DE602004015107D1 - Drucksensorvorrichtung und verfahren - Google Patents
Drucksensorvorrichtung und verfahrenInfo
- Publication number
- DE602004015107D1 DE602004015107D1 DE602004015107T DE602004015107T DE602004015107D1 DE 602004015107 D1 DE602004015107 D1 DE 602004015107D1 DE 602004015107 T DE602004015107 T DE 602004015107T DE 602004015107 T DE602004015107 T DE 602004015107T DE 602004015107 D1 DE602004015107 D1 DE 602004015107D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- sensor device
- pressure
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Acoustics & Sound (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/465,202 US7082835B2 (en) | 2003-06-18 | 2003-06-18 | Pressure sensor apparatus and method |
PCT/US2004/019384 WO2004113859A1 (en) | 2003-06-18 | 2004-06-17 | Pressure sensor apparatus and method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004015107D1 true DE602004015107D1 (de) | 2008-08-28 |
Family
ID=33517467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004015107T Expired - Lifetime DE602004015107D1 (de) | 2003-06-18 | 2004-06-17 | Drucksensorvorrichtung und verfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US7082835B2 (de) |
EP (1) | EP1634047B1 (de) |
CN (1) | CN100449289C (de) |
DE (1) | DE602004015107D1 (de) |
WO (1) | WO2004113859A1 (de) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0305461D0 (en) * | 2003-03-10 | 2003-04-16 | Transense Technologies Plc | Improvements in the construction of saw devices |
EP1653209A4 (de) * | 2003-07-03 | 2007-03-07 | Toyo Communication Equip | Drucksensor des quarz-typs und herstellungsverfahren dafür |
US7165298B2 (en) | 2004-09-14 | 2007-01-23 | Honeywell International Inc. | Method of making a surface acoustic wave device |
US20060191351A1 (en) * | 2005-02-25 | 2006-08-31 | Meehan Peter G | Sealed capacitive sensor |
US7377177B1 (en) | 2007-04-13 | 2008-05-27 | Honeywell International Inc. | Pressure sensor method and apparatus |
GB2439344B (en) * | 2006-06-23 | 2011-08-10 | Transense Technologies Plc | Post assembly automatic adjustment of tpms sensor preload |
US20080222884A1 (en) * | 2007-03-14 | 2008-09-18 | Honeywell International Inc. | Packaging for chip-on-board pressure sensor |
US7576470B2 (en) * | 2007-04-30 | 2009-08-18 | Honeywell International Inc. | Mechanical packaging of surface acoustic wave device for sensing applications |
US20090151829A1 (en) * | 2007-12-18 | 2009-06-18 | Robert Edward Lionetti | Tire with integral sensor mount |
US7726184B2 (en) * | 2007-12-28 | 2010-06-01 | Honeywell International Inc. | Surface acoustic wave sensor and package |
US7730772B2 (en) * | 2007-12-28 | 2010-06-08 | Honeywell International Inc. | Surface acoustic wave sensor and package |
GB2462128B (en) * | 2008-07-25 | 2012-05-02 | Transense Technologies Plc | SAW sensor with adjustable preload |
US8384524B2 (en) * | 2008-11-26 | 2013-02-26 | Honeywell International Inc. | Passive surface acoustic wave sensing system |
US8317392B2 (en) * | 2008-12-23 | 2012-11-27 | Honeywell International Inc. | Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions |
DE102009000692A1 (de) | 2009-02-06 | 2010-08-12 | Wika Alexander Wiegand Gmbh & Co. Kg | Messgerät |
