so as to realize anti-shake.

In another possible scenario, the sensor of angular velocity may also be used in a navigation, autopilot, etc. scenario. For example, when the electronic device 100 deflects during movement, the angular velocity sensor may detect the angle or angular velocity of the deflection. In combination with the moving speed of the electronic apparatus 100, the electronic apparatus 100 can determine the approximate position, driving state, and the like of itself on the map.

In yet another possible scenario, the angular velocity sensor may also be used in other more types of scenarios, such as somatosensory games.

The acceleration sensor may detect the magnitude of acceleration of the electronic device 100 in various directions (typically three axes). The magnitude and direction of gravity may be detected when the electronic device 100 is stationary. And can also be used for applications such as recognizing the gesture of the electronic device 100, pedometers, etc.

As shown in fig. 2, inertial sensor 20 may include a chip 21, and one or more detection components 22. The chip 21 may comprise a readout circuit or be replaced by a readout circuit. Part or all of the detection component 22 may also be referred to as a microelectromechanical system (micro electro mechanical system, MEMS). The chip 21 may be electrically connected to the detecting section 22. In the embodiment shown in fig. 2, inertial sensor 20 may include a single detection member 22. The chip 21 may acquire a signal related to the angular velocity through the detecting means 22, and in one embodiment, the chip 21 may acquire a signal related to the acceleration through the detecting means 22. In another embodiment, the inertial sensor 20 may include two detection members 22. The chip 21 can acquire a signal related to acceleration through one detecting part 22, and acquire a signal related to angular velocity through the other detecting part 22.

The principle of acquiring the motion state of the electronic device 100 by the inertial sensor 20 is explained below with reference to fig. 1 and 2.

The detection component 22 may include a substrate layer, a mechanical structure layer, and a cover layer. The mechanical structure layer may be sealingly connected between the mechanical structure layer and the cover layer. The mechanical structure layer may also be referred to as a MEMS layer. The mechanical structure layer may be a key component of the detection component 22 for enabling angular velocity detection.

The mechanical structure layer can comprise a mover and a stator. The stator may be fixed within the inertial sensor 20. The stator may for example be fixed on the substrate layer. A gap is provided between the stator and the mover so that the stator and the mover may form a capacitance. The capacitance formed by the stator and the mover may be used to drive the mover to move relative to the stator. The mover may be suspended on the substrate layer, for example, and may be movable relative to the substrate layer. In one embodiment, the mover and the stator may include a comb structure, for example. The comb-shaped mover may be a movable comb. The comb-like stator may be a stationary comb.

The stator may be, for example, an anchor region. In the present application, the stator may be provided with grooves. The grooves may be obtained, for example, by MEMS processing or by local growth of the substrate. Since the mechanical structure layer is connected between the substrate layer and the cover layer, the stator can be connected between the substrate layer and the cover layer. The stator and the substrate layer or cover layer may be connected by bonding. The stator is provided with grooves, which are beneficial to increasing the bonding area of the mechanical structure layer connection and the substrate layer or the mechanical structure layer connection and the cover layer, and further beneficial to improving the mechanical stability of the inertial sensor 20. The anchor region of the mechanical structure layer 300 may also be obtained by surface silicon growth, bonding fixation, or the like.

Inertial sensor 20 may also include a sense electrode. The detection electrode may be fixed within the inertial sensor 20. A capacitance may be formed between the mover and the detection electrode. The capacitance formed by the mover and the detection electrode may be used to detect the motion state of the electronic device 100. In the embodiment shown in fig. 2, the detection electrode may be fixed on the substrate layer, for example.

Referring now to fig. 2, the principle of operation of the inertial sensor 20 will be described using an example of an embodiment of Y-axis detection. The chip 21 may send an ac electrical signal to the detecting unit 22 to drive the mover of the detecting unit 22 to reciprocate in the X-axis direction with respect to the stator in a translational manner at a preset frequency. This movement does not substantially change the separation of the detection electrode and the mover in the Z-axis direction. The distance between the detection electrode and the mover along the Z-axis direction may correspond to the capacitance value of the capacitance formed by the detection electrode and the mover, so that the capacitance value of the capacitance formed by the detection electrode and the mover may be substantially maintained.

In the case where no movement (including translation, rotation, etc.) of the electronic device 100 occurs, the capacitance value of the capacitance formed by the detection electrode and the mover may remain substantially unchanged.

When the electronic device 100 moves, for example, when the electronic device has an angular velocity component rotating around the Y-axis direction by an external force, that is, when the rotation direction of the electronic device is the Y-axis direction, the mover also tends to rotate around the Y-axis direction and receives an additional force. This force may be referred to as coriolis force. The direction of the force (e.g., the Z-axis direction) may be orthogonal to both the direction of rotation of the mover (e.g., the Y-axis direction) and the direction of movement of the mover (e.g., the X-axis direction). The mover can move in the Z-axis direction under the action of the force. Therefore, the acting force can change the distance between the detection electrode and the mover, thereby changing the capacitance value of the capacitance formed by the detection electrode and the mover. The electronic apparatus 100 shown in fig. 1 can acquire the angular velocity ω rotated about the Y-axis direction with the electronic apparatus 100 by acquiring the capacitance variation amount of the capacitance formed by the detection electrode and the mover. In one embodiment, the readout circuit may acquire the accommodation value variation amount and output the angular velocity according to the accommodation variation amount.

From the capacitance change amount Δc, the distance change amount y between the detection electrode and the mover can be determined. The capacitance value variation Δc and the pitch variation y may satisfy the following equation, for example:

the Korotkoff force F born by the mover can be determined according to the rigidity k and the distance variation y of the mover. The coriolis force F, the stiffness k, and the pitch change y may satisfy the following equation, for example:

F＝k·y。

the angular velocity ω of the mover may be determined from the coriolis force F, the mover mass m, and the velocity v at which the mover reciprocates. The Korotkoff force F, the mover mass m, the velocity v of the mover's reciprocal movement, and the angular velocity ω may satisfy the following equations, for example:

when the electronic device 100 actually moves, the electronic device 100 may rotate around the X-axis direction, the Y-axis direction, and the Z-axis direction. The inertial sensor can acquire angular velocities around the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively, with reference to the above principle. In the embodiments provided by the application, the movement of the mover may be detected by other means than by capacitive detection, for example by time-of-flight methods or the like. The present application may not be limited to the manner in which the angular velocity is detected provided in the embodiment.

Since the mover is disposed on the substrate layer, movement of the mover may pull the substrate layer to deform. The deformation of the substrate layer may cause unreasonable movement of the mover, thereby affecting the measurement accuracy of the angular velocity sensor. Aiming at the problems, the embodiment of the application provides a series of technical schemes, and aims to reduce the influence of substrate deformation and the like on the measurement accuracy of the angular velocity sensor, so that the angular velocity sensor or the inertial sensor can meet various requirements, and the application performance of the angular velocity sensor or the inertial sensor in electronic equipment is improved. For example, the angular velocity sensor or the inertial sensor provided by the embodiment of the application can have the characteristics of small size, multi-axis detection, excellent detection precision and the like.

Fig. 3 and 4 are schematic internal structural views of a mechanical structure layer 300 according to an embodiment of the present application, wherein fig. 3 is a plan structural view and fig. 4 is a perspective structural view. Fig. 5 is a schematic diagram of the movement of the mover of the mechanical structure layer 300 when no rotation of the mechanical structure layer 300 shown in fig. 3 and 4 occurs. The mechanical structure layer 300 may be a component of an angular velocity sensor or an inertial sensor provided by the present application. The inertial sensor will be described below as an example. The embodiment of the angular velocity sensor may refer to the embodiment of the inertial sensor.

For convenience of description, as shown in fig. 3 to 5, it is assumed that an XYZ coordinate system exists. The XY plane is parallel to the paper surfaces of fig. 3 and 5, and the Z axis direction is perpendicular to the paper surfaces of fig. 3 and 5. The X-axis direction, the Y-axis direction and the Z-axis direction are orthogonal to each other. The mechanical structure layer 300 may be disposed in parallel with respect to the XY plane.

The mechanical structure layer 300 may include a mass 311, a mass 312. In the embodiment shown in fig. 3, the mass 311 is used to detect angular velocities about the X-axis and Z-axis directions. The mass 312 is used to detect angular velocity about the Y-axis. In other possible embodiments, the mass 311 may be used only to detect the angular velocity in the X-axis direction or the angular velocity in the Z-axis direction. The principle of operation of the mass 311 to detect angular velocities about the X-axis and Z-axis is described below. An embodiment in which the mass 311 detects only the angular velocity about the X-axis direction, and an embodiment in which the mass 311 detects only the angular velocity about the Z-axis direction, can be referred to the embodiment shown in fig. 3.

In some embodiments, the mechanical structure layer 300 may have symmetry in order to suppress effects due to factors such as material strain, process variations, and the like. The mechanical structure layer 300 has symmetry, which is beneficial to applying differential principle, removing common mode noise caused by material strain, processing deviation and the like, and improving temperature drift performance, zero drift performance and the like of the mechanical structure layer 300.

The mechanical-structure layer 300 may be symmetrical with respect to an axis of symmetry X, which may be parallel to the X-axis direction, and symmetrical with respect to the axis of symmetry X, which may be parallel to the Y-axis direction. In the present application, the moving directions of two parts or structures symmetrical to each other with respect to the symmetry axis x or the symmetry axis y may be symmetrical so that the moving patterns of the two parts or structures can satisfy the common-frequency difference requirement.

In one embodiment, the mass 311 is itself symmetrical with respect to the symmetry axis y. The mass 312 itself may be symmetrical with respect to the symmetry axis x. The mass block 311 and the mass block 312 have symmetry, which is beneficial to improving the measurement accuracy of the inertial sensor by applying the differential principle.

To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include a mass 313 and a mass 314. The mass 313 and the mass 311 may be symmetrical with respect to the torsion beam x. The masses 314 and 312 may be symmetrical with respect to the torsion beam y. The mass 313 and the mass 311 may satisfy a differential decoupling condition. The mass 314 and the mass 312 may satisfy a differential decoupling condition. Reference may be made to embodiments of the mass 313 with respect to embodiments of the mass 311. Specific embodiments of the mass 314 may refer to embodiments of the mass 312.

In the embodiment shown in fig. 3, a side of the mass 311 near the mass 312 and the mass 314 may be provided with a mass gap 3115, and a side of the mass 313 near the mass 312 and the mass 314 may be provided with a mass gap 3135. The mass gap 3115 and the mass gap 3135 may be symmetrical with respect to the symmetry axis x. The mass 312 and the mass 314 can be accommodated in the mass gap 3115 and the mass gap 3135, which is beneficial to increasing the available detection area of the mass 311 and the mass 313 and reducing the overall size of the angular velocity sensor.

