JP2004303734A5 - - Google Patents

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Publication number
JP2004303734A5
JP2004303734A5 JP2004096927A JP2004096927A JP2004303734A5 JP 2004303734 A5 JP2004303734 A5 JP 2004303734A5 JP 2004096927 A JP2004096927 A JP 2004096927A JP 2004096927 A JP2004096927 A JP 2004096927A JP 2004303734 A5 JP2004303734 A5 JP 2004303734A5
Authority
JP
Japan
Prior art keywords
actuator
piezoelectric sensor
electrode
microelectromechanical system
system switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004096927A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004303734A (ja
Filing date
Publication date
Priority claimed from KR10-2003-0020169A external-priority patent/KR100515693B1/ko
Application filed filed Critical
Publication of JP2004303734A publication Critical patent/JP2004303734A/ja
Publication of JP2004303734A5 publication Critical patent/JP2004303734A5/ja
Pending legal-status Critical Current

Links

JP2004096927A 2003-03-31 2004-03-29 圧電センサの変位量を拡大する変位量拡大方法及びこの圧電センサを用いたマイクロエレクトロメカニカルシステムスイッチ Pending JP2004303734A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0020169A KR100515693B1 (ko) 2003-03-31 2003-03-31 압전체의 구동량 확대방법 및 그를 이용한 멤스 스위치

Publications (2)

Publication Number Publication Date
JP2004303734A JP2004303734A (ja) 2004-10-28
JP2004303734A5 true JP2004303734A5 (enExample) 2007-08-09

Family

ID=33028852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004096927A Pending JP2004303734A (ja) 2003-03-31 2004-03-29 圧電センサの変位量を拡大する変位量拡大方法及びこの圧電センサを用いたマイクロエレクトロメカニカルシステムスイッチ

Country Status (6)

Country Link
US (1) US7138748B2 (enExample)
JP (1) JP2004303734A (enExample)
KR (1) KR100515693B1 (enExample)
CN (1) CN100336148C (enExample)
CH (1) CH696970A5 (enExample)
DE (1) DE102004013218A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100449669C (zh) * 2006-04-28 2009-01-07 浙江工业大学 新型压电陶瓷式继电器
CN101431172B (zh) * 2008-07-29 2013-09-04 华东师范大学 一种含mems开关的可重构微波低通滤波器及其制备方法
CN101593863B (zh) * 2009-06-26 2012-11-21 北京信息科技大学 一种可调微波带通滤波器
US8462478B2 (en) * 2009-12-04 2013-06-11 Sony Corporation Over-voltage protection
WO2017189806A1 (en) * 2016-04-27 2017-11-02 The Regents Of The University Of California Rf-powered micromechanical clock generator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139335A (ja) * 1984-07-27 1986-02-25 オムロン株式会社 リレ−
EP0189302B1 (en) * 1985-01-21 1991-10-16 Nec Corporation Piezoelectric latching actuator having an impact receiving projectile
JPS625526A (ja) * 1985-07-01 1987-01-12 宇部興産株式会社 圧電リレ−
JPH01112629A (ja) * 1987-10-26 1989-05-01 Matsushita Electric Works Ltd 圧電継電器
JPH08152575A (ja) * 1994-09-30 1996-06-11 Toppan Printing Co Ltd 光ビーム偏向器
JP3834862B2 (ja) * 1996-03-07 2006-10-18 住友電気工業株式会社 機械式電気スイッチ素子
JP2000030593A (ja) * 1998-07-09 2000-01-28 Fuji Electric Co Ltd 圧電式単安定リレー
US6481667B1 (en) * 2001-03-05 2002-11-19 Northrop Grumman Corporation System and method for deflecting an aerodynamic control surface

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