SG10201607048YA - Mems loudspeaker with position sensor - Google Patents

Mems loudspeaker with position sensor

Info

Publication number
SG10201607048YA
SG10201607048YA SG10201607048YA SG10201607048YA SG10201607048YA SG 10201607048Y A SG10201607048Y A SG 10201607048YA SG 10201607048Y A SG10201607048Y A SG 10201607048YA SG 10201607048Y A SG10201607048Y A SG 10201607048YA SG 10201607048Y A SG10201607048Y A SG 10201607048YA
Authority
SG
Singapore
Prior art keywords
position sensor
mems loudspeaker
mems
loudspeaker
sensor
Prior art date
Application number
SG10201607048YA
Inventor
Rusconi Clerici Andrea
Bottoni Ferruccio
Original Assignee
USound GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by USound GmbH filed Critical USound GmbH
Publication of SG10201607048YA publication Critical patent/SG10201607048YA/en

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00Monitoring arrangements; Testing arrangements
    • H04R29/001Monitoring arrangements; Testing arrangements for loudspeakers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/06Loudspeakers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/005Electrostatic transducers using semiconductor materials
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/02Loudspeakers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00Circuits for transducers, loudspeakers or microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00Circuits for transducers, loudspeakers or microphones
    • H04R3/002Damping circuit arrangements for transducers, e.g. motional feedback circuits
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00Circuits for transducers, loudspeakers or microphones
    • H04R3/007Protection circuits for transducers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/101Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
SG10201607048YA 2015-08-27 2016-08-24 Mems loudspeaker with position sensor SG10201607048YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102015114242.2A DE102015114242A1 (en) 2015-08-27 2015-08-27 MEMS speaker with position sensor

Publications (1)

Publication Number Publication Date
SG10201607048YA true SG10201607048YA (en) 2017-03-30

Family

ID=56684530

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201607048YA SG10201607048YA (en) 2015-08-27 2016-08-24 Mems loudspeaker with position sensor
SG10201909399X SG10201909399XA (en) 2015-08-27 2016-08-24 Mems loudspeaker with position sensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201909399X SG10201909399XA (en) 2015-08-27 2016-08-24 Mems loudspeaker with position sensor

Country Status (9)

Country Link
US (1) US10045136B2 (en)
EP (1) EP3136751B8 (en)
KR (1) KR20170026251A (en)
CN (1) CN106488366B (en)
AU (1) AU2016219645B2 (en)
CA (1) CA2939768A1 (en)
DE (1) DE102015114242A1 (en)
MY (1) MY178223A (en)
SG (2) SG10201607048YA (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017105594A1 (en) * 2017-03-16 2018-09-20 USound GmbH Amplifier unit for a sound transducer and sound generation unit
DE102017108594A1 (en) 2017-04-21 2018-10-25 USound GmbH Speaker unit with an electrodynamic and a MEMS speaker
KR102452952B1 (en) * 2017-12-06 2022-10-12 삼성전자주식회사 Directional sound sensor and electronic apparatus including the same
DE102018222758A1 (en) * 2018-12-21 2020-06-25 Robert Bosch Gmbh MEMS sensor with a membrane and method for producing a MEMS sensor
DE102019116080A1 (en) * 2019-06-13 2020-12-17 USound GmbH MEMS sound transducer with a membrane made of polymer
US10827243B1 (en) 2019-08-26 2020-11-03 Dell Products, Lp Method and apparatus for fabricating an information handling system with a vibration actuator speaker system assembly
WO2021134686A1 (en) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 Mems speaker
CN111757222B (en) * 2020-06-30 2021-08-10 瑞声科技(沭阳)有限公司 Loudspeaker
WO2022006815A1 (en) * 2020-07-09 2022-01-13 诺思(天津)微系统有限责任公司 Mems piezoelectric loudspeaker
CN112291691A (en) * 2020-11-11 2021-01-29 歌尔股份有限公司 MEMS piezoelectric micro-speaker, micro-speaker unit and electronic device
CN112951977A (en) * 2021-02-01 2021-06-11 苏州森斯微电子技术有限公司 Piezoelectric element and automobile integrated electronic device
CN113630703B (en) * 2021-08-27 2023-07-04 瑞声开泰科技(武汉)有限公司 MEMS speaker
DE102021133329A1 (en) 2021-12-03 2023-06-07 USound GmbH MEMS transducers with an adhesive damping layer
CN116233710A (en) 2021-12-03 2023-06-06 悠声股份有限公司 MEMS audio transducer with damping layer made of adhesive

