JP6192934B2 - β−アミノ酸含有電解質および金属層の堆積方法 - Google Patents
β−アミノ酸含有電解質および金属層の堆積方法 Download PDFInfo
- Publication number
- JP6192934B2 JP6192934B2 JP2012518625A JP2012518625A JP6192934B2 JP 6192934 B2 JP6192934 B2 JP 6192934B2 JP 2012518625 A JP2012518625 A JP 2012518625A JP 2012518625 A JP2012518625 A JP 2012518625A JP 6192934 B2 JP6192934 B2 JP 6192934B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- electrolyte
- acid
- amino acid
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
- C23C18/44—Coating with noble metals using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C229/00—Compounds containing amino and carboxyl groups bound to the same carbon skeleton
- C07C229/02—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton
- C07C229/04—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated
- C07C229/06—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton
- C07C229/08—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to hydrogen atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C229/00—Compounds containing amino and carboxyl groups bound to the same carbon skeleton
- C07C229/02—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton
- C07C229/04—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated
- C07C229/06—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton
- C07C229/10—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings
- C07C229/12—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings to carbon atoms of acyclic carbon skeletons
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C229/00—Compounds containing amino and carboxyl groups bound to the same carbon skeleton
- C07C229/02—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton
- C07C229/04—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated
- C07C229/06—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton
- C07C229/10—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings
- C07C229/16—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings to carbon atoms of hydrocarbon radicals substituted by amino or carboxyl groups, e.g. ethylenediamine-tetra-acetic acid, iminodiacetic acids
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C229/00—Compounds containing amino and carboxyl groups bound to the same carbon skeleton
- C07C229/02—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton
- C07C229/04—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated
- C07C229/22—Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated the carbon skeleton being further substituted by oxygen atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C231/00—Preparation of carboxylic acid amides
- C07C231/02—Preparation of carboxylic acid amides from carboxylic acids or from esters, anhydrides, or halides thereof by reaction with ammonia or amines
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C235/00—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by oxygen atoms
- C07C235/02—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by oxygen atoms having carbon atoms of carboxamide groups bound to acyclic carbon atoms and singly-bound oxygen atoms bound to the same carbon skeleton
