JP2005184029A5 - - Google Patents
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- Publication number
- JP2005184029A5 JP2005184029A5 JP2005041612A JP2005041612A JP2005184029A5 JP 2005184029 A5 JP2005184029 A5 JP 2005184029A5 JP 2005041612 A JP2005041612 A JP 2005041612A JP 2005041612 A JP2005041612 A JP 2005041612A JP 2005184029 A5 JP2005184029 A5 JP 2005184029A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- memory element
- region
- volatile memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 6
- 229910044991 metal oxide Inorganic materials 0.000 claims 5
- 150000004706 metal oxides Chemical class 0.000 claims 5
- 230000014759 maintenance of location Effects 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000011856 silicon-based particle Substances 0.000 claims 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005041612A JP2005184029A (ja) | 2005-02-18 | 2005-02-18 | 不揮発性記憶素子及び半導体集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005041612A JP2005184029A (ja) | 2005-02-18 | 2005-02-18 | 不揮発性記憶素子及び半導体集積回路装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001257698A Division JP2003068893A (ja) | 2001-08-28 | 2001-08-28 | 不揮発性記憶素子及び半導体集積回路 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008008964A Division JP2008172251A (ja) | 2008-01-18 | 2008-01-18 | 不揮発性記憶素子及び半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005184029A JP2005184029A (ja) | 2005-07-07 |
| JP2005184029A5 true JP2005184029A5 (enExample) | 2008-03-06 |
Family
ID=34792800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005041612A Pending JP2005184029A (ja) | 2005-02-18 | 2005-02-18 | 不揮発性記憶素子及び半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005184029A (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100672829B1 (ko) * | 2005-08-31 | 2007-01-22 | 삼성전자주식회사 | 전하 트랩 절연체의 제조 방법 및 소노스 타입의 비휘발성메모리 장치의 제조방법 |
| JP4730268B2 (ja) * | 2006-09-26 | 2011-07-20 | 株式会社デンソー | 不揮発性半導体記憶装置のデータ書き換え方法 |
| US8101989B2 (en) * | 2006-11-20 | 2012-01-24 | Macronix International Co., Ltd. | Charge trapping devices with field distribution layer over tunneling barrier |
| US8320191B2 (en) | 2007-08-30 | 2012-11-27 | Infineon Technologies Ag | Memory cell arrangement, method for controlling a memory cell, memory array and electronic device |
| US8068370B2 (en) | 2008-04-18 | 2011-11-29 | Macronix International Co., Ltd. | Floating gate memory device with interpoly charge trapping structure |
| US8987098B2 (en) | 2012-06-19 | 2015-03-24 | Macronix International Co., Ltd. | Damascene word line |
| US9379126B2 (en) | 2013-03-14 | 2016-06-28 | Macronix International Co., Ltd. | Damascene conductor for a 3D device |
| US9099538B2 (en) | 2013-09-17 | 2015-08-04 | Macronix International Co., Ltd. | Conductor with a plurality of vertical extensions for a 3D device |
| US9559113B2 (en) | 2014-05-01 | 2017-01-31 | Macronix International Co., Ltd. | SSL/GSL gate oxide in 3D vertical channel NAND |
-
2005
- 2005-02-18 JP JP2005041612A patent/JP2005184029A/ja active Pending
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