EP1979511A2 - Verfahren und vorrichtung zur beschichtung von substratoberflächen - Google Patents
Verfahren und vorrichtung zur beschichtung von substratoberflächenInfo
- Publication number
- EP1979511A2 EP1979511A2 EP07703047A EP07703047A EP1979511A2 EP 1979511 A2 EP1979511 A2 EP 1979511A2 EP 07703047 A EP07703047 A EP 07703047A EP 07703047 A EP07703047 A EP 07703047A EP 1979511 A2 EP1979511 A2 EP 1979511A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrolyte
- density
- coating
- bath
- density value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 64
- 238000000576 coating method Methods 0.000 title claims abstract description 45
- 239000011248 coating agent Substances 0.000 title claims abstract description 37
- 239000000758 substrate Substances 0.000 title claims abstract description 27
- 239000000203 mixture Substances 0.000 claims abstract description 33
- 239000003792 electrolyte Substances 0.000 claims description 139
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 26
- 238000000151 deposition Methods 0.000 claims description 24
- 230000008569 process Effects 0.000 claims description 17
- 229910052759 nickel Inorganic materials 0.000 claims description 13
- 238000003287 bathing Methods 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 3
- 230000009469 supplementation Effects 0.000 claims description 3
- 238000004064 recycling Methods 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 abstract description 65
- 239000002184 metal Substances 0.000 abstract description 65
- 150000003839 salts Chemical class 0.000 description 35
- 230000008021 deposition Effects 0.000 description 20
- 150000001450 anions Chemical class 0.000 description 18
- 239000008139 complexing agent Substances 0.000 description 14
- 239000003381 stabilizer Substances 0.000 description 12
- 150000002739 metals Chemical class 0.000 description 10
- 150000001242 acetic acid derivatives Chemical class 0.000 description 9
- 239000003638 chemical reducing agent Substances 0.000 description 9
- 229910052698 phosphorus Inorganic materials 0.000 description 8
- 150000004675 formic acid derivatives Chemical class 0.000 description 7
- 150000003891 oxalate salts Chemical class 0.000 description 7
- XBDQKXXYIPTUBI-UHFFFAOYSA-N Propionic acid Chemical class CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 6
- 150000001860 citric acid derivatives Chemical class 0.000 description 6
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 6
- 229910021645 metal ion Inorganic materials 0.000 description 6
- 239000011574 phosphorus Substances 0.000 description 6
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 150000001735 carboxylic acids Chemical class 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 150000002823 nitrates Chemical class 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 4
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- HCPOCMMGKBZWSJ-UHFFFAOYSA-N ethyl 3-hydrazinyl-3-oxopropanoate Chemical compound CCOC(=O)CC(=O)NN HCPOCMMGKBZWSJ-UHFFFAOYSA-N 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- WINXNKPZLFISPD-UHFFFAOYSA-M Saccharin sodium Chemical compound [Na+].C1=CC=C2C(=O)[N-]S(=O)(=O)C2=C1 WINXNKPZLFISPD-UHFFFAOYSA-M 0.000 description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 150000001768 cations Chemical class 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000000909 electrodialysis Methods 0.000 description 3
- 125000000623 heterocyclic group Chemical group 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 235000014655 lactic acid Nutrition 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000000901 saccharin and its Na,K and Ca salt Substances 0.000 description 3
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 239000011593 sulfur Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 229940072107 ascorbate Drugs 0.000 description 2
- 235000010323 ascorbic acid Nutrition 0.000 description 2
- 239000011668 ascorbic acid Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 229910001960 metal nitrate Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000012958 reprocessing Methods 0.000 description 2
- CVHZOJJKTDOEJC-UHFFFAOYSA-N saccharin Chemical compound C1=CC=C2C(=O)NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-N 0.000 description 2
- 229940081974 saccharin Drugs 0.000 description 2
- 235000019204 saccharin Nutrition 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 150000003464 sulfur compounds Chemical class 0.000 description 2
- 230000000153 supplemental effect Effects 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- CVHZOJJKTDOEJC-UHFFFAOYSA-M 1,1-dioxo-1,2-benzothiazol-3-olate Chemical compound C1=CC=C2C([O-])=NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-M 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- BDAGIHXWWSANSR-UHFFFAOYSA-M Formate Chemical compound [O-]C=O BDAGIHXWWSANSR-UHFFFAOYSA-M 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001453 nickel ion Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- -1 sodium carbon ions Chemical class 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 150000003585 thioureas Chemical class 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
- C25D21/14—Controlled addition of electrolyte components
Definitions
- the present invention relates to a method and a device for coating substrate surfaces with a metallic or oxidic layer in a coating bath.
