KR101673887B1 - 진동형 마이크로-기계식 각속도 센서 - Google Patents

진동형 마이크로-기계식 각속도 센서 Download PDF

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Publication number
KR101673887B1
KR101673887B1 KR1020117022849A KR20117022849A KR101673887B1 KR 101673887 B1 KR101673887 B1 KR 101673887B1 KR 1020117022849 A KR1020117022849 A KR 1020117022849A KR 20117022849 A KR20117022849 A KR 20117022849A KR 101673887 B1 KR101673887 B1 KR 101673887B1
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angular velocity
structures
excitation
velocity sensor
springs
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Korean (ko)
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KR20110125661A (ko
Inventor
안시 브룸비스트
야코 루오히오
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무라타 일렉트로닉스 오와이
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/02—Devices characterised by the use of mechanical means
    • G01P3/14—Devices characterised by the use of mechanical means by exciting one or more mechanical resonance systems

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Gyroscopes (AREA)
KR1020117022849A 2009-03-02 2010-03-01 진동형 마이크로-기계식 각속도 센서 Active KR101673887B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
FI20095201A FI20095201A0 (fi) 2009-03-02 2009-03-02 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095201 2009-03-02
FI20095903A FI122232B (fi) 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi
FI20095903 2009-09-02
PCT/FI2010/050160 WO2010100334A1 (en) 2009-03-02 2010-03-01 Vibrating micro-mechanical sensor of angular velocity

Publications (2)

Publication Number Publication Date
KR20110125661A KR20110125661A (ko) 2011-11-21
KR101673887B1 true KR101673887B1 (ko) 2016-11-08

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020117022849A Active KR101673887B1 (ko) 2009-03-02 2010-03-01 진동형 마이크로-기계식 각속도 센서
KR1020117022831A Active KR101676264B1 (ko) 2009-03-02 2010-03-01 마이크로 기계 각속도 센서

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020117022831A Active KR101676264B1 (ko) 2009-03-02 2010-03-01 마이크로 기계 각속도 센서

Country Status (9)

Country Link
US (2) US8997565B2 (enExample)
EP (2) EP2404139B1 (enExample)
JP (2) JP5670356B2 (enExample)
KR (2) KR101673887B1 (enExample)
CN (2) CN102369414B (enExample)
FI (2) FI20095201A0 (enExample)
IL (2) IL214926A (enExample)
TW (2) TWI481872B (enExample)
WO (2) WO2010100333A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101844595B1 (ko) 2016-12-09 2018-04-03 한국철도기술연구원 철도차량용 공기압축기의 진동 테스트 장치와 이를 이용하여 균형추를 설계하는 방법

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JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
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Publication number Priority date Publication date Assignee Title
KR101844595B1 (ko) 2016-12-09 2018-04-03 한국철도기술연구원 철도차량용 공기압축기의 진동 테스트 장치와 이를 이용하여 균형추를 설계하는 방법

Also Published As

Publication number Publication date
CN102369414A (zh) 2012-03-07
JP2012519295A (ja) 2012-08-23
FI20095201A0 (fi) 2009-03-02
TWI481872B (zh) 2015-04-21
TW201104216A (en) 2011-02-01
KR101676264B1 (ko) 2016-11-15
JP2012519294A (ja) 2012-08-23
FI20095903L (fi) 2010-09-03
US8997565B2 (en) 2015-04-07
US20100218605A1 (en) 2010-09-02
FI20095903A0 (fi) 2009-09-02
CN102369414B (zh) 2014-12-31
JP5670357B2 (ja) 2015-02-18
JP5670356B2 (ja) 2015-02-18
FI122232B (fi) 2011-10-31
CN102365524A (zh) 2012-02-29
EP2404139A1 (en) 2012-01-11
EP2404138A1 (en) 2012-01-11
EP2404138B1 (en) 2018-01-10
US20100222998A1 (en) 2010-09-02
IL214925A0 (en) 2011-11-30
IL214926A (en) 2016-05-31
TWI481817B (zh) 2015-04-21
IL214926A0 (en) 2011-11-30
WO2010100334A1 (en) 2010-09-10
US8904865B2 (en) 2014-12-09
EP2404138A4 (en) 2016-05-11
CN102365524B (zh) 2015-01-21
WO2010100333A1 (en) 2010-09-10
KR20110125661A (ko) 2011-11-21
EP2404139B1 (en) 2018-01-10
TW201040534A (en) 2010-11-16
EP2404139A4 (en) 2016-05-11
KR20110130452A (ko) 2011-12-05

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