IT1397202B1 - Sensore di accelerazione - Google Patents

Sensore di accelerazione

Info

Publication number
IT1397202B1
IT1397202B1 ITMI2009A002160A ITMI20092160A IT1397202B1 IT 1397202 B1 IT1397202 B1 IT 1397202B1 IT MI2009A002160 A ITMI2009A002160 A IT MI2009A002160A IT MI20092160 A ITMI20092160 A IT MI20092160A IT 1397202 B1 IT1397202 B1 IT 1397202B1
Authority
IT
Italy
Prior art keywords
acceleration sensor
acceleration
sensor
Prior art date
Application number
ITMI2009A002160A
Other languages
English (en)
Inventor
Guenther-Nino-Carlo Ullrich
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20092160A1 publication Critical patent/ITMI20092160A1/it
Application granted granted Critical
Publication of IT1397202B1 publication Critical patent/IT1397202B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
ITMI2009A002160A 2008-12-12 2009-12-09 Sensore di accelerazione IT1397202B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008054553.8A DE102008054553B4 (de) 2008-12-12 2008-12-12 Beschleunigungssensor

Publications (2)

Publication Number Publication Date
ITMI20092160A1 ITMI20092160A1 (it) 2010-06-13
IT1397202B1 true IT1397202B1 (it) 2013-01-04

Family

ID=42168279

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A002160A IT1397202B1 (it) 2008-12-12 2009-12-09 Sensore di accelerazione

Country Status (3)

Country Link
US (1) US8307709B2 (it)
DE (1) DE102008054553B4 (it)
IT (1) IT1397202B1 (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010062062B4 (de) 2010-11-26 2022-07-28 Robert Bosch Gmbh Verfahren zum Herstellen von MEMS-Strukturen und MEMS-Struktur
JP5962900B2 (ja) * 2012-04-02 2016-08-03 セイコーエプソン株式会社 物理量センサーおよび電子機器
US9218065B2 (en) * 2013-03-11 2015-12-22 Intel Corporation Stress tolerant MEMS accelerometer
DE102015207637A1 (de) * 2015-04-27 2016-10-27 Robert Bosch Gmbh Mikromechanische Struktur für einen Beschleunigungssensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4432837B4 (de) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
US6316796B1 (en) * 1995-05-24 2001-11-13 Lucas Novasensor Single crystal silicon sensor with high aspect ratio and curvilinear structures
DE19639946B4 (de) 1996-09-27 2006-09-21 Robert Bosch Gmbh Mikromechanisches Bauelement
US6393913B1 (en) 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
US7258010B2 (en) * 2005-03-09 2007-08-21 Honeywell International Inc. MEMS device with thinned comb fingers
US7637160B2 (en) * 2006-06-30 2009-12-29 Freescale Semiconductor, Inc. MEMS suspension and anchoring design
DE102006033636B4 (de) 2006-07-20 2022-08-11 Robert Bosch Gmbh Beschleunigungssensor
WO2008069573A1 (en) 2006-12-05 2008-06-12 Electronics And Telecommunications Research Institute Capacitive accelerometer
KR100899812B1 (ko) * 2006-12-05 2009-05-27 한국전자통신연구원 정전 용량형 가속도계
DE102006059928A1 (de) * 2006-12-19 2008-08-21 Robert Bosch Gmbh Beschleunigungssensor mit Kammelektroden
DE102008001863A1 (de) * 2008-05-19 2009-11-26 Robert Bosch Gmbh Beschleunigungssensor mit umgreifender seismischer Masse

Also Published As

Publication number Publication date
ITMI20092160A1 (it) 2010-06-13
DE102008054553B4 (de) 2022-02-17
US8307709B2 (en) 2012-11-13
US20100147077A1 (en) 2010-06-17
DE102008054553A1 (de) 2010-06-17

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