- a substrate surface is to be provided with a metallic coating
- the substrate to be coated is brought into contact with a treatment solution which contains the metal to be deposited in the form of its cations.
- the cations in solution can be deposited as a metallic layer on the substrate surface.
- the reduction can take place with the aid of a voltage applied between the substrate and a counterelectrode or else by means of reducing agents present in the solution. Accordingly, these are galvanic (electrochemical) or autocatalytic (electroless) brushing methods.
- the treatment solutions which are generally referred to as electrolytes, comprise further additives which, in particular, have the properties of the deposited layers, such as, for example, B. influence the compressive residual stress or hardness.
- the said method has in common that the electrolytes used change their composition during the treatment process.
- the electrolyte is depleted by the ions of the metal to be deposited.
- corresponding metal ion releasing components must be added to the electrolyte.
- a measure of the performance of an electrolyte is the number of so-called metal turn-overs (MTO).
- MTO metal turn-overs
- This object is achieved with regard to the method by a method for coating substrate surfaces with a metallic or oxidic layer in a coating bath, wherein the bath has at least one component whose concentration changes in the course of the coating process and which consequently leads to the preservation of the coating Bath quality added or removed, characterized in that the addition and / or removal of the electrolyte component takes place in dependence on the density of the bath composition.
- the basic idea of the present invention to maintain the density of the electrolyte composition in the equilibrium state, that is, in a state in which optimum coating results are obtained, by suitable means, so that the density does not further increase in the further course of the process.
- this is achieved by determining the density of the electrolyte, comparing the determined density value with a stored nominal density value for an optimum electrolyte composition, ie an electrolyte composition in the equilibrium state, and at least one component of the electrolyte as a function of the deviation of the determined density value from the nominal density value removed and / or supplemented.
- this can be done by continuously withdrawing from the coating bath a tunable amount of the electrolyte composition from the electrolyte, thereby artificially depriving electrolyte.
- the method according to the invention deposits layers while the electrolyte composition remains the same, resulting in consistent coating results and layer properties, such as consistently high compressive residual stress, over the entire period of use of the electrolyte.
- the determination of the density of the electrolyte composition may be continuous or discontinuous during the coating process.
- the determined density value of the coating bath is compared according to the invention with a setpoint density value and the supplementation and / or removal takes place as a function of the deviation of the determined density value from the setpoint density value.
- the setpoint density value can be stored in a data storage unit.
- the setpoint density value can then be compared by means of a computer unit with the determined density value of the coating bath.
- the computer unit determines the deviation of the current density value of the coating bath from the setpoint density value and determines the amount of electrolyte composition to be taken and / or supplemented or at least one component thereof.
- the computer unit controls an electronically controllable removal and / or supplemental device for removing or supplementing the electrolyte composition or at least one component of the electrolyte composition, with the proviso to adjust the density of the coating bath to the stored nominal density value.
- the withdrawn amount of electrolyte or electrolyte component can be collected and fed to a central reprocessing.
- electrolytes can be used in the equilibrium state, which can be held in this by means of the method according to the invention.
- the user immediately has an electrolyte available, which immediately, ie without start-up phase, delivers consistent coating results.
- the inventive method can be used both for the galvanic and for the autocatalytic deposition of metal or metal alloy layers on surfaces of a substrate.
- the method according to the invention can also be used in treatment solutions for forming an oxide layer on the surface of a metallic substrate.
- These treatment solutions can also be optimized by controlling the density of the treatment solution. For example, the anodizing of aluminum surfaces is mentioned here.
