JP2005249785A5 - - Google Patents

Download PDF

Info

Publication number
JP2005249785A5
JP2005249785A5 JP2005054010A JP2005054010A JP2005249785A5 JP 2005249785 A5 JP2005249785 A5 JP 2005249785A5 JP 2005054010 A JP2005054010 A JP 2005054010A JP 2005054010 A JP2005054010 A JP 2005054010A JP 2005249785 A5 JP2005249785 A5 JP 2005249785A5
Authority
JP
Japan
Prior art keywords
piezoelectric cantilever
pressure sensor
electrode
piezoelectric
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005054010A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005249785A (ja
JP4832772B2 (ja
Filing date
Publication date
Priority claimed from US10/792,777 external-priority patent/US7104134B2/en
Application filed filed Critical
Publication of JP2005249785A publication Critical patent/JP2005249785A/ja
Publication of JP2005249785A5 publication Critical patent/JP2005249785A5/ja
Application granted granted Critical
Publication of JP4832772B2 publication Critical patent/JP4832772B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005054010A 2004-03-05 2005-02-28 圧電カンチレバー圧力センサ Expired - Fee Related JP4832772B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/792,777 US7104134B2 (en) 2004-03-05 2004-03-05 Piezoelectric cantilever pressure sensor
US10/792777 2004-03-05

Publications (3)

Publication Number Publication Date
JP2005249785A JP2005249785A (ja) 2005-09-15
JP2005249785A5 true JP2005249785A5 (enExample) 2008-03-27
JP4832772B2 JP4832772B2 (ja) 2011-12-07

Family

ID=34750612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005054010A Expired - Fee Related JP4832772B2 (ja) 2004-03-05 2005-02-28 圧電カンチレバー圧力センサ

Country Status (4)

