|
US8766745B1
(en)
|
2007-07-25 |
2014-07-01 |
Hrl Laboratories, Llc |
Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
|
|
US7994877B1
(en)
|
2008-11-10 |
2011-08-09 |
Hrl Laboratories, Llc |
MEMS-based quartz hybrid filters and a method of making the same
|
|
US7555824B2
(en)
|
2006-08-09 |
2009-07-07 |
Hrl Laboratories, Llc |
Method for large scale integration of quartz-based devices
|
|
US7383729B2
(en)
|
2006-10-12 |
2008-06-10 |
Honeywell International, Inc. |
Tuning fork gyro with sense plate read-out
|
|
US10266398B1
(en)
|
2007-07-25 |
2019-04-23 |
Hrl Laboratories, Llc |
ALD metal coatings for high Q MEMS structures
|
|
JP4538503B2
(ja)
*
|
2008-01-18 |
2010-09-08 |
Okiセミコンダクタ株式会社 |
共振器
|
|
US8151640B1
(en)
*
|
2008-02-05 |
2012-04-10 |
Hrl Laboratories, Llc |
MEMS on-chip inertial navigation system with error correction
|
|
US7802356B1
(en)
|
2008-02-21 |
2010-09-28 |
Hrl Laboratories, Llc |
Method of fabricating an ultra thin quartz resonator component
|
|
US8664951B2
(en)
|
2009-03-30 |
2014-03-04 |
Honeywell International Inc. |
MEMS gyroscope magnetic sensitivity reduction
|
|
US8739626B2
(en)
*
|
2009-08-04 |
2014-06-03 |
Fairchild Semiconductor Corporation |
Micromachined inertial sensor devices
|
|
US9097524B2
(en)
|
2009-09-11 |
2015-08-04 |
Invensense, Inc. |
MEMS device with improved spring system
|
|
US8534127B2
(en)
|
2009-09-11 |
2013-09-17 |
Invensense, Inc. |
Extension-mode angular velocity sensor
|
|
US8176607B1
(en)
|
2009-10-08 |
2012-05-15 |
Hrl Laboratories, Llc |
Method of fabricating quartz resonators
|
|
KR101459797B1
(ko)
*
|
2009-12-03 |
2014-11-07 |
현대자동차주식회사 |
회전형 자이로스코프 및 그 제조방법
|
|
US8912711B1
(en)
|
2010-06-22 |
2014-12-16 |
Hrl Laboratories, Llc |
Thermal stress resistant resonator, and a method for fabricating same
|
|
US9278845B2
(en)
|
2010-09-18 |
2016-03-08 |
Fairchild Semiconductor Corporation |
MEMS multi-axis gyroscope Z-axis electrode structure
|
|
DE112011103124B4
(de)
|
2010-09-18 |
2025-10-30 |
Fairchild Semiconductor Corporation |
Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
|
|
WO2012037492A2
(en)
|
2010-09-18 |
2012-03-22 |
Janusz Bryzek |
Multi-die mems package
|
|
US9455354B2
(en)
|
2010-09-18 |
2016-09-27 |
Fairchild Semiconductor Corporation |
Micromachined 3-axis accelerometer with a single proof-mass
|
|
EP2616771B8
(en)
|
2010-09-18 |
2018-12-19 |
Fairchild Semiconductor Corporation |
Micromachined monolithic 6-axis inertial sensor
|
|
CN103221331B
(zh)
|
2010-09-18 |
2016-02-03 |
快捷半导体公司 |
用于微机电系统的密封封装
|
|
EP2619536B1
(en)
|
2010-09-20 |
2016-11-02 |
Fairchild Semiconductor Corporation |
Microelectromechanical pressure sensor including reference capacitor
|
|
EP2619130A4
(en)
|
2010-09-20 |
2014-12-10 |
Fairchild Semiconductor |
SILICONE CONTINUITY WITH REDUCED CROSS-CAPACITY
|
|
US8726717B2