- C07C235/04—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by oxygen atoms having carbon atoms of carboxamide groups bound to acyclic carbon atoms and singly-bound oxygen atoms bound to the same carbon skeleton the carbon skeleton being acyclic and saturated
- C07C235/12—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by oxygen atoms having carbon atoms of carboxamide groups bound to acyclic carbon atoms and singly-bound oxygen atoms bound to the same carbon skeleton the carbon skeleton being acyclic and saturated having the nitrogen atom of at least one of the carboxamide groups bound to an acyclic carbon atom of a hydrocarbon radical substituted by carboxyl groups
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C237/00—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by amino groups
- C07C237/02—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by amino groups having the carbon atoms of the carboxamide groups bound to acyclic carbon atoms of the carbon skeleton
- C07C237/04—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by amino groups having the carbon atoms of the carboxamide groups bound to acyclic carbon atoms of the carbon skeleton the carbon skeleton being acyclic and saturated
- C07C237/06—Carboxylic acid amides, the carbon skeleton of the acid part being further substituted by amino groups having the carbon atoms of the carboxamide groups bound to acyclic carbon atoms of the carbon skeleton the carbon skeleton being acyclic and saturated having the nitrogen atoms of the carboxamide groups bound to hydrogen atoms or to acyclic carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
- C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
- C07C309/13—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton
- C07C309/14—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton containing amino groups bound to the carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/48—Coating with alloys
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/48—Coating with alloys
- C23C18/50—Coating with alloys with alloys based on iron, cobalt or nickel
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemically Coating (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
さらに、本発明は少なくとも1つのカルボン酸、および/または少なくとも1つのカルボン酸塩の使用に関する。
【背景技術】
【発明の概要】
【発明が解決しようとする課題】
【課題を解決するための手段】
【発明を実施するための形態】
13.03g/L 硫酸ニッケル
1.925mg/L 沃化カリウム
17.27g/L 乳酸
5.94g/L リンゴ酸
40.2g/L 次亜リン酸ソーダ
9.81g/L 水酸化ナトリウム
0.35g/L β−アラニン
ここで、pHは4〜7の範囲。
【実施例1】
12.5g/l〜25.5g/lの酢酸ニッケル4水和物
30g/l〜50g/lの次亜リン酸ソーダ
32g/l〜55g/lの乳酸
0.5g/l〜10g/lのマロン酸
2.5g/l〜22g/lのサッカリンソーダ
0.1g/l〜2g/lの沃化カリ
200mg/l〜400mg/lのβ−アラニン
【参考例2】
12.5g/l〜25.5g/lの酢酸ニッケル4水和物
30g/l〜70g/lの次亜リン酸ソーダ
10g/l〜30g/lのグリシン
10g/l〜40g/lの25重量%アンモニア水
0.2g/l〜0.8g/lの沃化カリ
200mg/l〜400mg/lのβ−アラニン
【参考例3】
10g/l 硫酸銅
8g/l 苛性ソーダ
10g/l ホルムアルデヒド(37wt%水溶液として)
26g/l クアドロール(BASF AGより入手可)
200mg/l β−アラニン
【参考例4】
5g/l 硫酸銅
4g/l 苛性ソーダ
10g/l ホルムアルデヒド(37wt%水溶液として)
400mg/l β−アラニン
11g/l クアドロール
【実施例5】
10g/l〜28g/l 硫酸ニッケル6水和物
30g/l〜50g/l 次亜リン酸ソーダ
32g/l〜55g/l 乳酸
0.5g/l〜10g/l マロン酸
2.5g/l〜22g/l サッカリンソーダ
0.1g/l〜2g/l 沃化カリウム
200mg/l〜400mg/l β−アラニン
【参考例6】
25g/l 酢酸ニッケル4水和物
30g/l クエン酸
30g/l 次亜リン酸ソーダ
1g/l ジメチルアミノボラン
7g/l グリシン
200mg/l β−アラニン
積された。めっき不良は起こらなかった。電解質は長期間に渡って安定であった。
【参考例7】
23g/l クアドロール
8.9g/l ホルムアルデヒド(37重量%水溶液として)
8.2g/l 苛性ソーダ
200mg/l β−アラニン
【参考例8】
10g/l 苛性ソーダ
10ml/l ホルムアルヒド(37重量%水溶液として)
23g/l クアドロ−ル(N,N,N,N−テトラキス(2−ヒドロキシプロピル)エチレンジアミン
200〜400mg/l β−アラニン
