IT1392741B1 - Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione - Google Patents

Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione

Info

Publication number
IT1392741B1
IT1392741B1 ITTO2008A000981A ITTO20080981A IT1392741B1 IT 1392741 B1 IT1392741 B1 IT 1392741B1 IT TO2008A000981 A ITTO2008A000981 A IT TO2008A000981A IT TO20080981 A ITTO20080981 A IT TO20080981A IT 1392741 B1 IT1392741 B1 IT 1392741B1
Authority
IT
Italy
Prior art keywords
microelettromechanical
gyroscope
disorders
acceleration
improved rejection
Prior art date
Application number
ITTO2008A000981A
Other languages
English (en)
Inventor
Giacomo Calcaterra
Gabriele Cazzaniga
Luca Coronato
Original Assignee
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Rousset filed Critical St Microelectronics Rousset
Priority to ITTO2008A000981A priority Critical patent/IT1392741B1/it
Priority to US12/641,106 priority patent/US8347716B2/en
Priority to EP09179819A priority patent/EP2202484A1/en
Priority to JP2009290957A priority patent/JP2010217165A/ja
Priority to CN200911000165.4A priority patent/CN101898744B/zh
Publication of ITTO20080981A1 publication Critical patent/ITTO20080981A1/it
Application granted granted Critical
Publication of IT1392741B1 publication Critical patent/IT1392741B1/it
Priority to US13/619,570 priority patent/US8549917B2/en
Priority to US14/037,163 priority patent/US9278847B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
ITTO2008A000981A 2008-12-23 2008-12-23 Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione IT1392741B1 (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
ITTO2008A000981A IT1392741B1 (it) 2008-12-23 2008-12-23 Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
US12/641,106 US8347716B2 (en) 2008-12-23 2009-12-17 Microelectromechanical gyroscope with enhanced rejection of acceleration noises
EP09179819A EP2202484A1 (en) 2008-12-23 2009-12-18 Microelectromechanical gyroscope with enhanced rejection of acceleration noise
JP2009290957A JP2010217165A (ja) 2008-12-23 2009-12-22 加速度ノイズ除去が強化された微小電気機械ジャイロスコープ
CN200911000165.4A CN101898744B (zh) 2008-12-23 2009-12-23 增强抑制加速度噪声的微机电陀螺仪
US13/619,570 US8549917B2 (en) 2008-12-23 2012-09-14 Microelectromechanical gyroscope with enhanced rejection of acceleration noises
US14/037,163 US9278847B2 (en) 2008-12-23 2013-09-25 Microelectromechanical gyroscope with enhanced rejection of acceleration noises

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2008A000981A IT1392741B1 (it) 2008-12-23 2008-12-23 Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione

Publications (2)

Publication Number Publication Date
ITTO20080981A1 ITTO20080981A1 (it) 2010-06-24
IT1392741B1 true IT1392741B1 (it) 2012-03-16

Family

ID=41277483

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2008A000981A IT1392741B1 (it) 2008-12-23 2008-12-23 Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione

Country Status (5)

