JP2003031693A - 半導体メモリ装置 - Google Patents
半導体メモリ装置Info
- Publication number
- JP2003031693A JP2003031693A JP2001220461A JP2001220461A JP2003031693A JP 2003031693 A JP2003031693 A JP 2003031693A JP 2001220461 A JP2001220461 A JP 2001220461A JP 2001220461 A JP2001220461 A JP 2001220461A JP 2003031693 A JP2003031693 A JP 2003031693A
- Authority
- JP
- Japan
- Prior art keywords
- channel body
- gate
- state
- misfet
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/20—DRAM devices comprising floating-body transistors, e.g. floating-body cells
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
- G11C29/021—Detection or location of defective auxiliary circuits, e.g. defective refresh counters in voltage or current generators
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
- G11C29/028—Detection or location of defective auxiliary circuits, e.g. defective refresh counters with adaption or trimming of parameters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/33—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor extending under the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/34—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the transistor being at least partially in a trench in the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/50—Peripheral circuit region structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/711—Insulated-gate field-effect transistors [IGFET] having floating bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C2029/1202—Word line control
Landscapes
- Semiconductor Memories (AREA)
- Dram (AREA)
- Non-Volatile Memory (AREA)
- Thin Film Transistor (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001220461A JP2003031693A (ja) | 2001-07-19 | 2001-07-19 | 半導体メモリ装置 |
| US09/964,851 US6617651B2 (en) | 2001-07-19 | 2001-09-28 | Semiconductor memory device |
| EP01123208A EP1280205A3 (en) | 2001-07-19 | 2001-10-01 | Semiconductor memory device |
| TW090126711A TW519751B (en) | 2001-07-19 | 2001-10-29 | Semiconductor memory device |
| KR10-2001-0069942A KR100440188B1 (ko) | 2001-07-19 | 2001-11-10 | 반도체 메모리 장치 |
| CN011435461A CN1217415C (zh) | 2001-07-19 | 2001-12-11 | 半导体存储器件 |
| US10/617,737 US6897531B2 (en) | 2001-07-19 | 2003-07-14 | Semiconductor memory device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001220461A JP2003031693A (ja) | 2001-07-19 | 2001-07-19 | 半導体メモリ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003031693A true JP2003031693A (ja) | 2003-01-31 |
| JP2003031693A5 JP2003031693A5 (https=) | 2005-07-21 |
Family
ID=19054277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001220461A Pending JP2003031693A (ja) | 2001-07-19 | 2001-07-19 | 半導体メモリ装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6617651B2 (https=) |
| EP (1) | EP1280205A3 (https=) |
| JP (1) | JP2003031693A (https=) |
| KR (1) | KR100440188B1 (https=) |
| CN (1) | CN1217415C (https=) |
| TW (1) | TW519751B (https=) |
Cited By (78)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004297048A (ja) * | 2003-03-11 | 2004-10-21 | Semiconductor Energy Lab Co Ltd | 集積回路、該集積回路を有する半導体表示装置及び集積回路の駆動方法 |
| US6825524B1 (en) | 2003-08-29 | 2004-11-30 | Kabushiki Kaisha Toshiba | Semiconductor integrated circuit device |
| JP2005026353A (ja) * | 2003-06-30 | 2005-01-27 | Toshiba Corp | 半導体記憶装置及び半導体集積回路 |
| US6873539B1 (en) | 2001-06-18 | 2005-03-29 | Pierre Fazan | Semiconductor device |
| US6912150B2 (en) | 2003-05-13 | 2005-06-28 | Lionel Portman | Reference current generator, and method of programming, adjusting and/or operating same |
| JP2005191451A (ja) * | 2003-12-26 | 2005-07-14 | Toshiba Corp | 半導体記憶装置 |
| US6982918B2 (en) | 2002-04-18 | 2006-01-03 | Pierre Fazan | Data storage device and refreshing method for use with such device |
| US7061050B2 (en) | 2002-04-18 | 2006-06-13 | Innovative Silicon S.A. | Semiconductor device utilizing both fully and partially depleted devices |
| JP2006173291A (ja) * | 2004-12-15 | 2006-06-29 | Elpida Memory Inc | 半導体チップ、その製造方法およびその用途 |
| US7085156B2 (en) | 2003-05-13 | 2006-08-01 | Innovative Silicon S.A. | Semiconductor memory device and method of operating same |