ABS試料をドナン透析によってアルカリ安定カチオン選択性イオン交換膜を介して電解質に接触させる前に、銅をこの電解質に添加した。銅源として硫酸銅溶液が用いられた。めっき溶液および硫酸銅溶液は透析システムを介して向流させた。めっき液中のナトリウムイオンは、硫酸銅溶液からの銅イオンと、対の(水酸化物及び硫酸塩)イオンを引張込んだり出したりせずに置換された。流速は銅濃度が浴中で2.5g/lに達するまで、イオン交換膜表面を接線方向に横切って1l/m2・分であった。その後、銅濃度が2.3g/lを下回れば透析がスイッチオンにされた。
【実施例9】
200−400g/L 次亜リン酸ソーダ;
100−500g/L 苛性ソーダ;
200−500g/L 乳酸;
100−200g/L リンゴ酸;および
2−5g/L β−アラニン
2.還元剤成分および安定剤の予備混合物(C部)
500−800g/L 次亜リン酸ソーダ;
25−250g/L 苛性ソーダ;
25−100g/L 乳酸;
10−80g/L リンゴ酸;および
5−15g/L β−アラニン
3.ニッケル塩の予備混合物(A部)
300−550g/L NiSO4*6H2O;および
50−445g/L Ni(OOCCH3)2*4H2O
【参考例10】
13.03g/L 硫酸ニッケル;
1.925mg/L 沃化カリウム;
17.27g/L 乳酸;
5.94g/L リンゴ酸;
40.2g/L 次亜リン酸ソーダ;
9.81g/l 苛性ソーダ;
0.35g/L β−アラニン;
ここで、pHは、pH4〜pH7の範囲である。
Claims (11)
- 堆積される金属またはホウ素のための金属またはホウ素イオン源、還元剤、錯化剤、促進剤、並びに安定剤を含む基板上に金属またはホウ素層を無電解で堆積するための電解質であって、
前記堆積される金属またはホウ素が、ニッケル、銅、コバルト、ホウ素、金、またはこれらの金属の1つを少なくとも含む合金からなる群から選ばれた金属またはホウ素であり、
当該電解質は前記安定剤として添加量が1mg/L〜2g/Lの範囲のβ−アミノ酸を含み、
前記β−アミノ酸の総当量濃度の前記還元剤のモル濃度に対する比が0.07当量/モル以下であり、
前記還元剤が、次亜リン酸ソーダ、ホルムアルデヒド、ジメチルアミノボラン、アミノボラン、およびその他の有機ボランからなる群から選ばれる化合物で、
前記錯化剤が、2−ヒドロキシプロピオン酸、プロパン二酸(マロン酸)、EDTA、およびアミノ酢酸からなる群から選ばれる化合物で、
前記促進剤が、サッカリン、ヒダントイン、ローダニン、カルバミド、およびカルバミド誘導体からなる群から選ばれる化合物であり、
鉛、ビスマス、アンチモン、亜鉛、およびスズを含む無機安定剤、シアニド、セレン化合物、−2から+5の酸化状態における硫黄を含む硫黄化合物をいずれも含まない、
ことを特徴とする。 - 前記β−アミノ酸が4〜8のpKa値を有することを特徴とする請求項1による電解質。
- 前記β−アミノ酸が、3−アミノプロピオン酸、3−アミノブタン酸、および3−アミノ−4−メチル吉草酸からなる群から選ばれた酸である、請求項1または2による電解質。
- 金属イオン源としての前記電解質が、金属塩化物、金属硫酸塩、金属酢酸塩、金属窒化物、金属プロピオン酸塩、金属ホルミエート、金属シュウ酸塩、金属クエン酸塩、および金属アスコルビン酸塩からなる群から選ばれた金属化合物を含む、請求項1〜3の何れかによる電解質。
- 前記電解質の総当量β−アミノ酸濃度の電解質中の総当量カルボキシル濃度と前記総当量β−アミノ酸濃度の間の差に対する比が0.028以下である、請求項1〜4の何れかによる電解質。
- めっきされる基板が、安定剤として添加量が1mg/L〜2g/Lの範囲のβ−アミノ酸、堆積される金属またはホウ素用の金属またはホウ素イオン源、還元剤、錯化剤、促進剤を含む電解質と接触するようにされる、基板上の金属またはホウ素層の無電解堆積の方法であって、
前記電解質において、
前記β−アミノ酸の総当量濃度の前記還元剤のモル濃度に対する比が0.07当量/モル以下であり、
前記堆積される金属またはホウ素が、ニッケル、銅、コバルト、ホウ素、金、またはこれらの金属の1つを少なくとも含む合金からなる群から選ばれる金属またはホウ素であり、
前記還元剤が、次亜リン酸ソーダ、ホルムアルデヒド、ジメチルアミノボラン、アミノボラン、およびその他の有機ボランからなる群から選ばれる化合物で、
前記錯化剤が、2−ヒドロキシプロピオン酸、プロパン二酸(マロン酸)、EDTA、およびアミノ酢酸からなる群から選ばれる化合物で、
前記促進剤が、サッカリン、ヒダントイン、ローダニン、カルバミド、およびカルバミド誘導体からなる群から選ばれる化合物であり、
鉛、ビスマス、アンチモン、亜鉛、およびスズを含む無機安定剤、シアニド、セレン化合物、−2から+5の酸化状態における硫黄を含む硫黄化合物をいずれも含まない。 - 前記β−アミノ酸が4〜8の範囲のpKaを有する請求項6の方法。
- 前記β−アミノ酸が、3−アミノプロピオン酸、3−アミノブチル酸、および3−アミノ−4−メチル吉草酸からなる群から選ばれた化合物である、請求項6または7による方法。
- 金属イオン源としての前記電解質が、金属塩化物、金属硫酸塩、金属酢酸塩、金属窒化物、金属プロピオン酸塩、金属ホルミエート、金属シュウ酸塩、金属クエン酸塩、および金属アスコルビン酸塩からなる群から選ばれる金属化合物を含む、請求項6〜8の何れかによる方法。
- 前記電解質がさらに少なくとも1つのカルボン酸および/または少なくとも1つのカルボン酸塩を含む、請求項6〜9の何れかによる方法。
- 前記電解質の総当量β−アミノ酸濃度の電解質中の総当量カルボキシル濃度と前記総当量β−アミノ酸濃度の間の差に対する比が0.028以下である、請求項6〜10の何れかによる方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09008744A EP2270255A1 (en) | 2009-07-03 | 2009-07-03 | Beta-amino acid comprising electrolyte and method for the deposition of a metal layer |
EP09008744.6 | 2009-07-03 | ||
EP10004296 | 2010-04-22 | ||
EP10004296.9 | 2010-04-22 | ||
PCT/US2010/041077 WO2011003116A2 (en) | 2009-07-03 | 2010-07-06 | Beta-amino acid comprising electrolyte and method for the deposition of a metal layer |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017099768A Division JP6501821B2 (ja) | 2009-07-03 | 2017-05-19 | 基板上に金属層を堆積させるための鍍金処方物 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013508538A JP2013508538A (ja) | 2013-03-07 |
JP2013508538A5 JP2013508538A5 (ja) | 2017-07-20 |
