IL130720A0 - Composition for oxide CMP - Google Patents

Composition for oxide CMP

Info

Publication number
IL130720A0
IL130720A0 IL13072097A IL13072097A IL130720A0 IL 130720 A0 IL130720 A0 IL 130720A0 IL 13072097 A IL13072097 A IL 13072097A IL 13072097 A IL13072097 A IL 13072097A IL 130720 A0 IL130720 A0 IL 130720A0
Authority
IL
Israel
Prior art keywords
composition
oxide cmp
semiconductors
preference
manufacture
Prior art date
Application number
IL13072097A
Other languages
English (en)
Original Assignee
Cabot Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Corp filed Critical Cabot Corp
Publication of IL130720A0 publication Critical patent/IL130720A0/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
IL13072097A 1996-12-30 1997-12-19 Composition for oxide CMP IL130720A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/774,488 US5759917A (en) 1996-12-30 1996-12-30 Composition for oxide CMP
PCT/US1997/023627 WO1998029515A1 (en) 1996-12-30 1997-12-19 Composition for oxide cmp

Publications (1)

Publication Number Publication Date
IL130720A0 true IL130720A0 (en) 2000-06-01

Family

ID=25101406

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13072097A IL130720A0 (en) 1996-12-30 1997-12-19 Composition for oxide CMP

Country Status (11)

Country Link
US (3) US5759917A (enExample)
EP (1) EP0963419B1 (enExample)
JP (2) JP2001507739A (enExample)
KR (1) KR20000069823A (enExample)
CN (1) CN1168794C (enExample)
AT (1) ATE264378T1 (enExample)
AU (1) AU5532898A (enExample)
DE (1) DE69728691T2 (enExample)
IL (1) IL130720A0 (enExample)
TW (1) TW505690B (enExample)
WO (1) WO1998029515A1 (enExample)

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