- a device for the continuous removal and / or addition of at least one electrolyte component of an electrolyte for coating substrate surfaces with a metallic or oxidic layer which comprises a device for removing and / or adding at least one electrolyte component Device for determining the density of the electrolyte and a computer unit, wherein the means for removing and / or adding the at least one electrolyte component is controlled by the computer unit, wherein the computer unit determined by the means for determining the density of the electrolyte density value with a stored desired density value compares with the proviso that the density of the Electrolytes the predetermined and stored in the data storage device setpoint density is adjusted by adding and / or removing at least one component of the electrolyte.
- the means for adding and / or removing may advantageously be a pump or a valve.
- the device for determining the density may be a pycnometer, a spindle, a density balance, a bending vibrator or any other suitable device for density determination.
- the density can be determined indirectly via the calculation index by means of a refractometer.
- the device according to the invention can comprise further devices for determining bathing properties such as temperature, conductivity, pH, specific extinction or absorption, turbidity, wherein the values determined by means of this device can also be fed to the computer unit and compared with desired values stored in the storage device can be, with the computer unit can further control the determined bathing properties influencing facilities such as heating and cooling systems, filter systems or regeneration systems, with the proviso to adjust the bathing properties to the stored setpoints.
- bathing properties such as temperature, conductivity, pH, specific extinction or absorption, turbidity
- the device according to the invention can be integrated into existing coating systems.
- the amount of electrolyte removed by means of the device or at least one component of the electrolyte can be in. suitable facilities are collected and fed to a central reprocessing.
- suitable devices may be, for example, reusable containers, tank systems and the like.
- the method according to the invention and the device according to the invention can be combined with further methods or devices for improving the duration of use of electrolyte compositions.
- the process according to the invention can be combined with the process for electroless deposition of metals known from European patent application EP 1 413 646 A2, in which metal-base salts are used whose anions are volatile.
- the increase in density occurring during the lifetime of an electrolyte is reduced by the escape of the anions from the electrolyte composition, which can be further optimized in combination with the method according to the invention and the device according to the invention.
- Such an electrolyte for the electroless deposition of metal layers contains a metal-base salt, a reducing agent, a complexing agent, an accelerator and a stabilizer, wherein the electrolyte comprises, as metal-base salt, a metal salt whose anions are volatile, preferably in a concentration of 0.01 to 0.3 mol / l.
- This metal salt whose anions are volatile is preferably at least one salt selected from the group consisting of metal acetate, metal formate, metal nitrate, metal oxalate, metal propionate, metal citrate and metal ascorbate, preferably metal acetate.
- the life of the electrolyte can be extended at high deposition rates and uniformly deposited layers with constant layer properties. At the same time, layers with compressive residual stress are deposited.
- Such an electrolyte is basically composed of one or more metal base salts, preferably metal acetate and a reducing agent, preferably sodium hypophosphite. Furthermore, the electrolyte Various additives, such as complexing agents, accelerators and stabilizers, which are advantageously used in acidic electrolytes for the electroless deposition of nickel added. Since the deposition rate is significantly higher in an acidic medium, an acid is preferably added to the electrolyte as a complexing agent.
- carboxylic acids and / or polycarboxylic acids turns out to be particularly advantageous since, on the one hand, it determines the advantageous solubility of the metal salts and the controlled control of the free metal ions and, on the other hand, prescribes the adjustment of the pH required for the process due to their acid strength . facilitated.
- the pH of the electrolyte is advantageously in the range of 4.0 to 5.2.
- the dissolved metal is particularly advantageously complexed by the use of carboxylic acids and / or polycarboxylic acids whose salts and / or derivatives, preferably hydroxy (poly) carboxylic acids, particularly preferably 2-hydroxypropanoic acid and / or propanedioic acid. At the same time, these compounds serve as activators and as pH buffers and contribute significantly to the stability of the bath by their advantageous properties.
- a sulfur-containing heterocycle is added to the electrolyte as accelerator.
- the sulfur-containing heterocycle used is preferably saccharin, its salts and / or derivatives, particularly preferably sodium saccharin.
- the addition of saccharinate, even in higher concentrations, does not adversely affect the corrosion resistance of the deposited metal layers.
- a stabilizer is added to the electrolyte in order to counteract a spontaneous decomposition of the metallizing bath.
- a stabilizer may be, for example, metals, halogen compounds and / or sulfur compounds, such as thioureas.
- metals such as thioureas.
