JP2003068893A5 - - Google Patents

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Publication number
JP2003068893A5
JP2003068893A5 JP2001257698A JP2001257698A JP2003068893A5 JP 2003068893 A5 JP2003068893 A5 JP 2003068893A5 JP 2001257698 A JP2001257698 A JP 2001257698A JP 2001257698 A JP2001257698 A JP 2001257698A JP 2003068893 A5 JP2003068893 A5 JP 2003068893A5
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JP
Japan
Prior art keywords
insulating film
film
memory element
semiconductor
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001257698A
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English (en)
Japanese (ja)
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JP2003068893A (ja
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Publication date
Application filed filed Critical
Priority to JP2001257698A priority Critical patent/JP2003068893A/ja
Priority claimed from JP2001257698A external-priority patent/JP2003068893A/ja
Priority to PCT/JP2002/006710 priority patent/WO2003021666A1/ja
Priority to TW091117013A priority patent/TW584943B/zh
Publication of JP2003068893A publication Critical patent/JP2003068893A/ja
Publication of JP2003068893A5 publication Critical patent/JP2003068893A5/ja
Pending legal-status Critical Current

Links

JP2001257698A 2001-08-28 2001-08-28 不揮発性記憶素子及び半導体集積回路 Pending JP2003068893A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001257698A JP2003068893A (ja) 2001-08-28 2001-08-28 不揮発性記憶素子及び半導体集積回路
PCT/JP2002/006710 WO2003021666A1 (en) 2001-08-28 2002-07-03 Nonvolatile storage device and semiconductor integrated circuit
TW091117013A TW584943B (en) 2001-08-28 2002-07-30 Nonvolatile storage device and semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001257698A JP2003068893A (ja) 2001-08-28 2001-08-28 不揮発性記憶素子及び半導体集積回路

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2005041612A Division JP2005184029A (ja) 2005-02-18 2005-02-18 不揮発性記憶素子及び半導体集積回路装置
JP2005041611A Division JP2005184028A (ja) 2005-02-18 2005-02-18 不揮発性記憶素子

Publications (2)

Publication Number Publication Date
JP2003068893A JP2003068893A (ja) 2003-03-07
JP2003068893A5 true JP2003068893A5 (enExample) 2005-08-25

Family

ID=19085320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001257698A Pending JP2003068893A (ja) 2001-08-28 2001-08-28 不揮発性記憶素子及び半導体集積回路

Country Status (3)

Country Link
JP (1) JP2003068893A (enExample)
TW (1) TW584943B (enExample)
WO (1) WO2003021666A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4647175B2 (ja) 2002-04-18 2011-03-09 ルネサスエレクトロニクス株式会社 半導体集積回路装置
KR100446632B1 (ko) * 2002-10-14 2004-09-04 삼성전자주식회사 비휘발성 ｓｏｎｓｎｏｓ 메모리
KR100474850B1 (ko) * 2002-11-15 2005-03-11 삼성전자주식회사 수직 채널을 가지는 비휘발성 ｓｏｎｏｓ 메모리 및 그 제조방법
US7133313B2 (en) * 2004-04-26 2006-11-07 Macronix International Co., Ltd. Operation scheme with charge balancing for charge trapping non-volatile memory
US7075828B2 (en) * 2004-04-26 2006-07-11 Macronix International Co., Intl. Operation scheme with charge balancing erase for charge trapping non-volatile memory
JP2006196643A (ja) * 2005-01-13 2006-07-27 Renesas Technology Corp 不揮発性半導体記憶装置
JP2006245415A (ja) 2005-03-04 2006-09-14 Sharp Corp 半導体記憶装置及びその製造方法、並びに携帯電子機器
US7612403B2 (en) * 2005-05-17 2009-11-03 Micron Technology, Inc. Low power non-volatile memory and gate stack
US8101989B2 (en) * 2006-11-20 2012-01-24 Macronix International Co., Ltd. Charge trapping devices with field distribution layer over tunneling barrier
KR100815968B1 (ko) * 2007-05-17 2008-03-24 주식회사 동부하이텍 반도체 소자 제조 방법
US8320191B2 (en) 2007-08-30 2012-11-27 Infineon Technologies Ag Memory cell arrangement, method for controlling a memory cell, memory array and electronic device
US8252653B2 (en) 2008-10-21 2012-08-28 Applied Materials, Inc. Method of forming a non-volatile memory having a silicon nitride charge trap layer
US8198671B2 (en) 2009-04-22 2012-06-12 Applied Materials, Inc. Modification of charge trap silicon nitride with oxygen plasma
US8987098B2 (en) 2012-06-19 2015-03-24 Macronix International Co., Ltd. Damascene word line
JP5586666B2 (ja) 2012-08-01 2014-09-10 力晶科技股▲ふん▼有限公司 不揮発性半導体記憶装置とその読み出し方法
US9379126B2 (en) 2013-03-14 2016-06-28 Macronix International Co., Ltd. Damascene conductor for a 3D device
US9099538B2 (en) 2013-09-17 2015-08-04 Macronix International Co., Ltd. Conductor with a plurality of vertical extensions for a 3D device
US9559113B2 (en) 2014-05-01 2017-01-31 Macronix International Co., Ltd. SSL/GSL gate oxide in 3D vertical channel NAND

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913118B1 (enExample) * 1970-02-05 1974-03-29
JPS4886485A (enExample) * 1972-02-17 1973-11-15
JPS5924547B2 (ja) * 1976-11-04 1984-06-09 ソニー株式会社 不揮発性メモリトランジスタ
JP2901493B2 (ja) * 1994-06-27 1999-06-07 日本電気株式会社 半導体記憶装置及びその製造方法
JPH09205155A (ja) * 1996-01-25 1997-08-05 Sony Corp 半導体記憶装置の製造方法
JP2000030471A (ja) * 1998-07-14 2000-01-28 Toshiba Microelectronics Corp 不揮発性半導体メモリ
JP2000049241A (ja) * 1998-07-28 2000-02-18 Matsushita Electron Corp 半導体メモリ装置およびその製造方法
JP2000349175A (ja) * 1999-06-03 2000-12-15 Mitsubishi Electric Corp 半導体装置の製造方法
JP3464955B2 (ja) * 1999-12-03 2003-11-10 Ｎｅｃエレクトロニクス株式会社 半導体記憶装置及び記憶方法
JP2002184873A (ja) * 2000-10-03 2002-06-28 Sony Corp 不揮発性半導体記憶装置及びその製造方法

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