CN109798886B - Gyroscope structure - Google Patents
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- CN109798886B CN109798886B CN201711137644.5A CN201711137644A CN109798886B CN 109798886 B CN109798886 B CN 109798886B CN 201711137644 A CN201711137644 A CN 201711137644A CN 109798886 B CN109798886 B CN 109798886B
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- 239000003990 capacitor Substances 0.000 claims description 4
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Abstract
A gyroscope structure, comprising: a substrate; anchor points fixed on the substrate; a plurality of masses suspended on a substrate disposed about an anchor point, comprising: the first mass block, the second mass block, the third mass block and the fourth mass block are respectively connected to the anchor points through elastic connecting components; the first mass block and the second mass block are oppositely arranged in the first direction and are used for enabling the first mass block and the second mass block to do translational reciprocating motion along the first direction under the driving of power; the third mass block and the fourth mass block are oppositely arranged in the second direction, the first mass block and the second mass block are connected with the third mass block and the fourth mass block through coupling components, and the coupling components are used for driving the third mass block and the fourth mass block to do translational reciprocating motion in the second direction when the first mass block and the second mass block do translational reciprocating motion in the first direction, and the second direction is perpendicular to the first direction and is located in the same plane. The accuracy and sensitivity of the gyroscope are improved.
Description
Technical Field
The invention relates to the technical field of micro-electromechanical technology, in particular to a gyroscope structure.
Background
MEMS (Micro Electro MECHANICAL SYSTEM, microelectromechanical systems) gyroscopes utilize the phenomenon of Coriolis force (also known as Coriolis force). Coriolis forces are a description of the deflection of a particle in a rotating system that is moving linearly due to inertia relative to the linear motion produced by the rotating system. The coriolis force is derived from the inertia of an object moving, and particles moving linearly in a rotating system tend to continue moving in the original direction of motion due to the inertia, but because the system itself rotates, after a period of motion has elapsed, the position of particles in the system changes, and the direction of its original direction of motion deviates to some extent if viewed from the perspective of the rotating system. MEMS gyroscopes are small in size, low in cost, and well integrated, and have become increasingly widely used in products such as mobile terminals, camera anti-shake, gamepads, toy aircraft, navigation, and the like.
The MEMS gyroscope comprises a driving part and a detecting part, and the angular velocity of the motion is measured through the coupling action of driving and detecting the motion. When the gyroscope is in a driving motion mode and an angular velocity is input in a second direction perpendicular to the axial direction of the driving motion mode, the detection mode motion is generated in the detection axial direction due to the God effect gyroscope, and the rotation angular velocity of the object can be measured by measuring the displacement of the detection mode motion. The measuring of the displacement of the detection mode movement may be achieved by measuring a change in capacitance, for example by determining the change in capacitance resulting from the movement of the moving electrode under resonance conditions to capacitively detect the displacement of the detection mode movement, the detection of capacitance being achieved by interdigitated electrodes or plate electrodes. With the development of micro-electromechanical gyroscopes, the requirements of modern consumer electronics are met by the two-axis or three-axis measuring gyroscopes with high integration and low cost, and the two-axis or three-axis measuring gyroscopes become the development trend of micro-electromechanical gyroscopes.
The performance of the gyroscopes of the prior art is still to be further improved.
Disclosure of Invention
The invention aims to provide a gyroscope structure, and the performance of the gyroscope structure is further improved.
In order to solve the above-mentioned problems, the present invention provides a gyroscope structure including: a substrate; an anchor point fixed on the substrate; a plurality of masses disposed suspended on the substrate about the anchor point, comprising: the first mass block, the second mass block, the third mass block and the fourth mass block are respectively connected to the anchor points through elastic connecting components; the first mass block and the second mass block are oppositely arranged in a first direction and are used for enabling the first mass block and the second mass block to do translational reciprocating motion along the first direction under the driving of power; the third mass block and the fourth mass block are oppositely arranged in the second direction, the first mass block and the second mass block are respectively connected with the third mass block and the fourth mass block through coupling components and are used for driving the third mass block and the fourth mass block to do translational reciprocating motion in the second direction when the first mass block and the second mass block do translational reciprocating motion in the first direction, and the second direction is perpendicular to the first direction and is located in the same plane with the first direction.
