JP2011504595A - 蛍光バイオチップ診断装置 - Google Patents
蛍光バイオチップ診断装置 Download PDFInfo
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- JP2011504595A JP2011504595A JP2010534878A JP2010534878A JP2011504595A JP 2011504595 A JP2011504595 A JP 2011504595A JP 2010534878 A JP2010534878 A JP 2010534878A JP 2010534878 A JP2010534878 A JP 2010534878A JP 2011504595 A JP2011504595 A JP 2011504595A
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- 229910052751 metal Inorganic materials 0.000 claims description 57
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- 239000010410 layer Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 20
- 238000003745 diagnosis Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 6
- 238000012546 transfer Methods 0.000 claims description 5
- 238000002955 isolation Methods 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 229910052723 transition metal Inorganic materials 0.000 claims description 3
- 150000003624 transition metals Chemical group 0.000 claims description 3
- 102000034287 fluorescent proteins Human genes 0.000 abstract description 17
- 108091006047 fluorescent proteins Proteins 0.000 abstract description 17
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 10
- 239000013074 reference sample Substances 0.000 description 10
- 238000005259 measurement Methods 0.000 description 8
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- 238000006243 chemical reaction Methods 0.000 description 5
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- 239000010409 thin film Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 102000004169 proteins and genes Human genes 0.000 description 3
- 108090000623 proteins and genes Proteins 0.000 description 3
- 238000004590 computer program Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000002189 fluorescence spectrum Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
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- 230000005284 excitation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/531—Production of immunochemical test materials
- G01N33/532—Production of labelled immunochemicals
- G01N33/533—Production of labelled immunochemicals with fluorescent label
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
- G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N2021/6463—Optics
- G01N2021/6471—Special filters, filter wheel
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- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Abstract
Description
Claims (14)
- 複数の光検出器が形成されたイメージセンサと、
前記複数の光検出器の上部に形成された複数の帯域通過フィルタを有する帯域通過フィルタ部とを備え、
前記複数の帯域通過フィルタは、金属層にナノ構造のパターンを形成することによって実現されることを特徴とする蛍光バイオチップ診断装置。 - 前記イメージセンサは、前記複数の光検出器から得られる信号を処理する信号処理部をさらに備えることを特徴とする請求項1に記載の蛍光バイオチップ診断装置。
- 前記金属層は、透過光の波長帯域によって決定される厚さを有することを特徴とする請求項1または2に記載の蛍光バイオチップ診断装置。
- 前記金属層の厚さは、100nm〜1500nmであることを特徴とする請求項1または2に記載の蛍光バイオチップ診断装置。
- 前記金属層のパターン間距離は、透過光の中心波長によって決定されることを特徴とする請求項1または2に記載の蛍光バイオチップ診断装置。
- 前記金属層の材質は、遷移金属であることを特徴とする請求項1または2に記載の蛍光バイオチップ診断装置。
- 前記金属層の材質は、Al,Ag,Au,PtまたはCuのうちから選択された1つ以上であることを特徴とする請求項1または2に記載の蛍光バイオチップ診断装置。
- 前記帯域通過フィルタ部は、前記バイオチップから独立した状態で、前記バイオチップの下部と接触していることを特徴とする請求項1または2に記載の蛍光バイオチップ診断装置。
- 前記バイオチップからの蛍光を検出するフォトダイオード領域、該フォトダイオード領域での光電效果により発生した電荷が集まる電荷移動路である垂直電荷伝送領域、及び素子分離膜を有する基板と、
該基板上に順次形成されたゲート絶縁膜及びゲート電極と、
該ゲート電極を有する前記基板に形成された層間絶縁膜と、
該層間絶縁膜内に回路配線のために形成された少なくとも1つの金属層とを備え、
前記少なくとも1つの金属層の延長線上に、金属ナノ構造のパターンを有する少なくとも1つの帯域通過フィルタが形成されることを特徴とする蛍光バイオチップ診断装置。 - 前記金属層は、透過光の波長帯域によって決定される厚さを有することを特徴とする請求項9に記載の蛍光バイオチップ診断装置。
