JP5460113B2 - 局在表面プラズモン共鳴測定基板及び局在表面プラズモン共鳴センサ - Google Patents
局在表面プラズモン共鳴測定基板及び局在表面プラズモン共鳴センサ Download PDFInfo
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- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 title claims description 43
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
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- 229910021536 Zeolite Inorganic materials 0.000 claims description 2
- 239000004927 clay Substances 0.000 claims description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 2
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- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
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- 238000002441 X-ray diffraction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
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Description
2 金属微細構造
21 金属
22 誘電体膜
3 多孔質光透過性吸着材
4 検出対象物
5 透過光
Claims (15)
- 局在表面プラズモン共鳴による光吸収変化を測定するための局在表面プラズモン共鳴測定基板であって、
光透過性基板と、
前記光透過性基板の光入射面とは反対側の表面上に設けられた金属微細構造と、
前記光透過性基板の前記表面及び前記金属微細構造を覆うように設けられた多孔質光透過性吸着材と、を備え、
前記金属微細構造は、誘電体層上に非光透過性部を積層させた複数のドットを有し、
検出対象物が前記多孔質光透過性吸着材を介して前記光透過性基板上の前記金属微細構造の前記ドットに吸着する場合に、前記光透過性基板から前記ドット間を抜ける透過光に対して局在表面プラズモン共鳴が発生し、該局在表面プラズモン共鳴を検出するように構成されている、ことを特徴とする局在表面プラズモン共鳴測定基板。 - 前記多孔質光透過性吸着材は、メソポーラス材料、マクロポーラス材料、および複合メソポーラス/マクロポーラス材料から選択される、請求項1に記載の局在表面プラズモン共鳴測定基板。
- 前記多孔質光透過性吸着材の平均孔径は、0.5nmから50nmの範囲である、請求項2に記載の局在表面プラズモン共鳴測定基板。
- 前記多孔質光透過性吸着材は、ポリマー、金属、シリカ材料、粘土、セルロース、シリカゲル、カーボンナノチューブ、セラミック、ゼオライト、及びそれらの組み合わせから選択される材料である、請求項1ないし3のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記多孔質光透過性吸着材からなる吸着部の膜厚は、500nmから2μmの範囲である、請求項1ないし4のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記光透過性基板は、透明ガラス製又は透明プラスチック製である、請求項1ないし5のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記誘電体層は、金属酸化物製である、請求項1ないし6いずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記誘電体層の膜厚は、1nmから200nmである、請求項1ないし7のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記非光透過性部の膜厚が5nmから200nmである、請求項1ないし8のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記非光透過性部を構成する非光透過性物質は、金属である、請求項1ないし9のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記金属は、白金、金、銀、銅、アルミニウム、及びこれらの複合金属から選択される、請求項10に記載の局在表面プラズモン共鳴測定基板。
- 前記ドットの間隔は、10nmから2μmである、請求項1ないし11のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 前記検出対象物がVOCである、請求項1ないし12のいずれかに記載の局在表面プラズモン共鳴測定基板。
- 請求項1ないし13のいずれかに記載の基板を備え、
前記基板に、光源から光を透過させることにより局在表面プラズモン共鳴を誘発させ、該局在表面プラズモン共鳴による光吸収変化を検出し、この検出結果を基に検出対象物の濃度を検出する、局在表面プラズモン共鳴センサ。 - 局在表面プラズモン共鳴を誘発させる光が近赤外光である、請求項14に記載の局在表面プラズモン共鳴センサ。
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JP2017062182A (ja) * | 2015-09-25 | 2017-03-30 | コニカミノルタ株式会社 | ガス検知方法及びガス検知装置 |
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EP2721393B1 (en) * | 2011-06-16 | 2018-02-28 | 3M Innovative Properties Company | Surface plasmon resonance sensor element and sensor including the same |
TWI595219B (zh) * | 2012-05-08 | 2017-08-11 | Sony Corp | Infrared conversion element, imaging device and imaging method |
JP6201369B2 (ja) * | 2013-03-28 | 2017-09-27 | セイコーエプソン株式会社 | 検出装置及び電子機器 |
JP6634217B2 (ja) * | 2014-04-08 | 2020-01-22 | 地方独立行政法人東京都立産業技術研究センター | 局在表面プラズモン共鳴センサ、ガスセンサ及び製造方法 |
JP6010077B2 (ja) * | 2014-08-28 | 2016-10-19 | シャープ株式会社 | 表面プラズモン検出装置および表面プラズモン検出方法 |
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JP2001141714A (ja) * | 1999-11-11 | 2001-05-25 | Nippon Telegr & Teleph Corp <Ntt> | 二酸化窒素ガスの検出装置 |
US7456383B2 (en) * | 2003-08-06 | 2008-11-25 | University Of Pittsburgh | Surface plasmon-enhanced nano-optic devices and methods of making same |
ZA200610693B (en) * | 2004-05-19 | 2008-06-25 | Vp Holding Llc | Optical sensor with layered plasmon structure for enhanced detection of chemical groups by sers |
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