Country Link
US (3) US8347716B2 (it)
EP (1) EP2202484A1 (it)
JP (1) JP2010217165A (it)
CN (1) CN101898744B (it)
IT (1) IT1392741B1 (it)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8042396B2 (en) 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes
IT1391973B1 (it) 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari
IT1391972B1 (it) * 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
ITTO20090489A1 (it) 2008-11-26 2010-12-27 St Microelectronics Srl Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse
IT1394007B1 (it) 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US9097524B2 (en) * 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
US9507039B2 (en) * 2010-12-13 2016-11-29 Schlumberger Technology Corporation Seismic source, system, and method
FI124020B (fi) * 2011-03-04 2014-02-14 Murata Electronics Oy Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
ITTO20110806A1 (it) 2011-09-12 2013-03-13 St Microelectronics Srl Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro
US8448513B2 (en) 2011-10-05 2013-05-28 Freescale Semiconductor, Inc. Rotary disk gyroscope
US8991247B2 (en) * 2011-10-21 2015-03-31 The Regents Of The University Of California High range digital angular rate sensor based on frequency modulation
TWI453371B (zh) 2011-12-30 2014-09-21 Ind Tech Res Inst 一種具振盪模組的微機電系統裝置
JP6191151B2 (ja) * 2012-05-29 2017-09-06 株式会社デンソー 物理量センサ
EP2865990A4 (en) * 2012-06-22 2016-03-16 Nat Inst Of Advanced Ind Scien DEVICE FOR MEASURING ROTATION ANGLE ACCELERATION
DE102012219511A1 (de) * 2012-10-25 2014-04-30 Robert Bosch Gmbh Mikromechanische Struktur
US9547095B2 (en) 2012-12-19 2017-01-17 Westerngeco L.L.C. MEMS-based rotation sensor for seismic applications and sensor units having same
US9194704B2 (en) * 2013-03-13 2015-11-24 Freescale Semiconductor, Inc. Angular rate sensor having multiple axis sensing capability
US9476711B2 (en) * 2013-06-24 2016-10-25 Freescale Semiconductor, Inc. Angular rate sensor with quadrature error compensation
US10734212B2 (en) * 2014-01-02 2020-08-04 Dh Technologies Development Pte. Ltd. Homogenization of the pulsed electric field created in a ring stack ion accelerator
CN103822620A (zh) * 2014-02-20 2014-05-28 上海交通大学 一种静电驱动式参数激励的微机械固体波动盘形陀螺仪
CN105043370B (zh) * 2014-04-29 2019-01-22 财团法人工业技术研究院 具有支点元件的微型电机装置
EP2963387B1 (en) * 2014-06-30 2019-07-31 STMicroelectronics Srl Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
US10309782B2 (en) 2015-04-07 2019-06-04 Analog Devices, Inc. Quality factor estimation for resonators
FI127202B (en) * 2015-04-16 2018-01-31 Murata Manufacturing Co Three axis gyroscope
US10359284B2 (en) * 2015-12-10 2019-07-23 Invensense, Inc. Yaw rate gyroscope robust to linear and angular acceleration
ITUA20161498A1 (it) * 2016-03-09 2017-09-09 St Microelectronics Srl Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento
ITUA20162173A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
ITUA20162172A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
ITUA20162160A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche
CN106940182B (zh) * 2017-05-04 2023-05-23 成都振芯科技股份有限公司 一种四质量块耦合微机电陀螺仪
US10732198B2 (en) 2017-08-09 2020-08-04 Analog Devices, Inc. Integrated linear and angular MEMS accelerometers
CN107356249A (zh) * 2017-08-15 2017-11-17 中北大学 一种隧道磁阻检测的微惯性组件
US10578435B2 (en) 2018-01-12 2020-03-03 Analog Devices, Inc. Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
CN108225296B (zh) * 2018-01-26 2019-12-27 维沃移动通信有限公司 一种mems陀螺仪、电子设备及电子设备的控制方法
US10760909B2 (en) * 2018-06-18 2020-09-01 Nxp Usa, Inc. Angular rate sensor with in-phase drive and sense motion suppression
US11041722B2 (en) 2018-07-23 2021-06-22 Analog Devices, Inc. Systems and methods for sensing angular motion in the presence of low-frequency noise
US11614328B2 (en) * 2019-01-08 2023-03-28 Panasonic Intellectual Property Management Co., Ltd. Sensing device
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
US11698257B2 (en) * 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope
US11525680B2 (en) * 2021-02-17 2022-12-13 Nxp Usa, Inc. Angular rate sensor with centrally positioned coupling structures
CN115605765A (zh) * 2021-04-23 2023-01-13 深圳市韶音科技有限公司（Cn） 加速度传感装置
CN114353776A (zh) * 2021-12-31 2022-04-15 瑞声开泰科技(武汉)有限公司 一种基于旋转模态的mems陀螺