WO2010138559A2 (en) * | 2009-05-26 | 2010-12-02 | Diba Industries, Inc. | Pressure-sensor based liquid-level measuring device with reduced capillary effect |
AU2010317586B2 (en) | 2009-11-11 | 2014-09-18 | Koninklijke Philips Electronics N.V. | Wireless identification of a component of a pressure support system |
CN101799344B (zh) * | 2010-04-21 | 2014-07-09 | 无锡莱顿电子有限公司 | 硅压力传感器的封装结构 |
US8479590B2 (en) | 2010-11-18 | 2013-07-09 | Honeywell International Inc. | System for monitoring structural assets |
US8671753B2 (en) | 2011-08-01 | 2014-03-18 | Honeywell International Inc. | Cable harness for a sensor |
US8459125B2 (en) | 2011-08-01 | 2013-06-11 | Honeywell International Inc. | Pressure sensor assembly |
US8934263B2 (en) | 2011-08-01 | 2015-01-13 | Honeywell International Inc. | Protective cover for pressure sensor assemblies |
US8817483B2 (en) | 2011-08-01 | 2014-08-26 | Honeywell International Inc. | Connector assembly for a sensor |
US8656786B2 (en) | 2011-08-01 | 2014-02-25 | Honeywell International Inc. | Interchangeable pressure sensor assembly and methods of assembly |
US8534130B2 (en) | 2011-08-01 | 2013-09-17 | Honeywell International Inc. | Joint between a pressure sensor and a pressure port of a sensor assembly |
US20130098160A1 (en) | 2011-10-25 | 2013-04-25 | Honeywell International Inc. | Sensor with fail-safe media seal |
CN102384808B (zh) * | 2011-11-03 | 2015-10-07 | 浙江庆源车业部件有限公司 | 一种压力变送传感器 |
US8947242B2 (en) | 2011-12-15 | 2015-02-03 | Honeywell International Inc. | Gas valve with valve leakage test |
US9074770B2 (en) | 2011-12-15 | 2015-07-07 | Honeywell International Inc. | Gas valve with electronic valve proving system |
US8899264B2 (en) | 2011-12-15 | 2014-12-02 | Honeywell International Inc. | Gas valve with electronic proof of closure system |
US9835265B2 (en) | 2011-12-15 | 2017-12-05 | Honeywell International Inc. | Valve with actuator diagnostics |
US9557059B2 (en) | 2011-12-15 | 2017-01-31 | Honeywell International Inc | Gas valve with communication link |
US9851103B2 (en) | 2011-12-15 | 2017-12-26 | Honeywell International Inc. | Gas valve with overpressure diagnostics |
US9995486B2 (en) | 2011-12-15 | 2018-06-12 | Honeywell International Inc. | Gas valve with high/low gas pressure detection |
US9846440B2 (en) | 2011-12-15 | 2017-12-19 | Honeywell International Inc. | Valve controller configured to estimate fuel comsumption |
US8839815B2 (en) | 2011-12-15 | 2014-09-23 | Honeywell International Inc. | Gas valve with electronic cycle counter |
US8905063B2 (en) | 2011-12-15 | 2014-12-09 | Honeywell International Inc. | Gas valve with fuel rate monitor |
CN102589759B (zh) * | 2012-02-20 | 2013-10-23 | 浙江大学 | 基于压阻式和电容式组合的仿生柔性触觉传感阵列 |
CN102680159B (zh) * | 2012-05-24 | 2013-12-04 | 柯远珍 | 一种传感器 |
US9487388B2 (en) | 2012-06-21 | 2016-11-08 | Nextinput, Inc. | Ruggedized MEMS force die |
US10422531B2 (en) | 2012-09-15 | 2019-09-24 | Honeywell International Inc. | System and approach for controlling a combustion chamber |
US9234661B2 (en) | 2012-09-15 | 2016-01-12 | Honeywell International Inc. | Burner control system |
CN103939089B (zh) * | 2013-01-17 | 2017-07-25 | 中国石油化工股份有限公司 | 示踪器、包括该示踪器的钻井设备及使用方法 |
US9076272B2 (en) * | 2013-05-28 | 2015-07-07 | Infineon Technologies Ag | Wheel speed sensor and interface systems and methods |
CN103499024B (zh) * | 2013-10-22 | 2015-11-25 | 天津七一二通信广播有限公司 | 一种用于输油管道泄漏检测系统的声表面波压力传感器 |
