JP5076526B2 - 光学反射素子 - Google Patents

光学反射素子 Download PDF

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Publication number
JP5076526B2
JP5076526B2 JP2007025011A JP2007025011A JP5076526B2 JP 5076526 B2 JP5076526 B2 JP 5076526B2 JP 2007025011 A JP2007025011 A JP 2007025011A JP 2007025011 A JP2007025011 A JP 2007025011A JP 5076526 B2 JP5076526 B2 JP 5076526B2
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Japan
Prior art keywords
support shaft
piezoelectric diaphragm
frame
optical
piezoelectric
Prior art date
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Expired - Fee Related
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JP2007025011A
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English (en)
Japanese (ja)
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JP2008191351A (ja
JP2008191351A5 (enExample
Inventor
二郎 寺田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2007025011A priority Critical patent/JP5076526B2/ja
Publication of JP2008191351A publication Critical patent/JP2008191351A/ja
Publication of JP2008191351A5 publication Critical patent/JP2008191351A5/ja
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Publication of JP5076526B2 publication Critical patent/JP5076526B2/ja
Expired - Fee Related legal-status Critical Current
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  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2007025011A 2007-02-05 2007-02-05 光学反射素子 Expired - Fee Related JP5076526B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007025011A JP5076526B2 (ja) 2007-02-05 2007-02-05 光学反射素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007025011A JP5076526B2 (ja) 2007-02-05 2007-02-05 光学反射素子

Publications (3)

Publication Number Publication Date
JP2008191351A JP2008191351A (ja) 2008-08-21
JP2008191351A5 JP2008191351A5 (enExample) 2010-03-04
JP5076526B2 true JP5076526B2 (ja) 2012-11-21

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JP2007025011A Expired - Fee Related JP5076526B2 (ja) 2007-02-05 2007-02-05 光学反射素子

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JP (1) JP5076526B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2785992C1 (ru) * 2021-12-20 2022-12-15 Общество с ограниченной ответственностью "ВИЗ-Сталь" Способ удаления окалины с поверхности горячекатаного подката при производстве тонколистовой холоднокатаной электротехнической стали

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5405792B2 (ja) * 2008-10-01 2014-02-05 株式会社ニデック 形状可変ミラー
JP6049364B2 (ja) * 2012-09-11 2016-12-21 スタンレー電気株式会社 光偏向器
JP5654158B1 (ja) * 2014-05-07 2015-01-14 株式会社トライフォース・マネジメント 可動反射素子および二次元走査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4984117B2 (ja) * 2006-07-13 2012-07-25 スタンレー電気株式会社 ２次元光スキャナ、それを用いた光学装置および２次元光スキャナの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2785992C1 (ru) * 2021-12-20 2022-12-15 Общество с ограниченной ответственностью "ВИЗ-Сталь" Способ удаления окалины с поверхности горячекатаного подката при производстве тонколистовой холоднокатаной электротехнической стали

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JP2008191351A (ja) 2008-08-21

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