DE102010039952B8 - Schwingungs-Winkelgeschwindigkeitssensor - Google Patents

Schwingungs-Winkelgeschwindigkeitssensor Download PDF

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Publication number
DE102010039952B8
DE102010039952B8 DE102010039952.3A DE102010039952A DE102010039952B8 DE 102010039952 B8 DE102010039952 B8 DE 102010039952B8 DE 102010039952 A DE102010039952 A DE 102010039952A DE 102010039952 B8 DE102010039952 B8 DE 102010039952B8
Authority
DE
Germany
Prior art keywords
angular velocity
velocity sensor
vibration angular
vibration
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102010039952.3A
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English (en)
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DE102010039952B4 (de
DE102010039952A8 (de
DE102010039952A1 (de
Inventor
Tomoya Jomori
Minekazu Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
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Filing date
Publication date
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Publication of DE102010039952A1 publication Critical patent/DE102010039952A1/de
Publication of DE102010039952A8 publication Critical patent/DE102010039952A8/de
Application granted granted Critical
Publication of DE102010039952B4 publication Critical patent/DE102010039952B4/de
Publication of DE102010039952B8 publication Critical patent/DE102010039952B8/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
DE102010039952.3A 2009-09-04 2010-08-30 Schwingungs-Winkelgeschwindigkeitssensor Active DE102010039952B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-204751 2009-09-04
JP2009204751A JP4968298B2 (ja) 2009-09-04 2009-09-04 振動型角速度センサ

Publications (4)

Publication Number Publication Date
DE102010039952A1 DE102010039952A1 (de) 2011-04-07
DE102010039952A8 DE102010039952A8 (de) 2012-11-08
DE102010039952B4 DE102010039952B4 (de) 2022-02-10
DE102010039952B8 true DE102010039952B8 (de) 2022-04-14

Family

ID=43646625

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102010039952.3A Active DE102010039952B8 (de) 2009-09-04 2010-08-30 Schwingungs-Winkelgeschwindigkeitssensor

Country Status (3)

Country Link
US (1) US8438922B2 (de)
JP (1) JP4968298B2 (de)
DE (1) DE102010039952B8 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012202799A (ja) * 2011-03-25 2012-10-22 Mitsubishi Precision Co Ltd バイアス安定性に優れた振動型ジャイロ
JP5884603B2 (ja) * 2012-03-30 2016-03-15 株式会社デンソー ロールオーバージャイロセンサ
DE102012210144A1 (de) * 2012-06-15 2013-12-19 Robert Bosch Gmbh Verfahren zum Betrieb und/oder zur Vermessung einer mikromechanischen Vorrichtung und mikromechanische Vorrichtung
US9335170B2 (en) * 2012-11-28 2016-05-10 Freescale Semiconductor, Inc. Inertial sensor and method of levitation effect compensation
JP6176001B2 (ja) * 2012-11-29 2017-08-09 株式会社デンソー ジャイロセンサ
CN103398708B (zh) * 2013-07-15 2015-10-21 哈尔滨工程大学 一种双敏感模态的微机械陀螺
FI126557B (en) * 2014-05-07 2017-02-15 Murata Manufacturing Co Improved gyroscope structure and gyroscope
JP6527235B2 (ja) * 2015-09-30 2019-06-05 株式会社日立製作所 ジャイロスコープ
JP6689227B2 (ja) * 2017-03-15 2020-04-28 株式会社日立製作所 ジャイロスコープ
TWI669267B (zh) * 2017-04-04 2019-08-21 日商村田製作所股份有限公司 用於角速度的微機械感測器元件
JP2019148477A (ja) * 2018-02-27 2019-09-05 セイコーエプソン株式会社 角速度センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器、および移動体

Citations (3)

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Publication number Priority date Publication date Assignee Title
DE10040418A1 (de) 2000-08-18 2002-03-07 Hahn Schickard Ges Drehratensensor und Drehratensensorsystem
US20030154788A1 (en) 2001-02-21 2003-08-21 Rainer Willig Rotation rate sensor
DE102007030120A1 (de) 2007-06-29 2009-01-02 Litef Gmbh Drehratensensor

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EP0567938B1 (de) * 1992-04-30 1998-03-18 Texas Instruments Incorporated Digitaler Beschleunigungsmesser
DE19519488B4 (de) * 1995-05-27 2005-03-10 Bosch Gmbh Robert Drehratensensor mit zwei Beschleunigungssensoren
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
US7136072B2 (en) 2001-08-03 2006-11-14 Hewlett-Packard Development Company, L.P. System and method for performing texture synthesis
JP3870895B2 (ja) 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
WO2003058167A1 (de) * 2002-01-12 2003-07-17 Robert Bosch Gmbh Drehratensensor
DE10350037A1 (de) * 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
DE10360963B4 (de) * 2003-12-23 2007-05-16 Litef Gmbh Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel
DE10360962B4 (de) * 2003-12-23 2007-05-31 Litef Gmbh Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel
JP4734985B2 (ja) * 2005-03-23 2011-07-27 セイコーエプソン株式会社 圧電振動ジャイロ素子および圧電振動片
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
JP2007248152A (ja) * 2006-03-14 2007-09-27 Toyota Motor Corp 力学量検出装置及びその製造方法
DE102007030119A1 (de) * 2007-06-29 2009-01-02 Litef Gmbh Corioliskreisel
JP4609558B2 (ja) * 2008-09-02 2011-01-12 株式会社デンソー 角速度センサ
US8210038B2 (en) * 2009-02-17 2012-07-03 Robert Bosch Gmbh Drive frequency tunable MEMS gyroscope
JP4752952B2 (ja) * 2009-06-03 2011-08-17 株式会社デンソー 力学量センサ、及び該力学量センサの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040418A1 (de) 2000-08-18 2002-03-07 Hahn Schickard Ges Drehratensensor und Drehratensensorsystem
US20030154788A1 (en) 2001-02-21 2003-08-21 Rainer Willig Rotation rate sensor
DE102007030120A1 (de) 2007-06-29 2009-01-02 Litef Gmbh Drehratensensor

Also Published As

Publication number Publication date
DE102010039952B4 (de) 2022-02-10
US8438922B2 (en) 2013-05-14
US20110056292A1 (en) 2011-03-10
JP2011053185A (ja) 2011-03-17
DE102010039952A8 (de) 2012-11-08
JP4968298B2 (ja) 2012-07-04
DE102010039952A1 (de) 2011-04-07

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