FI20085314A0 - Värähtelevä mikromekaaninen kulmanopeusanturi - Google Patents

Värähtelevä mikromekaaninen kulmanopeusanturi

Info

Publication number
FI20085314A0
FI20085314A0 FI20085314A FI20085314A FI20085314A0 FI 20085314 A0 FI20085314 A0 FI 20085314A0 FI 20085314 A FI20085314 A FI 20085314A FI 20085314 A FI20085314 A FI 20085314A FI 20085314 A0 FI20085314 A0 FI 20085314A0
Authority
FI
Finland
Prior art keywords
angular velocity
velocity sensor
vibrating micromechanical
micromechanical angular
vibrating
Prior art date
Application number
FI20085314A
Other languages
English (en)
Swedish (sv)
Other versions
FI122397B (fi
FI20085314A (fi
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of FI20085314A0 publication Critical patent/FI20085314A0/fi
Priority to FI20085314A priority Critical patent/FI122397B/fi
Priority to JP2011504493A priority patent/JP5620903B2/ja
Priority to EP09732877.7A priority patent/EP2269001B1/en
Priority to PCT/FI2009/050270 priority patent/WO2009127782A1/en
Priority to CN200980122679.9A priority patent/CN102066874B/zh
Priority to KR1020107025612A priority patent/KR101641066B1/ko
Priority to US12/385,655 priority patent/US8176779B2/en
Publication of FI20085314A publication Critical patent/FI20085314A/fi
Priority to HK11112534.5A priority patent/HK1158304A1/xx
Application granted granted Critical
Publication of FI122397B publication Critical patent/FI122397B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
FI20085314A 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi FI122397B (fi)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20085314A FI122397B (fi) 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi
CN200980122679.9A CN102066874B (zh) 2008-04-16 2009-04-08 振动型微机械角速度传感器
EP09732877.7A EP2269001B1 (en) 2008-04-16 2009-04-08 Vibrating micro-mechanical sensor of angular velocity
PCT/FI2009/050270 WO2009127782A1 (en) 2008-04-16 2009-04-08 Vibrating micro-mechanical sensor of angular velocity
JP2011504493A JP5620903B2 (ja) 2008-04-16 2009-04-08 振動型マイクロメカニカル角速度センサ
KR1020107025612A KR101641066B1 (ko) 2008-04-16 2009-04-08 진동 마이크로-기계식 각속도 센서
US12/385,655 US8176779B2 (en) 2008-04-16 2009-04-15 Vibrating micro-mechanical sensor of angular velocity
HK11112534.5A HK1158304A1 (en) 2008-04-16 2011-11-18 Vibrating micro-mechanical sensor of angular velocity

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20085314A FI122397B (fi) 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20085314 2008-04-16

Publications (3)

Publication Number Publication Date
FI20085314A0 true FI20085314A0 (fi) 2008-04-16
FI20085314A FI20085314A (fi) 2009-10-17
FI122397B FI122397B (fi) 2011-12-30

Family

ID=39385942

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20085314A FI122397B (fi) 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi

Country Status (8)

Country Link
US (1) US8176779B2 (fi)
EP (1) EP2269001B1 (fi)
JP (1) JP5620903B2 (fi)
KR (1) KR101641066B1 (fi)
CN (1) CN102066874B (fi)
FI (1) FI122397B (fi)
HK (1) HK1158304A1 (fi)
WO (1) WO2009127782A1 (fi)

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US9170107B2 (en) 2011-09-16 2015-10-27 Invensense, Inc. Micromachined gyroscope including a guided mass system
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US8833162B2 (en) 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
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CN104236536B (zh) * 2013-06-07 2016-12-28 上海矽睿科技有限公司 一种微机械三轴角速度传感器
FI126199B (fi) 2013-06-28 2016-08-15 Murata Manufacturing Co Kapasitiivinen mikromekaaninen anturirakenne ja mikromekaaninen kiihtyvyysanturi
FI125696B (fi) * 2013-09-11 2016-01-15 Murata Manufacturing Co Gyroskooppirakenne ja gyroskooppi parannetulla kvadratuurikompensaatiolla
FI125695B (fi) * 2013-09-11 2016-01-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
EP3184961B1 (en) * 2013-09-30 2021-01-06 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
FI126071B (fi) * 2014-01-28 2016-06-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
CN105371834B (zh) * 2014-08-21 2018-08-31 上海矽睿科技有限公司 检测质量块及采用该检测质量块的陀螺仪
US10330471B2 (en) * 2014-11-27 2019-06-25 Goertek, Inc. Triaxial micro-electromechanical gyroscope
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DE102016213870A1 (de) * 2015-11-20 2017-05-24 Robert Bosch Gmbh Mikromechanischer Drehratensensor und Verfahren zu dessen Herstellung
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US10254134B2 (en) * 2016-08-04 2019-04-09 Apple Inc. Interference-insensitive capacitive displacement sensing
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Also Published As

Publication number Publication date
FI122397B (fi) 2011-12-30
KR20110011625A (ko) 2011-02-08
CN102066874B (zh) 2014-08-27
WO2009127782A1 (en) 2009-10-22
US20090260437A1 (en) 2009-10-22
US8176779B2 (en) 2012-05-15
KR101641066B1 (ko) 2016-07-21
HK1158304A1 (en) 2012-07-13
EP2269001A1 (en) 2011-01-05
JP5620903B2 (ja) 2014-11-05
JP2011517781A (ja) 2011-06-16
CN102066874A (zh) 2011-05-18
EP2269001A4 (en) 2014-04-09
EP2269001B1 (en) 2016-11-30
FI20085314A (fi) 2009-10-17

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