Family Cites Families (87)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744248A (en) 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
JPS6293668A (ja) 1985-10-21 1987-04-30 Hitachi Ltd 角速度・加速度検出器
US5205171A (en) 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
DE19530007C2 (de) 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
US6250156B1 (en) * 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
DE19641284C1 (de) 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
JP3796991B2 (ja) 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
DE19938206A1 (de) 1999-08-12 2001-02-15 Bosch Gmbh Robert Mikromechanischer Drehbeschleunigungssensor
JP3589182B2 (ja) 2000-07-07 2004-11-17 株式会社村田製作所 外力計測装置
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
US6928872B2 (en) 2001-04-27 2005-08-16 Stmicroelectronics S.R.L. Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
EP1253399B1 (en) 2001-04-27 2006-06-21 STMicroelectronics S.r.l. Integrated gyroscope of semiconductor material
US6535800B2 (en) 2001-05-29 2003-03-18 Delphi Technologies, Inc. Vehicle rollover sensing using angular rate sensors
US20020189351A1 (en) 2001-06-14 2002-12-19 Reeds John W. Angular rate sensor having a sense element constrained to motion about a single axis and flexibly attached to a rotary drive mass
US6722197B2 (en) * 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
US6513380B2 (en) 2001-06-19 2003-02-04 Microsensors, Inc. MEMS sensor with single central anchor and motion-limiting connection geometry
US6725719B2 (en) 2002-04-17 2004-04-27 Milli Sensor Systems And Actuators, Inc. MEMS-integrated inertial measurement units on a common substrate
FI119159B (fi) 2003-02-11 2008-08-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
US6837107B2 (en) 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
US6845665B2 (en) 2003-04-28 2005-01-25 Analog Devices, Inc. Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
US6848304B2 (en) * 2003-04-28 2005-02-01 Analog Devices, Inc. Six degree-of-freedom micro-machined multi-sensor
CN2636198Y (zh) * 2003-07-14 2004-08-25 财团法人工业技术研究院 膜式微型陀螺仪及具有该陀螺仪的测量装置
FR2858853B1 (fr) * 2003-08-13 2006-01-13 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par forme des electrodes amelioree
FR2859528B1 (fr) 2003-09-09 2006-01-06 Thales Sa Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee
JP2005241500A (ja) 2004-02-27 2005-09-08 Mitsubishi Electric Corp 角速度センサ
EP1735590B1 (en) * 2004-04-14 2013-11-27 Analog Devices, Inc. Coupling apparatus for inertial sensors
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프
EP1624286B1 (en) 2004-08-03 2017-10-04 STMicroelectronics Srl Micro-electro-mechanical sensor with force feedback loop
EP1626283B1 (en) 2004-08-13 2011-03-23 STMicroelectronics Srl Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses
JP2008514968A (ja) 2004-09-27 2008-05-08 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 回転速度センサ
SE528404C2 (sv) 2004-10-20 2006-11-07 Imego Ab Sensorarrangemang
JP4353087B2 (ja) 2004-12-01 2009-10-28 株式会社デンソー 回転振動型角速度センサ
US7155976B2 (en) 2005-01-05 2007-01-02 Industrial Technology Research Institute Rotation sensing apparatus and method for manufacturing the same
US7240552B2 (en) * 2005-06-06 2007-07-10 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
JP2007071677A (ja) 2005-09-07 2007-03-22 Hitachi Ltd コンバインドセンサとその製造方法
US7454246B2 (en) 2005-09-08 2008-11-18 Massachusetts Eye & Ear Infirmary Sensor signal alignment
JP4887034B2 (ja) 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
WO2007086849A1 (en) * 2006-01-25 2007-08-02 The Regents Of The University Of California Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same
EP1832841B1 (en) * 2006-03-10 2015-12-30 STMicroelectronics Srl Microelectromechanical integrated sensor structure with rotary driving motion
EP1996899B1 (de) 2006-03-10 2014-09-17 Continental Teves AG & Co. oHG Drehratensensor mit kopplungsbalken
JP4687577B2 (ja) 2006-06-16 2011-05-25 ソニー株式会社 慣性センサ
DE102006046772A1 (de) 2006-09-29 2008-04-03 Siemens Ag Anordnung zur Messung einer Drehrate mit einem Vibrationssensor
US7461552B2 (en) 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor
JP2008129088A (ja) 2006-11-16 2008-06-05 Eastman Kodak Co 角速度検出システムを備えるカメラの誤差除去方法
