CN101688884A - 角速度测量方法和振动微机械角速度传感器 - Google Patents
角速度测量方法和振动微机械角速度传感器 Download PDFInfo
- Publication number
- CN101688884A CN101688884A CN200880017640A CN200880017640A CN101688884A CN 101688884 A CN101688884 A CN 101688884A CN 200880017640 A CN200880017640 A CN 200880017640A CN 200880017640 A CN200880017640 A CN 200880017640A CN 101688884 A CN101688884 A CN 101688884A
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- signal
- angular
- phase
- motion
- main motion
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (21)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20075403 | 2007-06-01 | ||
FI20075403A FI20075403A0 (sv) | 2007-06-01 | 2007-06-01 | Förfarande för mätning av vinkelhastigheten och svängande mikromekanisk vinkelhastightesgivare |
FI20085441A FI120921B (fi) | 2007-06-01 | 2008-05-12 | Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi |
FI20085441 | 2008-05-12 | ||
PCT/FI2008/050313 WO2008145823A1 (en) | 2007-06-01 | 2008-05-29 | A method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101688884A true CN101688884A (zh) | 2010-03-31 |
CN101688884B CN101688884B (zh) | 2012-07-04 |
Family
ID=39523096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008800176406A Active CN101688884B (zh) | 2007-06-01 | 2008-05-29 | 角速度测量方法和振动微机械角速度传感器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8474316B2 (zh) |
EP (1) | EP2150822B1 (zh) |
JP (1) | JP5450394B2 (zh) |
KR (1) | KR101500307B1 (zh) |
CN (1) | CN101688884B (zh) |
FI (1) | FI120921B (zh) |
WO (1) | WO2008145823A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104121899A (zh) * | 2013-04-26 | 2014-10-29 | 马克西姆综合产品公司 | 陀螺仪震动和扰动检测电路 |
CN113135548A (zh) * | 2021-04-20 | 2021-07-20 | 广州蜂鸟传感科技有限公司 | 一种压电微机械执行器 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007327781A (ja) * | 2006-06-06 | 2007-12-20 | Fujitsu Media Device Kk | 振動センサ |
FI119895B (fi) * | 2007-10-05 | 2009-04-30 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
JP2010190706A (ja) | 2009-02-18 | 2010-09-02 | Panasonic Corp | 慣性力センサ |
FI20095201A0 (fi) * | 2009-03-02 | 2009-03-02 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
FI126071B (en) * | 2014-01-28 | 2016-06-15 | Murata Manufacturing Co | Improved gyroscope structure and gyroscope |
US9910061B2 (en) | 2014-06-26 | 2018-03-06 | Lumedyne Technologies Incorporated | Systems and methods for extracting system parameters from nonlinear periodic signals from sensors |
DE102014215038A1 (de) * | 2014-07-31 | 2016-02-04 | Robert Bosch Gmbh | Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors |
FI20146153A (fi) * | 2014-12-29 | 2016-06-30 | Murata Manufacturing Co | Mikromekaaninen gyroskooppirakenne |
FR3035736B1 (fr) | 2015-04-29 | 2019-08-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Systeme electronique combinable a un instrument de musique a vent pour produire des sons electroniques et instrument comprenant un tel systeme |
US10030976B2 (en) | 2015-05-13 | 2018-07-24 | Kionix, Inc. | Phase-based measurement and control of a gyroscope |
TWI676029B (zh) | 2015-05-20 | 2019-11-01 | 美商路梅戴尼科技公司 | 用於決定慣性參數之方法及系統 |
US20170153266A1 (en) * | 2015-11-30 | 2017-06-01 | Lumedyne Technologies Incorporated | Systems and methods for determining inertial parameters using integration |
US10234477B2 (en) | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
JP6984342B2 (ja) * | 2017-11-22 | 2021-12-17 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーの製造方法、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
