DE602005014898D1 - Flüssigkeitssensor und Verfahren - Google Patents

Flüssigkeitssensor und Verfahren

Info

Publication number
DE602005014898D1
DE602005014898D1 DE602005014898T DE602005014898T DE602005014898D1 DE 602005014898 D1 DE602005014898 D1 DE 602005014898D1 DE 602005014898 T DE602005014898 T DE 602005014898T DE 602005014898 T DE602005014898 T DE 602005014898T DE 602005014898 D1 DE602005014898 D1 DE 602005014898D1
Authority
DE
Germany
Prior art keywords
liquid sensor
sensor
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005014898T
Other languages
English (en)
Inventor
Qingqiao Wei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Development Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Publication of DE602005014898D1 publication Critical patent/DE602005014898D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Biochemistry (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Thin Film Transistor (AREA)
DE602005014898T 2004-03-23 2005-03-15 Flüssigkeitssensor und Verfahren Active DE602005014898D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/807,932 US20050212531A1 (en) 2004-03-23 2004-03-23 Fluid sensor and methods

Publications (1)

Publication Number Publication Date
DE602005014898D1 true DE602005014898D1 (de) 2009-07-30

Family

ID=34862061

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005014898T Active DE602005014898D1 (de) 2004-03-23 2005-03-15 Flüssigkeitssensor und Verfahren

Country Status (5)

Country Link
US (1) US20050212531A1 (de)
EP (1) EP1580547B1 (de)
JP (1) JP2005283578A (de)
DE (1) DE602005014898D1 (de)
TW (1) TW200532170A (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7692179B2 (en) * 2004-07-09 2010-04-06 Hewlett-Packard Development Company, L.P. Nanowire device with (111) vertical sidewalls and method of fabrication
US7235475B2 (en) * 2004-12-23 2007-06-26 Hewlett-Packard Development Company, L.P. Semiconductor nanowire fluid sensor and method for fabricating the same
JP2010500559A (ja) * 2006-08-11 2010-01-07 エージェンシー フォー サイエンス，テクノロジー アンド リサーチ ナノワイヤセンサ、ナノワイヤセンサアレイ、及び当該センサ及びセンサアレイを形成する方法
US20090066348A1 (en) * 2006-09-06 2009-03-12 Young Shik Shin Apparatus and method for quantitative determination of target molecules
WO2008030395A1 (en) * 2006-09-07 2008-03-13 California Institute Of Technology Apparatus and method for quantitative determination of target molecules
US7591193B2 (en) * 2006-10-11 2009-09-22 Hewlett-Packard Development Company, L.P. Hot-wire nano-anemometer
WO2008068692A1 (en) * 2006-12-08 2008-06-12 Koninklijke Philips Electronics N.V. Method of manufacturing a semiconductor sensor device and semiconductor sensor device obtained with such method
EP2092320A1 (de) * 2006-12-08 2009-08-26 Koninklijke Philips Electronics N.V. Verfahren zur herstellung eines halbleitersensorelements und in einem derartigen verfahren hergestelltes halbleitersensorelement
US8297351B2 (en) * 2007-12-27 2012-10-30 Schlumberger Technology Corporation Downhole sensing system using carbon nanotube FET
US8810249B2 (en) * 2009-03-20 2014-08-19 Thomas G. Cehelnik E-field sensor arrays for interactive gaming, computer interfaces, machine vision, medical imaging, and geological exploration CIP
TWI424160B (zh) * 2009-06-17 2014-01-21 Univ Nat Chiao Tung 結合矽奈米線閘極二極體之感測元件、製造方法及其檢測系統
KR20130136623A (ko) * 2012-06-05 2013-12-13 인제대학교 산학협력단 액체 전기전도도 측정 장치
US9310332B2 (en) * 2013-11-14 2016-04-12 Taiwan Semiconductor Manufacturing Company Limited Semiconductor device and selective heating thereof
US20180364188A1 (en) * 2014-03-13 2018-12-20 Innosense Llc Modular chemiresistive sensor for in vitro diagnostic and gas sensing applications
TWI566409B (zh) * 2014-08-26 2017-01-11 元太科技工業股份有限公司 電晶體及其製作方法
US20180128774A1 (en) * 2016-11-07 2018-05-10 Epistar Corporation Sensing device
US10770573B2 (en) * 2018-09-20 2020-09-08 Tower Semiconductor Ltd. Apparatus, system and method of an electrostatically formed nanowire (EFN)
CN116888464A (zh) * 2021-02-25 2023-10-13 国立研究开发法人科学技术振兴机构 气体传感器
WO2023242297A1 (en) * 2022-06-15 2023-12-21 Zhen Zhang Fet gas sensor device

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3897274A (en) * 1971-06-01 1975-07-29 Texas Instruments Inc Method of fabricating dielectrically isolated semiconductor structures
US4020830A (en) * 1975-03-12 1977-05-03 The University Of Utah Selective chemical sensitive FET transducers
GB2278235B (en) * 1991-10-21 1996-05-08 Holm Kennedy James W Method and device for biochemical sensing
US5576563A (en) 1995-04-24 1996-11-19 Motorola Inc. Chemical probe field effect transistor for measuring the surface potential of a gate electrode in response to chemical exposure
GB9512929D0 (en) * 1995-06-24 1995-08-30 Sun Electric Uk Ltd Multi-gas sensor systems for automatic emissions measurement
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
US6265222B1 (en) * 1999-01-15 2001-07-24 Dimeo, Jr. Frank Micro-machined thin film hydrogen gas sensor, and method of making and using the same
AU7701300A (en) * 1999-09-10 2001-04-10 Starmega Corporation Strongly textured atomic ridges and dots
US6673644B2 (en) * 2001-03-29 2004-01-06 Georgia Tech Research Corporation Porous gas sensors and method of preparation thereof
JP2002122560A (ja) * 2000-08-10 2002-04-26 Ngk Spark Plug Co Ltd ガスセンサ
EP2298968A3 (de) * 2000-08-22 2011-10-05 President and Fellows of Harvard College Verfahren zur Züchtung von Nanodrähten
US7301199B2 (en) * 2000-08-22 2007-11-27 President And Fellows Of Harvard College Nanoscale wires and related devices
JP4583710B2 (ja) * 2000-12-11 2010-11-17 プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ ナノセンサ
US20030113714A1 (en) * 2001-09-28 2003-06-19 Belcher Angela M. Biological control of nanoparticles
DE10247144A1 (de) * 2001-10-09 2003-05-22 Riken Tokio Tokyo Kk Gasdetektorelement und diese enthaltendes Gasdetektorgerät
US6882767B2 (en) * 2001-12-27 2005-04-19 The Regents Of The University Of California Nanowire optoelectric switching device and method
US20040132070A1 (en) * 2002-01-16 2004-07-08 Nanomix, Inc. Nonotube-based electronic detection of biological molecules
US20060228723A1 (en) * 2002-01-16 2006-10-12 Keith Bradley System and method for electronic sensing of biomolecules

Also Published As

Publication number Publication date
EP1580547B1 (de) 2009-06-17
EP1580547A1 (de) 2005-09-28
TW200532170A (en) 2005-10-01
US20050212531A1 (en) 2005-09-29
JP2005283578A (ja) 2005-10-13

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Legal Events

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