JP2005519348A5 - - Google Patents

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Publication number
JP2005519348A5
JP2005519348A5 JP2003575190A JP2003575190A JP2005519348A5 JP 2005519348 A5 JP2005519348 A5 JP 2005519348A5 JP 2003575190 A JP2003575190 A JP 2003575190A JP 2003575190 A JP2003575190 A JP 2003575190A JP 2005519348 A5 JP2005519348 A5 JP 2005519348A5
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JP
Japan
Prior art keywords
projection objective
lens group
lens
objective according
refractive power
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JP2003575190A
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English (en)
Japanese (ja)
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JP2005519348A (ja
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Priority claimed from DE10210899A external-priority patent/DE10210899A1/de
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Publication of JP2005519348A publication Critical patent/JP2005519348A/ja
Publication of JP2005519348A5 publication Critical patent/JP2005519348A5/ja
Pending legal-status Critical Current

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JP2003575190A 2002-03-08 2003-02-26 液浸リソグラフィ用の屈折投影対物レンズ Pending JP2005519348A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10210899A DE10210899A1 (de) 2002-03-08 2002-03-08 Refraktives Projektionsobjektiv für Immersions-Lithographie
PCT/EP2003/001954 WO2003077037A1 (en) 2002-03-08 2003-02-26 Refractive projection objective for immersion lithography

Publications (2)

Publication Number Publication Date
JP2005519348A JP2005519348A (ja) 2005-06-30
JP2005519348A5 true JP2005519348A5 (cg-RX-API-DMAC7.html) 2006-03-16

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ID=27762884

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2003575189A Pending JP2005519347A (ja) 2002-03-08 2002-05-03 最大開口型の投影対物レンズ
JP2003575190A Pending JP2005519348A (ja) 2002-03-08 2003-02-26 液浸リソグラフィ用の屈折投影対物レンズ

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2003575189A Pending JP2005519347A (ja) 2002-03-08 2002-05-03 最大開口型の投影対物レンズ

Country Status (8)

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US (4) US6891596B2 (cg-RX-API-DMAC7.html)
EP (2) EP1483625A1 (cg-RX-API-DMAC7.html)
JP (2) JP2005519347A (cg-RX-API-DMAC7.html)
KR (1) KR100991590B1 (cg-RX-API-DMAC7.html)
CN (1) CN100573222C (cg-RX-API-DMAC7.html)
AU (2) AU2002312872A1 (cg-RX-API-DMAC7.html)
DE (1) DE10210899A1 (cg-RX-API-DMAC7.html)
WO (2) WO2003077036A1 (cg-RX-API-DMAC7.html)

Families Citing this family (263)

* Cited by examiner, † Cited by third party
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