Optionally, the coupling component includes: the L-shaped connecting piece and the elastic connecting piece are positioned at two ends of the L-shaped connecting piece and are respectively connected to the adjacent mass blocks.
Optionally, the two parts of the L-shaped connector are arranged in a first direction and a second direction, respectively, or have projections in the first direction and the second direction, respectively.
Optionally, the elastic connection assembly includes: a rectangular frame disposed around the anchor point; the flexible body is positioned inside the rectangular frame and connected with the rectangular frame and the anchor point; the connecting rod is fixedly connected with the edge of the rectangular frame and extends into the mass block; and the beam is positioned inside the mass block and is vertically connected with the connecting rod, and the end part of the beam is provided with a first elastic beam connected to the mass block.
Optionally, the crossbeam includes with the first sub-crossbeam of connecting rod perpendicular connection, and connect respectively the second sub-crossbeam at first sub-crossbeam both ends, connect through the second elastic beam between first sub-crossbeam and the second sub-crossbeam.
Optionally, each connecting rod is connected with more than two cross beams.
Optionally, the elastic connection assembly has three-dimensional rotational degrees of freedom.
Optionally, the widths of the first mass block and the second mass block in the second direction become larger gradually as the distance between the first mass block and the anchor point becomes larger.
Optionally, the widths of the third mass and the fourth mass in the first direction become larger gradually as the distance from the anchor point becomes larger.
Optionally, the method further comprises: and the first motion detection electrode assembly is arranged on the surface of the substrate below the peripheral area of each mass block far away from the anchor point.
Optionally, the method further comprises: the second motion detection electrode assembly comprises a second motion detection movable electrode positioned on the third mass block and the fourth mass block and a second motion detection fixed electrode fixed on the substrate, and the second motion detection movable electrode and the second motion detection fixed electrode form a capacitance structure.
Optionally, the second motion detection electrode assembly is disposed between the first motion detection electrode assembly and an anchor point.
Optionally, the method further comprises: a driving electrode assembly, the driving electrode assembly comprising: the driving movable electrode is positioned on the first mass block and the second mass block, and the driving fixed electrode is fixed on the substrate, and the driving fixed electrode and the driving movable electrode form a comb tooth structure.
Optionally, the method further comprises: the driving detection electrode assembly comprises driving detection movable electrodes positioned on the third mass block and the fourth mass block and driving detection fixed electrodes fixed on the substrate, and the driving detection movable electrodes and the driving detection fixed electrodes form an interdigital capacitor structure.
The gyroscope structure comprises a centrally located anchor point, and a first mass block, a second mass block, a third mass block and a fourth mass block which are symmetrically arranged around the anchor point. The gyroscope is insensitive to packaging stress due to the fact that only one anchor point is arranged, so that the gyroscope is prevented from being influenced by the outside, and the sensitivity and accuracy of the gyroscope can be improved.
Furthermore, the detection electrodes of the gyroscope structure for the angular speeds in the x-axis direction and the y-axis direction are positioned at the periphery of the mass block, so that the capacitance change is large, and the detection sensitivity and accuracy are improved.
Further, the driving electrode assembly and the sensing electrode assembly of the gyroscope structure are mutually independent, and convenience in design is facilitated.
Drawings
FIG. 1 is a schematic diagram of a gyroscope structure according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a driving electrode assembly of a gyroscope structure according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a driving detection electrode assembly of a gyroscope structure according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a second motion detection electrode assembly of a gyroscope structure in accordance with an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a gyroscope structure according to an embodiment of the present invention.
Detailed Description
The following describes in detail a specific embodiment of a gyroscope structure provided by the present invention with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a gyroscope structure according to an embodiment of the invention.
The gyroscope includes: a substrate (not shown), an anchor point 10 fixed on the substrate, and a plurality of masses suspended on the substrate and disposed around the anchor point, comprising: a first mass 11, a second mass 12, a third mass 13 and a fourth mass 14, said masses being connected to said anchor point 10 by elastic connection means, respectively; the first mass block 11 and the second mass block 12 are oppositely arranged in a first direction, and are used for enabling the first mass block 11 and the second mass block 12 to do translational reciprocating motion in the first direction under the driving of power; the third mass block 13 and the fourth mass block 14 are oppositely arranged in the second direction, and the first mass block 11 and the second mass block 12 are respectively connected with the third mass block 13 and the fourth mass block 14 through a coupling component 15, so as to drive the third mass block 13 and the fourth mass block 14 to do translational reciprocating motion in the second direction when the first mass block 11 and the second mass block 12 do translational reciprocating motion in the first direction, and the second direction is perpendicular to the first direction and is in the same plane with the first direction.
In this embodiment, the first direction corresponds to the y-axis direction of the orthogonal coordinate system and the second direction corresponds to the x-axis direction of the orthogonal coordinate system.
The anchor point 10 is connected with each mass block through an elastic connection assembly so as to limit the movement displacement range of each mass block. The elastic connection assembly includes: a rectangular frame 101 disposed around the anchor point 10; a flexible body located inside the rectangular frame 101 and connecting the rectangular frame 101 with the anchor point 10; the connecting rods 103 are fixedly connected with the edges of the rectangular frame 101, and the connecting rods 103 extend into the inner parts of the mass blocks; a cross beam 104 located inside the mass and connected perpendicularly to the connecting rod 103, the end of the cross beam 104 having a first spring beam 1041 connected to the mass. The elastic connection assembly has three-dimensional rotation freedom and can rotate around an x axis, a y axis and a z axis.
In this embodiment, the rectangular frame 101 is square, and the side lengths are respectively set along the x direction and the y direction. The connecting rods 103 are respectively fixed to the center positions of the side lengths of the rectangular frames 101 and are rigidly connected. The four connecting bars 103 form a cross frame structure orthogonal in the x-direction and in the y-direction. The first mass 11 and the second mass 12 are connected to a connecting rod extending in the y-direction such that the first mass 11 and the second mass 12 are oppositely disposed in the y-direction; the third and fourth masses 13, 14 are connected to connecting rods extending in the x-direction such that the third and fourth masses 13, 14 are oppositely disposed in the x-direction.
The connecting rods 103 are rigid beams, and are used for supporting the first mass block 11, the second mass block 12, the third mass block 13 and the fourth mass block 14, so that the first mass block 11, the second mass block 12, the third mass block 13 and the fourth mass block 14 are suspended. The connecting rod 103 is connected to the mass block by a cross beam vertically connected to the connecting rod 103. In this embodiment, each connecting rod 103 connects two parallel-arranged cross beams 104, said cross beams 104 being symmetrically arranged about the connecting rod 103. The two cross beams 104 are connected with the mass block, so that the motion posture of the mass block is stabilized, and the mass block is ensured to translate in a plane in a driving state. In other embodiments of the invention, each connecting rod 103 may also be connected to one or more than three cross beams 104.
In this embodiment, the beam 104 includes a first sub-beam 104a vertically connected to the connecting rod 103, and two second sub-beams 104b respectively connected to two ends of the first sub-beam 104a, where the first sub-beam 104a is connected to the second sub-beam 104b through a second elastic beam 1042, and the other end of the second sub-beam 104b is connected to the mass block through a first elastic beam 1041. The second elastic beam 1042 is spaced from the connecting rod 103 by a certain distance, so as to improve the rotation rigidity of the mass block, improve the rotation frequency, and facilitate reducing the interference of other higher-order modes of the gyroscope structure. The first elastic beam 1041 and the second elastic beam 1042 may be a folded beam, a spring beam, or the like, which has a certain extension, so that the first mass 11, the second mass 12, the third mass 13, and the fourth mass 14 can perform resonance motion within a certain range of three directions x, y, and z.
In this embodiment, the first mass 11, the second mass 12, the third mass 13 and the fourth mass 14 are connected to the connecting rod 103 in the same way, so that the structure is symmetrical; in another embodiment, the first mass 11 and the second mass 12 are connected in the same manner, and the third mass 13 and the fourth mass 14 are connected in the same manner, so as to maintain structural symmetry in the same direction.
