ES2171616T3 - Procedimiento para la produccion de un substrato semiconductor. - Google Patents

Procedimiento para la produccion de un substrato semiconductor.

Info

Publication number
ES2171616T3
ES2171616T3 ES96305134T ES96305134T ES2171616T3 ES 2171616 T3 ES2171616 T3 ES 2171616T3 ES 96305134 T ES96305134 T ES 96305134T ES 96305134 T ES96305134 T ES 96305134T ES 2171616 T3 ES2171616 T3 ES 2171616T3
Authority
ES
Spain
Prior art keywords
silicon
layer
substrate
porous
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96305134T
Other languages
English (en)
Inventor
Kenji Yamagata
Takao Yonehara
Nobuhiko Sato
Kiyofumi Sakaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of ES2171616T3 publication Critical patent/ES2171616T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76256—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques using silicon etch back techniques, e.g. BESOI, ELTRAN
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/0203—Making porous regions on the surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76243—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using silicon implanted buried insulating layers, e.g. oxide layers, i.e. SIMOX techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Weting (AREA)
  • Pressure Sensors (AREA)

Abstract

SE PROPORCIONA UN PROCESO PARA LA PRODUCCION DE UN SUSTRATO SEMICONDUCTOR EN EL QUE SE PROPORCIONA UN PRIMER SUSTRATO HECHO DE SILICIO QUE TIENE UNA CAPA DE SILICIO POROSO FORMADA SOBRE EL MISMO, HACIENDO POROSO EL SILICIO DEL SUBSTRATO Y UNA CAPA DE SILICIO MONOCRISTALINO NO POROSO, RECRECIDA DE MODO EPITAXIAL EN LA CAPA DE SILICIO POROSO, DESPUES SE LAMINA EL PRIMER SUSTRATO SOBRE UN SEGUNDO SUSTRATO EN UN ESTADO EN EL QUE AL MENOS UNA DE LAS CARAS DE LAMINACION DEL PRIMER Y DEL SEGUNDO SUSTRATO TENGA UNA CAPA DE OXIDO DE SILICIO Y LA CAPA DE SILICIO MONOCRISTALINO NO POROSO SE INTERPONGA ENTRE LOS SUSTRATOS LAMINADOS, Y FINALMENTE SE ELIMINA LA CAPA DE SILICIO POROSO MEDIANTE DECAPADO EN EL QUE LA CAPA DE SILICIO POROSO SE ELIMINA MEDIANTE UNA SOLUCION DE ATAQUE QUE DECAPE LA CAPA DE SILICIO MONOCRISTALINO NO POROSO Y LA CAPA DE OXIDO DE SILICIO A INDICES DE DECAPADO NO SUPERIORES A 10 ANGSTROMS POR MINUTO.
ES96305134T 1995-07-13 1996-07-12 Procedimiento para la produccion de un substrato semiconductor. Expired - Lifetime ES2171616T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17718995 1995-07-13

Publications (1)

Publication Number Publication Date
ES2171616T3 true ES2171616T3 (es) 2002-09-16

Family

ID=16026741

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96305134T Expired - Lifetime ES2171616T3 (es) 1995-07-13 1996-07-12 Procedimiento para la produccion de un substrato semiconductor.

Country Status (9)

Country Link
US (1) US6103598A (es)
EP (1) EP0753886B1 (es)
KR (1) KR100249456B1 (es)
CN (1) CN1058354C (es)
DE (1) DE69619602T2 (es)
ES (1) ES2171616T3 (es)
MY (1) MY113920A (es)
SG (1) SG66317A1 (es)
TW (1) TW317645B (es)

Families Citing this family (40)