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US4276443A (en) * 1979-08-17 1981-06-30 Meyers Stanley T Sound reproducing system utilizing motional feedback and velocity-frequency equalization
JPS59139799A (en) 1983-01-31 1984-08-10 Sony Corp Flat speaker
EP0548836B1 (en) * 1991-12-20 1997-06-11 Matsushita Electric Industrial Co., Ltd. A bass reproduction speaker apparatus
US5764781A (en) * 1995-12-12 1998-06-09 Ding; Chih-Shun Speaker and amplifier system
FI114079B (en) * 1999-05-07 2004-07-30 Nokia Corp Piezoelectric audio device and method of sound production
US7253488B2 (en) * 2002-04-23 2007-08-07 Sharp Laboratories Of America, Inc. Piezo-TFT cantilever MEMS
FI116097B (en) * 2002-08-21 2005-09-15 Heikki Ruotoistenmaeki Force or pressure sensor and method for its application
AU2003287560A1 (en) * 2002-11-06 2004-06-03 Carnegie Mellon University Mems membrane based sensor
JP5245409B2 (en) * 2005-08-31 2013-07-24 日本電気株式会社 Piezoelectric actuator, acoustic element, and electronic device
DE102007021335A1 (en) * 2007-05-07 2008-11-13 Robert Bosch Gmbh Piezoelectric drive system, and method for operating such
WO2010038229A2 (en) 2008-10-02 2010-04-08 Audio Pixels Ltd. Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
KR101561663B1 (en) 2009-08-31 2015-10-21 삼성전자주식회사 Piezoelectric micro speaker having piston diaphragm and method of manufacturing the same
WO2012051340A1 (en) 2010-10-12 2012-04-19 Analog Devices, Inc. Microphone package with embedded asic
DE102011086722A1 (en) 2011-11-21 2013-05-23 Robert Bosch Gmbh Micromechanical functional device, in particular speaker device, and corresponding manufacturing method
FR3000354B1 (en) 2012-12-20 2015-01-30 Commissariat Energie Atomique MEMBRANE DEVICE WITH CONTROLLED DISPLACEMENT
US9510103B2 (en) * 2013-09-09 2016-11-29 Audio Pixels Ltd. Microelectromechanical apparatus for generating a physical effect
DE102013114826A1 (en) * 2013-12-23 2015-06-25 USound GmbH Microelectromechanical sound transducer with sound energy-reflecting intermediate layer
US10271146B2 (en) * 2014-02-08 2019-04-23 Empire Technology Development Llc MEMS dual comb drive
US9952111B2 (en) * 2015-04-15 2018-04-24 Infineon Technologies Ag System and method for a packaged MEMS device
US10003889B2 (en) * 2015-08-04 2018-06-19 Infineon Technologies Ag System and method for a multi-electrode MEMS device
US9648433B1 (en) * 2015-12-15 2017-05-09 Robert Bosch Gmbh Absolute sensitivity of a MEMS microphone with capacitive and piezoelectric electrodes

Also Published As

Publication number Publication date
CA2939768A1 (en) 2017-02-27
CN106488366A (en) 2017-03-08
MY178223A (en) 2020-10-07
AU2016219645B2 (en) 2020-06-11
SG10201909399XA (en) 2019-11-28
US10045136B2 (en) 2018-08-07
EP3136751B1 (en) 2023-04-12
CN106488366B (en) 2020-11-03
KR20170026251A (en) 2017-03-08
EP3136751B8 (en) 2023-05-24
AU2016219645A1 (en) 2017-03-16
US20170064474A1 (en) 2017-03-02
EP3136751A1 (en) 2017-03-01
DE102015114242A1 (en) 2017-03-02

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