In this embodiment, the flexible body includes an annular elastic suspension beam 102b disposed around the anchor point 10, and an elastic suspension beam 102a located at the periphery of the elastic suspension beam 102b, where the elastic suspension beam 102b is connected to the anchor point 10 in the x direction, the elastic suspension beam 102b is connected to the elastic suspension beam 102a in the y direction, and the elastic suspension beam 102a is connected to the rectangular frame 101 in the x direction. The stress of anchor point 10 and connecting rod 103 can be absorbed to the flexibility body, avoids stress transfer to the quality piece, influences the accuracy that the gyroscope detected. Compared with a single-ring elastic suspension beam, the two annular elastic suspension beams are adopted, so that the flexible body can rotate around x, y and z under the condition of small occupied area, and the elastic suspension beams have better absorption effect on stress, so that the movement frequency of each mass block is stable, and no external influence is received. In other embodiments of the invention, the flexible body may further comprise one or more annular elastic cantilever beams.
In a specific embodiment of the present invention, the gyroscope structure includes only one anchor point 10 and is located in the center of the entire gyroscope, so that the effect of package stress is less during the packaging process, and the stress of the anchor point 10 can be absorbed by the flexible body passing between the anchor point 10 and the rectangular frame 101, so that the influence on the mass is less.
In this embodiment, the coupling parts 15 of the first mass 11, the second mass 12 connected to the third mass 13 and the fourth mass 14 include: the L-shaped connecting member 151 and the elastic connecting members 152 respectively connected to the adjacent mass blocks at both ends of the L-shaped connecting member 151. Taking the first mass block 11 and the third mass block 13 as an example, the coupling component 15 is partially located in the first mass block 11 and partially located in the third mass block 13, so that one end of the L-shaped connecting piece 151 is located in the first mass block 11, and is connected to the first mass block 11 through the elastic connecting piece 152, and the other end is located in the third mass block 13, and is connected to the third mass block 13 through the elastic connecting piece 152. Specifically, the L-shaped connecting member 151 includes two parts, which may be two cantilever beams, and the two parts are respectively disposed along the y-direction and the x-direction or respectively have projections along the x-direction and the y-direction. For example, in one embodiment, the two portions of the L-shaped connector 151 are at right angles therebetween, and are disposed along the x-direction and the y-direction, respectively. When the first mass moves in translation in the y-direction, the L-shaped connection 151 is skewed and the end located in the second mass 12 transfers kinetic energy to the third mass 13, so that the second mass 12 moves in the x-direction. For example, when the first mass 11 moves in the y-direction, the third mass 13 is driven to move in the-x-direction. In this embodiment, the elastic connection member 152 is a T-shaped cantilever beam, and in other embodiments of the present invention, the elastic connection member 152 may be another elastic beam structure such as a folded beam.
The first mass block 11 and the fourth mass block 14 are connected through the same coupling component 15, and the coupling component 15 for connecting the first mass block 11 and the third mass block 13 and the coupling component 15 for connecting the first mass block 11 and the fourth mass block 14 are respectively positioned at two sides of the connecting rod 103 and are symmetrically distributed. The second mass block 12 is connected with the third mass block 13 and the fourth mass block 14 in the same way, and no description is repeated.
Thus, when the first mass 11 moves in the y-direction, the second mass 12 moves in the-y direction, the third mass 13 is driven to move in the-x direction, and the fourth mass 14 moves in the x-direction. The ratio of the movement frequencies of the first mass 11, the second mass 12, the third mass 13 and the fourth mass 14 can be adjusted by adjusting parameters such as the elastic coefficient of the elastic connecting piece 152, for example, the third mass 13 and the fourth mass 14 can have the same movement frequency with the first mass 11 and the second mass 12.
The first mass 11, the second mass 12, the third mass 13 and the fourth mass 14 may have various shapes, such as triangular, rectangular, trapezoidal, U-shaped, etc. The masses, which are usually kept in the same direction, have the same shape and are arranged symmetrically to each other.