In the present application, differential decoupling may mean that part a and part B are symmetrical and the movement pattern of part a and part B belongs to differential movement. By differential motion of the symmetrical structure, it may be advantageous to eliminate common mode effects to reduce the effects between component a and component B.

The mechanical structure layer 300 may further include an anchor region 321, an elastic connector 331. In the present application, the anchor region 32 may belong to the stator of the mechanical structure layer 300. The anchor region 321 may be disposed on the symmetry axis x. In the embodiment shown in fig. 3, the anchor region 321 itself may be symmetrical with respect to the symmetry axis x. The elastic connection 331 may be connected between the anchor region 321 and the mass 311. In the present application, the anchor region may be fixed to the substrate layer shown in fig. 2, for example.

In the present application, "connected" may include both direct and indirect connections. Direct connection of component a and component b may mean that no other component is included in the connection from component a to component b. An indirect connection between a component a and a component b may include one or more other components, such as a component c, in the connection from the component a to the component b. That is, component a and component b may be connected by one or more components (which may include component c).

The elastic connection 331 may be used to support the mass 311 such that the mass 311 is suspended between the substrate layer and the cover layer as shown in fig. 2. That is, the elastic connection 331 may be used to provide a levitation support for the mass 311 in the Z-axis direction. In some embodiments, the elastic connection 331 may be relatively stiff in the Z-axis direction.

The elastic connection 331 may also be used to provide a buffer space between the mass 311 and the anchor 321 in the X-axis direction and the Y-axis direction. That is, the rigidity of the elastic connection 331 in the X-axis direction and the Y-axis direction may be relatively small, or the elastic connection 331 may have elasticity in the X-axis direction and the Y-axis direction. The rigidity of the elastic connection 331 in the Z-axis direction may be greater than the rigidity of the elastic connection 331 in the X-axis direction or the rigidity in the Y-axis direction.

In some embodiments provided by the present application, the elastic connection 331 may include a connection beam 3311 and a connection beam 3312. Since the mass 311 is used to detect angular velocities in the X-axis direction and the Z-axis direction, the mass 311 can have a displacement component in the Y-axis direction when no external force is applied. That is, the driving direction of the mass 311 may be the Y-axis direction, and the detection direction of the mass 311 may be the X-axis direction and the Z-axis direction. Accordingly, one of the connection beams 3311 and 3312 may be disposed perpendicularly with respect to the driving direction of the mass 311, and the other of the connection beams 3311 and 3312 may be disposed perpendicularly with respect to the detection direction of the mass 311.

In one embodiment shown in fig. 3, the connection beams 3311 may be arranged in parallel with respect to the Y-axis direction so that the connection beams 3311 may be arranged perpendicularly with respect to the detection direction of the mass 311; the connection beams 3312 may be disposed in parallel with respect to the X-axis direction so that the connection beams 3311 may be disposed perpendicularly with respect to the driving direction of the mass 311.

The stiffness of the connection beam 3311 in the Y-axis direction and the Z-axis direction may be relatively large. The rigidity of the connection beam 3311 in the X-axis direction may be relatively small, or the connection beam 3311 may have elasticity in the X-axis direction so that the elastic connection 331 may provide a buffer space in the X-axis direction through the connection beam 3311.

The stiffness of the connection beam 3312 in the X-axis direction and the Z-axis direction may be relatively large. The rigidity of the connection beam 3312 in the Y-axis direction may be relatively small, or the connection beam 3312 may have elasticity in the Y-axis direction so that the elastic connection 331 may provide a buffer space in the Y-axis direction through the connection beam 3312.

Depending on the symmetry of the mechanical structure layer 300, the mechanical structure layer 300 may also include elastic connectors 332. The elastic connection 331 and the elastic connection 332 may be symmetrical with respect to the symmetry axis x. The elastic connector 331 and the elastic connector 332 may be located at both ends of the anchor region 321. A resilient connector 332 may be connected between the mass 313 and the anchor region 321. The elastic connection 332 may be used to support the mass 313 such that the mass 313 is suspended between the substrate layer and the cover layer as shown in fig. 2. That is, the elastic connection 332 may be used to provide levitation support for the mass 313 in the Z-axis direction.

The elastic connection 332 may be used to support the mass 313 such that the mass 313 is suspended between the substrate layer and the cover layer as shown in fig. 2. That is, the elastic connection 332 may be used to provide levitation support for the mass 313 in the Z-axis direction. In some embodiments, the resilient connection 332 may be relatively stiff in the Z-axis direction.

The elastic connection 332 may also be used to provide a buffer space between the mass 313 and the anchor 321 in the X-axis direction and the Y-axis direction. That is, the stiffness of the elastic connection 332 may be relatively small in the X-axis direction and the Y-axis direction, or the elastic connection 332 may have elasticity in the X-axis direction and the Y-axis direction.

Since the mass 311 and the mass 313 may be symmetrical with respect to the symmetry axis x, reference may be made to the embodiment related to the elastic connection 331 for the specific embodiment of the elastic connection 332.

To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include an anchor region 322, an elastic connection 333, and an elastic connection 334. The anchor regions 321 and 322 may be symmetrical with respect to the torsion beam y. The elastic connection 333 and the elastic connection 331 may be symmetrical with respect to the torsion beam y. The elastic connection 334 and the elastic connection 332 may be symmetrical with respect to the torsion beam y. For specific embodiments of anchor region 322 reference may be made to embodiments of anchor region 321. Reference may be made to embodiments of the elastic connection 333 for specific embodiments of the elastic connection 331. Specific embodiments of the elastic connector 334 can be referenced with respect to the embodiment of the elastic connector 332.

The mechanical structure layer 300 may further include an anchor region 323, a torsion beam 341, and a drive beam 351. The anchor region 323 may be disposed on the symmetry axis x. In the embodiment shown in fig. 3, the anchor region 323 itself may be symmetrical with respect to the symmetry axis x. Torsion beam 341 may be coupled to anchor region 323. The torsion beam 341 itself may be symmetrical with respect to the symmetry axis x. The end of the torsion beam 341 remote from the anchor zone 323 may be connected with a drive beam 351. The drive beam 351 itself may be symmetrical with respect to the symmetry axis x. The location of the transfer beam 351 connected to the torsion beam 341 may correspond to a central region of the transfer beam 351.

Torsion beams 341, drive beams 351 may be used to provide suspension support for mass 311 in the Z-axis direction. In connection with the above, one end of the mass 311 may be supported by the anchor region 321, the elastic connection 331, and the other end of the mass 311 may be supported by the anchor region 323, the torsion beam 341, and the driving beam 351. The torsional beams 341, the transfer beams 351 may be relatively stiff in the Z-axis direction.

The drive beam 351 may be used to twist about the torsion beam 341, thereby providing a buffer space for the mass 311 and the mass 313 in the Z-axis direction. In one embodiment, the torsion beam 341 may provide torsional stiffness to the drive beam 351 along the torsion beam 341 or along the X-axis direction.

To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include an anchor region 324, a torsion beam 342, and a driving beam 352. Anchor region 323 and anchor region 324 may be symmetrical with respect to symmetry axis y. The torsion beams 342 and 341 may be symmetrical with respect to the symmetry axis y. The drive beams 352 and 351 may be symmetrical with respect to the symmetry axis y. For specific embodiments of anchor region 324, reference may be made to embodiments of anchor region 323. For specific embodiments of the torsion beam 342, reference may be made to embodiments of the torsion beam 341. For specific embodiments of drive beam 352, reference may be made to embodiments of drive beam 351. In some embodiments, anchor region 323 can be integrally formed with anchor region 321. Similarly, anchor region 324 may be integrally formed with anchor region 322.

In some embodiments, the mechanical structure layer 300 may also include an elastic connector 335. The elastic connection 335 may be connected between the drive beam 351 and the mass 311. The elastic connection 335 may be used to provide a levitation support for the mass 311 in the Z-axis direction. The stiffness of the elastic connection 335 in the Z-axis direction may be relatively large.

At least one of the driving beam 351 and the elastic connection 335 may have a relatively small stiffness or elasticity in the X-axis direction, thereby providing a buffer space for the mass 311 and the mass 313 in the X-axis direction. In one embodiment provided by the present application, the drive beam 351 may have a relatively small stiffness or elasticity in the X-axis direction. In one possible scenario, the torsion beam 341 may provide torsional stiffness to the drive beam 351 in the Z-axis direction. In one embodiment, the resilient connectors 335, 336 may be relatively stiff in the X-axis direction.

At least one of the driving beam 351 and the elastic connection 335 may have a relatively small stiffness or elasticity in the Y-axis direction, thereby providing a buffer space for the mass 311 and the mass 313 in the Y-axis direction. In one embodiment provided by the present application, the resilient connection 335 may be relatively less stiff or resilient in the Y-axis direction. In one possible scenario, the stiffness of the drive beam 351 in the Y-axis direction may be greater than the stiffness of the elastic connection 335 in the Y-axis direction, such that the drive beam 351 may provide the elastic connection 335 with torsional stiffness in the Y-axis direction or the drive beam 351.

In some embodiments provided by the present disclosure, the overall stiffness of the resilient connector 335 may be less than the overall stiffness of the transfer beam 351, and the overall stiffness of the transfer beam 351 may be less than the overall stiffness of the torsion beam 341.

Depending on the symmetry of the mechanical structure layer 300, the mechanical structure layer 300 may also include elastic connectors 336. The elastic connection member 335 and the elastic connection member 336 may be connected to both ends of the driving beam 351, respectively. That is, the driving beam 351 may be connected between the elastic connection 335 and the elastic connection 336. The end of the elastic connection 336 remote from the drive beam 351 may be connected to the mass 313. The elastic connection 335 and the elastic connection 336 may be symmetrical with respect to the symmetry axis x. Since mass 311 and mass 313 may be symmetrical with respect to symmetry axis x, reference may be made to embodiments of elastic connection 336 for specific embodiments of elastic connection 335.

To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include an elastic connection piece 337 and an elastic connection piece 338. The resilient connection 337 and the resilient connection 335 may be symmetrical with respect to the symmetry axis y. The elastic connection 338 and the elastic connection 336 may be symmetrical with respect to the symmetry axis y. For specific embodiments of the resilient connector 337 reference may be made to embodiments of the resilient connector 335. Specific embodiments of the elastic connection 338 may be referred to with respect to embodiments of the elastic connection 336.

In the embodiment shown in fig. 3, to improve the stability of the suspension of the mass 311 on the substrate layer, the position 1 on the mass 311 connected to the anchor region 321, the position 2 on the mass 311 connected to the anchor region 322, the position 3 on the mass 311 connected to the anchor region 323, or the position 1 on the mass 311 connected to the anchor region 321, the position 3 on the mass 311 connected to the anchor region 323, the position 4 on the mass 311 connected to the anchor region 324 are not collinear.

