JP2010256126A - 局在表面プラズモン共鳴測定基板及び局在表面プラズモン共鳴センサ - Google Patents
局在表面プラズモン共鳴測定基板及び局在表面プラズモン共鳴センサ Download PDFInfo
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- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 title claims abstract description 50
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- 239000003463 adsorbent Substances 0.000 claims abstract description 30
- 238000001514 detection method Methods 0.000 claims abstract description 26
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 15
- 238000001179 sorption measurement Methods 0.000 claims abstract description 13
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- 238000005259 measurement Methods 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 8
- 239000002131 composite material Substances 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 239000011148 porous material Substances 0.000 claims description 6
- 239000013335 mesoporous material Substances 0.000 claims description 5
- 230000031700 light absorption Effects 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000002041 carbon nanotube Substances 0.000 claims description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 3
- 239000001913 cellulose Substances 0.000 claims description 3
- 229920002678 cellulose Polymers 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000010457 zeolite Substances 0.000 claims description 3
- 229910021536 Zeolite Inorganic materials 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000004927 clay Substances 0.000 claims description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 30
- 239000010409 thin film Substances 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 8
- 239000010408 film Substances 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- 206010024769 Local reaction Diseases 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 101000916532 Rattus norvegicus Zinc finger and BTB domain-containing protein 38 Proteins 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- -1 clays Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
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- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000000791 photochemical oxidant Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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- Nanotechnology (AREA)
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Abstract
【解決手段】検出対象物4を捕捉する多孔質光透過性吸着材3を持ち、検出対象物4が多孔質光透過性吸着材3に吸着されたことにより生じる局在表面プラズモン共鳴を検出する。
【選択図】図1
Description
2 金属微細構造
21 金属
22 誘電体膜
3 多孔質光透過性吸着材
4 検出対象物
5 透過光
Claims (19)
- 局在表面プラズモン共鳴による光吸収変化を測定するための局在表面プラズモン共鳴測定基板であって、
検出対象物を捕捉する多孔質光透過性吸着材を有し、検出対象物が多孔質光透過性吸着材に吸着されたことにより生じる局在表面プラズモン共鳴を検出するように構成されている、ことを特徴とする局在表面プラズモン共鳴測定基板。 - 光透過性基板、誘電体層、非光透過性部、及び前記多孔質光透過性吸着材からなる吸着部とを備える、請求項1に記載の局在表面プラズモン共鳴測定基板。
- 前記多孔質光透過性吸着材がメソポーラス材料、マクロポーラス材料、および複合メソポーラス/マクロポーラス材料から選択される、請求項1または2に記載の局在表面プラズモン共鳴測定基板。
- 前記多孔質光透過性吸着材の平均孔径が0.5nmから50nmの範囲である、請求項3に記載の局在表面プラズモン共鳴測定基板。
- 前記多孔質光透過性吸着材がポリマー、金属、シリカ材料、粘土、セルロース、シリカゲル、カーボンナノチューブ、セラミック、ゼオライト、およびそれらの組み合わせから選択される材料である、請求項1ないし4のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記多孔質光透過性吸着材からなる吸着部の膜厚が500nmから2μmの範囲である、請求項2ないし5のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記光透過性部が透明ガラス製又は透明プラスチック製である、請求項2ないし6のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記誘電体層が金属酸化物製である、請求項2ないし7のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記誘電体層の膜厚が1nmから200nmである、請求項2ないし8のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記非光透過性部が、前記検出対象物と前記多孔質光透過性吸着材とが反応して局在表面プラズモン共鳴を生じさせる膜厚である、請求項2ないし9のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記非光透過性部の膜厚が5nmから200nmである、請求項10に記載の局在表面プラズモン共鳴測定基板。
- 前記非光透過性部を構成する非光透過性物質が金属である、請求項2ないし11のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記金属が、白金、金、銀、銅、アルミニウム及びこれらの複合金属である、請求項12に記載の局在表面プラズモン共鳴測定基板。
- 前記非光透過性部が、非光透過性物質を等間隔で複数並べた微細構造を持つ、請求項2ないし14のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記非光透過性物質の間隔が10nmから2μmである、請求項14に記載の局在表面プラズモン共鳴測定基板。
- 前記検出対象物がVOCである、請求項1ないし15のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 請求項1ないし16のいずれかに記載の基板を備える局在表面プラズモン共鳴センサ。
- 前記基板に、光源から光を透過させることにより局在表面プラズモン共鳴を誘発させ、該局在表面プラズモン共鳴による光吸収変化を検出し、この検出結果を基に検出対象物の濃度を検出する、請求項17に記載の局在表面プラズモン共鳴センサ。
- 局在表面プラズモン共鳴を誘発させる光が近赤外光である、請求項17または18に記載の局在表面プラズモン共鳴センサ。
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014517321A (ja) * | 2011-06-16 | 2014-07-17 | スリーエム イノベイティブ プロパティズ カンパニー | 表面プラズモン共鳴センサー素子及びそれを含むセンサー |
JP2014190909A (ja) * | 2013-03-28 | 2014-10-06 | Seiko Epson Corp | 光学デバイス、検出装置及び電子機器 |
JP2015206786A (ja) * | 2014-04-08 | 2015-11-19 | 地方独立行政法人東京都立産業技術研究センター | 局在表面プラズモン共鳴センサ、ガスセンサ及び製造方法 |
WO2016031360A1 (ja) * | 2014-08-28 | 2016-03-03 | シャープ株式会社 | 表面プラズモン検出装置および表面プラズモン検出方法 |
JP2018032036A (ja) * | 2012-05-08 | 2018-03-01 | ソニー株式会社 | 赤外線変換素子及び撮像装置 |
Families Citing this family (1)
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JP6507969B2 (ja) * | 2015-09-25 | 2019-05-08 | コニカミノルタ株式会社 | ガス検知方法及びガス検知装置 |
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JP2006038506A (ja) * | 2004-07-23 | 2006-02-09 | Fuji Photo Film Co Ltd | 微細構造体 |
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JP2000356587A (ja) * | 1999-06-14 | 2000-12-26 | Inst Of Physical & Chemical Res | 局在プラズモン共鳴センサー |
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JP2006038506A (ja) * | 2004-07-23 | 2006-02-09 | Fuji Photo Film Co Ltd | 微細構造体 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014517321A (ja) * | 2011-06-16 | 2014-07-17 | スリーエム イノベイティブ プロパティズ カンパニー | 表面プラズモン共鳴センサー素子及びそれを含むセンサー |
JP2018032036A (ja) * | 2012-05-08 | 2018-03-01 | ソニー株式会社 | 赤外線変換素子及び撮像装置 |
JP2014190909A (ja) * | 2013-03-28 | 2014-10-06 | Seiko Epson Corp | 光学デバイス、検出装置及び電子機器 |
JP2015206786A (ja) * | 2014-04-08 | 2015-11-19 | 地方独立行政法人東京都立産業技術研究センター | 局在表面プラズモン共鳴センサ、ガスセンサ及び製造方法 |
WO2016031360A1 (ja) * | 2014-08-28 | 2016-03-03 | シャープ株式会社 | 表面プラズモン検出装置および表面プラズモン検出方法 |
JP2016048223A (ja) * | 2014-08-28 | 2016-04-07 | シャープ株式会社 | 表面プラズモン検出装置および表面プラズモン検出方法 |
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