JP2005184028A5 - - Google Patents
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- Publication number
- JP2005184028A5 JP2005184028A5 JP2005041611A JP2005041611A JP2005184028A5 JP 2005184028 A5 JP2005184028 A5 JP 2005184028A5 JP 2005041611 A JP2005041611 A JP 2005041611A JP 2005041611 A JP2005041611 A JP 2005041611A JP 2005184028 A5 JP2005184028 A5 JP 2005184028A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- memory element
- semiconductor
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 11
- 239000011856 silicon-based particle Substances 0.000 claims 6
- 238000009825 accumulation Methods 0.000 claims 2
- 230000014759 maintenance of location Effects 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005041611A JP2005184028A (ja) | 2005-02-18 | 2005-02-18 | 不揮発性記憶素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005041611A JP2005184028A (ja) | 2005-02-18 | 2005-02-18 | 不揮発性記憶素子 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001257698A Division JP2003068893A (ja) | 2001-08-28 | 2001-08-28 | 不揮発性記憶素子及び半導体集積回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005184028A JP2005184028A (ja) | 2005-07-07 |
| JP2005184028A5 true JP2005184028A5 (enExample) | 2008-02-14 |
Family
ID=34792799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005041611A Pending JP2005184028A (ja) | 2005-02-18 | 2005-02-18 | 不揮発性記憶素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005184028A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008078376A (ja) * | 2006-09-21 | 2008-04-03 | Oki Electric Ind Co Ltd | 半導体記憶装置 |
| US8101989B2 (en) * | 2006-11-20 | 2012-01-24 | Macronix International Co., Ltd. | Charge trapping devices with field distribution layer over tunneling barrier |
| US8320191B2 (en) | 2007-08-30 | 2012-11-27 | Infineon Technologies Ag | Memory cell arrangement, method for controlling a memory cell, memory array and electronic device |
| JP2019087667A (ja) | 2017-11-08 | 2019-06-06 | 東芝メモリ株式会社 | 半導体装置 |
-
2005
- 2005-02-18 JP JP2005041611A patent/JP2005184028A/ja active Pending
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