SG10201909399XA - Mems loudspeaker with position sensor - Google Patents
Mems loudspeaker with position sensorInfo
- Publication number
- SG10201909399XA SG10201909399XA SG10201909399XA SG10201909399XA SG 10201909399X A SG10201909399X A SG 10201909399XA SG 10201909399X A SG10201909399X A SG 10201909399XA SG 10201909399X A SG10201909399X A SG 10201909399XA
- Authority
- SG
- Singapore
- Prior art keywords
- position sensor
- circuit board
- control unit
- membrane
- mems loudspeaker
- Prior art date
Links
- 239000012528 membrane Substances 0.000 abstract 3
- 230000001105 regulatory effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R29/00—Monitoring arrangements; Testing arrangements
- H04R29/001—Monitoring arrangements; Testing arrangements for loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/06—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/02—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
- H04R3/002—Damping circuit arrangements for transducers, e.g. motional feedback circuits
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
- H04R3/007—Protection circuits for transducers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/1071—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Abstract
MEMS LOUDSPEAKER WITH POSITION SENSOR A MEMS loudspeaker 1 for generating sound waves within the audible wavelength range with a circuit board 10, a membrane 2 opposite the circuit board 10 that can be deflected along a z-axis, at least one piezoelectric actuator 7 to de- flect the membrane 2, and an electronic control unit 11 fully embedded in the circuit board 10 to control the actuator 7, for example an ASIC 40. The MEMS loudspeak- er 1 has at least one position sensor 19 with which the control unit 11 can be pro- vided with a sensor signal that depends on the membrane deflection. The control unit is executed to control the actuator in a regulated way based on the sensor sig- nal. Fig.1
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015114242.2A DE102015114242A1 (en) | 2015-08-27 | 2015-08-27 | MEMS speaker with position sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201909399XA true SG10201909399XA (en) | 2019-11-28 |
Family
ID=56684530
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201607048YA SG10201607048YA (en) | 2015-08-27 | 2016-08-24 | Mems loudspeaker with position sensor |
SG10201909399X SG10201909399XA (en) | 2015-08-27 | 2016-08-24 | Mems loudspeaker with position sensor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201607048YA SG10201607048YA (en) | 2015-08-27 | 2016-08-24 | Mems loudspeaker with position sensor |
Country Status (9)
Country | Link |
---|---|
US (1) | US10045136B2 (en) |
EP (1) | EP3136751B8 (en) |
KR (1) | KR20170026251A (en) |
CN (1) | CN106488366B (en) |
AU (1) | AU2016219645B2 (en) |
CA (1) | CA2939768A1 (en) |
DE (1) | DE102015114242A1 (en) |
MY (1) | MY178223A (en) |
SG (2) | SG10201607048YA (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017105594A1 (en) * | 2017-03-16 | 2018-09-20 | USound GmbH | Amplifier unit for a sound transducer and sound generation unit |
DE102017108594A1 (en) | 2017-04-21 | 2018-10-25 | USound GmbH | Speaker unit with an electrodynamic and a MEMS speaker |
KR102452952B1 (en) * | 2017-12-06 | 2022-10-12 | 삼성전자주식회사 | Directional sound sensor and electronic apparatus including the same |
DE102018222758A1 (en) * | 2018-12-21 | 2020-06-25 | Robert Bosch Gmbh | MEMS sensor with a membrane and method for producing a MEMS sensor |
DE102019116080A1 (en) * | 2019-06-13 | 2020-12-17 | USound GmbH | MEMS sound transducer with a membrane made of polymer |
US10827243B1 (en) | 2019-08-26 | 2020-11-03 | Dell Products, Lp | Method and apparatus for fabricating an information handling system with a vibration actuator speaker system assembly |
WO2021134686A1 (en) * | 2019-12-31 | 2021-07-08 | 瑞声声学科技(深圳)有限公司 | Mems speaker |
CN111757222B (en) * | 2020-06-30 | 2021-08-10 | 瑞声科技(沭阳)有限公司 | Loudspeaker |
WO2022006815A1 (en) * | 2020-07-09 | 2022-01-13 | 诺思(天津)微系统有限责任公司 | Mems piezoelectric loudspeaker |
CN112291691A (en) * | 2020-11-11 | 2021-01-29 | 歌尔股份有限公司 | MEMS piezoelectric micro-speaker, micro-speaker unit and electronic device |
CN112951977A (en) * | 2021-02-01 | 2021-06-11 | 苏州森斯微电子技术有限公司 | Piezoelectric element and automobile integrated electronic device |