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Publication number Priority date Publication date Assignee Title
US7148119B1 (en) 1994-03-10 2006-12-12 Canon Kabushiki Kaisha Process for production of semiconductor substrate
US20030087503A1 (en) * 1994-03-10 2003-05-08 Canon Kabushiki Kaisha Process for production of semiconductor substrate
JP3293736B2 (ja) * 1996-02-28 2002-06-17 キヤノン株式会社 半導体基板の作製方法および貼り合わせ基体
KR970052020A (ko) * 1995-12-30 1997-07-29 김주용 에스 오 아이 기판 제조방법
KR100304161B1 (ko) 1996-12-18 2001-11-30 미다라이 후지오 반도체부재의제조방법
SG71094A1 (en) * 1997-03-26 2000-03-21 Canon Kk Thin film formation using laser beam heating to separate layers
JP3847935B2 (ja) * 1998-01-09 2006-11-22 キヤノン株式会社 多孔質領域の除去方法及び半導体基体の製造方法
JP3218564B2 (ja) * 1998-01-14 2001-10-15 キヤノン株式会社 多孔質領域の除去方法及び半導体基体の製造方法
US6376285B1 (en) * 1998-05-28 2002-04-23 Texas Instruments Incorporated Annealed porous silicon with epitaxial layer for SOI
US20020106874A1 (en) * 1998-07-03 2002-08-08 Masaaki Iwane Crystal growth process, semiconductor device, and its production process
JP2000173976A (ja) * 1998-12-02 2000-06-23 Mitsubishi Electric Corp 半導体装置の製造方法
JP2000223682A (ja) * 1999-02-02 2000-08-11 Canon Inc 基体の処理方法及び半導体基板の製造方法
US6410436B2 (en) * 1999-03-26 2002-06-25 Canon Kabushiki Kaisha Method of cleaning porous body, and process for producing porous body, non-porous film or bonded substrate
US8507361B2 (en) * 2000-11-27 2013-08-13 Soitec Fabrication of substrates with a useful layer of monocrystalline semiconductor material
US6699770B2 (en) * 2001-03-01 2004-03-02 John Tarje Torvik Method of making a hybride substrate having a thin silicon carbide membrane layer
DE10128719A1 (de) * 2001-06-13 2002-12-19 Muehlbauer Ernst Gmbh & Co Kg Zahnärztlicher Abformlöffel
US7535100B2 (en) * 2002-07-12 2009-05-19 The United States Of America As Represented By The Secretary Of The Navy Wafer bonding of thinned electronic materials and circuits to high performance substrates
JP2004103600A (ja) * 2002-09-04 2004-04-02 Canon Inc 基板及びその製造方法
EP1396883A3 (en) * 2002-09-04 2005-11-30 Canon Kabushiki Kaisha Substrate and manufacturing method therefor
JP2004103855A (ja) * 2002-09-10 2004-04-02 Canon Inc 基板及びその製造方法
JP2004103946A (ja) * 2002-09-11 2004-04-02 Canon Inc 基板及びその製造方法
DE60310026D1 (de) * 2003-01-24 2007-01-11 St Microelectronics Srl Pipeline Analog-Digital-Wandler mit Korrektion von Verstärkungsfehlern zwischen den Stufen
US7198974B2 (en) * 2003-03-05 2007-04-03 Micron Technology, Inc. Micro-mechanically strained semiconductor film
US7220656B2 (en) * 2003-04-29 2007-05-22 Micron Technology, Inc. Strained semiconductor by wafer bonding with misorientation
US7115480B2 (en) * 2003-05-07 2006-10-03 Micron Technology, Inc. Micromechanical strained semiconductor by wafer bonding
US7662701B2 (en) 2003-05-21 2010-02-16 Micron Technology, Inc. Gettering of silicon on insulator using relaxed silicon germanium epitaxial proximity layers
US7273788B2 (en) 2003-05-21 2007-09-25 Micron Technology, Inc. Ultra-thin semiconductors bonded on glass substrates
US7008854B2 (en) * 2003-05-21 2006-03-07 Micron Technology, Inc. Silicon oxycarbide substrates for bonded silicon on insulator
US7439158B2 (en) 2003-07-21 2008-10-21 Micron Technology, Inc. Strained semiconductor by full wafer bonding
US7153753B2 (en) 2003-08-05 2006-12-26 Micron Technology, Inc. Strained Si/SiGe/SOI islands and processes of making same
US20050132332A1 (en) * 2003-12-12 2005-06-16 Abhay Sathe Multi-location coordinated test apparatus
US7354863B2 (en) * 2004-03-19 2008-04-08 Micron Technology, Inc. Methods of selectively removing silicon
US7544584B2 (en) 2006-02-16 2009-06-09 Micron Technology, Inc. Localized compressive strained semiconductor
EP1926132A1 (en) * 2006-11-23 2008-05-28 S.O.I.Tec Silicon on Insulator Technologies Chromium-free etching solution for Si-substrates and SiGe-substrates, method for revealing defects using the etching solution and process for treating Si-substrates and SiGe-substrates using the etching solution
CN100440489C (zh) * 2006-11-28 2008-12-03 北京大学 一种多孔硅片及其制备方法
RU2461090C1 (ru) * 2010-12-23 2012-09-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Кабардино-Балкарский государственный университет им. Х.М. Бербекова" (КБГУ) Способ изготовления полупроводниковой структуры
CN102169552A (zh) * 2011-01-28 2011-08-31 上海集成电路研发中心有限公司 射频识别标签及其制造方法
US20190131454A1 (en) * 2017-11-01 2019-05-02 Qualcomm Incorporated Semiconductor device with strained silicon layers on porous silicon
TWI683351B (zh) * 2017-12-14 2020-01-21 新唐科技股份有限公司 半導體裝置及其形成方法
WO2020245423A1 (en) * 2019-06-06 2020-12-10 Iqe Plc Tunable stress compensation in layered structures