- 前記金属層の厚さは、100nm〜1500nmであることを特徴とする請求項9に記載の蛍光バイオチップ診断装置。
- 前記金属層のパターン間距離は、透過光の中心波長によって決定されることを特徴とする請求項9に記載の蛍光バイオチップ診断装置。
- 前記金属層の材質は、遷移金属であることを特徴とする請求項9に記載の蛍光バイオチップ診断装置。
- 前記金属層の材質は、Al,Ag,Au,PtまたはCuのうちから選択された1つ以上であることを特徴とする請求項9に記載の蛍光バイオチップ診断装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070119994A KR100825087B1 (ko) | 2007-11-23 | 2007-11-23 | 형광형 바이오칩의 진단장치 |
PCT/KR2008/006624 WO2009066896A1 (en) | 2007-11-23 | 2008-11-10 | Fluorescent biochip diagnosis device |
Publications (1)
Publication Number | Publication Date |
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JP2011504595A true JP2011504595A (ja) | 2011-02-10 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010534878A Pending JP2011504595A (ja) | 2007-11-23 | 2008-11-10 | 蛍光バイオチップ診断装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100247382A1 (ja) |
EP (1) | EP2217924A4 (ja) |
JP (1) | JP2011504595A (ja) |
KR (1) | KR100825087B1 (ja) |
CN (1) | CN101868727B (ja) |
WO (1) | WO2009066896A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2017169755A1 (ja) * | 2016-03-29 | 2017-10-05 | ソニー株式会社 | 固体撮像装置 |
JP2018524613A (ja) * | 2015-07-08 | 2018-08-30 | シャンハイ イーブロット フォトエレクトリック テクノロジー カンパニー リミテッドShanghai E−Blot Photoelectric Technology Co., Ltd | 感光性チップによる信号収集の方法と装置、及び細胞追跡の方法と装置 |
JP2019519758A (ja) * | 2016-04-22 | 2019-07-11 | イラミーナ インコーポレーテッド | ピクセル内における複数部位の発光性造影に使用するためのフォトニック構造をベースとしたデバイス及び組成物、並びにその使用方法 |
Families Citing this family (9)
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EP2221606A3 (en) | 2009-02-11 | 2012-06-06 | Samsung Electronics Co., Ltd. | Integrated bio-chip and method of fabricating the integrated bio-chip |
KR101058861B1 (ko) * | 2009-05-11 | 2011-08-23 | (주)실리콘화일 | 포토 리소그래피 공정이 가능한 금속 광학 필터 및 이를 포함하는 이미지 센서 |
KR101062330B1 (ko) * | 2010-01-14 | 2011-09-05 | (주)실리콘화일 | 배면광 포토다이오드 구조를 갖는 이미지 센서를 구비한 바이오칩 |
KR101642434B1 (ko) | 2016-01-21 | 2016-07-25 | 주식회사 랩 지노믹스 | 카트리지를 포함한 체외 진단 장치 |
CN110609019A (zh) * | 2018-06-15 | 2019-12-24 | 夏普株式会社 | 荧光检测传感器 |
CN110854141A (zh) * | 2019-11-21 | 2020-02-28 | 中国电子科技集团公司第四十四研究所 | 一种单片集成型平衡光电探测器芯片及制作方法 |
EP4033275A4 (en) | 2020-11-30 | 2023-10-25 | Sol Inc. | FLUORESCENT FILTER AND IMAGE SENSOR MODULE CONTAINING SAME |
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2007
- 2007-11-23 KR KR1020070119994A patent/KR100825087B1/ko active IP Right Grant
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2008
- 2008-11-10 CN CN2008801172525A patent/CN101868727B/zh active Active
- 2008-11-10 US US12/743,998 patent/US20100247382A1/en not_active Abandoned
- 2008-11-10 WO PCT/KR2008/006624 patent/WO2009066896A1/en active Application Filing
- 2008-11-10 EP EP08852412.9A patent/EP2217924A4/en not_active Withdrawn
- 2008-11-10 JP JP2010534878A patent/JP2011504595A/ja active Pending
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Cited By (7)
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JP2018524613A (ja) * | 2015-07-08 | 2018-08-30 | シャンハイ イーブロット フォトエレクトリック テクノロジー カンパニー リミテッドShanghai E−Blot Photoelectric Technology Co., Ltd | 感光性チップによる信号収集の方法と装置、及び細胞追跡の方法と装置 |
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CN101868727B (zh) | 2013-04-17 |
KR100825087B1 (ko) | 2008-04-25 |
CN101868727A (zh) | 2010-10-20 |
US20100247382A1 (en) | 2010-09-30 |
WO2009066896A1 (en) | 2009-05-28 |
EP2217924A1 (en) | 2010-08-18 |
EP2217924A4 (en) | 2014-02-19 |
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