KR20070109922A - Ｍｅｍｓ형 자이로스코프 및 자이로스코프에서 오차를감소시키는 방법 - Google Patents

Ｍｅｍｓ형 자이로스코프 및 자이로스코프에서 오차를감소시키는 방법 Download PDF

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KR20070109922A
KR20070109922A KR1020070045600A KR20070045600A KR20070109922A KR 20070109922 A KR20070109922 A KR 20070109922A KR 1020070045600 A KR1020070045600 A KR 1020070045600A KR 20070045600 A KR20070045600 A KR 20070045600A KR 20070109922 A KR20070109922 A KR 20070109922A
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South Korea
Prior art keywords
voltage
orthogonal motion
inertial mass
inertial
drive
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KR1020070045600A
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Korean (ko)
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하워드 비. 프렌치
마크 더블유. 웨버
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허니웰 인터내셔널 인코포레이티드
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Publication of KR20070109922A publication Critical patent/KR20070109922A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
KR1020070045600A 2006-05-10 2007-05-10 Ｍｅｍｓ형 자이로스코프 및 자이로스코프에서 오차를감소시키는 방법 Ceased KR20070109922A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/382,633 US7231824B2 (en) 2005-03-22 2006-05-10 Use of electrodes to cancel lift effects in inertial sensors
US11/382,633 2006-05-10

Publications (1)

Publication Number Publication Date
KR20070109922A true KR20070109922A (ko) 2007-11-15

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KR1020070045600A Ceased KR20070109922A (ko) 2006-05-10 2007-05-10 Ｍｅｍｓ형 자이로스코프 및 자이로스코프에서 오차를감소시키는 방법

Country Status (4)

Country Link
US (1) US7231824B2 (enExample)
EP (1) EP1855086A3 (enExample)
JP (1) JP2007304099A (enExample)
KR (1) KR20070109922A (enExample)

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KR101371149B1 (ko) * 2012-01-18 2014-03-06 주식회사 에스알파워 멤즈 기반의 자이로스코프
KR101459797B1 (ko) * 2009-12-03 2014-11-07 현대자동차주식회사 회전형 자이로스코프 및 그 제조방법
KR101658473B1 (ko) * 2015-08-03 2016-09-22 국방과학연구소 Mems자이로스코프의 가속도 민감도 보정 방법

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US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
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US8151640B1 (en) * 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
US8664951B2 (en) 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
US8739626B2 (en) * 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US8176607B1 (en) 2009-10-08 2012-05-15 Hrl Laboratories, Llc Method of fabricating quartz resonators
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
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US8754694B2 (en) 2012-04-03 2014-06-17 Fairchild Semiconductor Corporation Accurate ninety-degree phase shifter
US8742964B2 (en) 2012-04-04 2014-06-03 Fairchild Semiconductor Corporation Noise reduction method with chopping for a merged MEMS accelerometer sensor
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
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DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9335170B2 (en) 2012-11-28 2016-05-10 Freescale Semiconductor, Inc. Inertial sensor and method of levitation effect compensation
US9250074B1 (en) 2013-04-12 2016-02-02 Hrl Laboratories, Llc Resonator assembly comprising a silicon resonator and a quartz resonator
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
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US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
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JP6398348B2 (ja) * 2014-06-12 2018-10-03 セイコーエプソン株式会社 機能素子、機能素子の製造方法、電子機器、および移動体
US9726491B2 (en) 2014-07-25 2017-08-08 Northrop Grumman Systems Corporation Vibrating-mass gyroscope systems and method
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
DE102015201544A1 (de) * 2015-01-29 2016-08-04 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
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JP6657842B2 (ja) * 2015-11-23 2020-03-04 株式会社デンソー 角速度センサ装置
US10451418B2 (en) * 2015-12-09 2019-10-22 Invensense, Inc. MEMS gyroscope amplitude control via quadrature
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US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
JP6812830B2 (ja) 2017-02-20 2021-01-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
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JP6984342B2 (ja) * 2017-11-22 2021-12-17 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
JP7192437B2 (ja) 2018-11-28 2022-12-20 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
CN109489649A (zh) * 2018-12-27 2019-03-19 瑞声声学科技(深圳)有限公司 Mems陀螺仪及包含该陀螺仪的电子设备
JP7225817B2 (ja) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 角速度センサー、慣性計測装置、電子機器および移動体
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Publication number Priority date Publication date Assignee Title
KR101459797B1 (ko) * 2009-12-03 2014-11-07 현대자동차주식회사 회전형 자이로스코프 및 그 제조방법
KR101371149B1 (ko) * 2012-01-18 2014-03-06 주식회사 에스알파워 멤즈 기반의 자이로스코프
KR101658473B1 (ko) * 2015-08-03 2016-09-22 국방과학연구소 Mems자이로스코프의 가속도 민감도 보정 방법

Also Published As

Publication number Publication date
EP1855086A3 (en) 2008-11-26
US7231824B2 (en) 2007-06-19
JP2007304099A (ja) 2007-11-22
EP1855086A2 (en) 2007-11-14
US20060213266A1 (en) 2006-09-28

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