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2660064B2 (ja) * 1988-10-02 1997-10-08 キヤノン株式会社 結晶物品及びその形成方法
US5190613A (en) * 1988-10-02 1993-03-02 Canon Kabushiki Kaisha Method for forming crystals
US5290712A (en) * 1989-03-31 1994-03-01 Canon Kabushiki Kaisha Process for forming crystalline semiconductor film
JPH03215391A (ja) * 1989-06-26 1991-09-20 Canon Inc 結晶の成長方法
US5278092A (en) * 1989-08-07 1994-01-11 Canon Kabushiki Kaisha Method of forming crystal semiconductor film
US5278093A (en) * 1989-09-23 1994-01-11 Canon Kabushiki Kaisha Method for forming semiconductor thin film
JP2695488B2 (ja) * 1989-10-09 1997-12-24 キヤノン株式会社 結晶の成長方法
US5363793A (en) * 1990-04-06 1994-11-15 Canon Kabushiki Kaisha Method for forming crystals
ATE259098T1 (de) * 1990-08-03 2004-02-15 Canon Kk Verfahren zur herstellung eines soi-substrats
JP2608351B2 (ja) * 1990-08-03 1997-05-07 キヤノン株式会社 半導体部材及び半導体部材の製造方法
US5403751A (en) * 1990-11-29 1995-04-04 Canon Kabushiki Kaisha Process for producing a thin silicon solar cell
US5403771A (en) * 1990-12-26 1995-04-04 Canon Kabushiki Kaisha Process for producing a solar cell by means of epitaxial growth process
JP3347354B2 (ja) * 1991-02-15 2002-11-20 キヤノン株式会社 エッチング方法および半導体基材の作製方法
SG93197A1 (en) * 1991-02-15 2002-12-17 Canon Kk Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution
TW211621B (es) * 1991-07-31 1993-08-21 Canon Kk
EP1043768B1 (en) * 1992-01-30 2004-09-08 Canon Kabushiki Kaisha Process for producing semiconductor substrates
JP3261685B2 (ja) * 1992-01-31 2002-03-04 キヤノン株式会社 半導体素子基体及びその作製方法

Also Published As

Publication number Publication date
CN1058354C (zh) 2000-11-08
TW317645B (es) 1997-10-11
DE69619602D1 (de) 2002-04-11
EP0753886A1 (en) 1997-01-15
DE69619602T2 (de) 2002-08-08
SG66317A1 (en) 1999-07-20
US6103598A (en) 2000-08-15
EP0753886B1 (en) 2002-03-06
CN1149758A (zh) 1997-05-14
KR100249456B1 (ko) 2000-03-15
MY113920A (en) 2002-06-29

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