- the use of metals as stabilizers has proved to be particularly advantageous.
- These salts are preferably one or more of the salts from the group consisting of acetates, formates, nitrates, oxalates, propionates, citrates and ascorbinates, more preferably acetates.
- the metal layers should have, besides phosphorus further components, such as, for example, additional metals, preferably cobalt, and / or finely dispersed particles are incorporated into the layer.
- additional components such as salts, preferably potassium iodide.
- the quality of the metallization bath is improved and the life is considerably extended, up to an unlimited lifetime of the metallization bath.
- This has the advantage that not only high deposition rates are achieved by the use of the method according to the invention, but also that the deposited by the process layers are uniform and high quality, have a very good adhesion and are consistently free of pores and cracks.
- the metallization of the surface is improved, especially by more complex substrates.
- the method proposed by the invention .. is in a preferred embodiment by the composition of the electrolyte in combination with the addition and / or removal of at least one bath component depending on the density. In this embodiment, therefore, it is advantageously economical and more environmentally friendly than the conventional methods known from the prior art.
- An electrolyte as described above for the preferred implementation of the method according to the invention, may, for example in the case of nickel plating, have essentially the following composition:
- metal salts whose anions are volatile are advantageously used as metal receivers.
- Preferred metal salts whose anions are volatile are one or more salts from the group consisting of metal acetates, metal formates, metal nitrates, metal oxalates, metal propionates, metal citrates and metal ascorbinates, more preferably exclusively metal acetate.
- the electrolyte according to the invention thus operates in a pH range of 4.0 to 5.2 throughout the deposition process, preferably 4.3 to 4.8, without having to be additionally added larger amounts of alkaline media. Due to the extremely advantageous pH self-regulation can be dispensed with during the process on a continuous pH control and alkaline additives.
- the concentration of the metal base salts is based on nickel at 0.04 to 0.16 mol / l, preferably 0.048 to 0.105 mol / l, wherein the content of metal between 0.068 to 0.102 mol / l, preferably 0.085 mol / l.
- the reducing agent used is preferably sodium hypophosphite having a concentration of from 25 to 65 g / l.
- the complexing agents used are carboxylic acids and / or polycarboxylic acids, their salts and / or derivatives, preferably hydroxy (poly) carboxylic acids, particularly preferably 2-hydroxypropanoic acid and / or propanedioic acid.
- the dissolved nickel is particularly advantageously complexed, so that the deposition rate can be maintained in a corresponding interval of 7 to 14 .mu.m / h, preferably 9 to 12 .mu.m / h with continuous addition of such complexing agents.
- the concentration of complexing agents in the base electrolyte is between 25 and 70 g / l, preferably 30 to 65 g / l.
- the concentration of the accelerator preferably using a sulfur-containing heterocycle, more preferably saccharin, its salts and / or derivatives, most preferably sodium saccharin, is from 1 to 25 g / l, preferably from 2.5 to 22 g / l.
- Stabilizers which may be used are halogen compound and / or sulfur compound, preferably thiourea. Particularly advantageous, however, is the use of metals, preferably lead, bismuth, zinc and / or tin, particularly preferably in the form of salts whose anions are volatile. These salts are preferably selected from the group consisting of acetates, formates, nitrates, oxalates, propionates, citrates and ascorbinates.
- the nitrates of the metals used as stabilizers are advantageously from 0.1 to 2 mg / l, preferably from 0.3 to 1 mg / l.
- further constituents for example potassium iodide, in a concentration of 0 to 3 g / l may also be added to the base electrolyte.
- this basic electrolyte a variety of substrates are introduced and galvanized. To support the lifetime and the stability of the electrolyte, it can be regenerated during the deposition process by means of electrodialysis and / or ion exchange resins. Likewise, supplemental solutions (as exemplified below) may be added to the electrolyte during the deposition process. These replenisher solutions are specially designed to control the individual contents of the basic components and added to the electrolyte in different amounts.
- a first replenisher solution includes, for example, the following composition:
- the same substances as in the base electrolyte are advantageously used. This results in another very important advantage of the method according to the invention. Since the same substances are used continuously and there are almost no impurities and precipitations, even the compounds from the sink can be returned to the electrolyte.
