CN101617208B - 检测传感器、振子 - Google Patents

检测传感器、振子 Download PDF

Info

Publication number
CN101617208B
CN101617208B CN200880005713.XA CN200880005713A CN101617208B CN 101617208 B CN101617208 B CN 101617208B CN 200880005713 A CN200880005713 A CN 200880005713A CN 101617208 B CN101617208 B CN 101617208B
Authority
CN
China
Prior art keywords
vibrator
actuator
detection sensor
vibration
piezoelectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200880005713.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN101617208A (zh
Inventor
鲁健
池原毅
三原孝士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST, Olympus Corp filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority claimed from PCT/JP2008/053793 external-priority patent/WO2008114603A1/ja
Publication of CN101617208A publication Critical patent/CN101617208A/zh
Application granted granted Critical
Publication of CN101617208B publication Critical patent/CN101617208B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • G01G3/165—Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
CN200880005713.XA 2007-03-16 2008-03-03 检测传感器、振子 Expired - Fee Related CN101617208B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2007068570 2007-03-16
JP068570/2007 2007-03-16
JP304936/2007 2007-11-26
JP2007304936A JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ
PCT/JP2008/053793 WO2008114603A1 (ja) 2007-03-16 2008-03-03 検出センサ、振動子

Publications (2)

Publication Number Publication Date
CN101617208A CN101617208A (zh) 2009-12-30
CN101617208B true CN101617208B (zh) 2013-03-27

Family

ID=39984409

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880005713.XA Expired - Fee Related CN101617208B (zh) 2007-03-16 2008-03-03 检测传感器、振子

Country Status (3)

Country Link
US (1) US8336367B2 (enExample)
JP (1) JP5019120B2 (enExample)
CN (1) CN101617208B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5419767B2 (ja) * 2010-03-24 2014-02-19 オリンパス株式会社 検出センサ、物質検出方法
CN102269615B (zh) * 2011-05-07 2012-11-14 大连理工大学 一种基于槽型悬臂梁结构的微质量传感器
JP5690207B2 (ja) * 2011-05-11 2015-03-25 ルネサスエレクトロニクス株式会社 半導体装置
US20130047710A1 (en) * 2011-08-26 2013-02-28 Purdue Research Foundation Nonlinear, bifurcation-based mass sensor
US9695036B1 (en) 2012-02-02 2017-07-04 Sitime Corporation Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same
JP6086347B2 (ja) * 2013-02-16 2017-03-01 国立大学法人信州大学 共振型質量センサ
US9705470B1 (en) 2014-02-09 2017-07-11 Sitime Corporation Temperature-engineered MEMS resonator
US9712128B2 (en) 2014-02-09 2017-07-18 Sitime Corporation Microelectromechanical resonator
CN104001660B (zh) * 2014-04-29 2016-05-25 国家电网公司 吸附式压电激励振子
US10676349B1 (en) 2016-08-12 2020-06-09 Sitime Corporation MEMS resonator
JP6863009B2 (ja) * 2017-03-31 2021-04-21 Ｉ−Ｐｅｘ株式会社 物質検出素子
JP6871823B2 (ja) * 2017-08-10 2021-05-12 ヤンマーパワーテクノロジー株式会社 果実生育監視システム、及び果実生育監視方法
KR102471291B1 (ko) 2018-09-27 2022-11-25 아이펙스 가부시키가이샤 물질 검출 소자
JP2023111668A (ja) * 2022-01-31 2023-08-10 太陽誘電株式会社 検出装置
KR20240029443A (ko) * 2022-08-26 2024-03-05 삼성전자주식회사 센서 장치 및 센서 장치의 작동 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6326563B1 (en) * 1998-10-09 2001-12-04 Ngk Insulators, Ltd. Mass sensor and mass sensing method
US20040189155A1 (en) * 2003-03-27 2004-09-30 Olympus Corporation Ultrasonic transducer and ultrasonic motor
US20050016277A1 (en) * 1997-09-08 2005-01-27 Ngk Insulators, Ltd. Mass sensor and mass sensing method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2849697B2 (ja) 1993-03-12 1999-01-20 工業技術院長 ２自由度振動型マイクロアクチュエータ
JPH10282130A (ja) 1997-04-01 1998-10-23 Canon Inc プローブとそれを用いた走査型プローブ顕微鏡
JPH11113920A (ja) * 1997-10-13 1999-04-27 Yasuto Takeuchi 多周波調和振動を用いる超音波手術装置
JP3744913B2 (ja) * 2003-03-20 2006-02-15 株式会社オーバル 渦流量計センサ及び渦流量計
JP2006071371A (ja) 2004-08-31 2006-03-16 Kyoto Univ カンチレバーおよびその利用

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016277A1 (en) * 1997-09-08 2005-01-27 Ngk Insulators, Ltd. Mass sensor and mass sensing method
US6326563B1 (en) * 1998-10-09 2001-12-04 Ngk Insulators, Ltd. Mass sensor and mass sensing method
US20040189155A1 (en) * 2003-03-27 2004-09-30 Olympus Corporation Ultrasonic transducer and ultrasonic motor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平11-113920A 1999.04.27

Also Published As

Publication number Publication date
JP2008261838A (ja) 2008-10-30
US20100107736A1 (en) 2010-05-06
US8336367B2 (en) 2012-12-25
CN101617208A (zh) 2009-12-30
JP5019120B2 (ja) 2012-09-05

Similar Documents

Publication Publication Date Title
CN101617208B (zh) 检测传感器、振子
JP5130422B2 (ja) 検出センサ
JP5083984B2 (ja) 検出センサ、振動子
JP5242347B2 (ja) 検出センサ
CN110603817B (zh) 压电麦克风芯片及压电麦克风
US8291745B2 (en) Analyte sensing device
JP4963159B2 (ja) 圧電／電歪デバイス
JP2009133772A (ja) 検出センサ、振動子
JP5413131B2 (ja) センサーアレイ及び圧力センサーの製造方法
CN101427393B (zh) 压电/电致伸缩膜型元件
Jang et al. Design, fabrication, and characterization of piezoelectric single crystal stack actuators based on PMN-PT
CN109848022A (zh) 超声波器件以及超声波测量装置
JPWO2006006587A1 (ja) ガス検知方法およびガスセンサ
JP4611251B2 (ja) 流体特性測定装置
WO2007001063A1 (ja) 圧電／電歪膜型素子
US20240288284A1 (en) Piezoelectric coil with a sensor and electronic apparatus
CN103053039B (zh) 压电体膜、喷墨头、角速度传感器、压电发电元件
JP7619657B2 (ja) 静電トランスデューサおよび静電トランスデューサの製造方法
Ferrari Printed thick-film piezoelectric and pyroelectric sensors
JP2010078334A (ja) 検出センサ、振動子
Pachkawade NEMS based actuation and sensing
JP4805787B2 (ja) 圧電／電歪膜型センサ
JP5633622B2 (ja) 圧力センサーアレイ
US9638616B2 (en) Devices and methods for gravimetric sensing in liquid environments

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20151020

Address after: Tokyo, Japan

Patentee after: Independent Administrative Corporation Industrial Comprehansive Technologles Institute

Address before: Tokyo, Japan

Patentee before: Independent Administrative Corporation Industrial Comprehansive Technologles Institute

Patentee before: Olympus Corporation

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130327

Termination date: 20180303