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8020441B2 (en) 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
EP1962054B1 (en) 2007-02-13 2011-07-20 STMicroelectronics Srl Microelectromechanical gyroscope with open loop reading device and control method of a microelectromechanical gyroscope
US7950281B2 (en) 2007-02-28 2011-05-31 Infineon Technologies Ag Sensor and method for sensing linear acceleration and angular velocity
CN101046381B (zh) * 2007-04-27 2010-08-04 孙博华 微机电光导干涉陀螺
DE102007030119A1 (de) 2007-06-29 2009-01-02 Litef Gmbh Corioliskreisel
KR100885416B1 (ko) 2007-07-19 2009-02-24 건국대학교 산학협력단 일체형 가속도계·각속도계 구동 시스템
DE102007035806B4 (de) 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
DE102007057042A1 (de) 2007-09-10 2009-03-12 Continental Teves Ag & Co. Ohg Mikromechanischer Drehratensensor mit Kopplungsbalken und Aufhängungs-Federelementen zur Unterdrückung der Quadratur
US8042396B2 (en) 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes
GB0720412D0 (en) 2007-10-18 2007-11-28 Melexis Nv Combined mems accelerometer and gyroscope
DE102007054505B4 (de) 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
US8037757B2 (en) 2007-12-12 2011-10-18 Honeywell International Inc. Parametric amplification of a MEMS gyroscope by capacitance modulation
JP4631992B2 (ja) 2008-01-07 2011-02-16 株式会社村田製作所 角速度センサ
US7984648B2 (en) 2008-04-10 2011-07-26 Honeywell International Inc. Systems and methods for acceleration and rotational determination from an in-plane and out-of-plane MEMS device
DE102008002748A1 (de) 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop
JP2010071793A (ja) 2008-09-18 2010-04-02 Toshiba Corp 多軸加速度センサ及び角速度センサ
IT1391973B1 (it) 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari
ITTO20090489A1 (it) 2008-11-26 2010-12-27 St Microelectronics Srl Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse
IT1391972B1 (it) 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
IT1392553B1 (it) 2008-12-11 2012-03-09 St Microelectronics Rousset Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
DE102009000606A1 (de) 2009-02-04 2010-08-05 Robert Bosch Gmbh Mikromechanische Strukturen
US8256290B2 (en) 2009-03-17 2012-09-04 Minyao Mao Tri-axis angular rate sensor
DE102009001922A1 (de) 2009-03-26 2010-09-30 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z
IT1394007B1 (it) 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
IT1394898B1 (it) 2009-06-03 2012-07-20 St Microelectronics Rousset Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico
US8710599B2 (en) 2009-08-04 2014-04-29 Fairchild Semiconductor Corporation Micromachined devices and fabricating the same
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
ITTO20091042A1 (it) 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
US8616057B1 (en) 2010-01-23 2013-12-31 Minyao Mao Angular rate sensor with suppressed linear acceleration response
US8317104B2 (en) 2010-08-05 2012-11-27 Hand Held Products, Inc. Image engine with integrated circuit structure for indicia reading terminal
US9003882B1 (en) 2010-11-03 2015-04-14 Georgia Tech Research Corporation Vibratory tuning fork based six-degrees of freedom inertial measurement MEMS device
JP2012173055A (ja) 2011-02-18 2012-09-10 Seiko Epson Corp 物理量センサー、電子機器
JP5822177B2 (ja) 2011-05-20 2015-11-24 セイコーエプソン株式会社 ジャイロセンサー、電子機器
CN103003704B (zh) 2011-05-23 2016-05-04 深迪半导体(上海)有限公司 感测旋转及加速度两者的微机电系统装置
DE102011057081A1 (de) 2011-12-28 2013-07-04 Maxim Integrated Products, Inc. Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors
DE102012200132A1 (de) 2012-01-05 2013-07-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
US9194704B2 (en) 2013-03-13 2015-11-24 Freescale Semiconductor, Inc. Angular rate sensor having multiple axis sensing capability
US9360319B2 (en) 2013-09-05 2016-06-07 Freescale Semiconductor, Inc. Multiple sense axis MEMS gyroscope having a single drive mode

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US8347716B2 (en) 2013-01-08
JP2010217165A (ja) 2010-09-30
CN101898744A (zh) 2010-12-01
US8549917B2 (en) 2013-10-08
CN101898744B (zh) 2014-12-10
US20140021564A1 (en) 2014-01-23
US20100154541A1 (en) 2010-06-24
ITTO20080981A1 (it) 2010-06-24
US20130008251A1 (en) 2013-01-10
EP2202484A1 (en) 2010-06-30

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