JP2004303734A - 圧電センサの変位量を拡大する変位量拡大方法及びこの圧電センサを用いたマイクロエレクトロメカニカルシステムスイッチ - Google Patents

圧電センサの変位量を拡大する変位量拡大方法及びこの圧電センサを用いたマイクロエレクトロメカニカルシステムスイッチ Download PDF

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Publication number
JP2004303734A
JP2004303734A JP2004096927A JP2004096927A JP2004303734A JP 2004303734 A JP2004303734 A JP 2004303734A JP 2004096927 A JP2004096927 A JP 2004096927A JP 2004096927 A JP2004096927 A JP 2004096927A JP 2004303734 A JP2004303734 A JP 2004303734A
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JP
Japan
Prior art keywords
displacement
piezoelectric sensor
switch
enlarging
displacement amount
Prior art date
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Pending
Application number
JP2004096927A
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English (en)
Japanese (ja)
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JP2004303734A5 (enExample
Inventor
Doo Sun Choi
スン チョイ、ドゥ
Taik Min Lee
ミン リー、タイク
Tae Jin Jae
ジン ジャエ、タエ
Kyung Hyun Hwang
ヒュン ファン、キュン
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Korea Institute of Machinery and Materials KIMM
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Korea Institute of Machinery and Materials KIMM
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Application filed by Korea Institute of Machinery and Materials KIMM filed Critical Korea Institute of Machinery and Materials KIMM
Publication of JP2004303734A publication Critical patent/JP2004303734A/ja
Publication of JP2004303734A5 publication Critical patent/JP2004303734A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
JP2004096927A 2003-03-31 2004-03-29 圧電センサの変位量を拡大する変位量拡大方法及びこの圧電センサを用いたマイクロエレクトロメカニカルシステムスイッチ Pending JP2004303734A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0020169A KR100515693B1 (ko) 2003-03-31 2003-03-31 압전체의 구동량 확대방법 및 그를 이용한 멤스 스위치

Publications (2)

Publication Number Publication Date
JP2004303734A true JP2004303734A (ja) 2004-10-28
JP2004303734A5 JP2004303734A5 (enExample) 2007-08-09

Family

ID=33028852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004096927A Pending JP2004303734A (ja) 2003-03-31 2004-03-29 圧電センサの変位量を拡大する変位量拡大方法及びこの圧電センサを用いたマイクロエレクトロメカニカルシステムスイッチ

Country Status (6)

Country Link
US (1) US7138748B2 (enExample)
JP (1) JP2004303734A (enExample)
KR (1) KR100515693B1 (enExample)
CN (1) CN100336148C (enExample)
CH (1) CH696970A5 (enExample)
DE (1) DE102004013218A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100449669C (zh) * 2006-04-28 2009-01-07 浙江工业大学 新型压电陶瓷式继电器
CN101431172B (zh) * 2008-07-29 2013-09-04 华东师范大学 一种含mems开关的可重构微波低通滤波器及其制备方法
CN101593863B (zh) * 2009-06-26 2012-11-21 北京信息科技大学 一种可调微波带通滤波器
US8462478B2 (en) * 2009-12-04 2013-06-11 Sony Corporation Over-voltage protection
WO2017189806A1 (en) * 2016-04-27 2017-11-02 The Regents Of The University Of California Rf-powered micromechanical clock generator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139335A (ja) * 1984-07-27 1986-02-25 オムロン株式会社 リレ−
EP0189302B1 (en) * 1985-01-21 1991-10-16 Nec Corporation Piezoelectric latching actuator having an impact receiving projectile
JPS625526A (ja) * 1985-07-01 1987-01-12 宇部興産株式会社 圧電リレ−
JPH01112629A (ja) * 1987-10-26 1989-05-01 Matsushita Electric Works Ltd 圧電継電器
JPH08152575A (ja) * 1994-09-30 1996-06-11 Toppan Printing Co Ltd 光ビーム偏向器
JP3834862B2 (ja) * 1996-03-07 2006-10-18 住友電気工業株式会社 機械式電気スイッチ素子
JP2000030593A (ja) * 1998-07-09 2000-01-28 Fuji Electric Co Ltd 圧電式単安定リレー
US6481667B1 (en) * 2001-03-05 2002-11-19 Northrop Grumman Corporation System and method for deflecting an aerodynamic control surface

Also Published As

Publication number Publication date
CN100336148C (zh) 2007-09-05
US7138748B2 (en) 2006-11-21
US20040264878A1 (en) 2004-12-30
DE102004013218A1 (de) 2004-10-21
CH696970A5 (de) 2008-02-29
CN1551275A (zh) 2004-12-01
KR20040085476A (ko) 2004-10-08
KR100515693B1 (ko) 2005-09-23

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