(en)
*
|
2011-04-27 |
2014-05-20 |
Honeywell International Inc. |
Adjusting a MEMS gyroscope to reduce thermally varying bias
|
|
KR101371149B1
(ko)
*
|
2012-01-18 |
2014-03-06 |
주식회사 에스알파워 |
멤즈 기반의 자이로스코프
|
|
US9062972B2
(en)
|
2012-01-31 |
2015-06-23 |
Fairchild Semiconductor Corporation |
MEMS multi-axis accelerometer electrode structure
|
|
WO2013116514A1
(en)
*
|
2012-02-01 |
2013-08-08 |
Cenk Acar |
Mems multi-axis gyroscope with central suspension and gimbal structure
|
|
US8978475B2
(en)
|
2012-02-01 |
2015-03-17 |
Fairchild Semiconductor Corporation |
MEMS proof mass with split z-axis portions
|
|
US8754694B2
(en)
|
2012-04-03 |
2014-06-17 |
Fairchild Semiconductor Corporation |
Accurate ninety-degree phase shifter
|
|
US8742964B2
(en)
|
2012-04-04 |
2014-06-03 |
Fairchild Semiconductor Corporation |
Noise reduction method with chopping for a merged MEMS accelerometer sensor
|
|
US9488693B2
(en)
|
2012-04-04 |
2016-11-08 |
Fairchild Semiconductor Corporation |
Self test of MEMS accelerometer with ASICS integrated capacitors
|
|
EP2647955B8
(en)
|
2012-04-05 |
2018-12-19 |
Fairchild Semiconductor Corporation |
MEMS device quadrature phase shift cancellation
|
|
EP2648334B1
(en)
|
2012-04-05 |
2020-06-10 |
Fairchild Semiconductor Corporation |
Mems device front-end charge amplifier
|
|
US9069006B2
(en)
|
2012-04-05 |
2015-06-30 |
Fairchild Semiconductor Corporation |
Self test of MEMS gyroscope with ASICs integrated capacitors
|
|
EP2647952B1
(en)
|
2012-04-05 |
2017-11-15 |
Fairchild Semiconductor Corporation |
Mems device automatic-gain control loop for mechanical amplitude drive
|
|
US9094027B2
(en)
|
2012-04-12 |
2015-07-28 |
Fairchild Semiconductor Corporation |
Micro-electro-mechanical-system (MEMS) driver
|
|
US9625272B2
(en)
|
2012-04-12 |
2017-04-18 |
Fairchild Semiconductor Corporation |
MEMS quadrature cancellation and signal demodulation
|
|
CN102706338A
(zh)
*
|
2012-06-19 |
2012-10-03 |
清华大学 |
基于巨磁阻效应的微机械陀螺仪
|
|
DE102013014881B4
(de)
|
2012-09-12 |
2023-05-04 |
Fairchild Semiconductor Corporation |
Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
|
|
US9335170B2
(en)
|
2012-11-28 |
2016-05-10 |
Freescale Semiconductor, Inc. |
Inertial sensor and method of levitation effect compensation
|
|
US9250074B1
(en)
|
2013-04-12 |
2016-02-02 |
Hrl Laboratories, Llc |
Resonator assembly comprising a silicon resonator and a quartz resonator
|
|
US9599470B1
(en)
|
2013-09-11 |
2017-03-21 |
Hrl Laboratories, Llc |
Dielectric high Q MEMS shell gyroscope structure
|
|
FI127287B
(en)
|
2013-11-01 |
2018-03-15 |
Murata Manufacturing Co |
Microelectromechanical sensor device with improved quadrature compensation
|
|
US9977097B1
(en)
|
2014-02-21 |
2018-05-22 |
Hrl Laboratories, Llc |
Micro-scale piezoelectric resonating magnetometer
|
|
US9991863B1
(en)