As shown in fig. 3, the mass 311 and the anchor 321 are connected by an elastic connection 331, and the position 1 on the mass 311 connected to the anchor 321 is the portion where the elastic connection 331 and the mass 311 are connected. The mass 311 and the anchor region 322 are connected by an elastic connection 333, and the position 2 on the mass 311 connected to the anchor region 322 is the portion where the elastic connection 333 and the mass 311 are connected. The mass 311 and the anchor region 323 are connected by an elastic connection 335, and the position 3 on the mass 311 connected with the anchor region 323 is the portion where the elastic connection 335 and the mass 311 are connected. Thus, positions 1, 2, 3 may not be collinear.

As shown in fig. 3, the mass 311 and the anchor 321 are connected by an elastic connection 331, and the position 1 on the mass 311 connected to the anchor 321 is the portion where the elastic connection 331 and the mass 311 are connected. The mass 311 and the anchor region 323 are connected by an elastic connection 335, and the position 3 on the mass 311 connected with the anchor region 323 is the portion where the elastic connection 335 and the mass 311 are connected. The mass 311 and the anchor region 324 are connected by an elastic connection piece 337, and a position 4 on the mass 311 connected to the anchor region 324 is a portion where the elastic connection piece 337 and the mass 311 are connected. Thus, positions 1, 3, 4 may not be collinear.

The mechanical-structure layer 300 may also include anchor regions 325, torsion beams 343, torsion beams 344. The anchor regions 325 are disposed on both the axis of symmetry x and the axis of symmetry y. That is, the anchor region 325 may cover the intersection of the symmetry axis x and the symmetry axis y. The anchor region 325 may be disposed at the intersection of the symmetry axis x and the symmetry axis y. In the embodiment shown in fig. 3, the anchor region 325 itself may be symmetrical about the symmetry axis x, y. Torsion beams 343 and 344 can be connected to opposite ends of the anchor region 325, respectively. The torsion beam 343 itself and the torsion beam 344 itself may be symmetrical with respect to the symmetry axis y. The torsion beams 343 and 344 may be symmetrical with respect to the symmetry axis x.

The mechanical structure layer 300 may also include a support 360. The support 360 itself may be symmetrical with respect to the symmetry axis x, y. The support 360 may have a support fenestration 361. The support fenestration 361 may be around the periphery of the anchor zone 325. The support fenestration 361 may be symmetrical with respect to an axis of symmetry x, an axis of symmetry y. That is, the support fenestration 361 may be located in a center region of the support 360. The inner wall of the support fenestration 361 may be coupled to the torsion beam 343 and the torsion beam 344. That is, an end of the torsion beam 343 remote from the anchor zone 325 may be coupled to a first location of the inner wall of the support fenestration 361. The end of the torsion beam 344 remote from the anchor region 325 may be coupled to a second location on the inner wall of the support fenestration 361. The first and second positions may be symmetrical with respect to the symmetry axis x. The first and second positions lie on the symmetry axis y.

The support 360 may include a support end 362, and the support end 362 may be disposed proximate to the mass 312 and coupled to the mass 312. The supports 360, torsion beams 343, torsion beams 344 may be used to support the mass 312 such that the mass 312, 314 may be suspended between the substrate layer and the cover layer shown in fig. 2. That is, the supports 360, the torsion beams 343, 344 may be used to provide suspension support in the Z-axis direction for the masses 312, 314. In some embodiments, the stiffness of the support 360, torsion beams 343, torsion beams 344 in the Z-axis direction may be relatively large.

The stiffness of the support 360, the torsion beams 343, 344 in the Y-axis direction may be relatively large, so that the support 360, the torsion beams 343, 344 may provide a supporting force to the mass 312 in the Y-axis direction to reduce a displacement component of the mass 312 in the Y-axis direction.

The support 360 may rotate about the torsion beams 343, 344. The support 360 may be used to absorb the Z-axis directional displacement component to reduce the amount of deformation of the anchor region 325 under traction of the mass 312. In some embodiments, the torsion beams 343, 344 may provide torsional stiffness to the support 360 in the Y-axis direction or along the torsion beams 343, 344.

Depending on the symmetry of the mechanical structure layer 300, the support 360 may also include support ends 363. The support end 362 and the support end 363 may be symmetrical with respect to the symmetry axis y. Support ends 363 may be disposed adjacent to mass 314 and connected to mass 314. The supports 360, torsion beams 343, torsion beams 344 can also be used to support the proof mass 314 so that the proof mass 314 can be suspended between the substrate layer and the cover layer shown in fig. 2. The support 360, torsion beams 343, torsion beams 344 can also be used to provide support force to the proof mass 314 in the Y-axis direction to reduce the displacement component of the proof mass 314 in the Y-axis direction. Since mass 312 and mass 314 may be symmetrical with respect to axis of symmetry y, reference may be made to embodiments of support end 361 for specific embodiments of support end 363.

In some embodiments provided by the present application, the mechanical structure layer 300 may also include an elastic connector 339. The elastic connection 339 itself may be symmetrical with respect to the symmetry axis x. The elastic connection 339 may be connected between the support end 362 of the support 360 and the mass 312. That is, the support 360 and the mass 312 may be connected by an elastic connection 339.

In the embodiment shown in fig. 3, the mass 312 may include a mass aperture 3121. The mass gap 3121 itself may be symmetrical with respect to the symmetry axis x. The elastic connection 339 may span the mass gap 3121, that is, one end of the elastic connection 339 may be connected with the position a of the mass gap 3121, and the other end of the elastic connection 339 may be connected with the position b of the mass gap 3121, wherein the position a and the position b may be disposed opposite, and the position a and the position b may be symmetrical with respect to the symmetry axis x.

The elastic connection 339 may be used to support the mass 312 such that the mass 312 may be suspended between the substrate layer and the cover layer as shown in fig. 2. That is, the elastic connection 339 may be used to provide suspension support for the mass 312 in the Z-axis direction. In some embodiments, the elastic connection 339 may be relatively stiff in the Z-axis direction.

The elastic connection 339 may also be used to provide a buffer space for the mass 312 in the X-axis direction. That is, the stiffness of the elastic connection 339 in the X-axis direction may be relatively small, or the elastic connection 339 may have elasticity in the X-axis direction. In one embodiment, the stiffness of the elastic connection 339 in the X-axis direction may be less than the stiffness of the support 360 in the X-axis direction.

In some embodiments, the stiffness of the elastic connection 339 in the Y-axis direction may be relatively greater to facilitate the supporting effect of the anchor region 325 on the mass 312 and the mass 314 in the Y-axis direction, reduce the amount of displacement of the mass 312 and the mass 314 in the Y-axis direction, and reduce the influence of the angular velocity component of the mass 312 and the mass 314 about the X-axis direction.

Depending on the symmetry of the mechanical structure layer 300, the mechanical structure layer 300 may also include elastic connectors 3310. The elastic connection 3310 itself may be symmetrical with respect to the symmetry axis x. The elastic connection 339 and the elastic connection 3310 may be symmetrical with respect to the symmetry axis y. An elastic connection 3310 may be connected between the support end 363 of the support 360 and the mass 314. That is, the support 360 and the mass 314 may be connected by an elastic connection 3310.

In the embodiment shown in fig. 3, the mass 314 may include a mass gap 3141. The mass gap 3141 itself may be symmetrical with respect to the symmetry axis x. The mass gap 3121 and the mass gap 3141 may be symmetrical with respect to the symmetry axis y. The elastic connection 3310 may span across the mass gap 3141 to connect with the mass 314.

Since the masses 312 and 314 are symmetrical about the axis of symmetry y, reference is made to the embodiment of the elastic connection 3310 for specific embodiments of the elastic connection 339.

The mechanical structure layer 300 may also include an anchor region 326 and a driver 371. The anchor region 326 itself may be symmetrical about the symmetry axis y. The driver 371 itself may be symmetrical about the symmetry axis y. The driver 371 may belong to a mover of the mechanical structure layer 300. The driving member 371 is movable in the Y-axis direction with respect to the anchor region 326, that is, the driving member 371 may have a displacement component in the Y-axis direction with respect to the anchor region 326. The anchor region 326 may have a drive electrode disposed thereon that forms a capacitance with the drive element 371 such that the drive element 371 is movable in the Y-axis direction relative to the anchor region 326.

In the present application, the member may have a displacement component in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction. The component of displacement of the component in the X-axis direction may be a projection of the displacement of the component in the X-axis direction. The component of displacement of the component in the Y-axis direction may be a projection of the displacement of the component in the Y-axis direction. The component of displacement of the component in the Z-axis direction may be a projection of the displacement of the component in the Z-axis direction. The displacement of the member may be a vector sum of a displacement component of the member in the X-axis direction, a displacement component in the Y-axis direction, and a displacement component in the Z-axis direction. When the member has a displacement component only in the X-axis direction, the member can be moved in the X-axis direction. When the member has a displacement component only in the Y-axis direction, the member can be moved in the Y-axis direction. When the member has a displacement component only in the Z-axis direction, the member can be moved in the Z-axis direction.

In one embodiment, the mechanical structure layer 300 may further include fixed comb teeth 3261 and movable comb teeth 3711. The fixed comb 3261 can be fixed to the anchor region 326. The movable comb 3711 may be fixed to the driving member 371. The fixed comb 3261 and the movable comb 3711 may be disposed at a crossing interval.

In the present application, the fixed comb teeth may belong to a stator of the mechanical structure layer 300, and the movable comb teeth may belong to a mover of the mechanical structure layer 300. The fixed comb teeth may include a plurality of fixed teeth and the movable comb teeth may include a plurality of movable teeth. The crossed interval between the fixed comb teeth and the movable comb teeth can mean that two adjacent fixed teeth are provided with movable teeth, two adjacent movable teeth are provided with fixed teeth, and the adjacent fixed teeth and the movable teeth are arranged at intervals.

By inputting alternating current to the driving member 371 and the anchor area 326, the interaction force between the movable comb teeth 3711 and the fixed comb teeth 3261 can drive the movable comb teeth 3711 to move in the Y-axis direction relative to the fixed comb teeth 3261, and thus the driving member 371 can have a displacement component in the Y-axis direction relative to the anchor area 326. The driving member 371 may be connected to the mass 311 at the anchor region 326, so that the mass 311 may have a displacement component in the Y-axis direction under the driving of the driving member 371. When the mass 311 is not subjected to an external force, the mass 311 can move in the Y-axis direction.

To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include an anchor region 327 and a driving member 372. Anchor region 327 and anchor region 326 may be symmetrical with respect to symmetry axis x. The driving member 372 and the driving member 371 may be symmetrical with respect to the symmetry axis x. The driving member 372 can move in the Y-axis direction relative to the anchor region 327. The moving direction of the driving piece 372 and the moving direction of the driving piece 371 may be symmetrical. The driving member 372 may be coupled between the anchor region 327 and the mass 313 such that the mass 313 may have a displacement component in the Y-axis direction under the driving of the driving member 372. The driving piece 371 and the driving piece 372 may satisfy the differential decoupling condition, and thus the moving direction of the mass 313 and the moving direction of the mass 311 may be symmetrical when no external force is applied. For specific embodiments of the driving member 372, reference may be made to embodiments of the driving member 371. Specific embodiments of anchor region 327 may refer to embodiments relating to anchor region 326.