| US7085153B2 (en) | 2003-05-13 | 2006-08-01 | Innovative Silicon S.A. | Semiconductor memory cell, array, architecture and device, and method of operating same |
| US7154151B2 (en) | 2004-06-03 | 2006-12-26 | Kabushiki Kaisha Toshiba | Semiconductor device |
| JP2007018588A (ja) * | 2005-07-06 | 2007-01-25 | Toshiba Corp | 半導体記憶装置および半導体記憶装置の駆動方法 |
| US7177175B2 (en) | 2003-09-24 | 2007-02-13 | Innovative Silicon S.A. | Low power programming technique for a floating body memory transistor, memory cell, and memory array |
| JP2007505436A (ja) * | 2003-09-10 | 2007-03-08 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | 耐欠陥性及び耐故障性回路相互接続 |
| JP2007073754A (ja) * | 2005-09-07 | 2007-03-22 | Toshiba Corp | 半導体装置 |
| US7208799B2 (en) | 2003-11-21 | 2007-04-24 | Kabushiki Kaisha Toshiba | Floating body cell dynamic random access memory with optimized body geometry |
| US7251164B2 (en) | 2004-11-10 | 2007-07-31 | Innovative Silicon S.A. | Circuitry for and method of improving statistical distribution of integrated circuits |
| JP2007194259A (ja) * | 2006-01-17 | 2007-08-02 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2007242950A (ja) * | 2006-03-09 | 2007-09-20 | Toshiba Corp | 半導体記憶装置 |
| US7301838B2 (en) | 2004-12-13 | 2007-11-27 | Innovative Silicon S.A. | Sense amplifier circuitry and architecture to write data into and/or read from memory cells |
| US7301803B2 (en) | 2004-12-22 | 2007-11-27 | Innovative Silicon S.A. | Bipolar reading technique for a memory cell having an electrically floating body transistor |
| US7335934B2 (en) | 2003-07-22 | 2008-02-26 | Innovative Silicon S.A. | Integrated circuit device, and method of fabricating same |
| US7338862B2 (en) | 2005-03-31 | 2008-03-04 | Samsung Electronics Co., Ltd. | Methods of fabricating a single transistor floating body DRAM cell having recess channel transistor structure |
| US7355916B2 (en) | 2005-09-19 | 2008-04-08 | Innovative Silicon S.A. | Method and circuitry to generate a reference current for reading a memory cell, and device implementing same |
| JP2008160125A (ja) * | 2006-12-22 | 2008-07-10 | Intel Corp | 二重ゲートを有する浮遊ボディメモリセル |
| JP2008205322A (ja) * | 2007-02-22 | 2008-09-04 | Renesas Technology Corp | 半導体集積回路 |
| US7476939B2 (en) | 2004-11-04 | 2009-01-13 | Innovative Silicon Isi Sa | Memory cell having an electrically floating body transistor and programming technique therefor |
| US7492632B2 (en) | 2006-04-07 | 2009-02-17 | Innovative Silicon Isi Sa | Memory array having a programmable word length, and method of operating same |
| US7542340B2 (en) | 2006-07-11 | 2009-06-02 | Innovative Silicon Isi Sa | Integrated circuit including memory array having a segmented bit line architecture and method of controlling and/or operating same |
| US7542345B2 (en) | 2006-02-16 | 2009-06-02 | Innovative Silicon Isi Sa | Multi-bit memory cell having electrically floating body transistor, and method of programming and reading same |
| JP2009177080A (ja) * | 2008-01-28 | 2009-08-06 | Toshiba Corp | 半導体記憶装置 |
| JP2009531860A (ja) * | 2006-03-29 | 2009-09-03 | マイクロン テクノロジー, インク. | フローティングボディトランジスタ構造、半導体構造、および半導体構造の形成方法 |
| US7606066B2 (en) | 2005-09-07 | 2009-10-20 | Innovative Silicon Isi Sa | Memory cell and memory cell array having an electrically floating body transistor, and methods of operating same |
| US7606098B2 (en) | 2006-04-18 | 2009-10-20 | Innovative Silicon Isi Sa | Semiconductor memory array architecture with grouped memory cells, and method of controlling same |
| US7683430B2 (en) | 2005-12-19 | 2010-03-23 | Innovative Silicon Isi Sa | Electrically floating body memory cell and array, and method of operating or controlling same |
| JP2010080718A (ja) * | 2008-09-26 | 2010-04-08 | Sharp Corp | 半導体記憶装置 |
| US7696558B2 (en) | 2004-02-02 | 2010-04-13 | Kabushiki Kaisha Toshiba | Semiconductor memory device for storing data as state of majority carriers accumulated in channel body and method of manufacturing the same |
| KR101027702B1 (ko) * | 2010-10-04 | 2011-04-12 | 주식회사 하이닉스반도체 | 플로팅 바디 캐패시터를 구비한 반도체 메모리 소자 및 그 제조방법 |