- the process of the invention thus has a decided material cycle, which makes the process thus more economical and environmentally conscious.
- the complexing agent content and the content of alkaline buffer are chosen so that the total content of the complexing agents in the electrolyte is 70 to 90 g / l.
- the content of the accelerator in the electrolyte is controlled so that, for example, in the case of a nickel electrolyte in the use of Sodium saccharinate as accelerator per gram of deposited nickel between 0.100 and 0.200 g, preferably 0.150 g are added.
- the following composition can be used:
- the complexing agent of the second replenisher solution may be the same as in the first replenisher or, if necessary, another.
- a hydroxycarboxylic acid for example 2-hydroxypropanoic acid of 60 g / l
- propanedioic acid with a content of 0.5 g / l
- the content of propanedioic acid is then increased by 0.005 to 0.015 g / g of deposited nickel.
- metal sulfate in addition to the metal base salts described so far, a deposition of adherent metal layers with compressive residual stresses at a throughput of at least 14 MTO guaranteed.
- metal-base salts whose anion has at least one carbon atom and which preferably originate from the group of acetates, formates, oxalates, propionates, citrates and ascorbinates, the lifetime of the electrolyte continues to increase.
- the already mentioned compressive residual stress is an extremely important and very desirable layer property. It positively influences the bending cycle stress and increases the ductility. So z.
- metal layers with a ductility of> 0.5% are deposited.
- the residual compressive stresses have a positive effect on the corrosion resistance of the metal-phosphorus layers.
- other components such as additional metals, preferably copper, and / or finely disperse particles, such as finely dispersed fluorine-containing thermoset or thermosetting plastic, may be added to the electrolyte as well as the replenisher, which in the deposited layers additional hardness, dry lubricating effects and / or achieve other properties.
- Such an electrolyte has a self-regulating pH range of 4.3 to 4.8 and allows deposition rates of 8 to 12 ⁇ m / hr.
- the internal stress of the deposited layers is -10 to - 40 N / mm 2 .
- the method and apparatus of the present invention can also be advantageously combined with electrodialysis methods and apparatus or other means of regenerating coating compositions.
- the electrolyte according to the invention can be regenerated, for example, by means of electrodialytic processes.
- metal salts whose anions are volatile the separation effect of the electrodialysis plant is significantly increased.
- the number of electrolysis cells for the separation of orthophosphite ions can be reduced with the same separation efficiency.
- the withdrawn and collected amounts of electrolyte in the case of a hypophosphite as the reducing agent having electrolyte in a central recycling of a phosphate recovery are supplied.
- the coating bath has at least one component whose concentration changes in the course of the coating process and which must be supplemented or removed in order to maintain the bath quality, wherein the supplementation and / or removal the component is a function of the density of the bath composition and the bath composition comprises a metal base salt, a reducing agent, a complexing agent, an accelerator and a stabilizer, wherein the bath composition comprises as metal base salt a metal salt whose anions are volatile and in an initial concentration of 0.01 to 0.30 mol / 1 is present.
- Fig. 1 shows the density profile of an electrolyte as a function of the operating time.
- Fig. 3 shows the loss of material in electrolytes at constant operating mode.
- FIG. 4 shows a process diagram of a device according to the invention.
- Fig. 1 the profile of the density of different electrolyte compositions depending on the operating time of the electrolyte and the removed Amount of electrolyte reflected.
- Curve No. 1 shows the density profile of an electrolyte known from the prior art for the deposition of nickel layers.
- Curve No. 2 shows the density profile of an electrolyte known from the prior art for depositing a nickel layer at a set removal quantity of electrolyte of 3.3%.
- Curve No. 3 shows the density profile of an electrolyte, as known from the European patent application EP 1 413 646, in which the metal base salt of the electrolyte composition used is metal salts whose anions are volatile.
- Curve No. 4 shows the electrolyte described in Curve No. 3 at a 3.3% electrolyte removal set.
- Curve No. 5 shows the electrolyte described for Curve No. 3 at a set removal amount of electrolyte of 10%.
- Fig. 3 shows the relative loss of material in the electrolyte per MTO compared to the electrolyte age in the equilibrium state.
- the left borderline represents a conventional electrolyte system.
- the right border corresponds to an electrolyte system according to EP 1 413 646 A2.