Fig. 5 shows a schematic structural diagram of the movement of the mass 311, 313 in the Y-axis direction. The broken lines in fig. 5 show the positions of the masses 311, 313 before movement, and the solid lines in fig. 5 show the positions of the masses 311, 313 after movement.

In the embodiment shown in fig. 3, the mass 311 may include a mass window 3111. The mass window 3111 may surround the outer circumference of the anchor region 326. The inner wall of the mass window 3111 may be connected to a drive 371. That is, the anchor region 326 and the driver 371 are located within the mass window 3111. The mass fenestration 3111 itself may be symmetrical about the axis of symmetry y.

In the embodiment shown in fig. 3, the mass 313 may include a mass fenestration 3131. The mass window 3131 may surround the outer circumference of the anchor region 327. The inner wall of the mass window 3131 may be connected to the driving member 372. That is, the anchor region 327 and the driver 372 are located within the mass fenestration 3131. The mass fenestration 3131 itself may be symmetrical about the axis of symmetry y. The mass fenestration 3131 and the mass fenestration 3111 may be symmetrical with respect to the symmetry axis x.

In the embodiment shown in fig. 3, the mass 311 may be a separate component, the mass 311 may have a receiving area (which may be a mass gap 3115) that may be located on a side of the mass 311 remote from the drive 372, and the mass 312 and the mass 314 may be disposed within the receiving area. Providing a receiving area on the side of the mass 311 remote from the driving member 372 facilitates deflection of the mass 311 about the X-axis direction relative to the side of the mass 311 near the driving member 372, with a relatively small displacement component of the mass 311 in the Z-axis direction on the side near the driving member 372, and a relatively large displacement component of the mass 311 in the Z-axis direction on the side remote from the driving member 372. It is advantageous to reduce the displacement components of the mass 312 and the mass 314 in the Z-axis direction under the traction of the mass 311.

In other possible embodiments, the mass 311 may also be assembled from multiple components. For example, the mass 311 may include a mass a and a mass b separately provided, and the mass a and the mass b may be symmetrical with respect to the symmetry axis y. The mass member a and the mass member b may be connected to both sides of the driving member 371, respectively.

When the mass 311 is a separate component, the integrity of the mass 311 is relatively high and the co-frequency differential performance of the mass 311 may be better. When the mass block 311 is assembled by a plurality of components, the overall mass of the mass block 311 can be slightly reduced, which is beneficial to improving the movement amplitude of the mass block 311 and improving the detection sensitivity of the inertial sensor. However, since the plurality of members are required to satisfy the common-frequency difference requirement, the processing accuracy of the mass block 311 is required to be high.

In combination with the above, the first end of the mass 311 may be supported by the anchor region 321 and the elastic connection 331, the second end of the mass 311 may be supported by the anchor region 322 and the elastic connection 333, the third end of the mass 311 may be supported by the anchor region 323 and the elastic connection 335, and the fourth end of the mass 311 may be supported by the anchor region 324 and the elastic connection 337. When the mass 311 has a displacement component in the Y-axis direction, the elastic connection 331, 333, 335, 337 may serve to provide the mass 311 with a buffer space in the Y-axis direction to reduce the amount of deformation of the anchor regions 321, 322, 323, 324.

In connection with the above, the first end of the mass 313 may be supported by the anchor region 321 and the elastic connection 332, the second end of the mass 313 may be supported by the anchor region 322 and the elastic connection 334, the third end of the mass 313 may be supported by the anchor region 323 and the elastic connection 336, and the fourth end of the mass 313 may be supported by the anchor region 324 and the elastic connection 337. When the mass 313 has a displacement component in the Y-axis direction, the elastic connection members 332, 334, 336, 337 may serve to provide the mass 313 with a buffer space in the Y-axis direction to reduce the amount of deformation of the anchor regions 321, 322, 323, 324.

Since the elastic connection member 331 and the elastic connection member 332 are symmetrical with respect to the symmetry axis x, the elastic component force in the Y-axis direction applied to the elastic connection member 331 and the elastic component force in the Y-axis direction applied to the elastic connection member 332 can cancel each other, which is advantageous for reducing the deformation amount of the anchor region 321 in the Y-axis direction.

Since the elastic connection member 333 and the elastic connection member 334 are symmetrical with respect to the symmetry axis x, the elastic component force in the Y-axis direction applied to the elastic connection member 333 and the elastic component force in the Y-axis direction applied to the elastic connection member 334 can cancel each other, which is advantageous for reducing the deformation amount of the anchor region 322 in the Y-axis direction.

Since the elastic connection member 335 and the elastic connection member 336 are symmetrical with respect to the symmetry axis x, the elastic component force in the Y-axis direction applied to the elastic connection member 335 and the elastic component force in the Y-axis direction applied to the elastic connection member 336 can cancel each other, which is advantageous for reducing the deformation amounts of the anchor region 323 and the torsion beam 341 in the Y-axis direction.

Since the elastic connection piece 337 and the elastic connection piece 338 are symmetrical with respect to the symmetry axis x, the elastic component force in the Y-axis direction applied to the elastic connection piece 337 and the elastic component force in the Y-axis direction applied to the elastic connection piece 338 can cancel each other, which is beneficial to reducing the deformation amount of the anchor region 324 and the torsion beam 342 in the Y-axis direction.

The mechanical structure layer 300 may also include a drive beam assembly 381. The drive beam assembly 381 itself may be symmetrical about the axis of symmetry y. The drive beam assembly 381 may include a connection end 3811, a connection end 3812, and a connection end 3813. The connection ends 3812, 3813 may be symmetrical with respect to the symmetry axis y.

The connection end 3811 may be connected to the driving member 371. In the embodiment shown in FIG. 3, the connection end 3811 may be coupled to the drive 371 via the mass 311. The connection end 3812 may be coupled to the mass 312. The connection end 3813 may be connected to the mass 314. The drive beam assembly 381 may transmit translational driving forces between the driving member 371 and the mass 312, and the driving member 371 and the mass 314, such that the mass 312 and the mass 314 reciprocate under the driving of the driving member 371. In the embodiment shown in fig. 3, since the mass 311 is connected between the driver 371 and the drive beam assembly 381, the drive beam assembly 381 may transmit translational driving forces between the mass 311 and the mass 312, and between the mass 311 and the mass 314, such that the mass 312 and the mass 314 reciprocate under the driving of the mass 311.

The drive beam assembly 381 is also used to convert translational driving force in the Y-axis direction from the drive 371 to translational driving force in the X-axis direction. Referring to fig. 6, the driving beam assembly 381 may further be used to convert a displacement component of the connection end 3811 in the Y-axis direction into a displacement component of the connection ends 3812 and 3813 in the X-axis direction. That is, when the connection end 3811 of the transmission beam assembly 381 moves in the Y-axis direction, the connection ends 3812 and 3813 of the transmission beam assembly 381 may have a displacement component in the X-axis direction, and the displacement components of the connection ends 3812 and 3813 of the transmission beam assembly 381 may be symmetrical with respect to the symmetry axis Y. The decoupling degree of the mass blocks 311 and 312 is advantageously improved by the drive beam assembly 381 and 382.

In some embodiments, as shown in fig. 6, when the connection end 3811 of the transmission beam assembly 381 moves in the y+ direction, the connection end 3812 of the transmission beam assembly 381 may have a displacement component in the x+ direction, the connection end 3813 of the transmission beam assembly 381 may have a displacement component in the X-direction, and the connection end 3812 and the connection end 3813 of the transmission beam assembly 381 may have the same movement amplitude. When the connection end 3811 of the transmission beam assembly 381 moves in the Y-direction, the connection end 3812 of the transmission beam assembly 381 may have a displacement component in the X-direction, the connection end 3813 of the transmission beam assembly 381 may have a displacement component in the x+ direction, and the connection end 3812 and the connection end 3813 of the transmission beam assembly 381 may have the same movement amplitude.

The masses 312, 314 may have a displacement component in the X-axis direction under the traction of the drive beam assembly 381. That is, the mass 312 and the mass 314 can reciprocate in the X-axis direction when the inertial sensor is not subjected to an external force. In the embodiment shown in fig. 5, in the case where the driver 371 has a positive displacement component in the Y-axis direction, the mass 312 may have a positive displacement component in the X-axis direction, and the mass 314 may have a negative displacement component in the X-axis direction; in the case where the driver 371 has a negative displacement component in the Y-axis direction, the mass 312 may have a negative displacement component in the X-axis direction, and the mass 314 may have a positive displacement component in the X-axis direction. Thus, the direction of movement of the mass 314 and the direction of movement of the mass 312 may be symmetrical.

In connection with the embodiment shown in fig. 3 and 6, the drive beam assembly 381 may include a drive beam 381a, a drive beam 381b, and a drive beam 381c.

The drive beam 381a may itself be symmetrical about the symmetry axis y. In one embodiment, as shown in FIG. 6, drive beam 381a may be a straight beam. The drive beam 381a may also have other shapes, such as a trapezoidal beam or the like. One end of the transmission beam 381a may be connected to the driving piece 371 or the mass 311, and the other end of the transmission beam 381a may be connected to the transmission beam 381b and the transmission beam 381c. That is, the drive beam 381b and the drive beam 381c may meet at an end of the drive beam 381a remote from the driver 371 or the mass 311. In one embodiment, the end of the drive beam 381a that is connected to the drive 371 or the mass 311 may correspond to the connection end 3811 of the drive beam assembly 381, the end of the drive beam 381b that is distal from the drive beam 381a may correspond to the connection end 3812 of the drive beam assembly 381, and the end of the drive beam 381c that is distal from the drive beam 381a may correspond to the connection end 3813 of the drive beam assembly 381.

The drive beams 381b and 381c may be symmetrical with respect to the symmetry axis y. The drive beam 381b may include one or more drive segments 3811b that are inclined or perpendicular relative to the drive beam 381 a. The drive beam 381c may include one or more drive segments 3811c that are inclined or perpendicular relative to the drive beam 381 a. The one or more transmission segments 3811b may be symmetrical with the one or more transmission segments 3811c with respect to the axis of symmetry y such that the transmission beam 381b and the transmission beam 381c as a whole may be symmetrical with respect to the axis of symmetry y. That is, one or more of the transmission segments 3811b may correspond one-to-one with one or more of the transmission segments 3811c, and the transmission segments 3811b and 3811c corresponding to each other may be symmetrical with respect to the symmetry axis y.

