IT1401001B1 - Accelerometro capacitivo triassiale microelettromeccanico - Google Patents

Accelerometro capacitivo triassiale microelettromeccanico

Info

Publication number
IT1401001B1
IT1401001B1 ITTO2010A000511A ITTO20100511A IT1401001B1 IT 1401001 B1 IT1401001 B1 IT 1401001B1 IT TO2010A000511 A ITTO2010A000511 A IT TO2010A000511A IT TO20100511 A ITTO20100511 A IT TO20100511A IT 1401001 B1 IT1401001 B1 IT 1401001B1
Authority
IT
Italy
Prior art keywords
triassial
microelettromechanical
accelerometer
triassial accelerometer
microelettromechanical triassial
Prior art date
Application number
ITTO2010A000511A
Other languages
English (en)
Inventor
Masi Biagio De
Barbara Simoni
Attilio Frangi
Original Assignee
Milano Politecnico
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Milano Politecnico, St Microelectronics Srl filed Critical Milano Politecnico
Priority to ITTO2010A000511A priority Critical patent/IT1401001B1/it
Priority to US13/161,345 priority patent/US8863575B2/en
Publication of ITTO20100511A1 publication Critical patent/ITTO20100511A1/it
Application granted granted Critical
Publication of IT1401001B1 publication Critical patent/IT1401001B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
ITTO2010A000511A 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico IT1401001B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO2010A000511A IT1401001B1 (it) 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico
US13/161,345 US8863575B2 (en) 2010-06-15 2011-06-15 Microelectromechanical three-axis capacitive accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A000511A IT1401001B1 (it) 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico

Publications (2)

Publication Number Publication Date
ITTO20100511A1 ITTO20100511A1 (it) 2011-12-16
IT1401001B1 true IT1401001B1 (it) 2013-07-05

Family

ID=43587119

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A000511A IT1401001B1 (it) 2010-06-15 2010-06-15 Accelerometro capacitivo triassiale microelettromeccanico

Country Status (2)

Country Link
US (1) US8863575B2 (it)
IT (1) IT1401001B1 (it)

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JP6070113B2 (ja) * 2012-11-27 2017-02-01 株式会社村田製作所 加速度センサ
JP6070112B2 (ja) * 2012-11-27 2017-02-01 株式会社村田製作所 加速度センサ
US9316666B2 (en) * 2012-11-27 2016-04-19 Murata Manufacturing Co., Ltd. Acceleration sensor having a capacitor array located in the center of an inertial mass
US9106575B2 (en) * 2013-01-31 2015-08-11 Apple Inc. Multiplexing multiple serial interfaces
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FI20135714L (fi) * 2013-06-28 2014-12-29 Murata Manufacturing Co Kapasitiivinen mikromekaaninen kiihtyvyysanturi
US20150268269A1 (en) * 2014-03-20 2015-09-24 Freescale Semiconductor, Inc. Sensor with combined sense elements for multiple axis sensing
DE102014211054A1 (de) * 2014-06-10 2015-12-17 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
US10241129B1 (en) * 2014-08-01 2019-03-26 Faez Ba-Tis MEMS piston-tube based capacitive accelerometer
US9733269B2 (en) * 2014-11-06 2017-08-15 Richtek Technology Corporation Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame
US10436812B2 (en) 2015-03-20 2019-10-08 Nxp Usa, Inc. Micro-electro-mechanical acceleration sensor device
US9720012B2 (en) * 2015-07-21 2017-08-01 Nxp Usa, Inc. Multi-axis inertial sensor with dual mass and integrated damping structure
WO2017075593A1 (en) * 2015-10-30 2017-05-04 Ion Geophysical Corporation Multi-axis, single mass accelerometer
US10012671B2 (en) 2015-11-03 2018-07-03 Richtek Technology Corporation Micro-electro-mechanical system device
US10393770B2 (en) * 2016-04-28 2019-08-27 Semiconductor Components Industries, Llc Multi-axis accelerometer with reduced stress sensitivity
KR101915954B1 (ko) * 2016-06-29 2018-11-08 주식회사 신성씨앤티 멤스 기반의 3축 가속도 센서
US10122392B2 (en) * 2016-08-18 2018-11-06 Advanced Micro Devices, Inc. Active equalizing negative resistance amplifier for bi-directional bandwidth extension
CN107782914B (zh) * 2016-08-27 2021-07-09 深迪半导体(绍兴)有限公司 一种三轴加速计
US10732196B2 (en) * 2017-11-30 2020-08-04 Invensense, Inc. Asymmetric out-of-plane accelerometer
BR112021003892A2 (pt) 2018-09-13 2021-05-18 Ion Geophysical Corporation medidor de aceleração de massa, único e multidirecional
US11733263B2 (en) * 2018-09-21 2023-08-22 Analog Devices, Inc. 3-axis accelerometer
RU204922U1 (ru) * 2019-03-19 2021-06-17 Российская Федерация, От Имени Которой Выступает Министерство Промышленности И Торговли Российской Федерации Чувствительный элемент трехосевого микромеханического акселерометра
CN110308308B (zh) * 2019-06-27 2021-07-13 深迪半导体(绍兴)有限公司 一种带补偿电极的面内平动式加速度计
EP4123313A1 (en) * 2021-07-23 2023-01-25 STMicroelectronics S.r.l. Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer
CN114487480A (zh) * 2022-01-14 2022-05-13 瑞声开泰科技(武汉)有限公司 微机电系统加速度计

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US8205498B2 (en) * 2008-11-18 2012-06-26 Industrial Technology Research Institute Multi-axis capacitive accelerometer

Also Published As

Publication number Publication date
ITTO20100511A1 (it) 2011-12-16
US20120000287A1 (en) 2012-01-05
US8863575B2 (en) 2014-10-21

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