In this embodiment, the overall contour of each mass is trapezoidal and is disposed about anchor point 10 to form a gyroscope with a square contour. The width of the first mass 11 and the second mass 12 in the x direction becomes larger gradually as the distance from the anchor point 10 becomes larger; the width of the third mass 13 and the fourth mass 14 in the y-direction becomes larger as the distance from the anchor point 10 becomes larger. When the gyroscope is in a detection state, the mass block moves under the action of coriolis force, and the displacement of the area, away from the anchor point 10, of the mass block is larger than that of the area, close to the anchor point 10.
The gyroscope further comprises a driving electrode assembly 20, which is located in the area of the first mass block 11 and the second mass block 12 and is used for driving the first mass block 11 and the second mass block 12 to move along the y direction. The first mass block 11 and the second mass block 12 are respectively provided with two groups of driving electrode assemblies 20 in the region, and the two groups of driving electrode assemblies are symmetrically arranged on two sides of the connecting rod 103.
Please refer to fig. 2, which is a schematic diagram of the driving electrode assembly 20.
The driving electrode assembly 20 includes: a driving moving electrode 22 on the first mass 11 and the second mass 12, a driving fixed electrode 21 fixed on the substrate. The driving movable electrode 22 and the driving fixed electrode 21 are respectively provided with comb teeth, the comb teeth are formed, and appropriate static electricity is applied to the driving fixed electrode 21 and the driving movable electrode 22, so that the driving movable electrode 22 is far away from or near to the driving fixed electrode 21, and the first mass block 11 and the second mass block 12 are driven to do oscillating motion at a certain frequency in the y-axis direction.
Simultaneously, the first mass block 11 and the second mass block 12 drive the third mass block 13 and the fourth mass block 14 to do oscillating motion in the y direction through the coupling component 15.
In order to detect the frequency and displacement of motion at the resonance of the gyroscope, the gyroscope further includes a drive detection electrode assembly 30. The driving detection electrode assembly 30 is located in the area of the third mass 13 and the fourth mass 14, and is used for detecting the frequency and displacement of the movement of the first mass 11 and the second mass 12 along the y direction, and the movement of the third mass 13 and the fourth mass 14 along the x direction. The third mass block 13 and the fourth mass block 14 are respectively provided with two groups of driving detection electrode assemblies 30 in the region where the third mass block and the fourth mass block 14 are located, and the two groups of driving detection electrode assemblies are symmetrically arranged on two sides of the connecting rod 103. The drive sense electrode assembly 30 may also be placed in the region of the first mass 11 and the second mass 12.
Referring to fig. 3, a schematic structure of the driving detection electrode assembly 30 is shown.
The driving detection electrode assembly 30 includes: the driving detection movable electrode 32 and the driving detection fixed electrode 31 are fixed on the substrate, and the driving detection movable electrode 32 and the driving detection fixed electrode 31 are provided with electrode plates in an interdigital shape, and form an interdigital capacitor structure. When the third mass 13 and the fourth mass 14 move in the x-direction, the interdigital capacitance formed by the driving detection electrode assembly 30 changes, so that the movement frequency and displacement of the first mass 11 and the second mass 12 in the y-direction and the movement frequency and displacement of the third mass 13 and the fourth mass 14 in the x-direction are detected.
The gyroscope further comprises a second motion sensing electrode assembly 40 disposed in the region of the third and fourth masses 13, 14 for sensing angular velocity in the z-axis direction. In this embodiment, the second motion detection electrode assembly 40 is disposed between two cross beams 104 connecting the third mass 13, the fourth mass 14 and the connecting rod 103. In other embodiments of the present invention, the second motion detection electrode assembly 40 may be disposed at other locations in the region of the third and fourth masses 13, 14.
Please refer to fig. 4, which is a schematic diagram of the second motion detecting electrode assembly 40.
The second motion detection electrode assembly 40 includes: the second motion detection moving electrode 42 is positioned on the third mass block 13 and the fourth mass block 14, and the second motion detection fixed electrode 41 is fixed on the substrate, and the second motion detection moving electrode 42 and the second motion detection fixed electrode 41 are provided with interdigital electrodes, and form a plate capacitor structure.