In some embodiments, drive beam 381b may also include one or more connection segments 3812b. The connection segments 3812b may be disposed in parallel with respect to the drive beams 381a and connected between adjacent two of the drive segments 3811b. The transmission beam 381c may further include a connection section 3812c, and the connection section 3812c may be disposed in parallel with respect to the transmission beam 381a and connected between adjacent two transmission sections 3811c. The one or more connection segments 3812b may be symmetrical with the one or more connection segments 3812c with respect to the axis of symmetry y such that the drive beam 381b and the drive beam 381c as a whole may be symmetrical with respect to the axis of symmetry y. That is, one or more of the connection segments 3812b may correspond one-to-one with one or more of the connection segments 3812c, and the connection segments 3812b and 3812c corresponding to each other may be symmetrical with respect to the symmetry axis y.

In the embodiment shown in fig. 6, the transmission beam 381b may include a transmission segment 3811b1, a transmission segment 3811b2, and a connection segment 3812b, and the transmission segments 3811b1 and 3811b2 may be disposed vertically with respect to the transmission beam 381a, with the connection segment 3812b being connected between the transmission segments 3811b1 and 3811b 2. The transmission beam 381c may include a transmission segment 3811c1, a transmission segment 3811c2, and a connection segment 3812c, and the transmission segment 3811c1 and the transmission segment 3811c2 may be disposed vertically with respect to the transmission beam 381a, with the connection segment 3812c being connected between the transmission segment 3811c1 and the transmission segment 3811c 2. Wherein the transmission segment 3811b1 may be symmetrical with the transmission segment 3811c1 with respect to the symmetry axis y; the transmission segment 3811b2 may be symmetrical with the transmission segment 3811c2 with respect to the symmetry axis y; the connection segment 3812b may be symmetrical with the connection segment 3812c with respect to the symmetry axis y.

When the transmission beam 381a has a displacement component in the extending direction of the transmission beam 381a, since the transmission beam 381b and the transmission beam 381c include portions different from the extending direction of the transmission beam 381a, the transmission beam 381b and the transmission beam 381c may be pulled by the transmission beam 381a, an end of the transmission beam 381b remote from the transmission beam 381a, and an end of the transmission beam 381c remote from the transmission beam 381a may have a displacement component in a direction perpendicular to the extending direction of the transmission beam 381 a. The drive beam assembly 381 may have a steering function.

To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include a drive beam assembly 382. The drive beam assembly 382 may be symmetrical with the drive beam assembly 381 about the axis of symmetry x. The drive beam assembly 382 may include a connection end 3821, a connection end 3822, and a connection end 3823. The connection ends 3822, 3823 may be symmetrical with respect to the symmetry axis y. The connection ends 3821, 3811 may be symmetrical with respect to the symmetry axis x. The connection ends 3822, 3812 may be symmetrical with respect to the symmetry axis x. The connection ends 3823, 3813 may be symmetrical with respect to the symmetry axis x.

The connection end 3821 may be connected to the driving member 372. In the embodiment shown in fig. 3, the connecting end 3821 may be coupled to the driving member 372 via the mass 313. The connection end 3822 may be coupled to the mass 312. The connection end 3823 may be connected to the mass 314. A drive beam assembly 382 may transmit translational drive forces between the drive member 372 and the mass 312, and the drive member 372 and the mass 314, such that the mass 312 and the mass 314 reciprocate in the X-axis direction under the drive of the drive member 372. Specific embodiments of drive beam assembly 382 may be referenced with respect to embodiments of drive beam assembly 381.

Fig. 5 shows a schematic structural view of the movement of the masses 312, 314 in the X-axis direction. The broken lines in fig. 5 show the positions of the masses 312, 314 before movement, and the solid lines in fig. 5 show the positions of the masses 312, 314 after movement. As shown in fig. 5, the mass 312 and the mass 314 may have a displacement component in the X-axis direction under the traction of the driver 371 by the drive beam assembly 381. The masses 312, 314 may have a displacement component in the X-axis direction under the traction of the drive member 372 by the drive beam assembly 382.

In connection with the above, a first end of mass 312 may be supported by mass 311, drive beam assembly 381, a second end of mass 312 may be supported by mass 313, drive beam assembly 382, and a third end of mass 312 may be supported by anchor region 325, torsion beam 343, torsion beam 344, and support 360 (and in one possible embodiment, elastic connection 339). As shown in fig. 5, when the mass 312 has a displacement component in the X-axis direction, the elastic connection 339 may be used to provide a buffer space for the mass 312 in the X-axis direction to reduce the amount of deformation of the anchor region 325.

In connection with the above, a first end of mass 314 may be supported by mass 311, drive beam assembly 381, a second end of mass 314 may be supported by mass 313, drive beam assembly 382, and a third end of mass 314 may be supported by anchor region 325, torsion beam 343, torsion beam 344, and support 360 (and in one possible embodiment, elastic connection 3310). As shown in fig. 5, when the mass 314 has a displacement component in the X-axis direction, the elastic connection 3310 may be used to provide a buffer space for the mass 314 in the X-axis direction to reduce the amount of deformation of the anchor region 325.

Since the drive beam assembly 381 and the drive beam assembly 382 are symmetrical with respect to the symmetry axis x, the elastic component force in the Y-axis direction applied to the drive beam assembly 381 and the elastic component force in the Y-axis direction applied to the drive beam assembly 382 can cancel each other, which is advantageous for reducing the deformation amounts of the mass block 312, the mass block 314, the anchor region 322, the supporting member 360, the torsion beam 343, and the torsion beam 344 in the Y-axis direction.

Since the elastic connection member 339 and the elastic connection member 3310 are symmetrical with respect to the symmetry axis y, the elastic component force in the X-axis direction applied to the elastic connection member 339 and the elastic component force in the X-axis direction applied to the elastic connection member 3310 can cancel each other, which is advantageous in reducing the deformation amount of the anchor region 325 in the X-axis direction.

In one possible embodiment, the displacement component of the drive 371 in the X-axis direction, the Z-axis direction may be relatively small or even negligible. For example, the drive 371 may be carried or supported by the substrate layer or anchor region 32 and constrained to move in the Y-axis direction. Since the displacement component of the mass 311 in the Z-axis direction may not affect the driving piece 371, the driving piece 371 and the mass 311 may satisfy a principle decoupling condition. Principle decoupling may mean that part a and part B do not belong to separate layouts, part a detects a change in capacitance in the direction of axis a, part B does not move on axis a, or the amount of movement of part B on axis a is negligible. That is, the resonance of component B does not affect the detection of component a. The principle structure is to circumvent or reduce the influence between the two components from the point of view of the detection principle.

In another possible embodiment, during rotation of mechanical structure layer 300, drive 371 may have a displacement component in the X-axis direction and/or the Z-axis direction, e.g., under the traction of mass 311, drive 371 may have a displacement component in the X-axis direction and/or in the Z-axis direction; alternatively, the driver 371 may pull the mass 311 such that the mass 311 has a displacement component in the X-axis direction and/or in the Z-axis direction. Since the mechanical structure layer 300 includes the mass 313 and the mass 311 satisfying the differential decoupling condition, the detection accuracy of the inertial sensor can be relatively high even if the driver 371 has a displacement component in the X-axis direction and/or the Z-axis direction.

In the case where the driving member 371 has a displacement component in the X-axis direction, the power transmission beam assembly 381 may have a displacement component in the X-axis direction partially or wholly under the traction of the driving member 371, and thus the traction mass 312 and the mass 314 have a displacement component in the X-axis direction. Since the detection directions of the mass 312 and the mass 314 are the Z-axis directions, the driving element 371 and the mass 312 (or the mass 314) can satisfy the principle decoupling condition.

In the case where the driving member 371 has a displacement component in the Z-axis direction, the power transmission beam assembly 381 may have a displacement component in the Z-axis direction partially or wholly under the traction of the driving member 371, and thus the traction mass 312 and the mass 314 have a displacement component in the Z-axis direction. Since the mass 312 and the mass 314 are symmetrical with respect to the axis of symmetry y, and the mass 312 itself and the mass 314 themselves may be symmetrical with respect to the axis of symmetry x, the detection accuracy of the inertial sensor may be relatively high even if the driving piece 371 has a displacement component in the Z-axis direction in combination with the differential decoupling principle.

Fig. 7 shows a distribution pattern of the detection electrode on the substrate. A capacitance is formed between the detection electrode and the mass block to capture the displacement component of the mass block.

The mechanical-structure layer 300 may also include an anchor region 328. The anchor area 328 is provided with a detection electrode group 391, and the detection electrode group 391 may be disposed opposite to the mass 311, so that the detection electrode group 391 may form a capacitance group 1 with the mass 311. The detection electrode group 391 and the mass 311 may be arranged along the X-axis direction.

In the embodiment shown in fig. 7, anchor regions 328 may have fixed comb teeth secured thereto. In connection with the embodiment shown in fig. 3, movable comb teeth may be fixed to the mass 311. The fixed comb teeth and the movable comb teeth are alternately arranged. The fixed comb teeth and the movable comb teeth can be arranged along the X-axis direction. Each fixed tooth of the fixed comb teeth is provided with a detection electrode, and all detection electrodes arranged on the fixed comb teeth can form a detection electrode group 391. Each movable tooth of the movable comb teeth may form a capacitance with the facing detection electrode, and all capacitances formed by the movable comb teeth and the detection electrode group 391 may constitute a capacitance group 1. By detecting the capacitance variation amount of the capacitor bank 1, the angular velocity component of the mass 311 about the Z-axis direction can be determined. The inertial sensor may include a readout circuit 1, and the readout circuit 1 may be configured to acquire a capacitance change amount of the capacitor bank 1 and output an angular velocity signal, which may indicate an angular velocity component of the mass 311 about the X-axis direction.

In one embodiment, as shown in FIG. 7, the mass 311 may include a mass window 3113, and the mass window 3113 may surround the anchor region 328 and the outer perimeter of the fixed comb. The movable comb 3114 may be connected to an inner wall of the mass window 3113, and a nip formed by the inner wall of the mass window 3113 extending into the fixed comb.

The mechanical-structure layer 300 may also include an anchor region 329. The anchor region 329 is provided with a set of detection electrodes 392, which sets of detection electrodes 392 may be disposed opposite the mass 313 such that the sets of detection electrodes 392 may form a set of capacitances 2 with the mass 313. The detection electrode sets 392 and the masses 313 may be arranged along the X-axis direction.

