JP2012519295A5 - - Google Patents

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JP2012519295A5
JP2012519295A5 JP2011552481A JP2011552481A JP2012519295A5 JP 2012519295 A5 JP2012519295 A5 JP 2012519295A5 JP 2011552481 A JP2011552481 A JP 2011552481A JP 2011552481 A JP2011552481 A JP 2011552481A JP 2012519295 A5 JP2012519295 A5 JP 2012519295A5
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angular velocity
excitation
sensor
vibration
present
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JP2011552481A
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JP2012519295A (ja
JP5670357B2 (ja
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Priority claimed from FI20095201A external-priority patent/FI20095201A0/fi
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JP2011552481A 2009-03-02 2010-03-01 角速度の振動微小機械センサ Active JP5670357B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
FI20095201A FI20095201A0 (fi) 2009-03-02 2009-03-02 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095201 2009-03-02
FI20095903A FI122232B (fi) 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi
FI20095903 2009-09-02
PCT/FI2010/050160 WO2010100334A1 (en) 2009-03-02 2010-03-01 Vibrating micro-mechanical sensor of angular velocity

Publications (3)

Publication Number Publication Date
JP2012519295A JP2012519295A (ja) 2012-08-23
JP2012519295A5 true JP2012519295A5 (enExample) 2014-08-07
JP5670357B2 JP5670357B2 (ja) 2015-02-18

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JP2011552480A Active JP5670356B2 (ja) 2009-03-02 2010-03-01 角速度の微小機械センサ
JP2011552481A Active JP5670357B2 (ja) 2009-03-02 2010-03-01 角速度の振動微小機械センサ

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JP2011552480A Active JP5670356B2 (ja) 2009-03-02 2010-03-01 角速度の微小機械センサ

Country Status (9)

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US (2) US8997565B2 (enExample)
EP (2) EP2404139B1 (enExample)
JP (2) JP5670356B2 (enExample)
KR (2) KR101673887B1 (enExample)
CN (2) CN102369414B (enExample)
FI (2) FI20095201A0 (enExample)
IL (2) IL214926A (enExample)
TW (2) TWI481872B (enExample)
WO (2) WO2010100333A1 (enExample)

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JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
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