As the gyroscope rotates about the z-axis, the third and fourth masses 13, 14 experience coriolis forces in the y-axis direction as the third and fourth masses 13, 14 move along the x-axis. The magnitude of the plate capacitance formed by the second motion detection electrode assembly 40 is changed, whereby the angular velocity at which the gyroscope rotates about the z-axis can be detected.
The gyroscope also includes a first motion sensing electrode assembly for sensing angular velocity of the gyroscope as it rotates about the x-axis and the y-axis.
Fig. 5 is a schematic structural diagram of a gyroscope according to an embodiment of the invention.
The gyroscope also includes a first motion detection electrode assembly including a first motion detection electrode 50b on the substrate below the first and second masses 11, 12 and a first motion detection electrode 50a on the substrate below the third and fourth masses 13, 14. The first motion detection electrodes 50a and 50b are plate electrodes, and plate capacitances are formed between the first mass 11, the second mass 12, the third mass 13, and the fourth mass 14.
When the gyroscope rotates around the x-axis, the first mass block 11 and the second mass block 12 move along the y-axis direction, so that the first mass block 11 and the second mass block 12 receive a coriolis force in the z-axis direction, the first mass block 11 and the second mass block 12 displace in the z-axis direction, and the plate capacitance between the first mass block 11 and the second mass block 12 and the first motion detection electrode 50b below changes, so that an angular velocity detection signal of the gyroscope rotating around the x-axis can be obtained through the first motion detection electrode 50 b.
Similarly, when the gyroscope rotates around the y axis, the third mass block 13 and the fourth mass block 14 move along the x axis direction, so that the third mass block 13 and the fourth mass block 14 receive a coriolis force along the z axis direction, so that the plate capacitance between the third mass block 13 and the fourth mass block 14 and the first motion detection electrode 50a below changes, and an angular velocity detection signal of the gyroscope rotating around the x axis can be obtained through the first motion detection electrode 50 a.
The greater the capacitance change, the more pronounced the detection signal and the greater the accuracy of the detection, and in order to obtain a greater capacitance change, in this embodiment, the first motion detection electrode 50a and the first motion detection electrode 50b are both disposed on the surface of the substrate below the peripheral region of the anchor point 10 where each mass is away from, and specifically, the first motion detection electrode 50a and the first motion detection electrode 50b are located on the outer side of the second motion detection electrode assembly 40 away from the anchor point 10, and the plate capacitance change is greater when the gyroscope rotates about the x-axis or the y-axis.
The gyroscope of the invention comprises a central anchor 10 and a first mass 11, a second mass 12 and a third mass 13 and a fourth mass 14 symmetrically arranged around the anchor 10. The gyroscope is insensitive to packaging stress due to the fact that only one anchor point is arranged, so that the gyroscope is prevented from being influenced by the outside, and the sensitivity and accuracy of the gyroscope can be improved. And moreover, the detection electrodes of the gyroscope for the angular speeds in the x-axis direction and the y-axis direction are positioned at the periphery of the mass block, so that the capacitance change is large, and the detection sensitivity and accuracy are improved. In addition, the driving electrode assembly and the sensing electrode assembly of the gyroscope are mutually independent, so that the gyroscope is beneficial to convenient design.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (13)
1. A gyroscope structure, comprising:
A substrate;
a single anchor point affixed to the substrate;
A plurality of masses disposed suspended on the substrate about the anchor point, comprising: the first mass block, the second mass block, the third mass block and the fourth mass block are respectively connected to the anchor points through elastic connecting components;
The elastic connecting assembly comprises connecting rods for supporting the first mass block, the second mass block, the third mass block and the fourth mass block and two or more cross beams vertically connected to each connecting rod, the connecting rods extend to the inside of each mass block and are connected with the mass blocks through the cross beams positioned in the mass blocks, and the connecting rods are rigid beams;
the first mass block and the second mass block are oppositely arranged in a first direction and are used for enabling the first mass block and the second mass block to do translational reciprocating motion along the first direction under the driving of power;
The third mass block and the fourth mass block are oppositely arranged in the second direction, the first mass block and the second mass block are respectively connected with the third mass block and the fourth mass block through coupling components and are used for driving the third mass block and the fourth mass block to do translational reciprocating motion in the second direction when the first mass block and the second mass block do translational reciprocating motion in the first direction, and the second direction is perpendicular to the first direction and is located in the same plane with the first direction.