Country Link
US (1) US7104134B2 (enExample)
EP (1) EP1571435B1 (enExample)
JP (1) JP4832772B2 (enExample)
DE (1) DE602004021168D1 (enExample)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US8481335B2 (en) * 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
EP2100125A4 (en) 2006-11-28 2012-02-15 Univ Drexel MICROPORTE-TO-FALSE PIEZOELECTRIC SENSORS FOR BIODETECTION
US7992431B2 (en) 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
CA2676269A1 (en) * 2007-01-29 2008-10-09 Drexel University Energy harvesting device
CA2677196A1 (en) * 2007-02-01 2008-09-12 Drexel University A hand-held phase-shift detector for sensor applications
CA2678943A1 (en) * 2007-03-13 2008-09-18 Nanoink, Inc. Nanolithography with use of viewports
KR100914026B1 (ko) 2007-06-12 2009-08-28 한국세라믹기술원 압전 박막형 지문 센서 제조방법
KR100908124B1 (ko) * 2007-07-09 2009-07-16 삼성전자주식회사 혈압측정용 압력 센서 및 그 제조방법
WO2009079154A2 (en) 2007-11-23 2009-06-25 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
US8011237B2 (en) * 2008-02-22 2011-09-06 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Piezoelectric module for energy harvesting, such as in a tire pressure monitoring system
US8741663B2 (en) 2008-03-11 2014-06-03 Drexel University Enhanced detection sensitivity with piezoelectric sensors
CN102066928B (zh) 2008-05-16 2015-08-05 德瑞索大学 评估组织的系统和方法
US10170685B2 (en) 2008-06-30 2019-01-01 The Regents Of The University Of Michigan Piezoelectric MEMS microphone
WO2010002887A2 (en) * 2008-06-30 2010-01-07 The Regents Of The University Of Michigan Piezoelectric memes microphone
US8120232B2 (en) * 2009-01-20 2012-02-21 Palo Alto Research Center Incorporated Sensors and actuators using piezo polymer layers
US20110086368A1 (en) * 2009-10-08 2011-04-14 Drexel University Method for immune response detection
US8722427B2 (en) * 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
JP5463510B2 (ja) * 2010-06-22 2014-04-09 独立行政法人科学技術振興機構 物理量センサ及びその製造方法
GB2494618B (en) * 2011-08-22 2018-03-21 Wheelright Ltd Vehicle tyre pressure measurement
US8824706B2 (en) 2011-08-30 2014-09-02 Qualcomm Mems Technologies, Inc. Piezoelectric microphone fabricated on glass
US8724832B2 (en) * 2011-08-30 2014-05-13 Qualcomm Mems Technologies, Inc. Piezoelectric microphone fabricated on glass
JP5677258B2 (ja) * 2011-09-27 2015-02-25 株式会社東芝 歪検知装置及びその製造方法
JP5807781B2 (ja) * 2011-12-26 2015-11-10 アイシン精機株式会社 生体信号検出体
JP5686443B2 (ja) * 2013-01-10 2015-03-18 日本写真印刷株式会社 接着層付きフィルム状感圧センサとこれを用いたタッチパッド、タッチ入力機能付き保護パネル及び電子機器
KR101453857B1 (ko) 2013-02-07 2014-10-22 한국기계연구원 압력 센서 및 그 제조 방법
WO2015064217A1 (ja) * 2013-10-28 2015-05-07 株式会社村田製作所 圧電センサ
EP3100020B1 (en) * 2014-01-31 2019-01-02 Nanotech Analysis S.r.l. Miniaturized device for measurements of very low pressure and of gas concentrations
EP3722300B1 (en) * 2014-01-31 2022-09-28 Nanotech Analysis S.R.L. Electro-mechanical miniaturized device for pressure measurements
JP6292932B2 (ja) * 2014-03-13 2018-03-14 セイコーインスツル株式会社 圧力センサ
JP6209801B2 (ja) * 2014-10-06 2017-10-11 国立大学法人 東京大学 圧力センサ
DE102015224938B4 (de) 2014-12-12 2021-09-23 Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e.V. (IFW Dresden e.V.) Verfahren und Vorrichtung zur Ermittlung von Kraftfeldern, Kraftfeldgradienten, Materialeigenschaften oder Massen mit einem System aus gekoppelten, schwingungsfähigen, balkenartigen Komponenten
US9972723B2 (en) * 2015-02-12 2018-05-15 United Arab Emirates University Piezoelectric thin-film based flexible sensing device, method for fabrication thereof and method for operating the same
CN106056033B (zh) 2015-04-14 2019-07-05 李美燕 复合基板感测装置及其制造方法
TWI563253B (en) * 2015-04-14 2016-12-21 Lee Mei Yen Composite substrate sensor device and method of manufacturing such sensor device
TWI574028B (zh) * 2015-06-22 2017-03-11 李美燕 集成式振波發射感測元、使用其之感測陣列及電子設備及其製造方法
US10061386B2 (en) 2015-06-26 2018-08-28 Sabic Global Technologies B.V. Integrated piezoelectric cantilever actuator and transistor for touch input and haptic feedback applications
US10062832B2 (en) 2015-11-30 2018-08-28 Sabic Global Technologies, B.V. Methods and systems for making piezoelectric cantilever actuators
US9960715B1 (en) 2016-03-22 2018-05-01 The United States Of America, As Represented By The Secretary Of The Navy Light activated piezoelectric converter
US20190036004A1 (en) * 2016-04-01 2019-01-31 Intel Corporation Strain sensitive piezoelectric system with optical indicator
CN105841850B (zh) * 2016-05-12 2018-02-27 京东方科技集团股份有限公司 一种压电传感器及其制作方法
US10840430B2 (en) * 2016-06-30 2020-11-17 Intel Corporation Piezoelectric package-integrated sensing devices
DE102016212717A1 (de) * 2016-07-13 2018-01-18 Robert Bosch Gmbh Detektionseinrichtung für piezoelektrisches Mikrofon
KR102710725B1 (ko) * 2016-08-03 2024-09-27 삼성전자주식회사 음향 스펙트럼 분석기 및 이에 구비된 공진기들의 배열방법
CN106778691B (zh) * 2017-01-16 2020-04-21 业成科技（成都）有限公司 声波式指纹识别装置及其制作方法以及应用其的电子装置
WO2018201853A1 (en) * 2017-05-01 2018-11-08 Shenzhen GOODIX Technology Co., Ltd. Ultrasound fingerprint sensing and sensor fabrication
US10952642B2 (en) * 2017-11-09 2021-03-23 Amorepacific Corporation Strain sensor unit and skin sensor module comprising the same
JP7027252B2 (ja) 2018-05-25 2022-03-01 株式会社東芝 振動センサ及びセンサモジュール
TWI684367B (zh) * 2018-09-14 2020-02-01 美律實業股份有限公司 揚聲器以及其微機電致動器
CN109734047B (zh) * 2019-02-27 2021-03-23 京东方科技集团股份有限公司 一种mems器件及其制作方法、显示基板
DE112020003726T5 (de) 2019-08-06 2022-04-21 Denso Corporation Piezoelektrisches Element
US11527700B2 (en) 2019-12-20 2022-12-13 Vanguard International Semiconductor Singapore Pte. Ltd. Microphone device with single crystal piezoelectric film and method of forming the same
CN110943156B (zh) * 2019-12-24 2021-08-24 中山大学 一种基于压电材料的压力传感器及制备方法
CN112968201B (zh) * 2021-02-05 2022-08-05 东莞市爱康智能技术有限公司 一种自适应热压机构
KR20230024872A (ko) 2021-08-11 2023-02-21 썬전 샥 컴퍼니 리미티드 마이크로폰
US20230099440A1 (en) * 2021-09-28 2023-03-30 Skyworks Global Pte. Ltd. Piezoelectric mems device with thermal compensation from different material properties
KR20240003596A (ko) * 2022-07-01 2024-01-09 현대자동차주식회사 파워 모듈
CN118501498A (zh) * 2023-02-16 2024-08-16 华为技术有限公司 一种压电传感芯片、压电传感器以及终端设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07121159B2 (ja) * 1985-03-26 1995-12-20 日本電気株式会社 超音波トランスジユ−サ
JPS62108161A (ja) * 1985-11-06 1987-05-19 Matsushita Electric Ind Co Ltd 加速度センサ
JPS63238438A (ja) * 1987-03-26 1988-10-04 Toray Ind Inc カセンサ
US4906840A (en) 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JPH0283425A (ja) * 1988-09-20 1990-03-23 Murata Mfg Co Ltd 圧電型圧力分布センサ
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
JPH071215B2 (ja) * 1990-10-31 1995-01-11 住友金属鉱山株式会社 空気圧変化検出器
JP3305304B2 (ja) * 1991-05-30 2002-07-22 キヤノン株式会社 探針駆動機構並びに該機構を用いた圧電式アクチュエータの製造方法
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
JP3027681B2 (ja) * 1994-04-22 2000-04-04 科学技術振興事業団 シリコンモノリシックセンサ
JP3055175B2 (ja) * 1994-09-12 2000-06-26 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 電気機械変換器
JP2000002714A (ja) * 1998-04-13 2000-01-07 Matsushita Electric Ind Co Ltd 圧電型加速度センサ、加速度検出方法、および圧電型加速度センサの製造方法
US6453748B1 (en) * 1999-12-15 2002-09-24 Wayne State University Boron nitride piezoresistive device
EP1266346B1 (en) * 2000-03-23 2009-04-29 Cross Match Technologies, Inc. Piezoelectric biometric identification device and applications thereof
US6578436B1 (en) * 2000-05-16 2003-06-17 Fidelica Microsystems, Inc. Method and apparatus for pressure sensing
JP2002329899A (ja) * 2001-04-27 2002-11-15 Sony Corp 圧電薄膜素子およびその製造方法

