WO2008114603A1 - 検出センサ、振動子 - Google Patents

検出センサ、振動子 Download PDF

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Publication number
WO2008114603A1
WO2008114603A1 PCT/JP2008/053793 JP2008053793W WO2008114603A1 WO 2008114603 A1 WO2008114603 A1 WO 2008114603A1 JP 2008053793 W JP2008053793 W JP 2008053793W WO 2008114603 A1 WO2008114603 A1 WO 2008114603A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibrator
detection sensor
actuator
attained
vibration
Prior art date
Application number
PCT/JP2008/053793
Other languages
English (en)
French (fr)
Inventor
Jian Lu
Tsuyoshi Ikehara
Takashi Mihara
Original Assignee
National Institute Of Advanced Industrial Science And Technology
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007304936A external-priority patent/JP5019120B2/ja
Application filed by National Institute Of Advanced Industrial Science And Technology, Olympus Corporation filed Critical National Institute Of Advanced Industrial Science And Technology
Priority to CN200880005713.XA priority Critical patent/CN101617208B/zh
Publication of WO2008114603A1 publication Critical patent/WO2008114603A1/ja
Priority to US12/555,221 priority patent/US8336367B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/10—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of mechanical energy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gyroscopes (AREA)

Abstract

　高感度化を図ることのできる検出センサ、振動子を提供することを目的とする。 　振動子３０の表面に圧電層や駆動電極等を設けず、振動子３０とは別に設けたアクチュエータ４０によって振動子３０を駆動させる方式とした。アクチュエータ４０は、カンチレバー状で、振動子３０の固定端３０ａの近傍に設けられている。そして、連結ビーム７０を介してアクチュエータ４０の振動を振動子３０に伝達させる。これにより、圧電層や駆動電極等によって振動子３０の振動が阻害されるのを抑え、振動子３０のＱ値を向上し、検出センサ１０をより高感度なものとする。また、同等の感度であれば従来よりもはるかに小型な検出センサ１０を実現することを可能とする。
PCT/JP2008/053793 2007-03-16 2008-03-03 検出センサ、振動子 WO2008114603A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200880005713.XA CN101617208B (zh) 2007-03-16 2008-03-03 检测传感器、振子
US12/555,221 US8336367B2 (en) 2007-03-16 2009-09-08 Detection sensor, vibrator

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007068570 2007-03-16
JP2007-068570 2007-03-16
JP2007304936A JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ
JP2007-304936 2007-11-26

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/555,221 Continuation US8336367B2 (en) 2007-03-16 2009-09-08 Detection sensor, vibrator

Publications (1)

Publication Number Publication Date
WO2008114603A1 true WO2008114603A1 (ja) 2008-09-25

Family

ID=39765713

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053793 WO2008114603A1 (ja) 2007-03-16 2008-03-03 検出センサ、振動子

Country Status (1)

Country Link
WO (1) WO2008114603A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010169685A (ja) * 2009-01-23 2010-08-05 Commissariat A L'energie Atomique & Aux Energies Alternatives 歪みゲージによる面外検出を用いた表面技術の慣性又は共振センサー
JP2011203008A (ja) * 2010-03-24 2011-10-13 Olympus Corp 検出センサ、物質検出方法
CN110353432A (zh) * 2019-06-11 2019-10-22 杭州电子科技大学 一种压电式发电的坐姿检测座椅及其发电、检测方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10282130A (ja) * 1997-04-01 1998-10-23 Canon Inc プローブとそれを用いた走査型プローブ顕微鏡
JP2849697B2 (ja) * 1993-03-12 1999-01-20 工業技術院長 ２自由度振動型マイクロアクチュエータ
JPH11113920A (ja) * 1997-10-13 1999-04-27 Yasuto Takeuchi 多周波調和振動を用いる超音波手術装置
JP2000180250A (ja) * 1998-10-09 2000-06-30 Ngk Insulators Ltd 質量センサ及び質量検出方法
JP3298897B2 (ja) * 1997-09-08 2002-07-08 日本碍子株式会社 質量センサおよび質量検出方法
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP2006071371A (ja) * 2004-08-31 2006-03-16 Kyoto Univ カンチレバーおよびその利用

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2849697B2 (ja) * 1993-03-12 1999-01-20 工業技術院長 ２自由度振動型マイクロアクチュエータ
JPH10282130A (ja) * 1997-04-01 1998-10-23 Canon Inc プローブとそれを用いた走査型プローブ顕微鏡
JP3298897B2 (ja) * 1997-09-08 2002-07-08 日本碍子株式会社 質量センサおよび質量検出方法
JPH11113920A (ja) * 1997-10-13 1999-04-27 Yasuto Takeuchi 多周波調和振動を用いる超音波手術装置
JP2000180250A (ja) * 1998-10-09 2000-06-30 Ngk Insulators Ltd 質量センサ及び質量検出方法
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP2006071371A (ja) * 2004-08-31 2006-03-16 Kyoto Univ カンチレバーおよびその利用

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010169685A (ja) * 2009-01-23 2010-08-05 Commissariat A L'energie Atomique & Aux Energies Alternatives 歪みゲージによる面外検出を用いた表面技術の慣性又は共振センサー
JP2011203008A (ja) * 2010-03-24 2011-10-13 Olympus Corp 検出センサ、物質検出方法
CN110353432A (zh) * 2019-06-11 2019-10-22 杭州电子科技大学 一种压电式发电的坐姿检测座椅及其发电、检测方法

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