CN100336148C - 增大压电传感器的行程的方法和利用该方法的mems开关 - Google Patents

增大压电传感器的行程的方法和利用该方法的mems开关 Download PDF

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Publication number
CN100336148C
CN100336148C CNB2004100322919A CN200410032291A CN100336148C CN 100336148 C CN100336148 C CN 100336148C CN B2004100322919 A CNB2004100322919 A CN B2004100322919A CN 200410032291 A CN200410032291 A CN 200410032291A CN 100336148 C CN100336148 C CN 100336148C
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CN
China
Prior art keywords
switch
piezoelectric sensor
mems
piezoelectric
increasing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB2004100322919A
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English (en)
Chinese (zh)
Other versions
CN1551275A (zh
Inventor
崔斗善
李泽旻
诸太珍
黄璟玹
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Korea Institute of Machinery and Materials KIMM
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Korea Institute of Machinery and Materials KIMM
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Publication of CN1551275A publication Critical patent/CN1551275A/zh
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Publication of CN100336148C publication Critical patent/CN100336148C/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
CNB2004100322919A 2003-03-31 2004-03-31 增大压电传感器的行程的方法和利用该方法的mems开关 Expired - Fee Related CN100336148C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2003-0020169A KR100515693B1 (ko) 2003-03-31 2003-03-31 압전체의 구동량 확대방법 및 그를 이용한 멤스 스위치
KR20169/2003 2003-03-31

Publications (2)

Publication Number Publication Date
CN1551275A CN1551275A (zh) 2004-12-01
CN100336148C true CN100336148C (zh) 2007-09-05

Family

ID=33028852

Family Applications (1)

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CNB2004100322919A Expired - Fee Related CN100336148C (zh) 2003-03-31 2004-03-31 增大压电传感器的行程的方法和利用该方法的mems开关

Country Status (6)

Country Link
US (1) US7138748B2 (enExample)
JP (1) JP2004303734A (enExample)
KR (1) KR100515693B1 (enExample)
CN (1) CN100336148C (enExample)
CH (1) CH696970A5 (enExample)
DE (1) DE102004013218A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100449669C (zh) * 2006-04-28 2009-01-07 浙江工业大学 新型压电陶瓷式继电器
CN101431172B (zh) * 2008-07-29 2013-09-04 华东师范大学 一种含mems开关的可重构微波低通滤波器及其制备方法
CN101593863B (zh) * 2009-06-26 2012-11-21 北京信息科技大学 一种可调微波带通滤波器
US8462478B2 (en) * 2009-12-04 2013-06-11 Sony Corporation Over-voltage protection
WO2017189806A1 (en) * 2016-04-27 2017-11-02 The Regents Of The University Of California Rf-powered micromechanical clock generator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139335A (ja) * 1984-07-27 1986-02-25 オムロン株式会社 リレ−
US5818148A (en) * 1996-03-07 1998-10-06 Sumitomo Electric Industries, Ltd. Electromechanical switch
US6481667B1 (en) * 2001-03-05 2002-11-19 Northrop Grumman Corporation System and method for deflecting an aerodynamic control surface

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0189302B1 (en) * 1985-01-21 1991-10-16 Nec Corporation Piezoelectric latching actuator having an impact receiving projectile
JPS625526A (ja) * 1985-07-01 1987-01-12 宇部興産株式会社 圧電リレ−
JPH01112629A (ja) * 1987-10-26 1989-05-01 Matsushita Electric Works Ltd 圧電継電器
JPH08152575A (ja) * 1994-09-30 1996-06-11 Toppan Printing Co Ltd 光ビーム偏向器
JP2000030593A (ja) * 1998-07-09 2000-01-28 Fuji Electric Co Ltd 圧電式単安定リレー

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139335A (ja) * 1984-07-27 1986-02-25 オムロン株式会社 リレ−
US5818148A (en) * 1996-03-07 1998-10-06 Sumitomo Electric Industries, Ltd. Electromechanical switch
US6481667B1 (en) * 2001-03-05 2002-11-19 Northrop Grumman Corporation System and method for deflecting an aerodynamic control surface

Also Published As

Publication number Publication date
US7138748B2 (en) 2006-11-21
US20040264878A1 (en) 2004-12-30
DE102004013218A1 (de) 2004-10-21
JP2004303734A (ja) 2004-10-28
CH696970A5 (de) 2008-02-29
CN1551275A (zh) 2004-12-01
KR20040085476A (ko) 2004-10-08
KR100515693B1 (ko) 2005-09-23

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20070905

Termination date: 20120331