JP2007059867A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2007059867A JP2007059867A JP2006081823A JP2006081823A JP2007059867A JP 2007059867 A JP2007059867 A JP 2007059867A JP 2006081823 A JP2006081823 A JP 2006081823A JP 2006081823 A JP2006081823 A JP 2006081823A JP 2007059867 A JP2007059867 A JP 2007059867A
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- semiconductor device
- electrode pad
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- wiring
- pad
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 77
- 239000011229 interlayer Substances 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims description 19
- 239000010410 layer Substances 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
【解決手段】層間膜22を厚くして電極パッド11の一部または全部をアクティブ領域16に引き出して形成することにより、I/O領域15を縮小することができるため、半導体装置の面積を縮小することができる。
【選択図】図1
Description
図8は従来の電極パッド近傍を示す半導体装置の要部拡大図であり、ここでは、表面のSiN絶縁膜および保護膜を省略している。図9は従来の電極パッド近傍を示す半導体装置の断面図であり、図8のA−A’断面図である。図10は従来のバンプを形成した電極パッド構成を示す断面図、図11は従来のバンプを形成した電極パッド構成を示す平面図、図12は従来の再配線技術を用いた電極パッド構成を示す断面図、図13は従来の再配線上にバンプを形成した電極パッド構成を示す断面図である。
請求項3記載の半導体装置は、請求項1または請求項2のいずれかに記載の半導体装置において、前記層間膜の膜厚が250nmから700nmであることを特徴とする。
請求項5記載の半導体装置は、請求項1または請求項2または請求項3または請求項4のいずれかに記載の半導体装置、前記配線および接続領域がCuで、前記電極パッドおよび導電層がAlであることを特徴とする。
まず、実施の形態1における半導体装置を図1,図2,図3、図4を用いて説明する。
図1は実施の形態1における電極パッド近傍を示す半導体装置の要部拡大図、図2は実施の形態1における電極パッド近傍を示す半導体装置の断面図であり、図1のA−A’断面図である。図3は実施の形態1におけるバンプを形成した電極パッド構成を示す断面図である。図4は実施の形態1におけるバンプを形成した電極パッド構成を示す平面図を示す。
そして、従来ではワイヤーボンディングやスタッドバンプ31の接合位置の平坦性を保つため、ワイヤーボンディングやスタッドバンプ31の接合位置が接続ビア13上に設けられ、接続ビア13は接合箇所の接合径より大きくする必要があったが、引き出した電極パッド11上にワイヤーボンディングやスタッドバンプ31を接続するため、接続ビア13の形状や大きさ,位置の自由度が増し、電極パッド11上に形成されるワイヤーボンディングやスタッドバンプ31などと電極パッド11との接合箇所の接合径17よりも、接続ビア13を小さくすることが可能となり、接合径17は接続ビア13の断面のいずれかの辺に平行な方向の長さよりも大きな構成となっていて、さらに、接合箇所は接続ビア13の外側に形成されることができる。このように、接続ビア13を小さくできるために、よりI/O領域15の面積を縮小することができ、延いては、半導体装置の面積を縮小することができる。また、ボンディング接合面が接続ビア13と重ならないために、段差へのボンディングによる下部へのダメージを低減することもできる。
図5は実施の形態2における電極パッド近傍を示す半導体装置の要部拡大図、図6は実施の形態2における電極パッド近傍を示す半導体装置の断面図であり、図5のA−A’断面図である。図7は実施の形態2におけるバンプを形成した電極パッド構成を示す断面図である。
12 パッドメタル
13 接続ビア
14 シールド配線
15 I/O領域
16 アクティブ領域
17 接合径
22 層間膜
23 保護膜
31 スタッドバンプ
40 配線
91 配線
101 半田ボール
Claims (11)
- I/Oセルの回路領域であるI/O領域および機能素子形成領域であるアクティブ領域から成る半導体装置であって、
I/O領域に形成されて内部配線を引き出すパッドメタルと、
前記パッドメタルの一部を露出させた状態で前記半導体装置全面に形成される層間膜と、
一部または全部が前記アクティブ領域の前記層間膜上に形成される電極パッドと、
前記パッドメタルと前記電極パッドとを電気的に接続する接続ビアと、
前記電極パッドを露出させた状態で前記半導体装置全面に形成される保護膜と
を有し、前記I/O領域が前記電極パッドより小さくなることを特徴とする半導体装置。 - 前記層間膜がSiN膜であることを特徴とする請求項1記載の半導体装置。
- 前記層間膜の膜厚が250nmから700nmであることを特徴とする請求項1または請求項2のいずれかに記載の半導体装置。
- 前記層間膜の膜厚が300nmであることを特徴とする請求項1または請求項2のいずれかに記載の半導体装置。
- 前記配線およびパッドメタルがCuで、前記電極パッドおよび接続ビアがAlであることを特徴とする請求項1または請求項2または請求項3または請求項4のいずれかに記載の半導体装置。
- 前記電極パッド直下の最上層配線の少なくとも一部が前記I/Oセルをシールドするシールド配線であることを特徴とする請求項1または請求項2または請求項3または請求項4または請求項5のいずれかに記載の半導体装置。
- 前記電極パッドをワイヤーボンディングにより外部と接続することを特徴とする請求項1または請求項2または請求項3または請求項4または請求項5または請求項6のいずれかに記載の半導体装置。
- 前記電極パッド上にスタッドバンプを形成することを特徴とする請求項1または請求項2または請求項3または請求項4または請求項5または請求項6または請求項7のいずれかに記載の半導体装置。
- 前記電極パッドと前記ワイヤーボンディングとの接合箇所の接合径が前記接続ビアと前記電極パッドとの接続面のいずれの辺の長さよりも大きいことを特徴とする請求項7記載の半導体装置。
- 前記電極パッドと前記スタッドバンプとの接合箇所の接合径が前記接続ビアと前記電極パッドとの接続面のいずれの辺の長さよりも大きいことを特徴とする請求項8記載の半導体装置。
- 前記接合箇所と前記接続ビアの位置関係は電極パッドのいずれかの辺に平行な方向にずれていることを特徴とする請求項9または請求項10のいずれかに記載の半導体装置。
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JP2006081823A JP2007059867A (ja) | 2005-07-26 | 2006-03-24 | 半導体装置 |
TW095122889A TW200705591A (en) | 2005-07-26 | 2006-06-26 | Semiconductor device |
KR20060062826A KR20070014015A (ko) | 2005-07-26 | 2006-07-05 | 반도체 장치 |
US11/487,329 US20070023927A1 (en) | 2005-07-26 | 2006-07-17 | Semiconductor device |
CN2006101085144A CN1905180B (zh) | 2005-07-26 | 2006-07-25 | 半导体器件 |
CN2011100223947A CN102176437A (zh) | 2005-07-26 | 2006-07-25 | 半导体器件 |
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JP2011507265A (ja) * | 2007-12-10 | 2011-03-03 | アギア システムズ インコーポレーテッド | 頂部金属層を用いるチップ識別 |
JPWO2013136388A1 (ja) * | 2012-03-14 | 2015-07-30 | パナソニック株式会社 | 半導体装置 |
JP2016111154A (ja) * | 2014-12-04 | 2016-06-20 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
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TW200705591A (en) | 2007-02-01 |
CN1905180A (zh) | 2007-01-31 |
CN1905180B (zh) | 2011-02-23 |
KR20070014015A (ko) | 2007-01-31 |
CN102176437A (zh) | 2011-09-07 |
US20070023927A1 (en) | 2007-02-01 |
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