In the embodiment shown in fig. 7, the anchor region 329 may have fixed comb teeth fixed thereto. In connection with the embodiment shown in fig. 3, movable comb teeth may be fixed to the mass 313. The fixed comb teeth and the movable comb teeth are alternately arranged. The fixed comb teeth and the movable comb teeth can be arranged along the X-axis direction. Each fixed tooth of the fixed comb teeth is provided with a detection electrode, and all detection electrodes arranged on the fixed comb teeth can form a detection electrode group 392. Each movable tooth of the movable comb teeth can form a capacitor with the facing detection electrode, and all the capacitors formed by the movable comb teeth and the detection electrode set 392 can form a capacitor set 2. By detecting the capacitance variation amount of the capacitor bank 2, the angular velocity component of the mass 313 about the Z-axis direction can be determined. The inertial sensor may include a readout circuit 2, and the readout circuit 2 may be configured to acquire a capacitance change amount of the capacitor bank 2 and output an angular velocity signal, which may indicate an angular velocity component of the mass 313 about the Z-axis direction.

In one embodiment, as shown in FIG. 7, the mass 313 may include a mass fenestration 3133, and the mass fenestration 3133 may surround the outer perimeter of the anchor area 329 and the fixed comb teeth. The movable comb teeth may be connected to the inner wall of the mass windowed 3133, and the inner wall of the mass windowed 3133 extends into the nip formed by the fixed comb teeth.

To improve the detection accuracy of the mechanical structure layer 300, the inertial sensor 20 may further include an anchor region 3210, an anchor region 3211, a detection electrode set 393, and a detection electrode set 394. The anchor region 3210 may have a set of detection electrodes 393 disposed thereon, and the set of detection electrodes 393 may form a set of capacitances 3 with the mass 311. The inertial sensor may include a readout circuit 3, and the readout circuit 3 may be configured to acquire a capacitance change amount of the capacitor bank 3 and output an angular velocity signal, which may indicate an angular velocity component of the mass 311 about the Z-axis direction. The anchor region 3211 may be provided with a set of detection electrodes 394, and the set of detection electrodes 394 may form a set of capacitances 4 with the mass 313. The inertial sensor may include a readout circuit 4, and the readout circuit 4 may be configured to acquire a capacitance change amount of the capacitor bank 4 and output an angular velocity signal, which may indicate an angular velocity component of the mass 314 about the Z-axis direction. Anchor region 3210 may be symmetrically disposed with anchor region 328 about axis of symmetry y. The anchor regions 3211 may be symmetrically disposed with respect to the anchor region 329 about the axis of symmetry y. The detection electrode group 393 may be disposed symmetrically with respect to the detection electrode group 391 with respect to the symmetry axis y. The set of detection electrodes 394 may be symmetrically disposed with respect to the set of detection electrodes 392 with respect to the symmetry axis y. Specific embodiments of anchor region 3210 may refer to embodiments of anchor region 328, specific embodiments of anchor region 3211 may refer to embodiments of anchor region 329, and specific embodiments of sense electrode set 393 may refer to embodiments of sense electrode set 391. For specific embodiments of the detection electrode set 394, reference may be made to embodiments relating to the detection electrode set 392.

Inertial sensor 20 may also include a set of detection electrodes 395. The detection electrode group 395 can be provided on the substrate layer shown in fig. 2, for example. The detection electrode group 395 may be provided opposite to the mass 311. The detection electrode group 395 and the mass 311 may be arranged along the Z-axis direction. The set of detection electrodes 395 may itself be symmetrical with respect to the symmetry axis y. In the embodiment shown in fig. 7, detection electrode group 395 may include detection electrode 395a, detection electrode 395b. Detection electrodes 395a, 395b may be symmetrical with respect to symmetry axis y.

The detection electrode group 395 and the mass 311 may be disposed parallel to the XY plane, so that the detection electrode group 395 and the mass 311 may form the capacitor group 5. The capacitor bank 5 may comprise one or more capacitors. In the embodiment shown in fig. 7, the detection electrode 395a and the mass 311 may be a capacitor 5a, the detection electrode 395b and the mass 311 may be a capacitor 5b, and the capacitor 5a and the capacitor 5b may be two capacitors in the capacitor bank 5. The inertial sensor may include a readout circuit 5, and the readout circuit 5 may be configured to acquire a capacitance change amount of the capacitor bank 5 and output an angular velocity signal, which may indicate an angular velocity component of the mass 311 about the X-axis direction.

Inertial sensor 20 may also include a sensing electrode set 396. The set of detection electrodes 396 may be disposed on a substrate layer as shown in fig. 2, for example. The sensing electrode set 396 may be disposed opposite the mass 312. The sensing electrode set 396 and the mass 312 may be aligned along the Z-axis direction. The detection electrode set 396 itself may be symmetrical with respect to the symmetry axis x. In the embodiment shown in fig. 7, the detection electrode set 396 may include a detection electrode 396a, a detection electrode 396b. The detection electrodes 396a, 396b may be symmetrical with respect to the symmetry axis x. The inertial sensor may include a readout circuit 6, and the readout circuit 6 may be configured to acquire a capacitance change amount of the capacitor bank 6 and output an angular velocity signal, which may indicate an angular velocity component of the mass 312 about the Y-axis direction.

The detection electrode group 396 and the mass 312 may be disposed parallel to the XY plane, so that the detection electrode group 396 and the mass 312 may form the capacitance group 6. The capacitor bank 6 may comprise one or more capacitors. In the embodiment shown in fig. 7, the sensing electrode 396a and the mass 312 may be a capacitor 6a, the sensing electrode 396b and the mass 312 may be a capacitor 6b, and the capacitor 6a and the capacitor 6b may be two capacitors in the capacitor bank 6.

Inertial sensor 20 may also include a set of sense electrodes 397 (in the embodiment shown in fig. 7, sense electrode set 397 may include sense electrodes 397a, 397 b). The detection electrode group 397 may be disposed opposite to the mass 313, and the detection electrode group 397 and the mass 313 may be arranged along the Z-axis direction, thereby forming the capacitor group 7. By detecting the capacitance variation amount of the capacitor bank 7, the angular velocity component of the mass 313 about the X-axis direction can be determined. The detection electrode group 397 may be disposed symmetrically with respect to the detection electrode group 395 with respect to the symmetry axis x. Specific embodiments of detection electrode set 397 may refer to embodiments related to detection electrode set 395. The inertial sensor may comprise a readout circuit 3, the readout circuit 3 may be configured to obtain the capacitance variation of the capacitor bank 7, and output an angular velocity signal, which may indicate an angular velocity component of the mass 313 about the X-axis direction.

The inertial sensor 20 may also include a set of detection electrodes 398 (in the embodiment shown in fig. 7, the set of detection electrodes 398 may include detection electrodes 398a, 398 b). The detection electrode set 398 may be disposed opposite to the mass 314, and the detection electrode set 398 and the mass 314 may be arranged along the Z-axis direction, thereby forming the capacitor set 8. By detecting the capacitance variation amount of the capacitor bank 8, the angular velocity component of the mass 314 about the Y-axis direction can be determined. The set of detection electrodes 398 may be disposed symmetrically with respect to the set of detection electrodes 396 with respect to the axis of symmetry y. For a specific embodiment of the detection electrode set 398, reference may be made to an embodiment relating to the detection electrode set 396. The inertial sensor may include a readout circuit 8, and the readout circuit 8 may be configured to acquire a capacitance change of the capacitor bank 8 and output an angular velocity signal, which may indicate an angular velocity component of the mass 314 about the Y-axis direction.

The readout circuits 1 to 8 may be the same readout circuit or may be different readout circuits.

Fig. 8 shows a schematic structural diagram of the inertial sensor 20 detecting the angular velocity about the X-axis direction. The inertial sensor 20 shown in fig. 8 is observed in the x+ direction, and a schematic structural diagram shown in fig. 9 can be obtained. The principle of detecting the angular velocity about the X-axis direction by the mass 311 and the mass 313 is explained below with reference to fig. 8 and 9.

In the present application, the inertial sensor 20 is rotated by an external force, and the inertial sensor 20 may have angular velocity components about the X-axis direction, the Y-axis direction, and the Z-axis direction. The projection of the angular velocity direction of the inertial sensor 20 in the X-axis direction may be an angular velocity component of the inertial sensor 20 around the X-axis direction. The projection of the angular velocity direction of the inertial sensor 20 in the Y-axis direction may be an angular velocity component of the inertial sensor 20 around the Y-axis direction. The projection of the angular velocity direction of the inertial sensor 20 in the Z-axis direction may be an angular velocity component of the inertial sensor 20 around the Z-axis direction. The vector sum of the angular velocity components of the inertial sensor 20 about the X-axis direction, the Y-axis direction, and the Z-axis direction may be the angular velocity direction of the inertial sensor 20.

The mass 311 and the mass 313 may have displacement components in the Y-axis direction. When the inertial sensor 20 as a whole has an angular velocity component rotating about the X-axis direction under the external force, the mass 311 and the mass 313 can receive coriolis force in the Z-axis direction. The mass 311 and the mass 313 may have displacement components in the Z-axis direction. Therefore, the distance between the mass block 311 and the detection electrode group 395 can be changed, and the capacitance value of the capacitor group 5 formed by the mass block 311 and the detection electrode group 395 can be changed; the spacing between the mass 313 and the set of detection electrodes 397 may vary, and the capacitance of the set of capacitances 7 formed by the mass 313 and the set of detection electrodes 397 may vary. The capacitance change amount of the capacitor group 5 formed by the mass 311 and the detection electrode group 395 may correspond to a displacement component of the mass 311 in the Z-axis direction. The capacitance variation amount of the capacitance group 7 formed by the mass 313 and the detection electrode group 397 may correspond to a displacement component of the mass 313 in the Z-axis direction.

Referring to fig. 8 and 9, it is assumed that the driving direction of the mass 311 is y+ and the driving direction of the mass 313 is Y-. The mass 311 may have an angular velocity component rotating about the X-axis direction around the elastic connection 331 and the elastic connection 333, and the mass 313 may have an angular velocity component rotating about the X-axis direction around the elastic connection 332 and the elastic connection 334 under the external force. Thus, the mass 311 may have a displacement component in the Z+ direction and the mass 313 may have a displacement component in the Z-direction. Mass 311 tends to be away from sense electrode set 395 and mass 313 tends to be closer to sense electrode set 397.

Since the detection results of the detection electrode group 395 and the detection electrode group 397 both include common mode noise, the detection results output by the detection electrode group 395 and the detection electrode group 397 are combined, so that the common mode noise can be relatively effectively removed, which is advantageous for improving, for example, the temperature drift performance, the zero drift performance, and the like of the inertial sensor 20.

As shown in fig. 8, a transmission beam 351 is connected between the elastic connection member 335 and the elastic connection member 336. Referring to fig. 9, a drive beam 351 may be connected between the mass 311 and the mass 313. Since the displacement components of the masses 311 and 313 in the Z-axis direction are opposite in direction, the drive beam 351 can be used to rotate about the symmetry axis x with respect to the anchor region 323. Since the elastic connection 335 and the elastic connection 336 have a buffering effect, the degree of inclination of the driving beam 351 may be relatively small, for example, the inclination angle of the driving beam 351 with respect to the torsion beam 341 may be smaller than the inclination angle of the elastic connection 335 with respect to the torsion beam 341. The drive beam 351 is also advantageous in providing the balance force in the Z-axis direction to the mass 311 and the mass 313, and in making the displacement components of the mass 311 and the mass 313 in the Z-axis direction symmetrical.

Fig. 10 shows a schematic structural diagram of the inertial sensor 20 detecting the angular velocity around the Y-axis direction. The inertial sensor 20 shown in fig. 10 is observed in the y+ direction, and a schematic structural diagram shown in fig. 11 can be obtained. The principle of detecting the angular velocity around the Y-axis direction by the mass 312 and the mass 314 is explained below with reference to fig. 10 and 11.

The mass 312 and the mass 314 may have a displacement component in the X-axis direction. When the inertial sensor 20 as a whole has an angular velocity component rotating around the Y-axis direction under the external force, the mass 312 and the mass 314 can receive coriolis force in the Z-axis direction. The mass 312 and the mass 314 may have a displacement component in the Z-axis direction. Therefore, the distance between the mass block 312 and the detection electrode group 396 can be changed, and the capacitance value of the capacitor group 6 formed by the mass block 312 and the detection electrode group 396 can be changed; the spacing between the mass 314 and the set of sense electrodes 398 may vary and the capacitance of the set of capacitances 8 formed by the mass 314 and the set of sense electrodes 398 may vary. The capacitance change amount of the capacitor group 6 formed by the mass 312 and the detection electrode group 396 may correspond to a displacement component of the mass 312 in the Z-axis direction. The capacitance variation of the capacitance set 8 formed by the mass 314 and the detection electrode set 398 may correspond to a displacement component of the mass 314 in the Z-axis direction.

Referring to fig. 10 and 11, it is assumed that the driving direction of the mass 312 is x+ and the driving direction of the mass 314 is X-. Under the external force, the mass 312 may have an angular velocity component rotating around the Y-axis direction around the anchor region 325 or the torsion beam 343 or the torsion beam 344, and the mass 314 may have an angular velocity component rotating around the Y-axis direction around the anchor region 325 or the torsion beam 343 or the torsion beam 344. Thus, the mass 312 may have a displacement component in the Z+ direction and the mass 314 may have a displacement component in the Z-direction. The mass 312 has a tendency to move away from the set of detection electrodes 396 and the mass 314 has a tendency to move closer to the set of detection electrodes 398.

Since the detection results of the detection electrode set 396 and the detection electrode set 398 include common mode noise, the detection results output by the detection electrode set 396 and the detection electrode set 398 are combined, so that the common mode noise can be relatively effectively removed, which is beneficial to improving, for example, temperature drift performance, zero drift performance, and the like of the inertial sensor 20.

As shown in fig. 10, a support member 360 is connected between the elastic connection member 339 and the elastic connection member 3310, and the support member 360 can be twisted around the torsion beam 343, 344. Referring to fig. 10 and 11, an elastic connector 339 may be coupled to the mass 312 and an elastic connector 3310 may be coupled to the mass 314. Because of the opposite direction of the displacement components of masses 312 and 314 in the Z-axis direction, support 360 may be configured to twist about axis of symmetry y relative to anchor region 325.

Because the stiffness of the elastic connection 339, the elastic connection 3310, and the support 360 in the Z-axis direction is relatively large, the degree of torsion of the elastic connection 339, the mass 312, and the support 360 with respect to the anchor region 325 or the torsion beam 343 or the torsion beam 344 may be substantially the same, and the degree of torsion of the elastic connection 3310, the mass 314, and the support 360 with respect to the anchor region 325 or the torsion beam 343 or the torsion beam 344 may be substantially the same. Therefore, the symmetry of displacement components of the mass block 312 and the mass block 314 in the Z-axis direction is improved, and the same-frequency differential motion performance of the mass block 312 and the mass block 314 is improved, so that the detection accuracy of the inertial sensor 20 is improved.

As shown in fig. 10, the mass 312 and the mass 311 are connected by a drive beam assembly 381, and the mass 314 and the mass 313 are connected by a drive beam assembly 382. Because the displacement components of the masses 312 and 314 in the Z-axis direction are opposite in direction, the drive beam assemblies 381 and 382 can withstand torsional forces that twist about the axis of symmetry y to reduce the likelihood that the masses 311 and 313 will be pulled by the twisting of the masses 312 and 314. The drive beam assembly 381 itself and the drive beam assembly 382 itself, the mass 311 itself, and the mass 313 itself may be symmetrical about the same axis of symmetry, also helping to reduce the likelihood that the masses 311 and 313 will be pulled by torsion of the masses 312 and 314. The mass 311 and the mass 313 may be supported by the elastic connection 331, the elastic connection 332, the elastic connection 333, and the elastic connection 334, and the rigidity of the elastic connection 331, the elastic connection 332, the elastic connection 333, and the elastic connection 334 in the Z-axis direction is relatively high, which is also beneficial to reducing the possibility that the mass 311 and the mass 313 are pulled by torsion of the mass 312 and the mass 314.

Fig. 12 shows a schematic structural diagram of the inertial sensor 20 detecting the angular velocity around the Z-axis direction. In fig. 12, the broken line shows the positions of the mass 311 and the mass 313 before rotation in the Z-axis direction, and the solid line shows the positions of the mass 311 and the mass 313 after rotation in the Z-axis direction in fig. 12. The principle of detecting the angular velocity around the Z-axis direction by the mass 311 and the mass 313 is explained below with reference to fig. 12.

The mass 311 and the mass 313 may have displacement components in the Y-axis direction. When the inertial sensor 20 as a whole has an angular velocity component rotating around the Z-axis direction under the external force, the mass 311 and the mass 313 can receive coriolis force in the X-axis direction. The mass 311 and the mass 313 may have displacement components in the X-axis direction.

The distance between the mass block 311 and the detection electrode group 391 can be changed, and the capacitance value of the capacitor group 1 formed by the mass block 311 and the detection electrode group 391 can be changed; similarly, the capacitance value of the capacitance set 3 formed by the mass 311 and the detection electrode set 393 may vary. The capacitance variation of the capacitance set 1 formed by the mass 311 and the detection electrode set 391 and the capacitance variation of the capacitance set 3 formed by the mass 311 and the detection electrode set 393 may correspond to the displacement component of the mass 311 in the X-axis direction.

The spacing between the mass 313 and the set of detection electrodes 392 may vary, and the capacitance of the capacitive set 2 formed by the mass 313 and the set of detection electrodes 392 may vary; similarly, the capacitance of the capacitive group 4 formed by the mass 313 and the detection electrode group 392 may vary. The amount of change in the capacitance value of the capacitance set 2 formed by the mass 313 and the detection electrode set 392, and the amount of change in the capacitance value of the capacitance set 4 formed by the mass 313 and the detection electrode set 394 may correspond to the displacement component of the mass 313 in the X-axis direction.

As shown in fig. 12, it is assumed that the driving direction of the mass 311 is y+, and the driving direction of the mass 313 is Y-. Under the influence of an external force, the mass 311 may have an angular velocity component rotating about the Z-axis direction around the anchor region 325, and the mass 313 may have an angular velocity component rotating about the Z-axis direction around the anchor region 325. Thus, the mass 311 may have a displacement component in the X-direction, and the mass 313 may have a displacement component in the X+ direction. In one embodiment, mass 311 has a tendency to move closer to detection electrode set 391 and away from detection electrode set 393, and mass 313 has a tendency to move away from detection electrode set 392 and closer to detection electrode set 394.

Since the detection results of the detection electrode group 391 and the detection electrode group 392 both include common-mode noise, the detection results output by the detection electrode group 391 and the detection electrode group 392 are synthesized, so that the common-mode noise can be relatively effectively removed, which is beneficial to improving, for example, the temperature drift performance, the zero drift performance, and the like of the inertial sensor 20.

As shown in fig. 12, the elastic connection 331, the anchor region 321, and the elastic connection 332 may be connected between the mass 311 and the mass 313. Since the directions of the displacement components of the mass 311 and the mass 313 in the X-axis direction are opposite, the elastic connection 331 and the elastic connection 332 can rotate with respect to the anchor region 321 around the direction parallel to the Z-axis direction. Since the elastic connection 331 and the elastic connection 332 have a buffering effect, the degree of deformation of the anchor region 321 can be relatively small.

As shown in fig. 12, a torsion beam 341 and a drive beam 351 may be connected between the mass 311 and the mass 313. Since the directions of the displacement components of the mass 311 and the mass 313 in the X-axis direction are opposite, the transmission beam 351 can rotate with respect to the torsion beam 341 around the direction parallel to the Z-axis direction. The drive beam 351 can provide the balance force in the X-axis direction to the mass 311 and the mass 313, which is advantageous in making the displacement components of the mass 311 and the mass 313 in the X-axis direction symmetrical. The torsion beam 341 may also provide torsional support for the mass 311 and the mass 313 to rotate about the Z-axis direction. As can be seen from the foregoing, the elastic deformation of the mass 311 and the mass 313 in at least two detection directions is facilitated by the elastic connection 335, the elastic connection 336 and the transmission beam 351 by a relatively simple structure, so that the mass 311 and the mass 313 have the capability of detecting angular velocities around multiple directions.

As shown in fig. 12, the mass 311 and the mass 312 are connected by a drive beam assembly 381, and the mass 313 and the mass 314 are connected by a drive beam assembly 382. Since the directions of the displacement components of the mass 311 and the mass 313 in the X-axis direction are opposite, the drive beam assembly 381 and the drive beam assembly 382 can absorb the displacement components in the X-axis direction to reduce the possibility that the mass 312 and the mass 314 are pulled by the mass 311 and the mass 313.

According to the angular velocity sensor and the inertial sensor provided by the embodiment of the application, the anchor area connected with the rotor is arranged on the same symmetry axis of the inertial sensor, so that the influence of substrate deformation and other influences on the measurement accuracy of the angular velocity sensor is reduced, the inertial sensor can meet various requirements, and the application performance of the inertial sensor in electronic equipment is improved. According to the angular velocity sensor and the inertial sensor provided by the embodiment of the application, through designing the components connected between the anchor area and the mass block, the same mass block can be used for detecting angular velocities around multiple directions, so that the integration level of the inertial sensor is improved, and the occupied space of the inertial sensor is reduced. According to the angular velocity sensor, the inertial sensor and the electronic equipment provided by the embodiment of the application, the steering structure is reasonably designed, so that the steering structure can be used for transmitting and converting directions, and the moving relevance among a plurality of mass blocks with different detection directions can be reduced, so that the decoupling among the plurality of mass blocks with different detection directions is improved, and the measurement accuracy of the inertial sensor is further improved.