- FIG. 4 shows a process diagram of a device according to the invention.
- the individual components required for the production of the electrolyte are transferred into the electrolyte bath 2 by means of suitable conveying media, such as pumps.
- the electrolyte composition in the electrolyte bath 2 is analyzed either directly in the electrolyte bath or in an external control module 3 supplied with a partial flow from the electrolyte bath, with regard to its chemophysical properties such as density, pH, temperature, conductivity or metal content.
- Both the component container 1 A to 1 F and the electrolyte bath and the receptacle for withdrawn electrolyte advantageously have level sensors that register exceeding or falling below filling limits and output appropriate messages and / or initiate appropriate process steps to maintain the trouble-free coating operation.
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- Materials Engineering (AREA)
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- Electrochemistry (AREA)
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- Automation & Control Theory (AREA)
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Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL07703047T PL1979511T3 (pl) | 2006-02-02 | 2007-01-26 | Sposób powlekania powierzchni substratu |
EP07703047.6A EP1979511B1 (de) | 2006-02-02 | 2007-01-26 | Verfahren zur beschichtung von substratoberflächen |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06002099A EP1816237A1 (de) | 2006-02-02 | 2006-02-02 | Verfahren und Vorrichtung zur Beschichtung von Substratoberflächen |
EP07703047.6A EP1979511B1 (de) | 2006-02-02 | 2007-01-26 | Verfahren zur beschichtung von substratoberflächen |
PCT/EP2007/000658 WO2007088008A2 (de) | 2006-02-02 | 2007-01-26 | Verfahren und vorrichtung zur beschichtung von substratoberflächen |
Publications (2)
Publication Number | Publication Date |
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EP1979511A2 true EP1979511A2 (de) | 2008-10-15 |
EP1979511B1 EP1979511B1 (de) | 2018-10-31 |
Family
ID=36576014
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06002099A Withdrawn EP1816237A1 (de) | 2006-02-02 | 2006-02-02 | Verfahren und Vorrichtung zur Beschichtung von Substratoberflächen |
EP07703047.6A Active EP1979511B1 (de) | 2006-02-02 | 2007-01-26 | Verfahren zur beschichtung von substratoberflächen |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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EP06002099A Withdrawn EP1816237A1 (de) | 2006-02-02 | 2006-02-02 | Verfahren und Vorrichtung zur Beschichtung von Substratoberflächen |
Country Status (8)
Country | Link |
---|---|
US (1) | US20090324804A1 (de) |
EP (2) | EP1816237A1 (de) |
JP (1) | JP5695295B2 (de) |
KR (1) | KR101466995B1 (de) |
CN (1) | CN101437986B (de) |
ES (1) | ES2706874T3 (de) |
PL (1) | PL1979511T3 (de) |
WO (1) | WO2007088008A2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2449148B1 (de) * | 2009-07-03 | 2019-01-02 | MacDermid Enthone Inc. | Beta-aminosäure mit elektrolyt und verfahren zur ablagerung einer metallschicht |
US20130087463A1 (en) * | 2011-10-05 | 2013-04-11 | Globalfoundries Inc. | Method and System for Metal Deposition in Semiconductor Processing |
KR101502795B1 (ko) * | 2012-03-15 | 2015-03-13 | 김종호 | 포물선의 전체 또는 일부의 굴절경로를 갖는 진주광택 안료 입자 및 이의 제조방법 |
US9708693B2 (en) * | 2014-06-03 | 2017-07-18 | Macdermid Acumen, Inc. | High phosphorus electroless nickel |
DE102018008312A1 (de) | 2018-10-22 | 2020-04-23 | RIAG Oberflächentechnik AG | Verfahren zur Beschichtung von Substratoberflächen, Vorrichtung mit Beschichtungsbad, Dichtemesseinrichtung, Entnahmeeinrichtung, Zugabeeinrichtungen und Steuerung |