US10732199B2 (en) * | 2017-12-20 | 2020-08-04 | Apple Inc. | Multi-stage MEMS accelerometer for mixed g-level operation |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06160102A (ja) | 1992-11-20 | 1994-06-07 | Mitsutoyo Corp | 振動ジャイロ |
JPH09250928A (ja) | 1996-03-14 | 1997-09-22 | Aisin Seiki Co Ltd | 角速度検出装置 |
US5817940A (en) * | 1996-03-14 | 1998-10-06 | Aisin Seiki Kabishiki Kaisha | Angular rate detector |
US6230563B1 (en) * | 1998-06-09 | 2001-05-15 | Integrated Micro Instruments, Inc. | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability |
JP4126833B2 (ja) * | 1999-03-12 | 2008-07-30 | 株式会社デンソー | 角速度センサ装置 |
US6370937B2 (en) * | 2000-03-17 | 2002-04-16 | Microsensors, Inc. | Method of canceling quadrature error in an angular rate sensor |
JP2001356017A (ja) | 2000-06-14 | 2001-12-26 | Alps Electric Co Ltd | 振動子の駆動検出装置 |
US6674108B2 (en) * | 2000-12-20 | 2004-01-06 | Honeywell International Inc. | Gate length control for semiconductor chip design |
US6946695B2 (en) * | 2002-08-08 | 2005-09-20 | Triad Sensors, Inc. | Solid-state rotational rate sensor device and method |
US6837107B2 (en) | 2003-04-28 | 2005-01-04 | Analog Devices, Inc. | Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing |
CN100437116C (zh) * | 2003-04-28 | 2008-11-26 | 模拟器件公司 | 提供两个加速度检测轴和一个角速度检测轴的微加工多传感器 |
DE10360963B4 (de) * | 2003-12-23 | 2007-05-16 | Litef Gmbh | Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel |
US7526957B2 (en) * | 2006-04-18 | 2009-05-05 | Watson Industries, Inc. | Vibrating inertial rate sensor utilizing skewed drive or sense elements |
-
2008
- 2008-05-12 FI FI20085441A patent/FI120921B/fi not_active IP Right Cessation
- 2008-05-29 KR KR1020097025290A patent/KR101500307B1/ko active IP Right Grant
- 2008-05-29 CN CN2008800176406A patent/CN101688884B/zh active Active
- 2008-05-29 WO PCT/FI2008/050313 patent/WO2008145823A1/en active Application Filing
- 2008-05-29 EP EP08761709.8A patent/EP2150822B1/en active Active
- 2008-05-29 US US12/155,059 patent/US8474316B2/en active Active
- 2008-05-29 JP JP2010509856A patent/JP5450394B2/ja active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104121899A (zh) * | 2013-04-26 | 2014-10-29 | 马克西姆综合产品公司 | 陀螺仪震动和扰动检测电路 |
CN104121899B (zh) * | 2013-04-26 | 2018-10-12 | 马克西姆综合产品公司 | 陀螺仪震动和扰动检测电路 |
CN113135548A (zh) * | 2021-04-20 | 2021-07-20 | 广州蜂鸟传感科技有限公司 | 一种压电微机械执行器 |
Also Published As
Publication number | Publication date |
---|---|
CN101688884B (zh) | 2012-07-04 |
US20080314144A1 (en) | 2008-12-25 |
FI20085441A (fi) | 2008-12-02 |
WO2008145823A1 (en) | 2008-12-04 |
EP2150822A4 (en) | 2012-08-01 |
KR101500307B1 (ko) | 2015-03-09 |
EP2150822A1 (en) | 2010-02-10 |
FI20085441A0 (fi) | 2008-05-12 |
US8474316B2 (en) | 2013-07-02 |
EP2150822B1 (en) | 2015-03-25 |
JP2010529426A (ja) | 2010-08-26 |
KR20100017610A (ko) | 2010-02-16 |
JP5450394B2 (ja) | 2014-03-26 |
FI120921B (fi) | 2010-04-30 |
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Owner name: CUNTIAN ELECTRONICS CO., LTD. Free format text: FORMER NAME: YTI HAMLIN OY |
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Address after: Finland Vantaa Patentee after: Vti Technologies OY Address before: Finland Vantaa Patentee before: VTI Technologies OY |
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Effective date of registration: 20210330 Address after: Kyoto Japan Patentee after: Murata Manufacturing Co.,Ltd. Address before: Wanta, Finland Patentee before: MURATA ELECTRONICS OY |
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