IL214926A - Micro mechanical vibration angular velocity sensor - Google Patents

Micro mechanical vibration angular velocity sensor

Info

Publication number
IL214926A
IL214926A IL214926A IL21492611A IL214926A IL 214926 A IL214926 A IL 214926A IL 214926 A IL214926 A IL 214926A IL 21492611 A IL21492611 A IL 21492611A IL 214926 A IL214926 A IL 214926A
Authority
IL
Israel
Prior art keywords
angular velocity
mechanical sensor
vibrating micro
vibrating
micro
Prior art date
Application number
IL214926A
Other languages
English (en)
Hebrew (he)
Other versions
IL214926A0 (en
Original Assignee
Murata Electronics Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Electronics Oy filed Critical Murata Electronics Oy
Publication of IL214926A0 publication Critical patent/IL214926A0/en
Publication of IL214926A publication Critical patent/IL214926A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733Structural details or topology
    • G01C19/574Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/02Devices characterised by the use of mechanical means
    • G01P3/14Devices characterised by the use of mechanical means by exciting one or more mechanical resonance systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Gyroscopes (AREA)
IL214926A 2009-03-02 2011-09-01 Micro mechanical vibration angular velocity sensor IL214926A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20095201A FI20095201A0 (fi) 2009-03-02 2009-03-02 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095903A FI122232B (fi) 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi
PCT/FI2010/050160 WO2010100334A1 (en) 2009-03-02 2010-03-01 Vibrating micro-mechanical sensor of angular velocity

Publications (2)

Publication Number Publication Date
IL214926A0 IL214926A0 (en) 2011-11-30
IL214926A true IL214926A (en) 2016-05-31

Family

ID=40510201

Family Applications (2)

Application Number Title Priority Date Filing Date
IL214926A IL214926A (en) 2009-03-02 2011-09-01 Micro mechanical vibration angular velocity sensor
IL214925A IL214925A0 (en) 2009-03-02 2011-09-01 Micro-mechanical resonator

Family Applications After (1)

Application Number Title Priority Date Filing Date
IL214925A IL214925A0 (en) 2009-03-02 2011-09-01 Micro-mechanical resonator

Country Status (9)

Country Link
US (2) US8997565B2 (enExample)
EP (2) EP2404139B1 (enExample)
JP (2) JP5670356B2 (enExample)
KR (2) KR101673887B1 (enExample)
CN (2) CN102369414B (enExample)
FI (2) FI20095201A0 (enExample)
IL (2) IL214926A (enExample)
TW (2) TWI481872B (enExample)
WO (2) WO2010100333A1 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI119895B (fi) * 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor
FI124020B (fi) * 2011-03-04 2014-02-14 Murata Electronics Oy Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
US9170107B2 (en) 2011-09-16 2015-10-27 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9714842B2 (en) 2011-09-16 2017-07-25 Invensense, Inc. Gyroscope self test by applying rotation on coriolis sense mass
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US9863769B2 (en) 2011-09-16 2018-01-09 Invensense, Inc. MEMS sensor with decoupled drive system
US8833162B2 (en) 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
TWI416070B (zh) 2011-12-26 2013-11-21 Ind Tech Res Inst 陀螺儀的讀取電路
DE102012200132A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
WO2013104828A1 (en) 2012-01-12 2013-07-18 Murata Electronics Oy A vibration tolerant accelaration sensor structure
EP2802884B1 (en) 2012-01-12 2016-06-08 Murata Electronics Oy Accelerator sensor structure and use thereof
US8991250B2 (en) * 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
DE102013206414A1 (de) * 2013-04-11 2014-10-16 Robert Bosch Gmbh Drehratensensor
FR3013445B1 (fr) * 2013-11-20 2015-11-20 Sagem Defense Securite Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
FI126071B (en) * 2014-01-28 2016-06-15 Murata Manufacturing Co Improved gyroscope design and gyroscope
TWI580632B (zh) 2014-03-14 2017-05-01 財團法人工業技術研究院 具用於旋轉元件之摺疊彈簧的微機電裝置
DE102015213447A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit minimierten Störbewegungen in der Antriebsmode
CN106871885A (zh) * 2015-12-10 2017-06-20 上海矽睿科技有限公司 用于mems传感器的折叠弹簧组以及mems传感器
KR101844595B1 (ko) 2016-12-09 2018-04-03 한국철도기술연구원 철도차량용 공기압축기의 진동 테스트 장치와 이를 이용하여 균형추를 설계하는 방법
TWI669267B (zh) 2017-04-04 2019-08-21 日商村田製作所股份有限公司 用於角速度的微機械感測器元件
US10466053B2 (en) * 2017-04-04 2019-11-05 Invensense, Inc. Out-of-plane sensing gyroscope robust to external acceleration and rotation
JP6610706B2 (ja) * 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
CN108731659A (zh) * 2018-05-25 2018-11-02 中国电子科技集团公司第二十九研究所 一种多检测振动单元微惯性导航陀螺仪
JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
US10823569B1 (en) * 2019-08-22 2020-11-03 Nxp Usa, Inc. Multiple axis sensing device based on frequency modulation and method of operation
DE102020202158A1 (de) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
CN116018498A (zh) * 2020-08-24 2023-04-25 美国亚德诺半导体公司 各向同性衰减的运动陀螺仪
US11624613B2 (en) 2020-12-03 2023-04-11 Murata Manufacturing Co., Ltd. Synchronized four mass gyroscope
CN114623814B (zh) * 2022-01-19 2025-07-18 瑞声开泰科技(武汉)有限公司 一种mems陀螺仪

Family Cites Families (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3016A (en) * 1843-03-21 Burning bricks
US3015A (en) * 1843-03-21 Improvement in gilding, silvering
US8028A (en) * 1851-04-08 Hokse-poweb
US5002A (en) * 1847-03-06 Godlove k
US10021A (en) * 1853-09-13 Screw-eastemtito- for boots and shoes
US4025A (en) * 1845-05-01 Feinting press
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6250156B1 (en) * 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US5920012A (en) * 1998-06-16 1999-07-06 Boeing North American Micromechanical inertial sensor
JP3106395B2 (ja) * 1998-07-10 2000-11-06 株式会社村田製作所 角速度センサ
JP2000131071A (ja) 1998-10-22 2000-05-12 Hitachi Ltd 回転角速度センサ
FR2798993B1 (fr) * 1999-09-28 2001-12-07 Thomson Csf Sextant Gyrometre de type diapason
KR100343211B1 (ko) * 1999-11-04 2002-07-10 윤종용 웨이퍼 레벨 진공 패키징이 가능한 mems의 구조물의제작방법
KR100374812B1 (ko) * 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
FR2809174B1 (fr) * 2000-05-16 2002-07-12 Commissariat Energie Atomique Structure vibrante a deux oscillateurs couples, notamment pour un gyrometre
JP3531918B2 (ja) * 2000-07-12 2004-05-31 キヤノン株式会社 光ジャイロ、及びその駆動方法並びに信号処理方法
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
DE10108197A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
US7316161B2 (en) * 2002-01-12 2008-01-08 Robert Bosch Gmbh Rotation rate sensor
AU2003259814A1 (en) * 2002-08-12 2004-02-25 The Boeing Company Isolated planar gyroscope with internal radial sensing and actuation
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
US6867543B2 (en) * 2003-03-31 2005-03-15 Motorola, Inc. Microdevice assembly having a fine grain getter layer for maintaining vacuum
US6843127B1 (en) 2003-07-30 2005-01-18 Motorola, Inc. Flexible vibratory micro-electromechanical device
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
JP4433747B2 (ja) * 2003-09-29 2010-03-17 株式会社村田製作所 角速度検出装置
FR2860865B1 (fr) * 2003-10-10 2006-01-20 Thales Sa Gyrometre micromecanique infertiel a diapason
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
DE10350037A1 (de) * 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
DE10360963B4 (de) * 2003-12-23 2007-05-16 Litef Gmbh Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel
US7043985B2 (en) * 2004-01-13 2006-05-16 Georgia Tech Research Corporation High-resolution in-plane tuning fork gyroscope and methods of fabrication
JP4512636B2 (ja) * 2004-04-14 2010-07-28 アナログ デバイシス, インコーポレイテッド 直線的にアレイされたセンサエレメントを有する慣性センサ
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프
FR2874257B1 (fr) * 2004-08-13 2006-10-13 Commissariat Energie Atomique Micro gyrometre a detection frenquentielle
JP2006105698A (ja) * 2004-10-01 2006-04-20 Star Micronics Co Ltd 加速度角速度複合センサ
FR2876180B1 (fr) * 2004-10-06 2006-12-08 Commissariat Energie Atomique Resonateur a masses oscillantes.
KR100616641B1 (ko) * 2004-12-03 2006-08-28 삼성전기주식회사 튜닝포크형 진동식 mems 자이로스코프
FI116543B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
CN101180516B (zh) * 2005-05-24 2011-09-14 独立行政法人宇宙航空研究开发机构 陀螺仪
US7228738B2 (en) * 2005-06-06 2007-06-12 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
US7617728B2 (en) * 2006-05-17 2009-11-17 Donato Cardarelli Tuning fork gyroscope
FR2888318B1 (fr) * 2005-07-05 2007-09-14 Thales Sa Capteur gyrometrique micro-usine realisant une mesure differentielle du mouvement des masses vibrantes
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
FR2894661B1 (fr) * 2005-12-13 2008-01-18 Thales Sa Gyrometre vibrant equilibre par un dispositif electrostatique
FR2895501B1 (fr) * 2005-12-23 2008-02-29 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec au moins deux massesm oscillantes couplees mecaniquement
EP1994363A1 (de) * 2006-03-10 2008-11-26 Contitemic Microelectronic GmbH Mikromechanischer drehratensensor
KR20090052832A (ko) 2006-03-10 2009-05-26 콘티넨탈 테베스 아게 운트 코. 오하게 커플링 바를 구비한 회전 속도 센서
US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
FR2905457B1 (fr) * 2006-09-01 2008-10-17 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec element de detection a electrodes capacitives.
JP4859649B2 (ja) * 2006-12-12 2012-01-25 日立オートモティブシステムズ株式会社 角速度センサ
TWI317812B (en) * 2006-12-22 2009-12-01 Delta Electronics Inc Capacitance acceleration sensing structure
FI120921B (fi) * 2007-06-01 2010-04-30 Vti Technologies Oy Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
US8061201B2 (en) * 2007-07-13 2011-11-22 Georgia Tech Research Corporation Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
WO2009119470A1 (ja) * 2008-03-24 2009-10-01 アルプス電気株式会社 角速度センサ
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置
US8146424B2 (en) * 2008-12-16 2012-04-03 Honeywell International Inc. Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor

Also Published As

Publication number Publication date
CN102369414A (zh) 2012-03-07
JP2012519295A (ja) 2012-08-23
FI20095201A0 (fi) 2009-03-02
TWI481872B (zh) 2015-04-21
TW201104216A (en) 2011-02-01
KR101676264B1 (ko) 2016-11-15
KR101673887B1 (ko) 2016-11-08
JP2012519294A (ja) 2012-08-23
FI20095903L (fi) 2010-09-03
US8997565B2 (en) 2015-04-07
US20100218605A1 (en) 2010-09-02
FI20095903A0 (fi) 2009-09-02
CN102369414B (zh) 2014-12-31
JP5670357B2 (ja) 2015-02-18
JP5670356B2 (ja) 2015-02-18
FI122232B (fi) 2011-10-31
CN102365524A (zh) 2012-02-29
EP2404139A1 (en) 2012-01-11
EP2404138A1 (en) 2012-01-11
EP2404138B1 (en) 2018-01-10
US20100222998A1 (en) 2010-09-02
IL214925A0 (en) 2011-11-30
TWI481817B (zh) 2015-04-21
IL214926A0 (en) 2011-11-30
WO2010100334A1 (en) 2010-09-10
US8904865B2 (en) 2014-12-09
EP2404138A4 (en) 2016-05-11
CN102365524B (zh) 2015-01-21
WO2010100333A1 (en) 2010-09-10
KR20110125661A (ko) 2011-11-21
EP2404139B1 (en) 2018-01-10
TW201040534A (en) 2010-11-16
EP2404139A4 (en) 2016-05-11
KR20110130452A (ko) 2011-12-05

Similar Documents

Publication Publication Date Title
IL214926A0 (en) Vibrating micro-mechanical sensor of angular velocity
EP2462408A4 (en) MICRO-MADE INERTIA SENSOR DEVICES
FI20085314A0 (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
IT1400586B1 (it) Sensore micromeccanico di frequenza di rotazione
EP2411817A4 (en) VERTICALLY INTEGRATED ACCELERATION MEMS TRANSDUCER
EP2616771A4 (en) MICRO-PROCESSED MONOLITHIC INERTIAL SENSOR WITH SIX AXES
ZA201109248B (en) A method of calibrating inertial sensors
PL2209110T3 (pl) Czujnik drgań
EP2351983A4 (en) ANGLE SPEEDOMETER
EP2726400A4 (en) CALIBRATION OF MEMS SENSORS
DE102010039952B8 (de) Schwingungs-Winkelgeschwindigkeitssensor
IT1394725B1 (it) Sensore di accelerazione micromeccanico con massa sismica aperta
GB201120198D0 (en) MEMS inertial sensor and method of inertial sensing
EP2413098A4 (en) ANGLE SPEED SENSOR
IL205444A0 (en) Gyroscope utilizing mems and optical sensing
EP2351982A4 (en) ANGULAR SPEED SENSOR
GB2483365B (en) Accelerometer determined input velocity
EP2663842A4 (en) MEMS / MOEMS SENSOR DESIGN
FI20075708A0 (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
GB201006223D0 (en) Vibration control sensor
GB2469411B (en) Mems transducers
EP2163903A4 (en) DEVICE FOR MEASURING THE ANGULAR SPEED OF A TIRE
GB2459866B (en) Mems transducer
PL2404072T3 (pl) Przegub stały równobieżny
GB0904149D0 (en) Sensor for determining velocity

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed