JP2007501391A - 表面プラズモンを増強するナノ光学素子及びこの製造方法 - Google Patents

表面プラズモンを増強するナノ光学素子及びこの製造方法 Download PDF

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JP2007501391A
JP2007501391A JP2006522587A JP2006522587A JP2007501391A JP 2007501391 A JP2007501391 A JP 2007501391A JP 2006522587 A JP2006522587 A JP 2006522587A JP 2006522587 A JP2006522587 A JP 2006522587A JP 2007501391 A JP2007501391 A JP 2007501391A
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metal
radiation
cell
wavelength
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JP2007501391A5 (enExample
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クー キム，ホン
ソン，チーチュン
ソク ジョン，ユン
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University of Pittsburgh
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University of Pittsburgh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/14—Arrangements for focusing or reflecting ray or beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J40/00—Photoelectric discharge tubes not involving the ionisation of a gas
    • H01J40/02—Details
    • H01J40/14—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/16—Optical or photographic arrangements structurally combined with the vessel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8067—Reflectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2006522587A 2003-08-06 2004-07-22 表面プラズモンを増強するナノ光学素子及びこの製造方法 Pending JP2007501391A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US49295403P 2003-08-06 2003-08-06
US49295503P 2003-08-06 2003-08-06
US49295603P 2003-08-06 2003-08-06
PCT/US2004/023499 WO2005017570A2 (en) 2003-08-06 2004-07-22 Surface plasmon-enhanced nano-optic devices and methods of making same

Publications (2)

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JP2007501391A true JP2007501391A (ja) 2007-01-25
JP2007501391A5 JP2007501391A5 (enExample) 2007-09-06

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US (2) US7456383B2 (enExample)
EP (1) EP1661182A4 (enExample)
JP (1) JP2007501391A (enExample)
KR (1) KR20060130543A (enExample)
WO (1) WO2005017570A2 (enExample)

Cited By (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007041555A (ja) * 2005-06-27 2007-02-15 Tohoku Univ カラーフィルタ装置及びその製造方法
JP2007264610A (ja) * 2006-02-28 2007-10-11 Canon Inc 光透過装置の設計方法、光学素子、撮像素子、光スイッチング素子、及び化学センサ装置
JP2008232806A (ja) * 2007-03-20 2008-10-02 Canon Inc 光学素子の製造方法
JP2009025091A (ja) * 2007-07-18 2009-02-05 Canon Inc センサー装置
JP2009076361A (ja) * 2007-09-21 2009-04-09 Toshiba Corp 極微細構造を有する光透過型金属電極およびその製造方法
JP2009087519A (ja) * 2007-10-01 2009-04-23 Samsung Electronics Co Ltd 表面プラズモンを利用したナノパターニング方法、それを利用したナノインプリント用マスター及び離散トラック磁気記録媒体の製造方法
JP2009180724A (ja) * 2008-01-30 2009-08-13 Palo Alto Research Center Inc 時間変化を示す検知結果の取得
JP2009223123A (ja) * 2008-03-18 2009-10-01 Ricoh Co Ltd 偏光制御素子、偏光制御装置
WO2009119391A1 (ja) * 2008-03-25 2009-10-01 学校法人 早稲田大学 光学的センサー
JP2009540312A (ja) * 2006-06-12 2009-11-19 コミツサリア タ レネルジー アトミーク 近接場透過で作動する光学部品
JP2010009025A (ja) * 2008-05-30 2010-01-14 Canon Inc 光学フィルタ
JP2010096645A (ja) * 2008-10-17 2010-04-30 National Institute Of Advanced Industrial Science & Technology 周期構造を有するマイクロプレート、並びに、それを用いた表面プラズモン励起増強蛍光顕微鏡、蛍光マイクロプレートリーダーおよび特異的な抗原抗体反応の検出方法
JP2010103078A (ja) * 2008-10-21 2010-05-06 Korea Advanced Inst Of Science & Technology ラップトップサイズの近接場の増幅を利用した高次高調波の生成装置
JP2010519558A (ja) * 2007-02-27 2010-06-03 コーニング インコーポレイテッド 掃引波長撮像光学インターロゲーションシステム及びこれを使用する方法
JP2010145408A (ja) * 2008-12-22 2010-07-01 Korea Electronics Telecommun バイオチップ及び生体物質検出装置
JP2010256126A (ja) * 2009-04-23 2010-11-11 Tokyo Metropolitan Industrial Technology Research Institute 局在表面プラズモン共鳴測定基板及び局在表面プラズモン共鳴センサ
EP2252069A2 (en) 2009-05-11 2010-11-17 Sony Corporation Two-dimensional solid-state image capture device and polarization-light data processing method thereof
JP2010541234A (ja) * 2007-09-27 2010-12-24 エーエスエムエル ネザーランズ ビー．ブイ． スペクトルフィルタ、そのスペクトルフィルタを含むリソグラフィ装置、デバイス製造方法、およびその方法により製造されたデバイス
JP2011504595A (ja) * 2007-11-23 2011-02-10 シリコンファイル・テクノロジーズ・インコーポレイテッド 蛍光バイオチップ診断装置
JP2011128133A (ja) * 2009-11-19 2011-06-30 Seiko Epson Corp センサーチップ、センサーカートリッジ及び分析装置
JP2011141264A (ja) * 2009-12-11 2011-07-21 Seiko Epson Corp センサーチップ、センサーカートリッジ及び分析装置
WO2011118309A1 (ja) * 2010-03-24 2011-09-29 Ｎｅｃシステムテクノロジー株式会社 分析装置
JP2011237376A (ja) * 2010-05-13 2011-11-24 Seiko Epson Corp 光デバイス及び分析装置
JP2012507707A (ja) * 2008-10-31 2012-03-29 エスエヌユー・アール・アンド・デービー・ファンデーション 電場増幅のためのナノギャップデバイス及びこれを用いてナノ粒子を検出するためのシステム
WO2012133778A1 (ja) * 2011-03-31 2012-10-04 住友化学株式会社 金属系粒子集合体
WO2012133777A1 (ja) * 2011-03-31 2012-10-04 住友化学株式会社 金属系粒子集合体
WO2012133776A1 (ja) * 2011-03-31 2012-10-04 住友化学株式会社 金属系粒子集合体
WO2013051470A1 (ja) * 2011-10-03 2013-04-11 住友化学株式会社 量子ドット発光素子
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JP2013231685A (ja) * 2012-05-01 2013-11-14 Seiko Epson Corp 検出装置
JP2014016372A (ja) * 2013-10-29 2014-01-30 National Institute Of Advanced Industrial & Technology 周期構造を有するマイクロプレート、並びに、それを用いた表面プラズモン励起増強蛍光顕微鏡、蛍光マイクロプレートリーダーおよび特異的な抗原抗体反応の検出方法
WO2014045851A1 (ja) * 2012-09-18 2014-03-27 住友化学株式会社 金属系粒子集合体
US8711463B2 (en) 2010-12-30 2014-04-29 Samsung Electronics Co., Ltd. Light modulators and optical apparatuses including the same
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JPWO2016125614A1 (ja) * 2015-02-02 2017-11-24 コニカミノルタ株式会社 検出方法、検出装置およびチップ
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