JP2007304099A - 慣性センサのリフト効果を打ち消すための電極の使用 - Google Patents

慣性センサのリフト効果を打ち消すための電極の使用 Download PDF

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Publication number
JP2007304099A
JP2007304099A JP2007124687A JP2007124687A JP2007304099A JP 2007304099 A JP2007304099 A JP 2007304099A JP 2007124687 A JP2007124687 A JP 2007124687A JP 2007124687 A JP2007124687 A JP 2007124687A JP 2007304099 A JP2007304099 A JP 2007304099A
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voltage
orthogonal
proof mass
members
drive
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Japanese (ja)
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JP2007304099A5 (enExample
Inventor
Howard B French
ハワード・ビー・フレンチ
Mark W Weber
マーク・ダブリュー・ウェーバー
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Honeywell International Inc
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Honeywell International Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
JP2007124687A 2006-05-10 2007-05-09 慣性センサのリフト効果を打ち消すための電極の使用 Pending JP2007304099A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/382,633 US7231824B2 (en) 2005-03-22 2006-05-10 Use of electrodes to cancel lift effects in inertial sensors

Publications (2)

Publication Number Publication Date
JP2007304099A true JP2007304099A (ja) 2007-11-22
JP2007304099A5 JP2007304099A5 (enExample) 2010-06-24

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JP2007124687A Pending JP2007304099A (ja) 2006-05-10 2007-05-09 慣性センサのリフト効果を打ち消すための電極の使用

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US (1) US7231824B2 (enExample)
EP (1) EP1855086A3 (enExample)
JP (1) JP2007304099A (enExample)
KR (1) KR20070109922A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010237204A (ja) * 2009-03-30 2010-10-21 Honeywell Internatl Inc 磁気感度が低減されたｍｅｍｓジャイロスコープ
JP2012233887A (ja) * 2011-04-27 2012-11-29 Honeywell Internatl Inc 温度で変化するバイアスを低減するためのｍｅｍｓ姿勢制御装置の調整
JP2017096732A (ja) * 2015-11-23 2017-06-01 株式会社デンソー 角速度センサ装置
JP2018529953A (ja) * 2015-09-09 2018-10-11 株式会社村田製作所 微小電気機械デバイス用の電極
US10627234B2 (en) 2017-02-20 2020-04-21 Seiko Epson Corporation Gyro sensor, electronic apparatus, and vehicle
US11181547B2 (en) 2018-11-28 2021-11-23 Seiko Epson Corporation Inertial sensor, electronic device, and vehicle

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JP4538503B2 (ja) * 2008-01-18 2010-09-08 Ｏｋｉセミコンダクタ株式会社 共振器
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US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
US8739626B2 (en) * 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
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US8176607B1 (en) 2009-10-08 2012-05-15 Hrl Laboratories, Llc Method of fabricating quartz resonators
KR101459797B1 (ko) * 2009-12-03 2014-11-07 현대자동차주식회사 회전형 자이로스코프 및 그 제조방법
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
DE112011103124B4 (de) 2010-09-18 2025-10-30 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
WO2012037492A2 (en) 2010-09-18 2012-03-22 Janusz Bryzek Multi-die mems package
US9455354B2 (en) 2010-09-18 2016-09-27 Fairchild Semiconductor Corporation Micromachined 3-axis accelerometer with a single proof-mass
EP2616771B8 (en) 2010-09-18 2018-12-19 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
CN103221331B (zh) 2010-09-18 2016-02-03 快捷半导体公司 用于微机电系统的密封封装
EP2619536B1 (en) 2010-09-20 2016-11-02 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
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WO2013116514A1 (en) * 2012-02-01 2013-08-08 Cenk Acar Mems multi-axis gyroscope with central suspension and gimbal structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US8754694B2 (en) 2012-04-03 2014-06-17 Fairchild Semiconductor Corporation Accurate ninety-degree phase shifter
US8742964B2 (en) 2012-04-04 2014-06-03 Fairchild Semiconductor Corporation Noise reduction method with chopping for a merged MEMS accelerometer sensor
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
EP2648334B1 (en) 2012-04-05 2020-06-10 Fairchild Semiconductor Corporation Mems device front-end charge amplifier
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9094027B2 (en) 2012-04-12 2015-07-28 Fairchild Semiconductor Corporation Micro-electro-mechanical-system (MEMS) driver
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
CN102706338A (zh) * 2012-06-19 2012-10-03 清华大学 基于巨磁阻效应的微机械陀螺仪
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9335170B2 (en) 2012-11-28 2016-05-10 Freescale Semiconductor, Inc. Inertial sensor and method of levitation effect compensation
US9250074B1 (en) 2013-04-12 2016-02-02 Hrl Laboratories, Llc Resonator assembly comprising a silicon resonator and a quartz resonator
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
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US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
JP6398348B2 (ja) * 2014-06-12 2018-10-03 セイコーエプソン株式会社 機能素子、機能素子の製造方法、電子機器、および移動体
US9726491B2 (en) 2014-07-25 2017-08-08 Northrop Grumman Systems Corporation Vibrating-mass gyroscope systems and method
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
DE102015201544A1 (de) * 2015-01-29 2016-08-04 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
KR101658473B1 (ko) * 2015-08-03 2016-09-22 국방과학연구소 Mems자이로스코프의 가속도 민감도 보정 방법
US10451418B2 (en) * 2015-12-09 2019-10-22 Invensense, Inc. MEMS gyroscope amplitude control via quadrature
US10877063B2 (en) * 2015-12-10 2020-12-29 Invensense, Inc. MEMS sensor with compensation of residual voltage
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US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
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US10753744B2 (en) 2017-03-15 2020-08-25 Honeywell International Inc. MEMS out of plane actuator
JP6984342B2 (ja) * 2017-11-22 2021-12-17 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
CN109489649A (zh) * 2018-12-27 2019-03-19 瑞声声学科技(深圳)有限公司 Mems陀螺仪及包含该陀螺仪的电子设备
JP7225817B2 (ja) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 角速度センサー、慣性計測装置、電子機器および移動体
US12012327B2 (en) 2020-03-12 2024-06-18 Honeywell International Inc. Methods for vibration immunity to suppress bias errors in sensor devices
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US20230332890A1 (en) * 2022-04-18 2023-10-19 Analog Devices, Inc. Quadrature trim vertical electrodes for yaw axis coriolis vibratory gyroscope

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010237204A (ja) * 2009-03-30 2010-10-21 Honeywell Internatl Inc 磁気感度が低減されたｍｅｍｓジャイロスコープ
US8664951B2 (en) 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
JP2012233887A (ja) * 2011-04-27 2012-11-29 Honeywell Internatl Inc 温度で変化するバイアスを低減するためのｍｅｍｓ姿勢制御装置の調整
JP2018529953A (ja) * 2015-09-09 2018-10-11 株式会社村田製作所 微小電気機械デバイス用の電極
JP2017096732A (ja) * 2015-11-23 2017-06-01 株式会社デンソー 角速度センサ装置
US10627234B2 (en) 2017-02-20 2020-04-21 Seiko Epson Corporation Gyro sensor, electronic apparatus, and vehicle
US11181547B2 (en) 2018-11-28 2021-11-23 Seiko Epson Corporation Inertial sensor, electronic device, and vehicle

Also Published As

Publication number Publication date
KR20070109922A (ko) 2007-11-15
EP1855086A3 (en) 2008-11-26
US7231824B2 (en) 2007-06-19
EP1855086A2 (en) 2007-11-14
US20060213266A1 (en) 2006-09-28

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