JP6192934B2 true JP6192934B2 (ja) | 2017-09-20 |
Family
ID=43411795
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012518625A Active JP6192934B2 (ja) | 2009-07-03 | 2010-07-06 | β−アミノ酸含有電解質および金属層の堆積方法 |
JP2017099768A Active JP6501821B2 (ja) | 2009-07-03 | 2017-05-19 | 基板上に金属層を堆積させるための鍍金処方物 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017099768A Active JP6501821B2 (ja) | 2009-07-03 | 2017-05-19 | 基板上に金属層を堆積させるための鍍金処方物 |
Country Status (8)
Country | Link |
---|---|
US (2) | US8962070B2 (ja) |
EP (1) | EP2449148B1 (ja) |
JP (2) | JP6192934B2 (ja) |
KR (1) | KR101635661B1 (ja) |
CN (1) | CN102892924B (ja) |
ES (1) | ES2714824T3 (ja) |
PL (1) | PL2449148T3 (ja) |
WO (1) | WO2011003116A2 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2714824T3 (es) * | 2009-07-03 | 2019-05-30 | Macdermid Enthone Inc | Electrolito que comprende beta-aminoácidos y método para la deposición de una capa de metal |
US20130065069A1 (en) * | 2011-09-09 | 2013-03-14 | Yun Li Liu | Electrodeposition of Hard Magnetic Coatings |
US9376755B2 (en) * | 2013-06-04 | 2016-06-28 | Sanchem, Inc. | Method and composition for electroless nickel and cobalt deposition |
US10246778B2 (en) * | 2013-08-07 | 2019-04-02 | Macdermid Acumen, Inc. | Electroless nickel plating solution and method |
CN103602965B (zh) * | 2013-11-18 | 2016-06-22 | 广东哈福科技有限公司 | 一种解决渗镀漏镀的化学镍工艺 |
US11685999B2 (en) * | 2014-06-02 | 2023-06-27 | Macdermid Acumen, Inc. | Aqueous electroless nickel plating bath and method of using the same |
US9708693B2 (en) | 2014-06-03 | 2017-07-18 | Macdermid Acumen, Inc. | High phosphorus electroless nickel |
KR101444687B1 (ko) * | 2014-08-06 | 2014-09-26 | (주)엠케이켐앤텍 | 무전해 금도금액 |
ES2639300T3 (es) * | 2014-12-16 | 2017-10-26 | Atotech Deutschland Gmbh | Composiciones de baño de chapado para el chapado no electrolítico de metales y aleaciones metálicas |
EP3156517B1 (en) * | 2015-10-13 | 2018-12-05 | MacDermid Enthone Inc. | Use of water soluble and air stable phosphaadamantanes as stabilizer in electrolytes for electroless metal deposition |
CN108048164B (zh) * | 2017-12-08 | 2020-10-20 | 合肥工业大学 | 表面涂层与纳米润滑剂协同改善内燃机摩擦学性能的方法 |
CN108411323B (zh) * | 2018-03-16 | 2019-04-23 | 浙江工业大学 | 一种镍-镍硒核-壳阵列材料的制备方法及其应用 |
CN108456901B (zh) * | 2018-03-16 | 2019-06-25 | 浙江工业大学 | 一种镍硒阵列材料的制备方法及其应用 |
DE102018008312A1 (de) * | 2018-10-22 | 2020-04-23 | RIAG Oberflächentechnik AG | Verfahren zur Beschichtung von Substratoberflächen, Vorrichtung mit Beschichtungsbad, Dichtemesseinrichtung, Entnahmeeinrichtung, Zugabeeinrichtungen und Steuerung |
RU2762733C1 (ru) * | 2021-02-18 | 2021-12-22 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Российский химико-технологический университет имени Д.И. Менделеева" (РХТУ им. Д.И. Менделеева) | Раствор для химического никелирования металлических изделий |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB785695A (en) * | 1953-08-27 | 1957-11-06 | Gen Am Transport | Improvements in or relating to processes and baths for chemical plating with nickel |
GB785696A (en) * | 1953-08-27 | 1957-11-06 | Gen Am Transport | Improvements in or relating to processes and baths for chemical plating with nickel |
US2935425A (en) * | 1954-12-29 | 1960-05-03 | Gen Am Transport | Chemical nickel plating processes and baths therefor |