2. The gyroscope structure of claim 1, wherein the coupling component comprises: the L-shaped connecting piece and the elastic connecting piece are positioned at two ends of the L-shaped connecting piece and are respectively connected to the adjacent mass blocks.
3. The gyroscope structure of claim 2, wherein the two portions of the L-shaped connector are disposed in a first direction and a second direction, respectively, or have projections in the first direction and the second direction, respectively.
4. The gyroscope structure of claim 1, wherein the elastic connection assembly further comprises: a rectangular frame disposed around the anchor point; the flexible body is positioned inside the rectangular frame and connected with the rectangular frame and the anchor point; the connecting rod is fixedly connected with the edge of the rectangular frame, and the end part of the cross beam is provided with a first elastic beam connected to the mass block.
5. The gyroscope structure of claim 4, wherein the cross beam includes a first sub-cross beam vertically connected to the connecting rod, and a second sub-cross beam respectively connected to two ends of the first sub-cross beam, and the first sub-cross beam is connected to the second sub-cross beam through a second elastic beam.
6. The gyroscope structure of claim 4, wherein the elastic connection assembly has three degrees of freedom of rotation.
7. The gyroscope structure of claim 1, wherein the widths of the first mass and the second mass in the second direction become progressively larger as the distance from the anchor becomes larger.
8. The gyroscope structure of claim 7, wherein the widths of the third mass and the fourth mass in the first direction progressively increase as the distance from the anchor point increases.
9. The gyroscope structure of claim 1 or 8, further comprising: and the first motion detection electrode assembly is arranged on the surface of the substrate below the peripheral area of each mass block far away from the anchor point.
10. The gyroscope structure of claim 9, further comprising: the second motion detection electrode assembly comprises a second motion detection movable electrode positioned on the third mass block and the fourth mass block and a second motion detection fixed electrode fixed on the substrate, and the second motion detection movable electrode and the second motion detection fixed electrode form a capacitance structure.
11. The gyroscope structure of claim 10, wherein the second motion detection electrode assembly is disposed between the first motion detection electrode assembly and an anchor point.
12. The gyroscope structure of claim 1, further comprising: a driving electrode assembly, the driving electrode assembly comprising: the driving movable electrode is positioned on the first mass block and the second mass block, and the driving fixed electrode is fixed on the substrate, and the driving fixed electrode and the driving movable electrode form a comb tooth structure.
13. The gyroscope structure of claim 1, further comprising: the driving detection electrode assembly comprises driving detection movable electrodes positioned on the third mass block and the fourth mass block and driving detection fixed electrodes fixed on the substrate, and the driving detection movable electrodes and the driving detection fixed electrodes form an interdigital capacitor structure.
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| CN110986908B (en) * | 2019-12-16 | 2021-07-20 | 武汉大学 | Elliptical resonant mode piezoelectric MEMS (micro-electromechanical systems) ring gyroscope |
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| CN112902892B (en) * | 2021-01-21 | 2022-06-28 | 清华大学深圳国际研究生院 | Static comb drive type in-plane two-dimensional positioning platform with low crosstalk motion |
| CN112945219B (en) * | 2021-02-04 | 2022-09-20 | 浙江大学 | Variable area capacitor structure capable of adjusting elastic coefficient of micro mechanical device more |
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| CN116660570A (en) * | 2022-02-18 | 2023-08-29 | 华为技术有限公司 | Angular velocity sensor, inertial sensor, and electronic apparatus |
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| CN107167123A (en) * | 2017-06-09 | 2017-09-15 | 深迪半导体(上海)有限公司 | A kind of micro electronmechanical two axis gyroscope instrument |
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