EP2868970B1 (de) | 2013-10-29 | 2020-04-22 | Honeywell Technologies Sarl | Regelungsvorrichtung |
WO2015089175A1 (en) * | 2013-12-11 | 2015-06-18 | The Board Of Regents Of The University Of Texas System | Devices and methods for parameter measurement |
US10024439B2 (en) | 2013-12-16 | 2018-07-17 | Honeywell International Inc. | Valve over-travel mechanism |
US9902611B2 (en) | 2014-01-13 | 2018-02-27 | Nextinput, Inc. | Miniaturized and ruggedized wafer level MEMs force sensors |
US9410861B2 (en) | 2014-03-25 | 2016-08-09 | Honeywell International Inc. | Pressure sensor with overpressure protection |
US9841122B2 (en) | 2014-09-09 | 2017-12-12 | Honeywell International Inc. | Gas valve with electronic valve proving system |
US9645584B2 (en) | 2014-09-17 | 2017-05-09 | Honeywell International Inc. | Gas valve with electronic health monitoring |
CN117486166A (zh) | 2015-06-10 | 2024-02-02 | 触控解决方案股份有限公司 | 具有容差沟槽的加固的晶圆级mems力传感器 |
US10215655B2 (en) | 2015-12-31 | 2019-02-26 | Honeywell International Inc. | Pressure sensor assembly |
US10503181B2 (en) | 2016-01-13 | 2019-12-10 | Honeywell International Inc. | Pressure regulator |
US9945747B1 (en) | 2016-10-13 | 2018-04-17 | Honeywell International Inc. | Gel filled port pressure sensor for robust media sealing |
US10564062B2 (en) | 2016-10-19 | 2020-02-18 | Honeywell International Inc. | Human-machine interface for gas valve |
WO2018148503A1 (en) | 2017-02-09 | 2018-08-16 | Nextinput, Inc. | Integrated digital force sensors and related methods of manufacture |
US11243125B2 (en) | 2017-02-09 | 2022-02-08 | Nextinput, Inc. | Integrated piezoresistive and piezoelectric fusion force sensor |
US10481024B2 (en) | 2017-04-20 | 2019-11-19 | Honeywell International Inc. | Pressure sensor assembly including a cured elastomeric force transmitting member |
US10684184B2 (en) | 2017-04-20 | 2020-06-16 | Honeywell International Inc. | Pressure sensor assembly having a cavity filled with gel or fluid |
WO2019018641A1 (en) | 2017-07-19 | 2019-01-24 | Nextinput, Inc. | STACK OF STRAIN TRANSFER IN A MEMS FORCE SENSOR |
WO2019023309A1 (en) | 2017-07-25 | 2019-01-31 | Nextinput, Inc. | FORCE SENSOR AND INTEGRATED FINGERPRINTS |
US11243126B2 (en) | 2017-07-27 | 2022-02-08 | Nextinput, Inc. | Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture |
WO2019079420A1 (en) | 2017-10-17 | 2019-04-25 | Nextinput, Inc. | SHIFT TEMPERATURE COEFFICIENT COMPENSATION FOR FORCE SENSOR AND STRAIN GAUGE |
WO2019090057A1 (en) | 2017-11-02 | 2019-05-09 | Nextinput, Inc. | Sealed force sensor with etch stop layer |
WO2019099821A1 (en) | 2017-11-16 | 2019-05-23 | Nextinput, Inc. | Force attenuator for force sensor |
US11073281B2 (en) | 2017-12-29 | 2021-07-27 | Honeywell International Inc. | Closed-loop programming and control of a combustion appliance |
US10697815B2 (en) | 2018-06-09 | 2020-06-30 | Honeywell International Inc. | System and methods for mitigating condensation in a sensor module |
DE202019105165U1 (de) * | 2018-09-19 | 2020-01-10 | Fluid Management Operations Llc | Füllstandsmessung für Dispenser-Behälter |
US10962427B2 (en) | 2019-01-10 | 2021-03-30 | Nextinput, Inc. | Slotted MEMS force sensor |