|
2014-04-08 |
2018-06-05 |
Hrl Laboratories, Llc |
Rounded and curved integrated tethers for quartz resonators
|
|
JP6398348B2
(ja)
*
|
2014-06-12 |
2018-10-03 |
セイコーエプソン株式会社 |
機能素子、機能素子の製造方法、電子機器、および移動体
|
|
US9726491B2
(en)
|
2014-07-25 |
2017-08-08 |
Northrop Grumman Systems Corporation |
Vibrating-mass gyroscope systems and method
|
|
US10308505B1
(en)
|
2014-08-11 |
2019-06-04 |
Hrl Laboratories, Llc |
Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
|
|
US10031191B1
(en)
|
2015-01-16 |
2018-07-24 |
Hrl Laboratories, Llc |
Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
|
|
DE102015201544A1
(de)
*
|
2015-01-29 |
2016-08-04 |
Robert Bosch Gmbh |
Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
|
|
KR101658473B1
(ko)
*
|
2015-08-03 |
2016-09-22 |
국방과학연구소 |
Mems자이로스코프의 가속도 민감도 보정 방법
|
|
FI127042B
(en)
*
|
2015-09-09 |
2017-10-13 |
Murata Manufacturing Co |
An electrode for a microelectromechanical device
|
|
JP6657842B2
(ja)
*
|
2015-11-23 |
2020-03-04 |
株式会社デンソー |
角速度センサ装置
|
|
US10451418B2
(en)
*
|
2015-12-09 |
2019-10-22 |
Invensense, Inc. |
MEMS gyroscope amplitude control via quadrature
|
|
US10877063B2
(en)
*
|
2015-12-10 |
2020-12-29 |
Invensense, Inc. |
MEMS sensor with compensation of residual voltage
|
|
US10110198B1
(en)
|
2015-12-17 |
2018-10-23 |
Hrl Laboratories, Llc |
Integrated quartz MEMS tuning fork resonator/oscillator
|
|
ITUB20159197A1
(it)
*
|
2015-12-29 |
2017-06-29 |
St Microelectronics Srl |
Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare
|
|
US10175307B1
(en)
|
2016-01-15 |
2019-01-08 |
Hrl Laboratories, Llc |
FM demodulation system for quartz MEMS magnetometer
|
|
JP6812830B2
(ja)
|
2017-02-20 |
2021-01-13 |
セイコーエプソン株式会社 |
ジャイロセンサー、電子機器、および移動体
|
|
US10697994B2
(en)
|
2017-02-22 |
2020-06-30 |
Semiconductor Components Industries, Llc |
Accelerometer techniques to compensate package stress
|
|
US10753744B2
(en)
|
2017-03-15 |
2020-08-25 |
Honeywell International Inc. |
MEMS out of plane actuator
|
|
JP6984342B2
(ja)
*
|
2017-11-22 |
2021-12-17 |
セイコーエプソン株式会社 |
物理量センサー、物理量センサーの製造方法、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
|
|
JP7192437B2
(ja)
|
2018-11-28 |
2022-12-20 |
セイコーエプソン株式会社 |
慣性センサー、電子機器および移動体
|
|
CN109489649A
(zh)
*
|
2018-12-27 |
2019-03-19 |
瑞声声学科技(深圳)有限公司 |
Mems陀螺仪及包含该陀螺仪的电子设备
|
|
JP7225817B2
(ja)
*
|
2019-01-17 |
2023-02-21 |
セイコーエプソン株式会社 |
角速度センサー、慣性計測装置、電子機器および移動体
|
|
US12012327B2
(en)
|
2020-03-12 |
2024-06-18 |
Honeywell International Inc. |
Methods for vibration immunity to suppress bias errors in sensor devices
|
|
US11788840B2
(en)
|
2021-11-08 |
2023-10-17 |
Northrop Grumman Systems Corporation |
Vibrating-mass sensor system
|
|
US20230332890A1
(en)
*
|
2022-04-18 |
2023-10-19 |
Analog Devices, Inc. |
Quadrature trim vertical electrodes for yaw axis coriolis vibratory gyroscope
|