| US7924630B2 (en) | 2008-10-15 | 2011-04-12 | Micron Technology, Inc. | Techniques for simultaneously driving a plurality of source lines |
| US7933142B2 (en) | 2006-05-02 | 2011-04-26 | Micron Technology, Inc. | Semiconductor memory cell and array using punch-through to program and read same |
| US7933140B2 (en) | 2008-10-02 | 2011-04-26 | Micron Technology, Inc. | Techniques for reducing a voltage swing |
| US7947543B2 (en) | 2008-09-25 | 2011-05-24 | Micron Technology, Inc. | Recessed gate silicon-on-insulator floating body device with self-aligned lateral isolation |
| US7957206B2 (en) | 2008-04-04 | 2011-06-07 | Micron Technology, Inc. | Read circuitry for an integrated circuit having memory cells and/or a memory cell array, and method of operating same |
| US8014195B2 (en) | 2008-02-06 | 2011-09-06 | Micron Technology, Inc. | Single transistor memory cell |
| JP2011205103A (ja) * | 2003-03-11 | 2011-10-13 | Semiconductor Energy Lab Co Ltd | 半導体表示装置 |
| US8064274B2 (en) | 2007-05-30 | 2011-11-22 | Micron Technology, Inc. | Integrated circuit having voltage generation circuitry for memory cell array, and method of operating and/or controlling same |
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| US8085594B2 (en) | 2007-06-01 | 2011-12-27 | Micron Technology, Inc. | Reading technique for memory cell with electrically floating body transistor |
| US8089801B2 (en) | 2008-01-23 | 2012-01-03 | Suzhou Oriental Semiconductor Co., Ltd. | Semiconductor memory device and method of forming the same |
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Families Citing this family (68)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6642133B2 (en) * | 2001-12-20 | 2003-11-04 | Intel Corporation | Silicon-on-insulator structure and method of reducing backside drain-induced barrier lowering |
| JP2003309182A (ja) * | 2002-04-17 | 2003-10-31 | Hitachi Ltd | 半導体装置の製造方法及び半導体装置 |
| US6865407B2 (en) * | 2002-07-11 | 2005-03-08 | Optical Sensors, Inc. | Calibration technique for non-invasive medical devices |
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| US6917078B2 (en) * | 2002-08-30 | 2005-07-12 | Micron Technology Inc. | One transistor SOI non-volatile random access memory cell |
| US7042027B2 (en) * | 2002-08-30 | 2006-05-09 | Micron Technology, Inc. | Gated lateral thyristor-based random access memory cell (GLTRAM) |
| US7710771B2 (en) * | 2002-11-20 | 2010-05-04 | The Regents Of The University Of California | Method and apparatus for capacitorless double-gate storage |
| JP4850387B2 (ja) * | 2002-12-09 | 2012-01-11 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| FR2857150A1 (fr) * | 2003-07-01 | 2005-01-07 | St Microelectronics Sa | Element integre de memoire dynamique a acces aleatoire, matrice et procede de fabrication de tels elements |
| US8125003B2 (en) * | 2003-07-02 | 2012-02-28 | Micron Technology, Inc. | High-performance one-transistor memory cell |
| US7119393B1 (en) * | 2003-07-28 | 2006-10-10 | Actel Corporation | Transistor having fully-depleted junctions to reduce capacitance and increase radiation immunity in an integrated circuit |
| JP4443886B2 (ja) * | 2003-09-30 | 2010-03-31 | 株式会社東芝 | 半導体記憶装置 |
| JP4044510B2 (ja) | 2003-10-30 | 2008-02-06 | 株式会社東芝 | 半導体集積回路装置 |
| US7002842B2 (en) * | 2003-11-26 | 2006-02-21 | Intel Corporation | Floating-body dynamic random access memory with purge line |
| JP4028499B2 (ja) * | 2004-03-01 | 2007-12-26 | 株式会社東芝 | 半導体記憶装置 |
| JP4002900B2 (ja) | 2004-03-02 | 2007-11-07 | 東芝マイクロエレクトロニクス株式会社 | 半導体記憶装置 |
| JP4110115B2 (ja) * | 2004-04-15 | 2008-07-02 | 株式会社東芝 | 半導体記憶装置 |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW519751B (en) | 2003-02-01 |
| EP1280205A2 (en) | 2003-01-29 |
| US6617651B2 (en) | 2003-09-09 |
| US20040026749A1 (en) | 2004-02-12 |
| US20030015757A1 (en) | 2003-01-23 |
| CN1399340A (zh) | 2003-02-26 |
| KR20030011512A (ko) | 2003-02-11 |
| CN1217415C (zh) | 2005-08-31 |
| US6897531B2 (en) | 2005-05-24 |
| KR100440188B1 (ko) | 2004-07-14 |
| EP1280205A3 (en) | 2009-10-07 |
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