Similar Documents

Publication Publication Date Title
JP2005249785A5 (enExample)
FR2919486B1 (fr) Capteur de pression auto-etalonnable.
EP1187322A3 (en) Piezoelectric device and method of manufacturing it
US20050193822A1 (en) Piezoelectric cantilever pressure sensor
FR2875007B1 (fr) Puce biologique comportant un reseau d'electrodes sur un substrat
EP2515339A3 (en) Wide bandgap field effect transistors with source connected field plates
TW200711545A (en) A method of manufacturing a MEMS element
CN105704629B (zh) 麦克风及制造该麦克风的方法
WO2007134051A3 (en) High frequency ultrasound transducers
EP2383785A3 (en) A nanoscale electronic device
DE50112140D1 (de) Mikromechanisches bauelement
EP1187234A3 (en) Piezoelectric/electrostrictive element
TW200738036A (en) Acoustic light-emitting device
EP1701387A3 (en) Organic thin film transistor array panel and manufacturing method thereof
TW200501790A (en) Sound detection mechanism and manufacturing method thereof
JP2006078417A5 (enExample)
JP2007060465A5 (enExample)
WO2005101434A3 (fr) Microcommutateur a faible tension d’actionnement et faible consommation
EP1237204A3 (en) Piezoelectric/electrostrictive film element
EP1187321A3 (en) Piezoelectric device and method of manufacturing it
CN109613065B (zh) 一种半导体湿度传感器及其制备方法
EP1717589A3 (en) Vibration-type piezoelectric acceleration sensor
WO2007054368A3 (de) Halbleitervorrichtung mit einem eine ansteuereinheit enthaltenden gehäuse
EP1635458A4 (en) ACOUSTIC SURFACE WAVE DEVICE
EP1387416A3 (en) Piezoelectric/electrostrictive film type device