CN111504521B (zh) * | 2020-05-07 | 2021-09-03 | 腾讯科技(深圳)有限公司 | 柔性电容阵列及其制备方法、和电容阵列检测系统 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4058788A (en) * | 1976-04-05 | 1977-11-15 | Bourns, Inc. | Differential pressure transducer |
US4454440A (en) * | 1978-12-22 | 1984-06-12 | United Technologies Corporation | Surface acoustic wave (SAW) pressure sensor structure |
US4586382A (en) * | 1982-09-29 | 1986-05-06 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
EP0195232B1 (de) * | 1985-03-20 | 1991-12-11 | Hitachi, Ltd. | Piezoresistiver Belastungsfühler |
CN87209309U (zh) * | 1987-06-20 | 1988-05-18 | 北京半导体器件十厂 | 硅压阻式气压传感器 |
US4771639A (en) * | 1987-09-02 | 1988-09-20 | Yokogawa Electric Corporation | Semiconductor pressure sensor |
CN1047420A (zh) * | 1989-05-18 | 1990-11-28 | 清华大学 | 一种单晶硅压力传感器制造方法及其结构 |
JP2595829B2 (ja) * | 1991-04-22 | 1997-04-02 | 株式会社日立製作所 | 差圧センサ、及び複合機能形差圧センサ |
US5447071A (en) * | 1992-12-16 | 1995-09-05 | Hanson; Richard A. | Direct coupled pressure sensing device |
US5471723A (en) * | 1993-08-20 | 1995-12-05 | Endress + Hauser Gmbh + Co. | Methods of manufacturing thin-film absolute pressure sensors |
JPH08178778A (ja) * | 1994-12-27 | 1996-07-12 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
US5853020A (en) * | 1995-06-23 | 1998-12-29 | Widner; Ronald D. | Miniature combination valve and pressure transducer and system |
EP0757237B1 (de) * | 1995-08-01 | 2002-04-10 | Endress + Hauser GmbH + Co. | Druckaufnehmer |
US5852230A (en) * | 1997-04-09 | 1998-12-22 | Savant, Inc. | Device to test pumpability of oils at low temperature |
JPH11201846A (ja) * | 1998-01-12 | 1999-07-30 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
US6229190B1 (en) * | 1998-12-18 | 2001-05-08 | Maxim Integrated Products, Inc. | Compensated semiconductor pressure sensor |
JP2001041838A (ja) * | 1999-08-03 | 2001-02-16 | Yamatake Corp | 圧力センサおよびその製造方法 |
US6550337B1 (en) * | 2000-01-19 | 2003-04-22 | Measurement Specialties, Inc. | Isolation technique for pressure sensing structure |
CA2398713A1 (en) * | 2000-02-02 | 2001-08-09 | Rutgers, The State University Of New Jersey | Programmable surface acoustic wave (saw) filter |
US6462698B2 (en) * | 2000-06-02 | 2002-10-08 | Research In Motion Limited | Wireless communication system using surface acoustic wave (SAW) single-phase unidirectional transducer (SPUDT) techniques |
US6571638B2 (en) * | 2000-06-30 | 2003-06-03 | Sawtek, Inc. | Surface-acoustic-wave pressure sensor and associated methods |
GB0024813D0 (en) * | 2000-10-10 | 2000-11-22 | Transense Technologies Plc | Pressure monitoring device incorporating saw device |
-
2003
- 2003-06-18 US US10/465,202 patent/US7082835B2/en not_active Expired - Lifetime
-
2004
- 2004-06-17 CN CNB200480023825XA patent/CN100449289C/zh not_active Expired - Fee Related
- 2004-06-17 WO PCT/US2004/019384 patent/WO2004113859A1/en active Application Filing
- 2004-06-17 DE DE602004015107T patent/DE602004015107D1/de not_active Expired - Lifetime
- 2004-06-17 EP EP04755509A patent/EP1634047B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1634047A1 (de) | 2006-03-15 |
CN1839299A (zh) | 2006-09-27 |
EP1634047B1 (de) | 2008-07-16 |
US20040255681A1 (en) | 2004-12-23 |
CN100449289C (zh) | 2009-01-07 |
WO2004113859A1 (en) | 2004-12-29 |
US7082835B2 (en) | 2006-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |