IT1397626B1 - Sistema sensore - Google Patents
Sistema sensoreInfo
- Publication number
- IT1397626B1 IT1397626B1 ITMI2010A000004A ITMI20100004A IT1397626B1 IT 1397626 B1 IT1397626 B1 IT 1397626B1 IT MI2010A000004 A ITMI2010A000004 A IT MI2010A000004A IT MI20100004 A ITMI20100004 A IT MI20100004A IT 1397626 B1 IT1397626 B1 IT 1397626B1
- Authority
- IT
- Italy
- Prior art keywords
- sensor system
- sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102009000167A DE102009000167A1 (de) | 2009-01-13 | 2009-01-13 | Sensoranordnung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ITMI20100004A1 ITMI20100004A1 (it) | 2010-07-14 |
| IT1397626B1 true IT1397626B1 (it) | 2013-01-18 |
Family
ID=42262716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ITMI2010A000004A IT1397626B1 (it) | 2009-01-13 | 2010-01-07 | Sistema sensore |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20100175473A1 (it) |
| JP (2) | JP5697874B2 (it) |
| DE (1) | DE102009000167A1 (it) |
| IT (1) | IT1397626B1 (it) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008043524B4 (de) * | 2008-11-06 | 2021-10-14 | Robert Bosch Gmbh | Beschleunigungssensor und Verfahren zu seiner Herstellung |
| DE102009026462B4 (de) | 2009-05-26 | 2023-03-30 | Robert Bosch Gmbh | Beschleunigungssensor |
| JP5560809B2 (ja) * | 2010-03-23 | 2014-07-30 | 株式会社豊田中央研究所 | Ｍｅｍｓ構造体 |
| DE102011080982B4 (de) | 2011-08-16 | 2020-03-05 | Robert Bosch Gmbh | Sensoranordnung |
| DE102012200929B4 (de) * | 2012-01-23 | 2020-10-01 | Robert Bosch Gmbh | Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur |
| DE102012223016B4 (de) | 2012-12-13 | 2024-05-02 | Robert Bosch Gmbh | Inertialsensor mit verringerter Querempfindlichkeit |
| DE102013216898B4 (de) | 2013-08-26 | 2023-02-09 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements |
| DE102013222747A1 (de) | 2013-11-08 | 2015-05-13 | Robert Bosch Gmbh | Mikromechanischer Z-Sensor |
| DE102014202816B4 (de) | 2014-02-17 | 2022-06-30 | Robert Bosch Gmbh | Wippeneinrichtung für einen mikromechanischen Z-Sensor |
| DE102014212314A1 (de) | 2014-06-26 | 2015-12-31 | Robert Bosch Gmbh | Mikromechanische Sensoreinrichtung |
| WO2016039034A1 (ja) * | 2014-09-09 | 2016-03-17 | 株式会社村田製作所 | Ｍｅｍｓ構造体、加速度センサ |
| DE102014223314A1 (de) | 2014-11-14 | 2016-05-19 | Robert Bosch Gmbh | Wippeneinrichtung für einen mikromechanischen Z-Sensor |
| CN205090976U (zh) * | 2014-12-11 | 2016-03-16 | 意法半导体股份有限公司 | 微机电检测结构、微机电传感器和电子器件 |
| US20170356929A1 (en) * | 2015-01-30 | 2017-12-14 | Goertek, Inc. | Z-axis structure of accelerometer and manufacturing method of z-axis structure |
| DE102015207639B4 (de) | 2015-04-27 | 2022-10-06 | Robert Bosch Gmbh | Seismisches Erfassungselement für einen mikromechanischen Sensor |
| DE102015209941A1 (de) | 2015-05-29 | 2016-12-01 | Robert Bosch Gmbh | Mikromechanischer Beschleunigungssensor |
| DE102015217921A1 (de) | 2015-09-18 | 2017-03-23 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| DE102015217918A1 (de) | 2015-09-18 | 2017-03-23 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| DE102015217928A1 (de) | 2015-09-18 | 2017-03-23 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| DE102015218536A1 (de) | 2015-09-28 | 2017-03-30 | Robert Bosch Gmbh | Sensorflächenreduktion bei mehrschichtigen Inertialsensoren durch Dichtungsring zum Schutz vor Unterätzung der Verdrahtung beim Gasphasenätzen |
| ITUB20154667A1 (it) | 2015-10-14 | 2017-04-14 | St Microelectronics Srl | Dispositivo sensore microelettromeccanico con ridotta sensibilita' agli stress |
| DE102015222532A1 (de) * | 2015-11-16 | 2017-05-18 | Robert Bosch Gmbh | Mikromechanische Struktur für einen Beschleunigungssensor |
| DE102016207650A1 (de) | 2016-05-03 | 2017-11-09 | Robert Bosch Gmbh | Mikromechanischer Sensor und Verfahren zum Herstellen eines mikromechanischen Sensors |
| DE102016208925A1 (de) | 2016-05-24 | 2017-11-30 | Robert Bosch Gmbh | Mikromechanischer Sensor und Verfahren zum Herstellen eines mikromechanischen Sensors |
| WO2018072820A1 (de) | 2016-10-19 | 2018-04-26 | Robert Bosch Gmbh | Sensorflächenreduktion bei mehrschichtigen inertialsensoren durch dichtungsring zum schutz vor unterätzung der verdrahtung beim gasphasenätzen |
| DE102016220510A1 (de) * | 2016-10-19 | 2018-04-19 | Robert Bosch Gmbh | Mikromechanischer z-Beschleunigungssensor |
| DE102017213780A1 (de) * | 2017-08-08 | 2019-02-14 | Robert Bosch Gmbh | Drehratensensor, Verfahren zur Herstellung eines Drehratensensors |
| US10759656B2 (en) * | 2017-09-29 | 2020-09-01 | Apple Inc. | MEMS sensor with dual pendulous proof masses |
| DE102018219546B3 (de) | 2018-11-15 | 2019-09-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| IT201900000190A1 (it) * | 2019-01-08 | 2020-07-08 | St Microelectronics Srl | Dispositivo mems con geometria ottimizzata per la riduzione dell'offset dovuto all'effetto radiometrico |
| DE102019200843B4 (de) | 2019-01-24 | 2020-09-24 | Robert Bosch Gmbh | Mikromechanisches kapazitiv auswertbares Bauelement |
| CN110058046B (zh) * | 2019-04-23 | 2021-02-12 | 中国大唐集团科学技术研究院有限公司华东电力试验研究院 | 一种基于对流传热的流体流速测量方法及装置 |
| DE102019217505A1 (de) | 2019-11-05 | 2021-05-06 | Robert Bosch Gmbh | Inertialsensor mit einem eine Haupterstreckungsebene aufweisendem Substrat und einer über eine Federanordnung mit dem Substrat verbundenen seismischen Masse |
| DE102019216987A1 (de) * | 2019-11-05 | 2021-05-06 | Robert Bosch Gmbh | Mikromechanische Sensoranordnung |
| DE102019216984A1 (de) * | 2019-11-05 | 2021-05-06 | Robert Bosch Gmbh | Mikromechanische Sensoranordnung |
| DE102020205616A1 (de) | 2020-05-04 | 2021-11-04 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanische Sensoranordnung, Verfahren zur Verwendung einer mikromechanischen Sensoranordnung |
| DE102020209934A1 (de) | 2020-08-06 | 2022-02-10 | Robert Bosch Gesellschaft mit beschränkter Haftung | Herstellungsverfahren für ein mikromechanisches Bauelement, entsprechendes mikromechanisches Bauelement und entsprechende Anordnung |
| DE102020210647A1 (de) | 2020-08-21 | 2022-02-24 | Robert Bosch Gesellschaft mit beschränkter Haftung | Sensorsystem, Verfahren zum Betreiben eines Sensorsystems |
| DE102021200233A1 (de) | 2021-01-13 | 2022-07-14 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanisches Bauteil für eine Sensorvorrichtung |
| EP4047375B1 (en) * | 2021-02-22 | 2024-07-17 | Murata Manufacturing Co., Ltd. | Anchor structure for reducing temperature-based error |
| EP4123313A1 (en) * | 2021-07-23 | 2023-01-25 | STMicroelectronics S.r.l. | Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer |
| EP4187258A1 (en) * | 2021-11-25 | 2023-05-31 | STMicroelectronics S.r.l. | Z-axis microelectromechanical sensor device with improved stress insensitivity |
| DE102022211541A1 (de) | 2022-10-31 | 2024-05-02 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanischer Sensor mit integriertem Stresssensor und Verfahren zur Signalkorrektur eines Sensorsignals |
| DE102022213533A1 (de) | 2022-12-13 | 2024-06-13 | Robert Bosch Gesellschaft mit beschränkter Haftung | Elektronisches Bauelement in einem Chip-Scale-Package und Verfahren zur Herstellung eines mikromechanischen Sensors in einem Chip-Scale-Package mit einer Kompensation von Feuchteeinflüssen |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4104920A (en) * | 1977-04-01 | 1978-08-08 | The Singer Company | Piezoelectric damping mechanism |
| DE3611360A1 (de) | 1986-04-04 | 1987-10-08 | Bosch Gmbh Robert | Sensor zur selbsttaetigen ausloesung von insassenschutzvorrichtungen |
| US5249465A (en) * | 1990-12-11 | 1993-10-05 | Motorola, Inc. | Accelerometer utilizing an annular mass |
| CA2149933A1 (en) * | 1994-06-29 | 1995-12-30 | Robert M. Boysel | Micro-mechanical accelerometers with improved detection circuitry |
| DE19541388A1 (de) | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
| DE19639946B4 (de) * | 1996-09-27 | 2006-09-21 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| FI119299B (fi) * | 2005-06-17 | 2008-09-30 | Vti Technologies Oy | Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi |
| DE102006057929A1 (de) * | 2006-12-08 | 2008-06-12 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor mit verringerter Empfindlichkeit gegenüber dem Einfluss driftender Oberflächenladungen und zu seinem Betrieb geeignetes Verfahren |
| ITTO20070033A1 (it) * | 2007-01-19 | 2008-07-20 | St Microelectronics Srl | Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata |
-
2009
- 2009-01-13 DE DE102009000167A patent/DE102009000167A1/de active Pending
- 2009-11-06 US US12/614,176 patent/US20100175473A1/en not_active Abandoned
-
2010
- 2010-01-07 IT ITMI2010A000004A patent/IT1397626B1/it active
- 2010-01-13 JP JP2010004592A patent/JP5697874B2/ja active Active
-
2014
- 2014-06-16 JP JP2014123353A patent/JP5808459B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| DE102009000167A1 (de) | 2010-07-22 |
| JP2014186036A (ja) | 2014-10-02 |
| JP5697874B2 (ja) | 2015-04-08 |
| ITMI20100004A1 (it) | 2010-07-14 |
| US20100175473A1 (en) | 2010-07-15 |
| JP5808459B2 (ja) | 2015-11-10 |
| JP2010164564A (ja) | 2010-07-29 |
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