FI20085441A - Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi - Google Patents

Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi Download PDF

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Publication number
FI20085441A
FI20085441A FI20085441A FI20085441A FI20085441A FI 20085441 A FI20085441 A FI 20085441A FI 20085441 A FI20085441 A FI 20085441A FI 20085441 A FI20085441 A FI 20085441A FI 20085441 A FI20085441 A FI 20085441A
Authority
FI
Finland
Prior art keywords
angular velocity
measuring
vibrating micromechanical
velocity sensor
sensor
Prior art date
Application number
FI20085441A
Other languages
English (en)
Swedish (sv)
Other versions
FI120921B (fi
FI20085441A0 (fi
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FI20075403A external-priority patent/FI20075403A0/fi
Publication of FI20085441A0 publication Critical patent/FI20085441A0/fi
Priority to FI20085441A priority Critical patent/FI120921B/fi
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to PCT/FI2008/050313 priority patent/WO2008145823A1/en
Priority to US12/155,059 priority patent/US8474316B2/en
Priority to JP2010509856A priority patent/JP5450394B2/ja
Priority to EP08761709.8A priority patent/EP2150822B1/en
Priority to KR1020097025290A priority patent/KR101500307B1/ko
Priority to CN2008800176406A priority patent/CN101688884B/zh
Publication of FI20085441A publication Critical patent/FI20085441A/fi
Publication of FI120921B publication Critical patent/FI120921B/fi
Application granted granted Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
FI20085441A 2007-06-01 2008-05-12 Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi FI120921B (fi)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI20085441A FI120921B (fi) 2007-06-01 2008-05-12 Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi
PCT/FI2008/050313 WO2008145823A1 (en) 2007-06-01 2008-05-29 A method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity
CN2008800176406A CN101688884B (zh) 2007-06-01 2008-05-29 角速度测量方法和振动微机械角速度传感器
US12/155,059 US8474316B2 (en) 2007-06-01 2008-05-29 Method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity
JP2010509856A JP5450394B2 (ja) 2007-06-01 2008-05-29 角速度を測定する方法及び振動型微小機械角速度センサ
EP08761709.8A EP2150822B1 (en) 2007-06-01 2008-05-29 A method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity
KR1020097025290A KR101500307B1 (ko) 2007-06-01 2008-05-29 각속도 측정 방법 및 각속도의 진동 마이크로기계적 센서

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
FI20075403A FI20075403A0 (sv) 2007-06-01 2007-06-01 Förfarande för mätning av vinkelhastigheten och svängande mikromekanisk vinkelhastightesgivare
FI20075403 2007-06-01
FI20085441 2008-05-12
FI20085441A FI120921B (fi) 2007-06-01 2008-05-12 Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi

Publications (3)

Publication Number Publication Date
FI20085441A0 FI20085441A0 (fi) 2008-05-12
FI20085441A true FI20085441A (fi) 2008-12-02
FI120921B FI120921B (fi) 2010-04-30

Family

ID=39523096

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20085441A FI120921B (fi) 2007-06-01 2008-05-12 Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi

Country Status (7)

Country Link
US (1) US8474316B2 (fi)
EP (1) EP2150822B1 (fi)
JP (1) JP5450394B2 (fi)
KR (1) KR101500307B1 (fi)
CN (1) CN101688884B (fi)
FI (1) FI120921B (fi)
WO (1) WO2008145823A1 (fi)

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JP2007327781A (ja) * 2006-06-06 2007-12-20 Fujitsu Media Device Kk 振動センサ
FI119895B (fi) * 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
JP2010190706A (ja) 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102014105205A1 (de) * 2013-04-26 2014-11-13 Maxim Integrated Products, Inc. Gyroskop-Stoß- und -Störungsmessschaltung
FI126071B (fi) * 2014-01-28 2016-06-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
EP3161416A2 (en) 2014-06-26 2017-05-03 Lumedyne Technologies Incorporated Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
DE102014215038A1 (de) * 2014-07-31 2016-02-04 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
FI20146153A (fi) 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekaaninen gyroskooppirakenne
FR3035736B1 (fr) 2015-04-29 2019-08-23 Commissariat A L'energie Atomique Et Aux Energies Alternatives Systeme electronique combinable a un instrument de musique a vent pour produire des sons electroniques et instrument comprenant un tel systeme
US10030976B2 (en) 2015-05-13 2018-07-24 Kionix, Inc. Phase-based measurement and control of a gyroscope
CN107636473B (zh) 2015-05-20 2020-09-01 卢米达因科技公司 从非线性的周期性信号中提取惯性信息
US20170153266A1 (en) * 2015-11-30 2017-06-01 Lumedyne Technologies Incorporated Systems and methods for determining inertial parameters using integration
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
JP6984342B2 (ja) 2017-11-22 2021-12-17 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
US10732199B2 (en) * 2017-12-20 2020-08-04 Apple Inc. Multi-stage MEMS accelerometer for mixed g-level operation
CN113135548A (zh) * 2021-04-20 2021-07-20 广州蜂鸟传感科技有限公司 一种压电微机械执行器

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JPH06160102A (ja) 1992-11-20 1994-06-07 Mitsutoyo Corp 振動ジャイロ
US5817940A (en) * 1996-03-14 1998-10-06 Aisin Seiki Kabishiki Kaisha Angular rate detector
JPH09250928A (ja) 1996-03-14 1997-09-22 Aisin Seiki Co Ltd 角速度検出装置
US6230563B1 (en) * 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
JP4126833B2 (ja) * 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
US6370937B2 (en) * 2000-03-17 2002-04-16 Microsensors, Inc. Method of canceling quadrature error in an angular rate sensor
JP2001356017A (ja) 2000-06-14 2001-12-26 Alps Electric Co Ltd 振動子の駆動検出装置
US6674108B2 (en) * 2000-12-20 2004-01-06 Honeywell International Inc. Gate length control for semiconductor chip design
US6946695B2 (en) * 2002-08-08 2005-09-20 Triad Sensors, Inc. Solid-state rotational rate sensor device and method
US6837107B2 (en) 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
CN100437116C (zh) * 2003-04-28 2008-11-26 模拟器件公司 提供两个加速度检测轴和一个角速度检测轴的微加工多传感器
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Also Published As

Publication number Publication date
EP2150822A1 (en) 2010-02-10
JP5450394B2 (ja) 2014-03-26
WO2008145823A1 (en) 2008-12-04
FI120921B (fi) 2010-04-30
KR101500307B1 (ko) 2015-03-09
EP2150822B1 (en) 2015-03-25
CN101688884A (zh) 2010-03-31
US8474316B2 (en) 2013-07-02
CN101688884B (zh) 2012-07-04
KR20100017610A (ko) 2010-02-16
EP2150822A4 (en) 2012-08-01
JP2010529426A (ja) 2010-08-26
FI20085441A0 (fi) 2008-05-12
US20080314144A1 (en) 2008-12-25

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