DE102007009218A8 - Winkelgeschwindigkeitssensor und Verfahren zu dessen Betrieb - Google Patents

Winkelgeschwindigkeitssensor und Verfahren zu dessen Betrieb Download PDF

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Publication number
DE102007009218A8
DE102007009218A8 DE102007009218A DE102007009218A DE102007009218A8 DE 102007009218 A8 DE102007009218 A8 DE 102007009218A8 DE 102007009218 A DE102007009218 A DE 102007009218A DE 102007009218 A DE102007009218 A DE 102007009218A DE 102007009218 A8 DE102007009218 A8 DE 102007009218A8
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DE
Germany
Prior art keywords
angular velocity
velocity sensor
sensor
angular
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE102007009218A
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English (en)
Other versions
DE102007009218B4 (de
DE102007009218A1 (de
Inventor
Takashi Kariya Katsumata
Takeshi Kariya Ito
Hirofumi Kariya Higuchi
Mutsuhito Kariya Ogino
Tetsuya Kariya Morishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Publication of DE102007009218A1 publication Critical patent/DE102007009218A1/de
Publication of DE102007009218A8 publication Critical patent/DE102007009218A8/de
Application granted granted Critical
Publication of DE102007009218B4 publication Critical patent/DE102007009218B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE102007009218.2A 2006-02-28 2007-02-26 Winkelgeschwindigkeitssensor und Verfahren zu dessen Betrieb Expired - Fee Related DE102007009218B4 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006-052094 2006-02-28
JP2006052094 2006-02-28
JP2006-260603 2006-09-26
JP2006260603A JP4830757B2 (ja) 2006-02-28 2006-09-26 角速度センサおよびその製造方法

Publications (3)

Publication Number Publication Date
DE102007009218A1 DE102007009218A1 (de) 2007-09-06
DE102007009218A8 true DE102007009218A8 (de) 2008-01-17
DE102007009218B4 DE102007009218B4 (de) 2014-06-26

Family

ID=38329488

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102007009218.2A Expired - Fee Related DE102007009218B4 (de) 2006-02-28 2007-02-26 Winkelgeschwindigkeitssensor und Verfahren zu dessen Betrieb

Country Status (3)

Country Link
US (1) US7523665B2 (de)
JP (1) JP4830757B2 (de)
DE (1) DE102007009218B4 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4682856B2 (ja) * 2006-02-01 2011-05-11 株式会社デンソー 角速度センサ装置
WO2009028594A1 (ja) * 2007-08-31 2009-03-05 Rohm Co., Ltd. 角速度信号検出回路及び角速度信号検出方法
US7805987B1 (en) * 2008-08-19 2010-10-05 Smith Bradley R System and method for pneumatic tire defect detection
JP5183374B2 (ja) * 2008-08-29 2013-04-17 日立オートモティブシステムズ株式会社 角速度検出装置
DE102008044000B4 (de) * 2008-11-24 2019-11-07 Robert Bosch Gmbh Verfahren zum Regeln einer angeregten Schwingung, Vorrichtung zum Regeln einer angeregten Schwingung
JP5260342B2 (ja) * 2009-01-30 2013-08-14 ローム株式会社 Ｍｅｍｓセンサ
JP5355334B2 (ja) * 2009-10-05 2013-11-27 オリンパス株式会社 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置
US8513746B2 (en) 2010-10-15 2013-08-20 Rohm Co., Ltd. MEMS sensor and method for producing MEMS sensor, and MEMS package
JP2012255668A (ja) * 2011-06-07 2012-12-27 Denso Corp 角速度センサ
JP5287939B2 (ja) 2011-06-28 2013-09-11 株式会社デンソー 角速度センサ
JP6812830B2 (ja) * 2017-02-20 2021-01-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
JPH10246639A (ja) * 1997-03-05 1998-09-14 Mitsubishi Electric Corp 角速度検出装置
JP3307328B2 (ja) * 1998-05-11 2002-07-24 株式会社デンソー 半導体力学量センサ
JP3428458B2 (ja) * 1998-10-01 2003-07-22 株式会社村田製作所 角速度センサ
US6257059B1 (en) * 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
WO2002018875A1 (fr) * 2000-08-30 2002-03-07 Matsushita Electric Industrial Co., Ltd. Capteur de vitesse angulaire
JP3627648B2 (ja) * 2000-11-27 2005-03-09 株式会社デンソー 角速度センサ
US6718823B2 (en) * 2002-04-30 2004-04-13 Honeywell International Inc. Pulse width modulation drive signal for a MEMS gyroscope
FR2846740B1 (fr) * 2002-11-05 2005-02-04 Thales Sa Capteur gyrometrique micro-usine, a detection dans le plan de la plaque usinee
DE10350037A1 (de) * 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
US20050092085A1 (en) * 2003-11-04 2005-05-05 Shyu-Mou Chen Solid-state gyroscopes and planar three-axis inertial measurement unit
DE102005010940B8 (de) * 2004-03-12 2013-01-17 Denso Corporation Elektrostatisch in Schwingungen versetzbare Anordnung
US7134336B2 (en) * 2004-03-19 2006-11-14 Denso Corporation Vibration type angular velocity sensor
JP4412477B2 (ja) * 2004-06-11 2010-02-10 株式会社デンソー 振動型角速度センサ
JP2006071335A (ja) * 2004-08-31 2006-03-16 Denso Corp 角速度センサおよびその駆動方法
DE102005041059B4 (de) * 2004-09-02 2014-06-26 Denso Corporation Winkelratensensor und Anbringungsstruktur eines Winkelratensensors

Also Published As

Publication number Publication date
DE102007009218B4 (de) 2014-06-26
US20070199377A1 (en) 2007-08-30
DE102007009218A1 (de) 2007-09-06
JP4830757B2 (ja) 2011-12-07
US7523665B2 (en) 2009-04-28
JP2007263941A (ja) 2007-10-11

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OP8 Request for examination as to paragraph 44 patent law
8196 Reprint of faulty title page (publication) german patentblatt: part 1a6
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R020 Patent grant now final

Effective date: 20150327

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee