JP5019120B2 - 検出センサ - Google Patents

検出センサ Download PDF

Info

Publication number
JP5019120B2
JP5019120B2 JP2007304936A JP2007304936A JP5019120B2 JP 5019120 B2 JP5019120 B2 JP 5019120B2 JP 2007304936 A JP2007304936 A JP 2007304936A JP 2007304936 A JP2007304936 A JP 2007304936A JP 5019120 B2 JP5019120 B2 JP 5019120B2
Authority
JP
Japan
Prior art keywords
vibrator
actuator
vibration
detection sensor
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007304936A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008261838A5 (enExample
JP2008261838A (ja
Inventor
ルウ ジャン
毅 池原
孝士 三原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Olympus Corp
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST, Olympus Corp filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to JP2007304936A priority Critical patent/JP5019120B2/ja
Priority to CN200880005713.XA priority patent/CN101617208B/zh
Priority to PCT/JP2008/053793 priority patent/WO2008114603A1/ja
Publication of JP2008261838A publication Critical patent/JP2008261838A/ja
Priority to US12/555,221 priority patent/US8336367B2/en
Publication of JP2008261838A5 publication Critical patent/JP2008261838A5/ja
Application granted granted Critical
Publication of JP5019120B2 publication Critical patent/JP5019120B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • G01G3/165—Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
JP2007304936A 2007-03-16 2007-11-26 検出センサ Expired - Fee Related JP5019120B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007304936A JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ
CN200880005713.XA CN101617208B (zh) 2007-03-16 2008-03-03 检测传感器、振子
PCT/JP2008/053793 WO2008114603A1 (ja) 2007-03-16 2008-03-03 検出センサ、振動子
US12/555,221 US8336367B2 (en) 2007-03-16 2009-09-08 Detection sensor, vibrator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007068570 2007-03-16
JP2007068570 2007-03-16
JP2007304936A JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ

Publications (3)

Publication Number Publication Date
JP2008261838A JP2008261838A (ja) 2008-10-30
JP2008261838A5 JP2008261838A5 (enExample) 2010-07-01
JP5019120B2 true JP5019120B2 (ja) 2012-09-05

Family

ID=39984409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007304936A Expired - Fee Related JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ

Country Status (3)

Country Link
US (1) US8336367B2 (enExample)
JP (1) JP5019120B2 (enExample)
CN (1) CN101617208B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5419767B2 (ja) * 2010-03-24 2014-02-19 オリンパス株式会社 検出センサ、物質検出方法
CN102269615B (zh) * 2011-05-07 2012-11-14 大连理工大学 一种基于槽型悬臂梁结构的微质量传感器
JP5690207B2 (ja) * 2011-05-11 2015-03-25 ルネサスエレクトロニクス株式会社 半導体装置
US20130047710A1 (en) * 2011-08-26 2013-02-28 Purdue Research Foundation Nonlinear, bifurcation-based mass sensor
US9695036B1 (en) 2012-02-02 2017-07-04 Sitime Corporation Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same
JP6086347B2 (ja) * 2013-02-16 2017-03-01 国立大学法人信州大学 共振型質量センサ
US9705470B1 (en) 2014-02-09 2017-07-11 Sitime Corporation Temperature-engineered MEMS resonator
US9712128B2 (en) 2014-02-09 2017-07-18 Sitime Corporation Microelectromechanical resonator
CN104001660B (zh) * 2014-04-29 2016-05-25 国家电网公司 吸附式压电激励振子
US10676349B1 (en) 2016-08-12 2020-06-09 Sitime Corporation MEMS resonator
JP6863009B2 (ja) * 2017-03-31 2021-04-21 Ｉ−Ｐｅｘ株式会社 物質検出素子
JP6871823B2 (ja) * 2017-08-10 2021-05-12 ヤンマーパワーテクノロジー株式会社 果実生育監視システム、及び果実生育監視方法
KR102471291B1 (ko) 2018-09-27 2022-11-25 아이펙스 가부시키가이샤 물질 검출 소자
JP2023111668A (ja) * 2022-01-31 2023-08-10 太陽誘電株式会社 検出装置
KR20240029443A (ko) * 2022-08-26 2024-03-05 삼성전자주식회사 센서 장치 및 센서 장치의 작동 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2849697B2 (ja) 1993-03-12 1999-01-20 工業技術院長 ２自由度振動型マイクロアクチュエータ
JPH10282130A (ja) 1997-04-01 1998-10-23 Canon Inc プローブとそれを用いた走査型プローブ顕微鏡
WO1999013518A1 (fr) 1997-09-08 1999-03-18 Ngk Insulators, Ltd. Dispositif piezoelectrique/electrostrictif
JPH11113920A (ja) * 1997-10-13 1999-04-27 Yasuto Takeuchi 多周波調和振動を用いる超音波手術装置
JP2000180250A (ja) * 1998-10-09 2000-06-30 Ngk Insulators Ltd 質量センサ及び質量検出方法
JP3744913B2 (ja) * 2003-03-20 2006-02-15 株式会社オーバル 渦流量計センサ及び渦流量計
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP2006071371A (ja) 2004-08-31 2006-03-16 Kyoto Univ カンチレバーおよびその利用

Also Published As

Publication number Publication date
JP2008261838A (ja) 2008-10-30
US20100107736A1 (en) 2010-05-06
US8336367B2 (en) 2012-12-25
CN101617208B (zh) 2013-03-27
CN101617208A (zh) 2009-12-30

Similar Documents

Publication Publication Date Title
JP5019120B2 (ja) 検出センサ
JP5083984B2 (ja) 検出センサ、振動子
JP5130422B2 (ja) 検出センサ
JP5242347B2 (ja) 検出センサ
Kabir et al. Piezoelectric MEMS acoustic emission sensors
JP4963159B2 (ja) 圧電／電歪デバイス
US9478728B2 (en) Piezoelectric devices
JP2009133772A (ja) 検出センサ、振動子
US20150330785A1 (en) Angular velocity sensor and manufacturing method therefor
Jang et al. Design, fabrication, and characterization of piezoelectric single crystal stack actuators based on PMN-PT
JP2011099675A (ja) 圧力センサー、センサーアレイ、及び圧力センサーの製造方法
JP2006147839A (ja) 圧電／電歪デバイス
CN109848022A (zh) 超声波器件以及超声波测量装置
JPH02248865A (ja) 加速度検出装置
Isarakorn et al. Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
JP2009198493A (ja) 角速度検出装置
KR20030013130A (ko) 고감도 초소형 캔틸레버 센서 및 제조 방법
JP2007326204A (ja) アクチュエータ
JP2010223622A (ja) 角速度検出装置
Abd. Rahman et al. Response analyses of micro-ultrasonic sensor devices for underwater robotic applications
Kim et al. Materials and devices for MEMS piezoelectric energy harvesting
JP7316926B2 (ja) 圧電ｍｅｍｓデバイス、製造方法および駆動方法
Pachkawade NEMS based actuation and sensing
JP2010078334A (ja) 検出センサ、振動子
CN116349251B (zh) 静电转换器以及静电转换器的制造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100517

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20101116

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20101118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111207

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120203

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120229

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120420

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120516

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120530

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150622

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees