DE69633150T2 - Siliziumcarbid-Metall-Diffusionsbarriere-Schicht - Google Patents

Siliziumcarbid-Metall-Diffusionsbarriere-Schicht Download PDF

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Publication number
DE69633150T2
DE69633150T2 DE69633150T DE69633150T DE69633150T2 DE 69633150 T2 DE69633150 T2 DE 69633150T2 DE 69633150 T DE69633150 T DE 69633150T DE 69633150 T DE69633150 T DE 69633150T DE 69633150 T2 DE69633150 T2 DE 69633150T2
Authority
DE
Germany
Prior art keywords
metal wiring
silicon carbide
layer
integrated circuit
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69633150T
Other languages
German (de)
English (en)
Other versions
DE69633150D1 (de
Inventor
Mark Jon Midland Loboda
Keith Winton Midland Michael
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Publication of DE69633150D1 publication Critical patent/DE69633150D1/de
Application granted granted Critical
Publication of DE69633150T2 publication Critical patent/DE69633150T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/45—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts
    • H10W20/48—Insulating materials thereof

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
DE69633150T 1995-02-02 1996-01-25 Siliziumcarbid-Metall-Diffusionsbarriere-Schicht Expired - Lifetime DE69633150T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/382,701 US5818071A (en) 1995-02-02 1995-02-02 Silicon carbide metal diffusion barrier layer
US382701 2003-03-05

Publications (2)

Publication Number Publication Date
DE69633150D1 DE69633150D1 (de) 2004-09-23
DE69633150T2 true DE69633150T2 (de) 2005-08-18

Family

ID=23510038

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69633150T Expired - Lifetime DE69633150T2 (de) 1995-02-02 1996-01-25 Siliziumcarbid-Metall-Diffusionsbarriere-Schicht

Country Status (6)

Country Link
US (1) US5818071A (https=)
EP (1) EP0725440B1 (https=)
JP (1) JP3731932B2 (https=)
KR (1) KR100402187B1 (https=)
DE (1) DE69633150T2 (https=)
TW (1) TW284920B (https=)

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Also Published As

Publication number Publication date
JP3731932B2 (ja) 2006-01-05
KR960032640A (ko) 1996-09-17
TW284920B (https=) 1996-09-01
DE69633150D1 (de) 2004-09-23
EP0725440A2 (en) 1996-08-07
US5818071A (en) 1998-10-06
JPH08250594A (ja) 1996-09-27
EP0725440B1 (en) 2004-08-18
EP0725440A3 (en) 1997-01-29
KR100402187B1 (ko) 2004-02-11

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