The foregoing is merely illustrative of the present application, and the present application is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. An angular velocity sensor, characterized by comprising:

-a first mass (311) and a second mass (313), the first mass (311) and the second mass (313) being driven to have a displacement component in a first direction (Y), the first mass (311) and the second mass (313) being adapted to detect an angular velocity around a second direction (X) and/or a third direction (Z), the first direction (Y), the second direction (X), the third direction (Z) being mutually orthogonal, the first mass (311) itself and the second mass (313) themselves being symmetrical with respect to a first symmetry axis (Y), the first symmetry axis (Y) being parallel to the first direction (Y), the second symmetry axis (X) being parallel to the second direction (X);

-a third mass (312) and a fourth mass (314), said third mass (312) and said fourth mass (314) being driven to have a displacement component in said second direction (X), said third mass (312) and said fourth mass (314) being adapted to detect an angular velocity around said first direction (Y), said third mass (312) and said fourth mass (314) being themselves symmetrical with respect to said second symmetry axis (X), said third mass (312) and said fourth mass (314) being symmetrical with respect to said first symmetry axis (Y);

-a first anchor region and a second anchor region, said first mass (311) being connected to said first anchor region and said second anchor region, said second mass (313) being connected to said first anchor region and said second anchor region, said first anchor region and said second anchor region being symmetrical with respect to said first symmetry axis (y);

-a third anchor region (325), the third anchor region (325) being connected to the third mass (312) and the fourth mass (314);

the first, second and third anchor regions (325) are disposed on the second axis of symmetry (x), the third anchor region (325) covering an intersection of the first and second axes of symmetry (y, x).

2. Sensor of angular velocity according to claim 1, characterized in that the first anchor region itself, the second anchor region itself and the third anchor region (325) itself are symmetrical with respect to the second symmetry axis (x), the third anchor region (325) itself being symmetrical with respect to the first symmetry axis (y).

3. The sensor of angular velocity according to claim 1 or 2, characterized in that the sensor of angular velocity further comprises:

a driving member (371), wherein the driving member (371) is used for reciprocating along the first direction (Y), and the driving member (371) is connected with the first mass block (311);

drive beam assembly (381), drive beam assembly (381) is symmetrical for first symmetry axis (Y), drive beam assembly (381) includes first end (3811), second end (3812) and third end (3813), first end (3811) with driving piece (371) are connected, second end (3812) with third quality piece (312) are connected, third end (3813) with fourth quality piece (314) are connected, when first end (3811) has the displacement component along first direction (Y), second end (3812) with third end (3813) all have the displacement component that is parallel to second direction (X), the displacement component of second end (3812) is opposite with the displacement component direction of third end (3813).

4. A sensor of angular velocity according to claim 3, characterized in that the transmission beam assembly (381) comprises a first transmission beam (381 a), a second transmission beam (381 b) and a third transmission beam (381 c) connected to each other, the first transmission beam (381 a) being arranged close to the driving member (371), the second transmission beam (381 b) being arranged close to the third mass (312), the third transmission beam (381 c) being arranged close to the fourth mass (314), the first transmission beam (381 a) being arranged parallel to the first direction (Y), the second transmission beam (381 b) and the third transmission beam (381 c) each comprising a portion arranged obliquely or vertically with respect to the first direction (Y).

5. The sensor of angular velocity according to claim 4, characterized in that the second transmission beam (381 b) comprises a first transmission section (3811 b 1), a second transmission section (3811 b 2), a third transmission section (3812 b), the first transmission section (3811 b 1) and the second transmission section (3811 b 2) being arranged in parallel with respect to the second direction (X), the third transmission section (3812 b) being connected between the first transmission section (3811 b 1) and the second transmission section (3811 b 2), the third transmission section (3812 b) being arranged in parallel or oblique with respect to the first direction (Y).

6. The sensor of angular velocity according to claim 4 or 5, characterized in, that the second transmission beam (381 b) and the third transmission beam (381 c) rotate around the first transmission beam (381 a) when the third mass (312) and the fourth mass (314) have an angular velocity component around the first direction (Y).

7. The sensor of angular velocity according to any one of claims 4 to 6, characterized in, that the stiffness of the first transmission beam (381 a) in the second direction (X) is smaller than the stiffness of the first transmission beam (381 a) in the third direction (Z).

8. The sensor of angular velocity according to any one of claims 4 to 7, characterized in, that the stiffness of the second transmission beam (381 b) in the second direction (X) is smaller than the stiffness of the second transmission beam (381 b) in the third direction (Z).

9. The sensor of angular velocity according to any one of claims 4 to 8, characterized in, that the stiffness of the second transmission beam (381 b) in the first direction (Y) is smaller than the stiffness of the second transmission beam (381 b) in the third direction (Z).

10. The sensor of angular velocity according to any one of claims 1 to 9, characterized in that the sensor of angular velocity further comprises:

-a support (360), the support (360) being connected with the third anchor zone (325) and between the third mass (312) and the fourth mass (314), the support (360) being symmetrical with respect to the first symmetry axis (y) and the second symmetry axis (x).

11. The sensor of angular velocity according to claim 10, characterized in that the sensor of angular velocity further comprises:

-a first torsion beam (343), the first torsion beam (343) being connected between the support (360) and the third anchor region (325), the first torsion beam (343) extending in the first direction (Y), the support (360) rotating around the first torsion beam (343) when the third mass (312) and the fourth mass (314) have an angular velocity component around the first direction (Y).

12. Sensor of angular velocity according to claim 10 or 11, characterized in, that the third mass (312) comprises a first mass gap (3121), the first mass gap (3121) being symmetrical with respect to the second symmetry axis (x); the sensor of angular velocity further includes:

-a first elastic connection (339), said first elastic connection (339) crossing said first mass gap (3121) and being connected between said support (360) and said third mass (312).

13. The sensor of angular velocity according to claim 12, characterized in, that the stiffness of the first elastic connection (339) in the second direction (X) is smaller than the stiffness of the first elastic connection (339) in the third direction (Z).

14. The sensor of angular velocity according to any one of claims 1 to 13, characterized in that the sensor of angular velocity further comprises:

-a fourth transmission beam (351), said fourth transmission beam (351) being connected to said first anchor region (323) and between said first mass (311) and said second mass (313), said fourth transmission beam (351) extending along said first direction (Y), said fourth transmission beam (351) being itself symmetrical with respect to said second symmetry axis (x).

15. The sensor of angular velocity according to claim 14, characterized in, that the stiffness of the fourth transmission beam (351) in the second direction (X) is smaller than the stiffness of the fourth transmission beam (351) in the third direction (Z).

16. The sensor of angular velocity according to claim 14 or 15, characterized in that the sensor of angular velocity further comprises:

-a second torsion beam (341), the second torsion beam (341) being connected between the first anchor zone (323) and the fourth transmission beam (351), the second torsion beam (341) extending along the second direction (X), the fourth transmission beam (351) rotating around the second torsion beam (341) when the first mass (311) and the second mass (313) have an angular velocity component around the second direction (X), the second torsion beam (341) itself being symmetrical with respect to the second symmetry axis (X).

17. The sensor of angular velocity according to any one of claims 14 to 16, characterized in that the sensor of angular velocity further comprises:

-a second elastic connection (335), the second elastic connection (335) being connected between the fourth transmission beam (351) and the first mass (311), the second elastic connection (335) extending along the second direction (X).

18. Sensor of angular velocity according to claim 17, characterized in that the stiffness of said second elastic connection (335) in said first direction (Y) is smaller than the stiffness of said second elastic connection (335) in said third direction (Z).

19. The sensor of angular velocity according to any one of claims 1 to 18, characterized in that the sensor of angular velocity further comprises:

-a fourth anchor region (321), said fourth anchor region (321) being connected between said first mass (311) and said second mass (313), said fourth anchor region (321) itself being symmetrical with respect to said second symmetry axis (x);

the position of the first mass block (311) connected with the first anchor region (323) is a first position, the position of the first mass block (311) connected with the second anchor region (324) is a second position, the position of the first mass block (311) connected with the fourth anchor region (321) is a third position, and the first position, the second position and the third position are not collinear.

20. The sensor of angular velocity according to claim 19, characterized in that the sensor of angular velocity further comprises:

-a third elastic connection (331), said third elastic connection (331) being connected between said fourth anchor zone (321) and said first mass (311).

21. Sensor of angular velocity according to claim 20, characterized in that the stiffness of said third elastic connection (331) in said first direction (Y) is smaller than the stiffness of said third elastic connection (331) in said third direction (Z).

22. Sensor of angular velocity according to claim 20 or 21, characterized in that the stiffness of said third elastic connection (331) in said second direction (X) is smaller than the stiffness of said third elastic connection (331) in said third direction (Z).

23. Sensor of angular velocity according to any one of claims 1 to 22, characterized in that the first mass (311) has a second mass gap (3115), the third mass (312) and the fourth mass (314) being arranged within the second mass gap (3115).

24. The sensor of angular velocity according to any one of claims 1 to 23, characterized in that the sensor of angular velocity further comprises:

-a first detection electrode (395), the first mass (311) being movable relative to the first detection electrode (395), the first mass (311) and the first detection electrode (395) being arranged along the third direction (Z) to form a first capacitance, the first mass (311) having a displacement component along the third direction (Z) when the first mass (311) has an angular velocity component around the second direction (X), the displacement component of the first mass (311) along the third direction (Z) corresponding to a capacitance variation of the first capacitance;

and a first readout circuit for outputting an angular velocity component in the second direction (X) according to the capacitance change amount of the first capacitor.

25. The sensor of angular velocity according to any one of claims 1 to 24, characterized in that the sensor of angular velocity further comprises:

-a second detection electrode (396), the third mass (312) being movable relative to the second detection electrode (396), the third mass (312) and the second detection electrode (396) being arranged along the third direction (Z) to form a second capacitance, the third mass (312) having a displacement component along the third direction (Z) when the third mass (312) has an angular velocity component around the first direction (Y), the displacement component of the third mass (312) along the third direction (Z) corresponding to a capacitance value variation of the second capacitance;

And a second readout circuit configured to output an angular velocity component in the first direction (Y) according to a capacitance change amount of the second capacitor.

26. The sensor of angular velocity according to any one of claims 1 to 25, characterized in that the sensor of angular velocity further comprises:

-a third detection electrode (391, 393), the first mass (311) being movable relative to the third detection electrode (391, 393), the first mass (311) and the third detection electrode (391, 393) being arranged along the second direction (X) to form a third capacitance, the first mass (311) having a displacement component along the second direction (X) when the first mass (311) has an angular velocity component around the third direction (Z), the displacement component of the third mass (312) along the second direction (X) corresponding to a capacitance variation of the third capacitance;

and a third readout circuit for outputting an angular velocity component in the third direction (Z) according to the capacitance change amount of the third capacitor.

27. An inertial sensor (20), comprising an angular velocity sensor according to any one of claims 1 to 26.

28. An electronic device comprising an inertial sensor (20) according to claim 27.