CN113630703B (en) * | 2021-08-27 | 2023-07-04 | 瑞声开泰科技(武汉)有限公司 | MEMS speaker |
CN116233710A (en) | 2021-12-03 | 2023-06-06 | 悠声股份有限公司 | MEMS audio transducer with damping layer made of adhesive |
DE102021133329A1 (en) | 2021-12-03 | 2023-06-07 | USound GmbH | MEMS transducers with an adhesive damping layer |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4276443A (en) * | 1979-08-17 | 1981-06-30 | Meyers Stanley T | Sound reproducing system utilizing motional feedback and velocity-frequency equalization |
JPS59139799A (en) * | 1983-01-31 | 1984-08-10 | Sony Corp | Flat speaker |
EP0548836B1 (en) * | 1991-12-20 | 1997-06-11 | Matsushita Electric Industrial Co., Ltd. | A bass reproduction speaker apparatus |
US5764781A (en) * | 1995-12-12 | 1998-06-09 | Ding; Chih-Shun | Speaker and amplifier system |
FI114079B (en) * | 1999-05-07 | 2004-07-30 | Nokia Corp | Piezoelectric audio device and method of sound production |
US7253488B2 (en) * | 2002-04-23 | 2007-08-07 | Sharp Laboratories Of America, Inc. | Piezo-TFT cantilever MEMS |
FI116097B (en) * | 2002-08-21 | 2005-09-15 | Heikki Ruotoistenmaeki | Force or pressure sensor and method for its application |
US7223366B2 (en) * | 2002-11-06 | 2007-05-29 | Carnegie Mellon University | MEMS membrane based sensor |
CN101262959A (en) * | 2005-08-31 | 2008-09-10 | 日本电气株式会社 | Piezoelectric actuator, acoustic element, and electronic device |
DE102007021335A1 (en) * | 2007-05-07 | 2008-11-13 | Robert Bosch Gmbh | Piezoelectric drive system, and method for operating such |
WO2010038229A2 (en) | 2008-10-02 | 2010-04-08 | Audio Pixels Ltd. | Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same |
KR101561663B1 (en) * | 2009-08-31 | 2015-10-21 | 삼성전자주식회사 | Piezoelectric micro speaker having piston diaphragm and method of manufacturing the same |
WO2012051340A1 (en) * | 2010-10-12 | 2012-04-19 | Analog Devices, Inc. | Microphone package with embedded asic |
DE102011086722A1 (en) * | 2011-11-21 | 2013-05-23 | Robert Bosch Gmbh | Micromechanical functional device, in particular speaker device, and corresponding manufacturing method |
FR3000354B1 (en) | 2012-12-20 | 2015-01-30 | Commissariat Energie Atomique | MEMBRANE DEVICE WITH CONTROLLED DISPLACEMENT |
US9510103B2 (en) * | 2013-09-09 | 2016-11-29 | Audio Pixels Ltd. | Microelectromechanical apparatus for generating a physical effect |
DE102013114826A1 (en) * | 2013-12-23 | 2015-06-25 | USound GmbH | Microelectromechanical sound transducer with sound energy-reflecting intermediate layer |
US10271146B2 (en) * | 2014-02-08 | 2019-04-23 | Empire Technology Development Llc | MEMS dual comb drive |
US9952111B2 (en) * | 2015-04-15 | 2018-04-24 | Infineon Technologies Ag | System and method for a packaged MEMS device |
US10003889B2 (en) * | 2015-08-04 | 2018-06-19 | Infineon Technologies Ag | System and method for a multi-electrode MEMS device |
US9648433B1 (en) * | 2015-12-15 | 2017-05-09 | Robert Bosch Gmbh | Absolute sensitivity of a MEMS microphone with capacitive and piezoelectric electrodes |
-
2015
- 2015-08-27 DE DE102015114242.2A patent/DE102015114242A1/en active Pending
-
2016
- 2016-08-12 EP EP16184069.9A patent/EP3136751B8/en active Active
- 2016-08-12 US US15/235,438 patent/US10045136B2/en active Active
- 2016-08-22 CA CA2939768A patent/CA2939768A1/en active Pending
- 2016-08-24 SG SG10201607048YA patent/SG10201607048YA/en unknown
- 2016-08-24 SG SG10201909399X patent/SG10201909399XA/en unknown
- 2016-08-25 AU AU2016219645A patent/AU2016219645B2/en not_active Ceased
- 2016-08-25 MY MYPI2016001564A patent/MY178223A/en unknown
- 2016-08-26 KR KR1020160109266A patent/KR20170026251A/en not_active Application Discontinuation
- 2016-08-26 CN CN201610742220.0A patent/CN106488366B/en active Active
Also Published As
Publication number | Publication date |
---|---|
AU2016219645B2 (en) | 2020-06-11 |
US20170064474A1 (en) | 2017-03-02 |
EP3136751B1 (en) | 2023-04-12 |
DE102015114242A1 (en) | 2017-03-02 |
MY178223A (en) | 2020-10-07 |
AU2016219645A1 (en) | 2017-03-16 |
KR20170026251A (en) | 2017-03-08 |
US10045136B2 (en) | 2018-08-07 |
CN106488366B (en) | 2020-11-03 |
SG10201607048YA (en) | 2017-03-30 |
EP3136751A1 (en) | 2017-03-01 |
EP3136751B8 (en) | 2023-05-24 |
CA2939768A1 (en) | 2017-02-27 |
CN106488366A (en) | 2017-03-08 |
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