SG10201909786QA - Sound transducer assembly with a mems sound transducer - Google Patents

Sound transducer assembly with a mems sound transducer

Info

Publication number
SG10201909786QA
SG10201909786QA SG10201909786QA SG10201909786QA SG 10201909786Q A SG10201909786Q A SG 10201909786QA SG 10201909786Q A SG10201909786Q A SG 10201909786QA SG 10201909786Q A SG10201909786Q A SG 10201909786QA
Authority
SG
Singapore
Prior art keywords
sound transducer
substrate
mems
mems sound
sound converter
Prior art date
Application number
Inventor
Clerici Beltrami Andrea Rusconi
Ferruccio Bottoni
Original Assignee
USound GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by USound GmbH filed Critical USound GmbH
Publication of SG10201909786QA publication Critical patent/SG10201909786QA/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
    • H04R1/04—Structural association of microphone with electric circuitry therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/24—Structural combinations of separate transducers or of two parts of the same transducer and responsive respectively to two or more frequency ranges
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H04R1/2869—Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself
    • H04R1/2876—Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself by means of damping material, e.g. as cladding
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H04R1/2869—Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself
    • H04R1/2884—Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself by means of the enclosure structure, i.e. strengthening or shape of the enclosure
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Abstract

Sound transducer assembly with a MEMS sound transducer The present invention relates to a sound converter arrangement (1) having a first MEMS sound converter (21) for generating and/or detecting soundwaves in the audible wavelength spectrum which comprises a first cavity (41) and an ASIC (11) which is electrically connected to the first MEMS sound converter. According to the invention, the ASIC (11) is embedded in a first substrate (10), and the first MEMS sound converter (21) is arranged on a second substrate (20). In addition there is provision that the first substrate (10) and the second substrate (20) are electrically connected to one another, and that the first cavity (41) is formed at least partially in the first and/or second substrate (10, 20). FIG. 1
SG10201909786Q 2015-05-13 2016-05-10 Sound transducer assembly with a mems sound transducer SG10201909786QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102015107560.1A DE102015107560A1 (en) 2015-05-13 2015-05-13 Sound transducer arrangement with MEMS sound transducer

Publications (1)

Publication Number Publication Date
SG10201909786QA true SG10201909786QA (en) 2019-11-28

Family

ID=55963359

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201909786Q SG10201909786QA (en) 2015-05-13 2016-05-10 Sound transducer assembly with a mems sound transducer
SG11201709249VA SG11201709249VA (en) 2015-05-13 2016-05-10 Sound transducer assembly with a mems sound transducer

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201709249VA SG11201709249VA (en) 2015-05-13 2016-05-10 Sound transducer assembly with a mems sound transducer

Country Status (10)

Country Link
US (1) US10412505B2 (en)
EP (1) EP3295683B1 (en)
KR (1) KR20180014726A (en)
CN (1) CN107864696B (en)
AU (1) AU2016261293B2 (en)
CA (1) CA2985721A1 (en)
DE (1) DE102015107560A1 (en)
HK (1) HK1247015A1 (en)
SG (2) SG10201909786QA (en)
WO (1) WO2016180820A1 (en)

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* Cited by examiner, † Cited by third party
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DK3703389T1 (en) 2016-08-26 2020-11-09 Sonion Nederland Bv Vibration sensor with low-frequency roll-off response curve
DE102017108594A1 (en) * 2017-04-21 2018-10-25 USound GmbH Speaker unit with an electrodynamic and a MEMS speaker
DE102017114008A1 (en) * 2017-06-23 2018-12-27 USound GmbH In-ear listener
DE102017114142A1 (en) 2017-06-26 2018-12-27 USound GmbH Sound transducer arrangement with a MEMS unit
EP3651479B1 (en) * 2018-11-08 2022-06-01 Usound GmbH Method for producing at least one membrane unit of a mems converter
DE102019101325A1 (en) * 2019-01-17 2020-07-23 USound GmbH Manufacturing process for multiple MEMS transducers
US11805342B2 (en) 2019-09-22 2023-10-31 xMEMS Labs, Inc. Sound producing package structure and manufacturing method thereof
CN110677788B (en) * 2019-09-24 2021-01-15 维沃移动通信有限公司 Sound production module and electronic equipment
JP6857271B1 (en) * 2019-10-14 2021-04-14 シャープ株式会社 Speaker device and display device
US11395073B2 (en) * 2020-04-18 2022-07-19 xMEMS Labs, Inc. Sound producing package structure and method for packaging sound producing package structure
CN115918106A (en) * 2020-05-08 2023-04-04 弗劳恩霍夫应用研究促进协会 MEMS for efficient interaction with volumetric flow
CN111918188B (en) * 2020-07-10 2021-12-14 瑞声科技（南京）有限公司 MEMS loudspeaker and manufacturing process thereof
DE102021133329A1 (en) 2021-12-03 2023-06-07 USound GmbH MEMS transducers with an adhesive damping layer
CN114125675A (en) * 2021-12-21 2022-03-01 歌尔微电子股份有限公司 MEMS device, microphone and electronic product

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US7434305B2 (en) * 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
US6675932B2 (en) * 2001-07-02 2004-01-13 Harman International Industries, Inc. Speaker housing configured to minimize standing waves and resonate above the frequency range of transducers
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Also Published As

Publication number Publication date
SG11201709249VA (en) 2017-12-28
WO2016180820A1 (en) 2016-11-17
US10412505B2 (en) 2019-09-10
AU2016261293A1 (en) 2017-12-14
EP3295683A1 (en) 2018-03-21
CN107864696A (en) 2018-03-30
CN107864696B (en) 2021-02-02
US20180139543A1 (en) 2018-05-17
DE102015107560A1 (en) 2016-11-17
EP3295683B1 (en) 2022-05-04
AU2016261293B2 (en) 2020-12-10
HK1247015A1 (en) 2018-09-14
KR20180014726A (en) 2018-02-09
CA2985721A1 (en) 2016-11-17

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