IT1392553B1 - Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico - Google Patents

Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico

Info

Publication number
IT1392553B1
IT1392553B1 ITTO2008A000924A ITTO20080924A IT1392553B1 IT 1392553 B1 IT1392553 B1 IT 1392553B1 IT TO2008A000924 A ITTO2008A000924 A IT TO2008A000924A IT TO20080924 A ITTO20080924 A IT TO20080924A IT 1392553 B1 IT1392553 B1 IT 1392553B1
Authority
IT
Italy
Prior art keywords
electronic device
microelettromechanical
variable capacity
incorporating
electronic
Prior art date
Application number
ITTO2008A000924A
Other languages
English (en)
Inventor
Piazza Roncoroni Alessandra Maria Rizzo
Original Assignee
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Rousset filed Critical St Microelectronics Rousset
Priority to ITTO2008A000924A priority Critical patent/IT1392553B1/it
Priority to US12/635,453 priority patent/US8347715B2/en
Priority to CN200911000071.7A priority patent/CN101792107B/zh
Publication of ITTO20080924A1 publication Critical patent/ITTO20080924A1/it
Application granted granted Critical
Publication of IT1392553B1 publication Critical patent/IT1392553B1/it
Priority to US13/707,389 priority patent/US8667842B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
ITTO2008A000924A 2008-12-11 2008-12-11 Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico IT1392553B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITTO2008A000924A IT1392553B1 (it) 2008-12-11 2008-12-11 Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
US12/635,453 US8347715B2 (en) 2008-12-11 2009-12-10 Variable capacitance electronic device and microelectromechanical device incorporating such electronic device
CN200911000071.7A CN101792107B (zh) 2008-12-11 2009-12-11 可变电容电子装置和包括该电子装置的微电子机械装置
US13/707,389 US8667842B2 (en) 2008-12-11 2012-12-06 Variable capacitance electronic device and microelectromechanical device incorporating such electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2008A000924A IT1392553B1 (it) 2008-12-11 2008-12-11 Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico

Publications (2)

Publication Number Publication Date
ITTO20080924A1 ITTO20080924A1 (it) 2010-06-12
IT1392553B1 true IT1392553B1 (it) 2012-03-09

Family

ID=40940620

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2008A000924A IT1392553B1 (it) 2008-12-11 2008-12-11 Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico

Country Status (3)

Country Link
US (2) US8347715B2 (it)
CN (1) CN101792107B (it)
IT (1) IT1392553B1 (it)

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IT1391972B1 (it) 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
IT1392553B1 (it) * 2008-12-11 2012-03-09 St Microelectronics Rousset Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
IT1392741B1 (it) 2008-12-23 2012-03-16 St Microelectronics Rousset Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
IT1394007B1 (it) 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
JP5355334B2 (ja) * 2009-10-05 2013-11-27 オリンパス株式会社 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置
ITTO20091042A1 (it) 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
US8714012B2 (en) * 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
JP5752441B2 (ja) * 2011-02-25 2015-07-22 セイコーエプソン株式会社 駆動回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
ITTO20110688A1 (it) * 2011-07-28 2013-01-29 St Microelectronics Srl Giroscopio microelettromeccanico con funzione di autocalibrazione e metodo di calibrazione di un giroscopio microelettromeccanico
ITTO20110806A1 (it) * 2011-09-12 2013-03-13 St Microelectronics Srl Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro
JP6268367B2 (ja) * 2013-02-08 2018-01-31 パナソニックＩｐマネジメント株式会社 慣性センサ
EP2789976B1 (fr) * 2013-04-10 2016-01-13 EM Microelectronic-Marin SA Circuit électronique d'entraînement d'un dispositif à résonateur du type MEMS, et procédé pour sa mise en action
US9404747B2 (en) 2013-10-30 2016-08-02 Stmicroelectroncs S.R.L. Microelectromechanical gyroscope with compensation of quadrature error drift
US10948295B2 (en) * 2019-03-29 2021-03-16 Panasonic Intellectual Property Management Co., Ltd. Auto phase control drive circuit for gyroscope apparatus
CN110146066A (zh) * 2019-05-21 2019-08-20 深迪半导体(上海)有限公司 正交误差补偿电路、mems传感器读出装置以及mems传感器系统

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Also Published As

Publication number Publication date
CN101792107A (zh) 2010-08-04
US20100149721A1 (en) 2010-06-17
ITTO20080924A1 (it) 2010-06-12
US8347715B2 (en) 2013-01-08
US20130170091A1 (en) 2013-07-04
CN101792107B (zh) 2014-11-05
US8667842B2 (en) 2014-03-11

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