US3515564A (en) * | 1968-05-27 | 1970-06-02 | Allied Res Prod Inc | Stabilization of electroless plating solutions |
US3846138A (en) * | 1973-08-02 | 1974-11-05 | Webline Corp | Electroless copper plating |
US4171225A (en) * | 1976-01-23 | 1979-10-16 | U.S. Philips Corporation | Electroless copper plating solutions |
US4503131A (en) * | 1982-01-18 | 1985-03-05 | Richardson Chemical Company | Electrical contact materials |
US4533441A (en) * | 1984-03-30 | 1985-08-06 | Burlington Industries, Inc. | Practical amorphous iron electroform and method for achieving same |
JPH0684545B2 (ja) * | 1985-03-29 | 1994-10-26 | 日立化成工業株式会社 | 無電解銅めっき液 |
GB8822641D0 (en) * | 1988-09-27 | 1988-11-02 | Int Paint Plc | Improvements related to coatings |
GB2231063A (en) | 1989-02-27 | 1990-11-07 | Omi International | Electroless plating composition containing saccharin |
WO1991005085A1 (en) * | 1989-09-26 | 1991-04-18 | Courtaulds Coatings (Holdings) Limited | Improvements related to coatings |
US5258061A (en) * | 1992-11-20 | 1993-11-02 | Monsanto Company | Electroless nickel plating baths |
JPH06322548A (ja) * | 1993-03-18 | 1994-11-22 | Hitachi Ltd | 化学銅めっき液、化学銅めっき方法および配線基板の製造方法 |
EP0769572A1 (en) | 1995-06-06 | 1997-04-23 | ENTHONE-OMI, Inc. | Electroless nickel cobalt phosphorous composition and plating process |
JP2901523B2 (ja) * | 1995-08-09 | 1999-06-07 | 日本カニゼン株式会社 | 無電解黒色めっき浴組成と皮膜の形成方法 |
JP3014958B2 (ja) * | 1996-02-23 | 2000-02-28 | 学校法人早稲田大学 | ニッケル・リン薄膜および無電解ニッケル・リンめっき液 |
DE10054544A1 (de) * | 2000-11-01 | 2002-05-08 | Atotech Deutschland Gmbh | Verfahren zum chemischen Metallisieren von Oberflächen |
JP2003113478A (ja) * | 2001-10-10 | 2003-04-18 | C Uyemura & Co Ltd | 無電解酸化亜鉛めっき浴 |
US6926922B2 (en) * | 2002-04-09 | 2005-08-09 | Shipley Company, L.L.C. | PWB manufacture |
US6800121B2 (en) * | 2002-06-18 | 2004-10-05 | Atotech Deutschland Gmbh | Electroless nickel plating solutions |
DE10246453A1 (de) * | 2002-10-04 | 2004-04-15 | Enthone Inc., West Haven | Verfahren zur stromlosen Abscheidung von Nickel |
JP2005126734A (ja) | 2003-10-21 | 2005-05-19 | C Uyemura & Co Ltd | 無電解ニッケルめっき浴及びそれを用いためっき方法 |
US8349393B2 (en) * | 2004-07-29 | 2013-01-08 | Enthone Inc. | Silver plating in electronics manufacture |
JP4185523B2 (ja) | 2005-12-14 | 2008-11-26 | 日本カニゼン株式会社 | 無電解ニッケルめっき皮膜およびこの皮膜を有する機械部品 |
EP1816237A1 (de) * | 2006-02-02 | 2007-08-08 | Enthone, Inc. | Verfahren und Vorrichtung zur Beschichtung von Substratoberflächen |
TWI348499B (en) * | 2006-07-07 | 2011-09-11 | Rohm & Haas Elect Mat | Electroless copper and redox couples |
JP2008081765A (ja) * | 2006-09-26 | 2008-04-10 | Tanaka Kikinzoku Kogyo Kk | パラジウム合金めっき液及びそのめっき液を用いためっき方法。 |
ES2714824T3 (es) * | 2009-07-03 | 2019-05-30 | Macdermid Enthone Inc | Electrolito que comprende beta-aminoácidos y método para la deposición de una capa de metal |
-
2010
- 2010-07-06 ES ES10730685T patent/ES2714824T3/es active Active
- 2010-07-06 JP JP2012518625A patent/JP6192934B2/ja active Active
- 2010-07-06 KR KR1020127003101A patent/KR101635661B1/ko active IP Right Grant
- 2010-07-06 WO PCT/US2010/041077 patent/WO2011003116A2/en active Application Filing
- 2010-07-06 PL PL10730685T patent/PL2449148T3/pl unknown
- 2010-07-06 US US13/382,131 patent/US8962070B2/en active Active
- 2010-07-06 CN CN201080037528.6A patent/CN102892924B/zh active Active