CN113755937B (zh) * | 2021-09-09 | 2022-12-09 | 中国航发南方工业有限公司 | 电镀铂槽液的维护方法 |
CN114351231B (zh) * | 2022-01-04 | 2022-11-25 | 深圳技术大学 | 电解液中金属离子浓度的测量和监控的设备和方法 |
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US3035898A (en) * | 1957-12-30 | 1962-05-22 | Int Minerals & Chem Corp | Method for preparing potassium phosphates |
US3243362A (en) * | 1963-05-02 | 1966-03-29 | Aluminum Co Of America | Method of anodizing aluminum |
US3637473A (en) * | 1969-07-03 | 1972-01-25 | Engelhard Min & Chem | Method for electroplating gold |
US3765436A (en) * | 1970-08-22 | 1973-10-16 | Volkswagenwerk Ag | Control device for two metallic salt components in electroplating baths |
CH610597A5 (en) * | 1972-06-29 | 1979-04-30 | Siemens Ag | Process for electroless nickel plating of surfaces comprising metals, metal alloys, plastics and ceramics |
JPS5324897B2 (de) * | 1972-09-27 | 1978-07-24 | ||
AT322940B (de) * | 1972-10-31 | 1975-06-10 | Siemens Ag | Bäder zum stromlosen vernickeln von metall, kunststoff und keramik |
US4152164A (en) * | 1976-04-26 | 1979-05-01 | Michael Gulla | Electroless nickel plating |
DE2744426C3 (de) * | 1977-10-03 | 1980-07-03 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum stromlosen Vernickeln von Oberflächen aus Metallen, Kunststoff und Keramik |
JPS5952700B2 (ja) * | 1979-11-14 | 1984-12-21 | 上村工業株式会社 | 無電解めつき制御方法及びその装置 |
US4353933A (en) * | 1979-11-14 | 1982-10-12 | C. Uyemura & Co., Ltd. | Method for controlling electroless plating bath |
EP0100203A1 (de) * | 1982-07-23 | 1984-02-08 | Brent Chemicals International Plc | Vorrichtung und Verfahren für das stromlose Plattieren |
JPS5941488A (ja) * | 1982-09-01 | 1984-03-07 | Sumitomo Metal Ind Ltd | 鉄系電気メツキ浴濃度の自動制御方法 |
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US6277180B1 (en) * | 1999-07-12 | 2001-08-21 | Oliver Sales Company | Method of replacing evaporation losses from colloidal catalyst baths |
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DE10246453A1 (de) * | 2002-10-04 | 2004-04-15 | Enthone Inc., West Haven | Verfahren zur stromlosen Abscheidung von Nickel |
CN1293237C (zh) * | 2004-06-21 | 2007-01-03 | 乐清市帕特尼触头有限公司 | 电触头材料生产方法 |
-
2006
- 2006-02-02 EP EP06002099A patent/EP1816237A1/de not_active Withdrawn
-
2007
- 2007-01-26 US US12/278,256 patent/US20090324804A1/en not_active Abandoned
- 2007-01-26 PL PL07703047T patent/PL1979511T3/pl unknown
- 2007-01-26 ES ES07703047T patent/ES2706874T3/es active Active
- 2007-01-26 KR KR1020087021543A patent/KR101466995B1/ko active IP Right Grant
- 2007-01-26 WO PCT/EP2007/000658 patent/WO2007088008A2/de active Application Filing
- 2007-01-26 JP JP2008552727A patent/JP5695295B2/ja active Active
- 2007-01-26 CN CN2007800119432A patent/CN101437986B/zh active Active
- 2007-01-26 EP EP07703047.6A patent/EP1979511B1/de active Active
Non-Patent Citations (1)
Title |
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See references of WO2007088008A2 * |
Also Published As
Publication number | Publication date |
---|---|
CN101437986B (zh) | 2013-12-11 |
EP1979511B1 (de) | 2018-10-31 |
ES2706874T3 (es) | 2019-04-01 |
WO2007088008A2 (de) | 2007-08-09 |
US20090324804A1 (en) | 2009-12-31 |
WO2007088008A3 (de) | 2008-04-17 |
JP5695295B2 (ja) | 2015-04-01 |
CN101437986A (zh) | 2009-05-20 |
KR101466995B1 (ko) | 2014-12-01 |
EP1816237A1 (de) | 2007-08-08 |
PL1979511T3 (pl) | 2019-05-31 |
JP2009525404A (ja) | 2009-07-09 |
KR20080093451A (ko) | 2008-10-21 |
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