- 2010-07-06 EP EP10730685.4A patent/EP2449148B1/en active Active
-
2015
- 2015-02-24 US US14/630,268 patent/US9249513B2/en active Active
-
2017
- 2017-05-19 JP JP2017099768A patent/JP6501821B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US8962070B2 (en) | 2015-02-24 |
JP2013508538A (ja) | 2013-03-07 |
ES2714824T3 (es) | 2019-05-30 |
WO2011003116A3 (en) | 2014-06-12 |
CN102892924A (zh) | 2013-01-23 |
US9249513B2 (en) | 2016-02-02 |
US20120156387A1 (en) | 2012-06-21 |
JP6501821B2 (ja) | 2019-04-17 |
CN102892924B (zh) | 2015-02-18 |
KR20120050999A (ko) | 2012-05-21 |
EP2449148A2 (en) | 2012-05-09 |
KR101635661B1 (ko) | 2016-07-01 |
JP2017166073A (ja) | 2017-09-21 |
WO2011003116A2 (en) | 2011-01-06 |
PL2449148T3 (pl) | 2019-06-28 |
US20150167175A1 (en) | 2015-06-18 |
EP2449148B1 (en) | 2019-01-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6192934B2 (ja) | β−アミノ酸含有電解質および金属層の堆積方法 | |
CA2875317C (en) | Plating bath for electroless deposition of nickel layers | |
EP1378584B1 (en) | Electroless nickel plating solutions | |
JP6298530B2 (ja) | 無電解ニッケルめっき液、及び無電解ニッケルめっき方法 | |
JP2013508538A5 (ja) | ||
TWI572742B (zh) | Reduction Electroless Silver Plating Solution and Reduced Electroless Silver Plating Method | |
KR20150118173A (ko) | 비전도성 폴리머상에 제 1 금속 층을 퇴적시키는 방법 | |
TWI445839B (zh) | 無電解純鈀鍍敷液 | |
KR20180044923A (ko) | 금의 무전해 도금을 위한 도금욕 조성물 및 금 층을 침착시키는 방법 | |
EP3156517B1 (en) | Use of water soluble and air stable phosphaadamantanes as stabilizer in electrolytes for electroless metal deposition | |
JP2013108170A (ja) | 無電解パラジウムめっき液 | |
JPH11269658A (ja) | 無電解パラジウムメッキ液 | |
JP7297771B2 (ja) | 無電解金めっき浴 | |
EP2270255A1 (en) | Beta-amino acid comprising electrolyte and method for the deposition of a metal layer | |
EP3255175A1 (en) | Use of water soluble lanthanide compounds as stabilizer in electrolytes for electroless metal deposition |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130111 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130703 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130703 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140421 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140430 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140730 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140806 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140829 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140905 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140929 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20150324 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150610 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20150610 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20150701 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20150904 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20170317 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20170418 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170519 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20170519 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20170519 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170809 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6192934 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |